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EP3465182A4 - Method and apparatus for x-ray microscopy - Google Patents

Method and apparatus for x-ray microscopy Download PDF

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Publication number
EP3465182A4
EP3465182A4 EP17810765.2A EP17810765A EP3465182A4 EP 3465182 A4 EP3465182 A4 EP 3465182A4 EP 17810765 A EP17810765 A EP 17810765A EP 3465182 A4 EP3465182 A4 EP 3465182A4
Authority
EP
European Patent Office
Prior art keywords
ray microscopy
microscopy
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP17810765.2A
Other languages
German (de)
French (fr)
Other versions
EP3465182A1 (en
Inventor
Wenbing Yun
Sylvia Jia Yun Lewis
Janos KIRZ
Srivatsan Seshadri
Alan Francis Lyon
David Vine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sigray Inc
Original Assignee
Sigray Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US15/173,711 external-priority patent/US10401309B2/en
Priority claimed from US15/605,957 external-priority patent/US10352880B2/en
Application filed by Sigray Inc filed Critical Sigray Inc
Publication of EP3465182A1 publication Critical patent/EP3465182A1/en
Publication of EP3465182A4 publication Critical patent/EP3465182A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/041Phase-contrast imaging, e.g. using grating interferometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/201Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials by measuring small-angle scattering
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/025Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00Gamma- or X-ray microscopes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/611Specific applications or type of materials patterned objects; electronic devices
    • G01N2223/6116Specific applications or type of materials patterned objects; electronic devices semiconductor wafer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/044Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using laminography or tomosynthesis
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2207/00Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
    • G21K2207/005Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
EP17810765.2A 2016-06-05 2017-06-02 Method and apparatus for x-ray microscopy Withdrawn EP3465182A4 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US15/173,711 US10401309B2 (en) 2014-05-15 2016-06-05 X-ray techniques using structured illumination
US201662401164P 2016-09-28 2016-09-28
US201662429587P 2016-12-02 2016-12-02
US201662429760P 2016-12-03 2016-12-03
US201762485916P 2017-04-15 2017-04-15
US15/605,957 US10352880B2 (en) 2015-04-29 2017-05-26 Method and apparatus for x-ray microscopy
PCT/US2017/035800 WO2017213996A1 (en) 2016-06-05 2017-06-02 Method and apparatus for x-ray microscopy

Publications (2)

Publication Number Publication Date
EP3465182A1 EP3465182A1 (en) 2019-04-10
EP3465182A4 true EP3465182A4 (en) 2020-03-18

Family

ID=60578901

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17810765.2A Withdrawn EP3465182A4 (en) 2016-06-05 2017-06-02 Method and apparatus for x-ray microscopy

Country Status (5)

Country Link
EP (1) EP3465182A4 (en)
JP (1) JP6775035B2 (en)
KR (1) KR20190015531A (en)
CN (1) CN109564176A (en)
WO (1) WO2017213996A1 (en)

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US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
US10297359B2 (en) 2013-09-19 2019-05-21 Sigray, Inc. X-ray illumination system with multiple target microstructures
US10269528B2 (en) 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
US10352880B2 (en) 2015-04-29 2019-07-16 Sigray, Inc. Method and apparatus for x-ray microscopy
US10295486B2 (en) 2015-08-18 2019-05-21 Sigray, Inc. Detector for X-rays with high spatial and high spectral resolution
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
WO2018175570A1 (en) 2017-03-22 2018-09-27 Sigray, Inc. Method of performing x-ray spectroscopy and x-ray absorption spectrometer system
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
WO2019222786A1 (en) * 2018-05-25 2019-11-28 Micro-X Limited A device for applying beamforming signal processing to rf modulated x-rays
DE112019002822T5 (en) 2018-06-04 2021-02-18 Sigray, Inc. WAVELENGTH DISPERSIVE X-RAY SPECTROMETER
GB2591630B (en) 2018-07-26 2023-05-24 Sigray Inc High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
DE112019004433B4 (en) 2018-09-04 2024-09-12 Sigray, Inc. SYSTEM AND METHOD FOR X-RAY FLUORESCENCE WITH FILTERING
CN112823280B (en) 2018-09-07 2024-11-05 斯格瑞公司 Systems and methods for depth-selective x-ray analysis
WO2020214073A1 (en) * 2019-04-18 2020-10-22 Prismatic Sensors Ab In-line x-ray focusing optics used for manipulation of x-rays in medical transmission radiography
US11733182B2 (en) * 2019-12-20 2023-08-22 Varex Imaging Corporation Radiographic inspection system for pipes and other structures using radioisotopes
CN111221025B (en) * 2020-01-21 2021-08-24 中国工程物理研究院流体物理研究所 A detector using a wire array as a cathode and its use and calibration method
US11175243B1 (en) 2020-02-06 2021-11-16 Sigray, Inc. X-ray dark-field in-line inspection for semiconductor samples
DE112021002841T5 (en) 2020-05-18 2023-03-23 Sigray, Inc. System and method for X-ray absorption spectroscopy using a crystal analyzer and multiple detector elements
DE112021004828T5 (en) 2020-09-17 2023-08-03 Sigray, Inc. SYSTEM AND PROCEDURE USING X-RAYS FOR DEPTH RESOLUTION MEASUREMENT AND ANALYSIS
DE112021006348T5 (en) 2020-12-07 2023-09-21 Sigray, Inc. HIGH-THROUGHPUT 3D X-RAY IMAGING SYSTEM USING A TRANSMISSION X-RAY SOURCE
CN112268914B (en) * 2020-12-07 2021-04-30 西安稀有金属材料研究院有限公司 A non-destructive testing method for accident-resistant coatings of full-scale nuclear fuel cladding tube elements
US12480892B2 (en) 2020-12-07 2025-11-25 Sigray, Inc. High throughput 3D x-ray imaging system using a transmission x-ray source
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
US11992350B2 (en) 2022-03-15 2024-05-28 Sigray, Inc. System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector
CN119173759A (en) 2022-05-02 2024-12-20 斯格瑞公司 X-ray sequential array wavelength dispersive spectrometer
CN121013975A (en) 2023-02-16 2025-11-25 斯格瑞公司 X-ray detector system with at least two stacked planar Bragg diffractometers
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources
US12429437B2 (en) 2023-11-07 2025-09-30 Sigray, Inc. System and method for x-ray absorption spectroscopy using spectral information from two orthogonal planes
KR20250074077A (en) * 2023-11-20 2025-05-27 한국전기연구원 X-ray target for forming spatially fractionated x-ray, target module having the same, and radiotherapy apparatus
US12429436B2 (en) 2024-01-08 2025-09-30 Sigray, Inc. X-ray analysis system with focused x-ray beam and non-x-ray microscope
WO2025155719A1 (en) 2024-01-18 2025-07-24 Sigray, Inc. Sequential array of x-ray imaging detectors
WO2025174966A1 (en) 2024-02-15 2025-08-21 Sigray, Inc. System and method for generating a focused x‑ray beam

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US20150117599A1 (en) * 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
WO2015168473A1 (en) * 2014-05-01 2015-11-05 Sigray, Inc. X-ray interferometric imaging system
WO2015176023A1 (en) * 2014-05-15 2015-11-19 Sigray, Inc. X-ray method for measurement, characterization, and analysis of periodic structures

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US20150117599A1 (en) * 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
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Title
See also references of WO2017213996A1 *

Also Published As

Publication number Publication date
WO2017213996A1 (en) 2017-12-14
EP3465182A1 (en) 2019-04-10
CN109564176A (en) 2019-04-02
KR20190015531A (en) 2019-02-13
JP2019523871A (en) 2019-08-29
JP6775035B2 (en) 2020-10-28

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