EP3802898A1 - Dichteoptimierte molybdänlegierung - Google Patents
Dichteoptimierte molybdänlegierungInfo
- Publication number
- EP3802898A1 EP3802898A1 EP19739199.8A EP19739199A EP3802898A1 EP 3802898 A1 EP3802898 A1 EP 3802898A1 EP 19739199 A EP19739199 A EP 19739199A EP 3802898 A1 EP3802898 A1 EP 3802898A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- molybdenum alloy
- molybdenum
- alloy according
- vanadium
- density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/04—Alloys based on tungsten or molybdenum
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/045—Alloys based on refractory metals
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/02—Alloys based on vanadium, niobium, or tantalum
- C22C27/025—Alloys based on vanadium, niobium, or tantalum alloys based on vanadium
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C30/00—Alloys containing less than 50% by weight of each constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
- C22C32/0047—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D25/00—Component parts, details, or accessories, not provided for in, or of interest apart from, other groups
- F01D25/005—Selecting particular materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
- F01D5/12—Blades
- F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
- B22F2998/10—Processes characterised by the sequence of their steps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/12—Light metals
- F05D2300/123—Boron
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/13—Refractory metals, i.e. Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W
- F05D2300/131—Molybdenum
Definitions
- the present invention relates to a disproportionateoptim jewe and high temperature resistant alloy based on molybdenum-silicon-boron (Mo-Si-B), processes for their preparation and use as a structural material.
- Mo-Si-B molybdenum-silicon-boron
- the ternary Mo-Si-B alloy system not only has a very high melting temperature (beyond 2000 ° C), which allows use at temperatures well above 1000 ° C, but also has good oxidation resistance, creep resistance and a sufficient ductile-brittle transition temperature and fracture toughness.
- the ternary Mo-Si-B alloy system is particularly suitable as a structural material for the production of components that are operated at very high temperatures, such as turbine blades and disks in gas turbines, for highly stressed components in aerospace engineering , but also for tools in forming technology.
- very high temperatures such as turbine blades and disks in gas turbines
- the silicide content is greater than 50%.
- Protective measures to prevent oxidation such as the use of inert gas or the application of protective coatings, can thus account for powder metallurgy produced materials or other manufactured, very fine-grained materials with a core size of less than 10 pm and homogeneous phase distribution.
- DE 25 34 379 A1 relates to a Mo-Si-B alloy which, inter alia, may also contain vanadium.
- this is an amorphous alloy, which is characterized by a high thermal stability, that is, which is stable even at high temperatures and does not begin to crystallize.
- WO 2005/028692 A2 describes a Mo-Si-B alloy which has Mo silicide and Mo-B silicide as essential constituents.
- a Mo mixed crystal may be present, which may contain other elements which form a mixed crystal with Mo, among other things called vanadium. However, here or the other elements is present exclusively in the mixed crystal, but not in the silicides.
- the density of a ternary Mo-Si-B alloy can be reduced by partially replacing the heavy metal Mo with the much lighter metal Ti. It should be noted, however, that the partial replacement of Mo with Ti adversely affects the oxidation resistance. For compensation, additional elements such as iron and / or yttrium must be added.
- this ternary Mo-Si-B alloy system would be a promising candidate as a structural material at high temperatures for rotating or flying applications such as turbine material.
- a disadvantage for such applications, but also other applications, is the high density, which is typically between 8.5 and 9.5 g / cm 3 .
- the alloy Mo-9Si-8B has a density of 9.5 g / cm 3 .
- an alloy system comprising 5 to 25 at% silicon (Si), 0.5 to 25 at% boron (B), 3 to 50 at% vanadium (V) and the balance molybdenum, the molybdenum alloy being a molybdenum -Vanadium mixed crystal matrix and distributed therein has at least one silicide phase, and the density of the molybdenum alloy is less than 8 g / cm 3 .
- the molybdenum alloy has a vanadium content of 10 to 50 A% and at least one silicide phase selected from (Mo, V) 3 Si, (Mo, V) 5 Si 2 and (Mo, V) 5 Si 3.
- the content of Mo is more than 10 at%, especially at least 20 at% and more. Particularly preferred is a content of Mo of at least 40 at% and more.
- Preferred content ranges for Si are 8-15 At%, B 7-20 At% and V 10-40 At%.
- the alloy system according to the invention preferably has a silicide phase content of at least 30% and in particular at least 50%.
- Vanadium with a melting point of 1910 ° C, and thus less than 2000 ° C, among the so-called extended refractory metals, however, has a significantly lower density of 6.1 1 g / cm 3 at 293.15 K than 10.28 g molybdenum / cm 3 .
- Another advantage of vanadium is that it has a similar atomic radius (134 pm) as molybdenum (145 pm) and the same crystal structure, namely cubic body-centered, has. This results in a good mixing and interchangeability of these two elements in the crystal lattice and thus good alloyability of the two elements.
- vanadium has a high ductility, so that its addition does not deteriorate the toughness of the ternary Mo-Si-B alloy.
- the vanadium-added alloys according to the invention have a density of less than 8 g / cm 3 at 293.15 K.
- the ternary Mo-Si-B system has a Mo mixed crystal matrix which inherently has good toughness.
- boron deposits on interstitial sites and silicon on regular lattice sites in the Mo phase.
- silicide phases may already form during the alloying process, for example during very long and high-energy alloying processes or during powder atomization.
- silicide phases in particular M03S1 (A15) and Mo 5 SiB 2 (T2), to give the system, although a high strength, but the toughness due to their brittleness reduced.
- M03S1 (A15) and Mo 5 SiB 2 (T2) to give the system, although a high strength, but the toughness due to their brittleness reduced.
- the proportion of silicide phases increases, which, when a critical fraction is exceeded (about 50% when produced by the mechanical alloying process), can form the matrix phase in the microstructure. It is expected that this will not only reduce toughness, but also shift the brittle-ductile transition temperature to higher temperatures. To avoid these disadvantages, it is therefore desirable to produce alloys with Mo mixed crystal phase as the matrix phase.
- V does not lead to the deterioration of the toughness of Mo-Si-B alloys, but to stabilize the Mo mixed crystal phase and with a slightly increased mixed crystal content to improve the toughness of the overall system. Furthermore, the substitution of V atoms in the Mo mixed crystal lattice leads to a further improvement in the strength.
- the addition of vanadium to the ternary Mo-Si-B alloy system not only leads to a reduction in density but at the same time to an improvement in strength with the same toughness.
- the alloy system according to the invention also has a structure in silicide phase fractions of more than 50% in which the silicide phases are distributed in a mixed Mo matrix.
- the Mo-Si-B-V base alloy titanium (Ti) may be added in an amount of 0.5-30 at%.
- the base alloy of the present invention may contain one or more additional alloying elements selected from the group consisting of Al, Fe, Zr, Mg, Li, Cr, Mn, Co, Ni, Cu, Zn, Ge, Ga, Y, Nb, Cd, Ca and La each at a content of 0.01 at% to 15 at%, preferably at 10 at% and / or one or more alloying elements selected from the group of HF, Pb, Bi, Ru, Rh, Pd, Ag, Au , Ta, W, Re, Os, Ir and Pt each contained in a content of 0.01 at% to preferably at most 5 at%.
- additional alloying elements selected from the group consisting of Al, Fe, Zr, Mg, Li, Cr, Mn, Co, Ni, Cu, Zn, Ge, Ga, Y, Nb, Cd, Ca and La each at a content of 0.01 at% to 15 at%, preferably at 10 at% and / or one or more alloying elements selected from the group of HF, Pb, Bi,
- the latter group are heavy elements with a density of more than 9 g / cm 3 , which should be added in as small an amount as possible to avoid increasing the density.
- additional alloying elements can also be added in the form of their oxides, nitrides and / or carbides and complex phases (eg oxynitrides) in concentrations of up to 15% by volume of the alloy.
- the alloys of the invention may still contain interstitial soluble elements such as oxygen, nitrogen, hydrogen. These are unavoidable impurities that can not always be completely removed from the process. However, these are only in the ppm range, typically a few 100 ppm.
- the alloys according to the invention are non-eutectic but also near-eutectic and eutectic alloys.
- Non-eutectic alloys are alloys that do not conform to eutectic stoichiometry.
- near-eutectic alloys are alloys whose composition is close to the eutectic.
- the preparation of the non-eutectic alloys according to the invention is advantageously carried out by means of powder metallurgical process techniques.
- powder mixtures which consist of the corresponding alloy components, treated by mechanical alloying, both elemental powders and pre-alloyed powders can be used.
- mechanical alloying various high energy mills may be used, such as attritors, drop mills, vibratory mills, planetary ball mills.
- the metal powder is intensively treated mechanically and homogenized to the atomic level.
- the pre-alloying can alternatively also take place by means of an atomization process under protective gas.
- the mechanically alloyed powder can be compacted by means of FAST (Field Assisted Sintering Technology).
- FAST Field Assisted Sintering Technology
- a suitable FAST process is carried out, for example under vacuum at a pressure of 50 MPa and a holding time of 15 minutes at 1600 ° C, being heated at 100 K / min and cooled.
- the powders may also be compacted by cold isostatic pressing, sintering at, for example, 1600 ° C, and hot isostatic pressing (HIP) at 1500 ° C and 200 MPa.
- FAST Field Assisted Sintering Technology
- the FAST process is preferred since the sintering process times are considerably shortened compared to hot pressing.
- homogeneous material properties can be achieved even with larger components.
- FAST a higher strength and hardness, in this case expressed as microhardness, can be obtained, since due to the much shorter process times, the grain growth is suppressed during the process. Fine grains in the microstructure, in contrast to coarser grains, result in better strength.
- the density optimized alloy according to the invention can be produced by means of an additive manufacturing process such as, for example, selective laser melting (SLM) or laser metal deposition (LMD).
- SLM selective laser melting
- LMD laser metal deposition
- the processing is carried out here on the basis of mechanically alloyed or atomized and thus pre-alloyed powders which, due to the addition of V (and optionally Ti or other alloying elements), have a melting point which is lower than that of pure tenacious Mo-Si-B alloys and thus easier by such processes are workable.
- An advantage of the additive manufacturing process is that components close to the end-structure can be obtained cost-effectively, in terms of time and material.
- Near-eutectic and eutectic alloys can be processed particularly well with the aid of additive processes, since it is possible to produce particularly fine-grained microstructures with good mechanical strength.
- Such alloys are in a compositional range of Mo- (7..19) Si (6 ... 10) B- (5 ... 15) V and Mo- (7..19) Si (6 ... 10). .10) B- (5 ... 15) V- (5 ... 18) Ti.
- these alloys are also suitable for other melt metallurgical processes, i.a. also for directional solidification in the well-known Bridgman method.
- FIG. 1 shows an X-ray diffractogram of the alloy sample MK6-FAST (Mo-40V-9Si-8B);
- FIG. 2 shows the microstructure of the alloy sample MK6 FAST according to FIG. 1 after compaction by means of the FAST method as a binary image; and
- FIG. 3 shows the result of the microhardness test taking into account the standard deviation of the alloy samples according to the examples.
- the alloys obtained according to 1. were heat-treated.
- the samples were each filled into ceramic dishes and annealed over the entire duration of the heat treatment under argon inert gas.
- about 10 g of each of the alloys in the initial state were filled and heat-treated for 5 hours at 1300 ° C in a tube furnace of HTM Retz GmbH type Losic.
- the sample MK6-WB was compacted by means of FAST. For this, the sample under vacuum at a pressure of 50 MPa and a holding time of 10 minutes at 1100 ° C and 15 minutes at 1600 ° C, being heated and cooled at 100 K / min.
- the sample obtained was named MK6 FAST.
- the microstructure and morphology of the powder particles was analyzed with a Scanning Electron Microscope ESEM (REM) XL30 from Philips.
- the phase contrast was displayed by means of BSE contrast.
- the included phases were assigned by EDX analysis.
- sample preparation small amounts of the sample powders were cold-embedded in epoxy resin as follows, then wet ground with 800 and 1200 grit SiC abrasive paper and polished with diamond suspension.
- the samples were sputtered with a thin layer of gold prior to embedding.
- the microstructure of the alloy MK6 FAST is shown in a binarized form in FIG.
- the Mo mixed crystal phase is white and both silicide phases are black.
- the density of MK6 FAST was determined by the principle archimedes'schen 7.8 g / cm 3.
- the EDX analysis confirmed the results of the XRD measurement.
- the silicidic phases (Mo, V) 3Si and (Mo, V) 5 SiB2 have formed in the microstructure of all samples in addition to the Mo mixed crystal. In this case, a higher proportion of vanadium was found in the silicide phases than in the mixed crystal matrix.
- MK6 FAST The evaluation of MK6 FAST showed that it has the highest proportion of silicide phases in the microstructure compared to the heat-treated samples.
- microhardness of the mechanically alloyed (ML) samples MK3, MK4, MK5, MK6 and MK6-Fast was measured.
- microhardness was determined by the method according to Vickers with a microscope from Carl Zeiss Microscopy GmbH (model Axiophod 2), in which a hardness tester from Anton Paar GmbH (model MHT-10) was integrated:
- the samples were prepared as for the SEM analysis (see B. 2.), but without gold sputtering.
- the microhardness of the silicides in the FAST sample is significantly higher than that of the mixed crystal phase.
- the very fine and homogeneous distribution of silicide phases and their proportion of about 55% ensures a high overall hardness of the alloy.
- the total hardness of the FAST sample is composed of the respective microhardnesses of the single phase Mo, V mixed crystal phase and the two silicide phases.
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Powder Metallurgy (AREA)
- Silicon Compounds (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102018113340.5A DE102018113340B4 (de) | 2018-06-05 | 2018-06-05 | Dichteoptimierte Molybdänlegierung |
PCT/EP2019/064475 WO2019234016A1 (de) | 2018-06-05 | 2019-06-04 | Dichteoptimierte molybdänlegierung |
Publications (3)
Publication Number | Publication Date |
---|---|
EP3802898A1 true EP3802898A1 (de) | 2021-04-14 |
EP3802898C0 EP3802898C0 (de) | 2024-05-22 |
EP3802898B1 EP3802898B1 (de) | 2024-05-22 |
Family
ID=67253841
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19739199.8A Active EP3802898B1 (de) | 2018-06-05 | 2019-06-04 | Dichteoptimierte molybdänlegierung |
Country Status (6)
Country | Link |
---|---|
US (1) | US11492683B2 (de) |
EP (1) | EP3802898B1 (de) |
JP (2) | JP7587263B2 (de) |
CN (1) | CN112218964B (de) |
DE (1) | DE102018113340B4 (de) |
WO (1) | WO2019234016A1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102018113340B4 (de) | 2018-06-05 | 2020-10-01 | Otto-Von-Guericke-Universität Magdeburg | Dichteoptimierte Molybdänlegierung |
US11761064B2 (en) * | 2020-12-18 | 2023-09-19 | Rtx Corporation | Refractory metal alloy |
CN112919475A (zh) * | 2021-03-10 | 2021-06-08 | 南京理工大学 | 一种合成二硅化钼粉体的方法 |
AT17662U1 (de) * | 2021-11-04 | 2022-10-15 | Plansee Se | Bauteil aus Refraktärmetall |
CN113975470B (zh) * | 2021-11-22 | 2023-09-22 | 山东瑞安泰医疗技术有限公司 | 一种可降解金属钼基合金血管内支架制备方法 |
CN115896575B (zh) * | 2022-11-07 | 2024-01-26 | 湖南科技大学 | 一种Mo-12Si-8.5B/Ag宽温域自润滑材料及其制备方法 |
DE102023108051A1 (de) * | 2023-03-29 | 2024-10-02 | Deloro Wear Solutions GmbH | Molybdän-basierte Legierung |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1155609B (de) * | 1956-12-04 | 1963-10-10 | Union Carbide Corp | Ausgangsmaterial zur Herstellung oxydationsbestaendiger und hochtemperaturfester Gegenstaende, insbesondere selbst regenerierende Schutzueberzuege fuer Metallkoerper |
GB1476589A (en) * | 1974-08-07 | 1977-06-16 | Allied Chem | Amorphous metal alloys |
US5693156A (en) | 1993-12-21 | 1997-12-02 | United Technologies Corporation | Oxidation resistant molybdenum alloy |
US5865909A (en) * | 1995-07-28 | 1999-02-02 | Iowa State University Research Foundation, Inc. | Boron modified molybdenum silicide and products |
US6497968B2 (en) * | 2001-02-26 | 2002-12-24 | General Electric Company | Oxidation resistant coatings for molybdenum silicide-based composite articles |
US6652674B1 (en) * | 2002-07-19 | 2003-11-25 | United Technologies Corporation | Oxidation resistant molybdenum |
US7005191B2 (en) * | 2003-05-01 | 2006-02-28 | Wisconsin Alumni Research Foundation | Oxidation resistant coatings for ultra high temperature transition metals and transition metal alloys |
AT6955U1 (de) * | 2003-09-19 | 2004-06-25 | Plansee Ag | Ods-molybdän-silizium-bor-legierung |
AT7187U1 (de) * | 2004-02-25 | 2004-11-25 | Plansee Ag | Verfahren zur herstellung einer molybdän-legierung |
US8268035B2 (en) * | 2008-12-23 | 2012-09-18 | United Technologies Corporation | Process for producing refractory metal alloy powders |
US8449817B2 (en) | 2010-06-30 | 2013-05-28 | H.C. Stark, Inc. | Molybdenum-containing targets comprising three metal elements |
JP5394582B1 (ja) | 2012-06-07 | 2014-01-22 | 株式会社アライドマテリアル | モリブデン耐熱合金 |
DE102015214730A1 (de) * | 2014-08-28 | 2016-03-03 | MTU Aero Engines AG | Kriech- und oxidationsbeständige Molybdän - Superlegierung |
DE102015209583A1 (de) | 2015-05-26 | 2016-12-01 | Siemens Aktiengesellschaft | Molybdän-Silizium-Borlegierung und Verfahren zur Herstellung sowie Bauteil |
DE102015114092B4 (de) * | 2015-08-25 | 2022-06-23 | Otto-Von-Guericke-Universität Magdeburg | Oxidationsbeständige Vanadiumlegierungen für hochtemperaturbeanspruchte Bauteile |
DE102018113340B4 (de) | 2018-06-05 | 2020-10-01 | Otto-Von-Guericke-Universität Magdeburg | Dichteoptimierte Molybdänlegierung |
-
2018
- 2018-06-05 DE DE102018113340.5A patent/DE102018113340B4/de active Active
-
2019
- 2019-06-04 US US17/059,350 patent/US11492683B2/en active Active
- 2019-06-04 EP EP19739199.8A patent/EP3802898B1/de active Active
- 2019-06-04 JP JP2020567901A patent/JP7587263B2/ja active Active
- 2019-06-04 CN CN201980037134.1A patent/CN112218964B/zh active Active
- 2019-06-04 WO PCT/EP2019/064475 patent/WO2019234016A1/de unknown
-
2024
- 2024-05-30 JP JP2024088113A patent/JP2024116201A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
CN112218964B (zh) | 2023-03-10 |
WO2019234016A1 (de) | 2019-12-12 |
US20210238717A1 (en) | 2021-08-05 |
JP2021527162A (ja) | 2021-10-11 |
DE102018113340A1 (de) | 2019-12-05 |
CN112218964A (zh) | 2021-01-12 |
EP3802898C0 (de) | 2024-05-22 |
EP3802898B1 (de) | 2024-05-22 |
JP7587263B2 (ja) | 2024-11-20 |
DE102018113340B4 (de) | 2020-10-01 |
US11492683B2 (en) | 2022-11-08 |
JP2024116201A (ja) | 2024-08-27 |
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