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EP3830422A1 - Pompe à vide - Google Patents

Pompe à vide

Info

Publication number
EP3830422A1
EP3830422A1 EP19752141.2A EP19752141A EP3830422A1 EP 3830422 A1 EP3830422 A1 EP 3830422A1 EP 19752141 A EP19752141 A EP 19752141A EP 3830422 A1 EP3830422 A1 EP 3830422A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
critical parameter
correlation module
rotor
operating variable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP19752141.2A
Other languages
German (de)
English (en)
Inventor
Joeri COECKELBERGS
Vicente Paul GUERRERO LULE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of EP3830422A1 publication Critical patent/EP3830422A1/fr
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0261—Surge control by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2270/00—Control
    • F05B2270/30—Control parameters, e.g. input parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2270/00—Control
    • F05D2270/70—Type of control algorithm
    • F05D2270/707—Type of control algorithm fuzzy logic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2270/00—Control
    • F05D2270/70—Type of control algorithm
    • F05D2270/709—Type of control algorithm with neural networks
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/024—Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Definitions

  • the present invention relates to a vacuum pump and, in particular, to a dry-compressing two-shaft pump, and to a method for operating a vacuum pump.
  • Known vacuum pumps have a housing with an inlet and an outlet.
  • a rotor is arranged in the housing, which is driven by an electric motor and is thus set in rotation.
  • the rotor has rotor elements which cooperate with a stator or rotor elements of a second rotor, so that a gaseous medium is conveyed from the inlet to the outlet.
  • the distance is influenced by the operating temperature of the vacuum pump and the speed of rotation of the rotors.
  • the distance is to be designed in such a way that contact with the rotor and the housing and / or the second shaft is prevented even in the case of non-optimal operating variables, such as, for example, high inlet pressure, a high temperature of the inflowing gas or a high temperature of the cooling liquid.
  • the distance between the rotor element and stator or the rotor element of a second rotor is chosen so large that the distance has a safety margin. However, this reduces the pumping power.
  • Another critical parameter when operating a vacuum pump is the temperature of the bearings used to support the rotors.
  • the bearings heat up due to the rotation of the rotors, whereby a limit temperature must not be exceeded, since existing lubricant would decompose above the limit temperature and lose its lubricating properties.
  • the storage temperature is also limited by the thermal deformation.
  • high speed, high inlet pressure, high temperatures of the inlet gas and a high cooling water temperature lead to a temperature of the bearings, so that the speed of the rotor has to be adjusted accordingly, so that the limit temperature for the bearings even in the worst possible operating conditions is not reached.
  • the maximum possible rotational speed of the rotors is reduced, which also means that pump power is lost.
  • the object of the present invention is to create a vacuum pump and a method for operating a vacuum pump which is inexpensive to manufacture and provides optimum performance.
  • the object is achieved by a vacuum pump according to claim 1 and a method according to claim 11.
  • the vacuum pump according to the invention which is in particular a dry-compressing two-shaft pump, has a housing with an inlet and an outlet.
  • a rotor is arranged in the housing and is rotatably supported in particular by means of bearings.
  • the rotor in particular has at least one rotor element.
  • a motor is provided for driving the rotor so that the rotor is set in rotation, a gaseous medium being conveyed from the inlet to the outlet by the rotation of the rotor.
  • the vacuum pump has a control device which is connected to the motor for controlling the motor, the speed of the motor in particular being controlled here.
  • a sensor for detecting at least one operating variable of the pump, the sensor being connected to the control device.
  • the control device has a correlation module, the correlation module being designed to correlate the detected operating variable with a critical parameter of the vacuum pump.
  • the motor is controlled by means of the critical parameter by means of the control device, the motor speed in particular being controlled.
  • a critical parameter of the vacuum pump is thus derived from the at least one recorded operating variable of the pump and the motor is controlled on the basis thereof. It is no longer necessary to provide a margin of safety for the respective critical parameter, which ensures that a limit value of the critical parameter is prevented in every operating situation of the vacuum pump.
  • the vacuum pump according to the invention can therefore always perform optimally depending on the existing operating parameters.
  • more than one sensor is provided.
  • more than one operating variable, in particular a large number of operating variables, of the vacuum pump can be detected. This means that there are a large number of operating variables that can be corrected with a critical parameter.
  • a company size is detected by more than one sensor, in particular at different positions on the vacuum pump.
  • the detected operating variable is preferably one or more of the following values: temperature of the inlet gas, temperature of the outlet gas, temperature of the inflowing cooling medium, the cooling medium in particular being water, temperature of the outflowing cooling medium, which is the cooling medium is in particular water, rotational speed of the motor, motor output, the motor output being determined in particular by the current consumption or the phase offset between excitation voltage and rotation of the rotor of the electric motor, cooling medium flow rate, vibration and inlet pressure and outlet pressure.
  • These are company variables that are easy to measure. In particular, the sensors required for this are inexpensive.
  • the critical parameter is preferably the distance between the rotor and / or stator or housing. In particular if a two-shaft pump is provided, the critical parameter can also be the distance between the two rotors provided. As an alternative or in addition, the storage temperature can be selected as the critical parameter. In particular, more than one critical parameter can be taken into account. In general, the critical parameter is a parameter of the vacuum pump in which exceeding a limit value leads to damage to the vacuum pump or to failure of the vacuum pump.
  • the correlation module is preferably designed to correlate the operating variable and the critical parameter by means of regression or fuzzy logic or generally a machine learning algorithm, preferably by means of regression, or a regression model based on machine learning.
  • the correlation module is preferably designed to correlate the operating variable and the critical parameter with one another by means of a correlation function.
  • the underlying correlation function can be based on a model of the vacuum pump.
  • the correlation module preferably has a neural network, the neural network being designed in particular as a recursive neural network.
  • the operating size and the critical parameter are correlated with one another by means of the neural network. Due to the provision of the neural network, the farm size or multiple farm sizes can be correlated with a critical parameter without using a specific model.
  • the neural network is preferably trained, with at least one sensor being provided for at least one critical parameter.
  • the recorded operating variable is used as the input value for the training and the critical parameter as the output value.
  • the initial value is compared with the critical parameter, which is determined by the sensor present in the training, and thereby the neural network is trained.
  • the training only has to be carried out once for each pump type, ie for each different vacuum pump. As soon as a suitably trained neural network is available, this can be implemented in the controls of further vacuum pumps of the same type or vacuum pumps with only insignificant changes.
  • a sensor for the at least one critical parameter is therefore only required in training.
  • a sensor for the critical parameter is not required during actual operation.
  • the vacuum pump preferably has no sensor for the critical parameter. In particular, the vacuum pump has no sensor for any critical parameter. Since the sensors for critical parameters are, in particular, expensive sensors, the costs for the vacuum pump can be significantly reduced by dispensing with these sensors.
  • the control device is preferably designed to reduce the rotational speed of the rotor when the critical parameter exceeds a predetermined limit value. This prevents damage to the vacuum pump.
  • the rotational speed is preferably increased.
  • this is essentially the same limit value as described above. This ensures that optimum operating performance is always achieved depending on the existing operating conditions, which are given by the different operating sizes.
  • the invention relates to a method for operating a vacuum pump, in particular as described above.
  • FIG. 1 shows a schematic representation of a two-shaft pump according to the present invention
  • FIG. 2 is a control diagram of the vacuum pump of FIG. 1.
  • the vacuum pump 10 designed as a screw pump in the example shown, has a housing 12 with an inlet 14 and an outlet 15.
  • a first shaft 16 with helical rotor elements 18 is arranged in the housing 12.
  • a second shaft 20 is arranged in the housing 12 with helical rotor elements 22, which are in engagement with the rotor elements 18 of the first shaft 16.
  • an electric motor 24 is provided which, via a gear 26, the two shafts 16, 20 drives and rotates.
  • the shafts 16, 20 are rotatably supported by bearings 28. Due to the opposite rotation of the two shafts 16, 20 and the pump elements 18, 22 connected to the shafts 16, 20, a gaseous medium is pumped from the inlet 14 to the outlet 15.
  • the vacuum pump 10 also has a control device 30 for controlling the electric motor 24.
  • Various sensors are connected to the control device 30 for detecting operating variables of the vacuum pump 10.
  • a sensor 36 is designed as a temperature sensor, which are arranged at the inlet 32 of a coolant supply 34 of the housing 12. This sensor 36 detects the temperature of the inflowing cooling medium, the cooling medium in particular being water.
  • a further sensor 38 which is connected to the control device 30, detects the temperature of the inlet gas at the inlet 14.
  • Further operating variables can also be detected by sensors, the operating variables, for example, also being the outlet gas temperature at the outlet 15, the temperature of the outflowing cooling medium at the outlet 40 of the coolant supply 34, the rotational speed of the rotor elements 18, 22, the motor power of the electric motor 24, the coolant flow rate, the coolant supply 34, vibrations of the vacuum pump 10 on the housing 12, inlet pressure on Inlet 14 and / or outlet pressure at outlet 15.
  • the control device 30 has a correlation module, the recorded operating variables being correlated with critical parameters of the vacuum pump 10. The control device 30 then controls the electric motor 24 of the vacuum pump 10 as a function of the critical parameters determined thereby.
  • the critical parameters are, for example, the spacing of the rotor elements 18, 22 from one another or the respective spacing of the rotor elements 18, 22 from the housing 12. If the rotor elements 18, 22 come into contact with one another or with the housing 12, this leads to a severe damage or even destruction of the vacuum pump.
  • the vacuum pump is controlled by means of the control device 30 on the basis of the determined operating variables and the critical parameters correlated therefrom, for example to reduce the rotational speed in order to avoid contact. It is not necessary to record the critical parameters directly.
  • Another critical parameter is the bearing temperature of the bearings 28. Since the lubrication of the bearings 28 can no longer be guaranteed if a limit temperature is exceeded, this can lead to the bearings 28 being destroyed.
  • Other critical parameters can also be included, each parameter of the vacuum pump for which a limit value exists such that if this limit value is exceeded, proper operation of the vacuum pump is no longer guaranteed and even damage or destruction of the Vacuum pump can be done.
  • the correlation module 44 is a neural network, which can also be designed as a machine-based model, which then correlates the operating variables 42 with one or more critical parameters of the vacuum pump.
  • the neural network of the correlation module is trained appropriately.
  • a sensor is provided on the vacuum pump, which directly determines / measures the critical parameter which is to be inferred later in operation on the basis of the operating variables. This can also involve a large number of critical parameters.
  • the procedure for training the neural network has the following steps:
  • the vacuum pumps which have the neural network thus transmitted in the respective correlation module, in particular no longer have a sensor in order to measure the critical parameter directly.
  • two critical parameters 46 are provided, such as, for example, the distance of the rotor elements from the housing 12 or from one another and the bearing temperature of the bearings 28 42 critical parameters 46 determined by means of the correlation module 44 are then compared in comparators 50 with predetermined limit values 48. Sensors for the direct measurement of the critical parameters are not provided. If the critical parameter 46 ascertained by means of the correlation module 44 exceeds the predetermined limit value 48, an adjustment of the rotational speed and in particular a reduction of the rotational speed is initiated by means of the control element 52. If more than one determined critical parameter 46 exceeds the respectively predetermined limit values 48, only the larger exceedance is taken into account due to the maximum element 54. A reduction in the speed of rotation by the control element 52 due to the larger overshoot also means that the smaller overshoot of the other critical parameter is resolved.
  • the critical parameters 46 determined by means of the correlation module 44 fall below the predefined limit values 48, then an increase in the rotational speed is initiated by means of the control element 52.
  • an absolute maximum value of the rotational speed is specified as limit value 55.
  • the speed increase caused by the control element 52 is compared with the limit value 55 in the comparator 56. If the maximum permissible rotational speed has not yet been reached, the speed increase is passed on to the electric motor 24.
  • the control diagram in FIG. 2 has a connection 58 which is connected to the electric motor 24.
  • the method for operating a vacuum pump as described above thus has the following steps: a) measuring at least one operating variable;
  • the vacuum pump 10 does not have to be designed for the worst possible operating conditions, but the operation can be dynamically adapted to the existing operating parameters, it always being ensured that critical parameters for the operation of the vacuum pump do not exceed the predetermined limit values. At the same time, however, if the critical parameters fall below the limit values, an increase in the rotational speed and thus the pump power is made possible.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Air Blowers (AREA)

Abstract

L'invention concerne une pompe à vide pourvue d'un boîtier (12) pourvu d'une entrée (14) et d'une sortie (15), un rotor (16, 20) étant agencé dans le boîtier (12) pour acheminer un milieu gazeux de l'entrée (14) vers la sortie (15). L'invention prévoit en outre un moteur (24) destiné à faire tourner le rotor (16, 20) et un équipement de commande (30) connecté en série au moteur (24) pour la commande du moteur (24), l'invention prévoyant au moins un capteur (36, 38) pour la détection d'au moins une grandeur de fonctionnement (42) de la pompe à vide (10), le capteur (36, 38) étant connecté à l'équipement de commande (30), et le dispositif de commande (30) comportant un module de corrélation (44), le module de corrélation (44) servant à corréler la grandeur de fonctionnement (42) détectée avec au moins un paramètre critique (46), et le moteur (24) étant commandé à l'aide du paramètre critique (46).
EP19752141.2A 2018-08-01 2019-08-01 Pompe à vide Pending EP3830422A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202018003585.8U DE202018003585U1 (de) 2018-08-01 2018-08-01 Vakuumpumpe
PCT/EP2019/070782 WO2020025754A1 (fr) 2018-08-01 2019-08-01 Pompe à vide

Publications (1)

Publication Number Publication Date
EP3830422A1 true EP3830422A1 (fr) 2021-06-09

Family

ID=67551525

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19752141.2A Pending EP3830422A1 (fr) 2018-08-01 2019-08-01 Pompe à vide

Country Status (7)

Country Link
US (1) US11988211B2 (fr)
EP (1) EP3830422A1 (fr)
JP (1) JP2021533302A (fr)
KR (1) KR20210031473A (fr)
CN (1) CN112513469B (fr)
DE (1) DE202018003585U1 (fr)
WO (1) WO2020025754A1 (fr)

Families Citing this family (4)

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Publication number Priority date Publication date Assignee Title
GB2592573A (en) * 2019-12-19 2021-09-08 Leybold France S A S Lubricant-sealed vacuum pump, lubricant filter and method.
EP3686432B1 (fr) * 2020-03-27 2022-06-08 Pfeiffer Vacuum Technology AG Pompe à vide
CN114607604B (zh) * 2022-03-15 2024-11-22 江苏华瑞制冷设备有限公司 一种低耗能的螺杆气体压缩机
CN117345631B (zh) * 2023-08-24 2024-05-31 东莞市大成智能装备有限公司 真空泵转子运动间隙的监测方法、控制方法及真空泵

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US11988211B2 (en) 2024-05-21
WO2020025754A1 (fr) 2020-02-06
DE202018003585U1 (de) 2019-11-06
CN112513469A (zh) 2021-03-16
KR20210031473A (ko) 2021-03-19
CN112513469B (zh) 2024-04-02
JP2021533302A (ja) 2021-12-02
US20210310488A1 (en) 2021-10-07

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