EP4002976A4 - Dispositif d'inspection et procédé pour capturer une image d'inspection - Google Patents
Dispositif d'inspection et procédé pour capturer une image d'inspection Download PDFInfo
- Publication number
- EP4002976A4 EP4002976A4 EP19937881.1A EP19937881A EP4002976A4 EP 4002976 A4 EP4002976 A4 EP 4002976A4 EP 19937881 A EP19937881 A EP 19937881A EP 4002976 A4 EP4002976 A4 EP 4002976A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- inspection
- capturing
- image
- inspection device
- inspection image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
- H05K13/0815—Controlling of component placement on the substrate during or after manufacturing
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/60—Control of cameras or camera modules
- H04N23/695—Control of camera direction for changing a field of view, e.g. pan, tilt or based on tracking of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Operations Research (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Supply And Installment Of Electrical Components (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/028160 WO2021009884A1 (fr) | 2019-07-17 | 2019-07-17 | Dispositif d'inspection et procédé pour capturer une image d'inspection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP4002976A1 EP4002976A1 (fr) | 2022-05-25 |
| EP4002976A4 true EP4002976A4 (fr) | 2022-07-27 |
Family
ID=74210265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP19937881.1A Pending EP4002976A4 (fr) | 2019-07-17 | 2019-07-17 | Dispositif d'inspection et procédé pour capturer une image d'inspection |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US11877063B2 (fr) |
| EP (1) | EP4002976A4 (fr) |
| JP (1) | JP7194831B2 (fr) |
| CN (1) | CN114097313B (fr) |
| WO (1) | WO2021009884A1 (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024000809A (ja) * | 2022-06-21 | 2024-01-09 | キオクシア株式会社 | 検査装置、テンプレートの製造方法、及び検査方法 |
| KR20240160181A (ko) * | 2022-07-01 | 2024-11-08 | 야마하하쓰도키 가부시키가이샤 | 기판 외관 검사 장치 및 기판 외관 검사 방법 |
| WO2024111064A1 (fr) * | 2022-11-22 | 2024-05-30 | 株式会社Fuji | Dispositif d'acquisition d'images, dispositif d'inspection et procédé d'acquisition d'images |
| CN118242975A (zh) * | 2022-12-23 | 2024-06-25 | 上海微电子装备（集团）股份有限公司 | 量测装置及量测方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63257808A (ja) * | 1987-04-16 | 1988-10-25 | Hitachi Ltd | 部品取付検査装置 |
| JP2000266691A (ja) * | 1999-03-16 | 2000-09-29 | Olympus Optical Co Ltd | 外観検査装置 |
| US20130100276A1 (en) * | 2011-10-17 | 2013-04-25 | Robert Bishop | High Speed Autofocus System |
| US20140071458A1 (en) * | 2012-09-11 | 2014-03-13 | Keyence Corporation | Shape Measuring Device, Shape Measuring Method, And Shape Measuring Program |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3143038B2 (ja) * | 1994-11-18 | 2001-03-07 | 株式会社日立製作所 | 自動焦点合わせ方法及び装置並びに三次元形状検出方法及びその装置 |
| JPH11201911A (ja) * | 1998-01-13 | 1999-07-30 | Meidensha Corp | 検査装置 |
| JP2002310628A (ja) | 2001-04-06 | 2002-10-23 | San Optronics Kk | 画像検査装置 |
| JP2005086035A (ja) * | 2003-09-09 | 2005-03-31 | Yamagata Casio Co Ltd | 部品搭載装置、プリント基板排出方法、及びそのプログラム |
| JP4715944B2 (ja) * | 2009-04-03 | 2011-07-06 | オムロン株式会社 | 三次元形状計測装置、三次元形状計測方法、および三次元形状計測プログラム |
| JP2011232825A (ja) * | 2010-04-23 | 2011-11-17 | Toyota Motor Corp | カメラ位置決定方法 |
| KR101497947B1 (ko) * | 2013-09-10 | 2015-03-03 | 주식회사 고영테크놀러지 | 솔더 조인트의 검사방법 |
| JP6230434B2 (ja) | 2014-01-31 | 2017-11-15 | 株式会社キーエンス | 画像検査装置、画像検査方法及び画像検査プログラム並びにコンピュータで読み取り可能な記録媒体 |
| JP5941209B1 (ja) * | 2015-10-15 | 2016-06-29 | 株式会社シーアイエス | 撮像装置 |
-
2019
- 2019-07-17 WO PCT/JP2019/028160 patent/WO2021009884A1/fr unknown
- 2019-07-17 JP JP2021532627A patent/JP7194831B2/ja active Active
- 2019-07-17 EP EP19937881.1A patent/EP4002976A4/fr active Pending
- 2019-07-17 US US17/627,548 patent/US11877063B2/en active Active
- 2019-07-17 CN CN201980098391.6A patent/CN114097313B/zh active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63257808A (ja) * | 1987-04-16 | 1988-10-25 | Hitachi Ltd | 部品取付検査装置 |
| JP2000266691A (ja) * | 1999-03-16 | 2000-09-29 | Olympus Optical Co Ltd | 外観検査装置 |
| US20130100276A1 (en) * | 2011-10-17 | 2013-04-25 | Robert Bishop | High Speed Autofocus System |
| US20140071458A1 (en) * | 2012-09-11 | 2014-03-13 | Keyence Corporation | Shape Measuring Device, Shape Measuring Method, And Shape Measuring Program |
Non-Patent Citations (1)
| Title |
|---|
| See also references of WO2021009884A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| US20220264019A1 (en) | 2022-08-18 |
| CN114097313B (zh) | 2023-07-25 |
| CN114097313A (zh) | 2022-02-25 |
| EP4002976A1 (fr) | 2022-05-25 |
| JPWO2021009884A1 (fr) | 2021-01-21 |
| JP7194831B2 (ja) | 2022-12-22 |
| US11877063B2 (en) | 2024-01-16 |
| WO2021009884A1 (fr) | 2021-01-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE |
|
| 17P | Request for examination filed |
Effective date: 20211228 |
|
| AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
| A4 | Supplementary search report drawn up and despatched |
Effective date: 20220628 |
|
| RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 21/60 20060101ALI20220622BHEP Ipc: H05K 13/08 20060101AFI20220622BHEP |
|
| DAV | Request for validation of the european patent (deleted) | ||
| DAX | Request for extension of the european patent (deleted) | ||
| P01 | Opt-out of the competence of the unified patent court (upc) registered |
Effective date: 20230328 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: EXAMINATION IS IN PROGRESS |
|
| 17Q | First examination report despatched |
Effective date: 20230807 |