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EP3457448A4 - LAMINATE TYPE PHOTOELECTRIC CONVERSION DEVICE, AND MANUFACTURING METHOD THEREOF - Google Patents

LAMINATE TYPE PHOTOELECTRIC CONVERSION DEVICE, AND MANUFACTURING METHOD THEREOF Download PDF

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Publication number
EP3457448A4
EP3457448A4 EP17796083.8A EP17796083A EP3457448A4 EP 3457448 A4 EP3457448 A4 EP 3457448A4 EP 17796083 A EP17796083 A EP 17796083A EP 3457448 A4 EP3457448 A4 EP 3457448A4
Authority
EP
European Patent Office
Prior art keywords
manufacturing
photoelectric conversion
conversion device
type photoelectric
laminate type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP17796083.8A
Other languages
German (de)
French (fr)
Other versions
EP3457448B1 (en
EP3457448A1 (en
Inventor
Ryota Mishima
Masashi Hino
Tomomi Meguro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kaneka Corp
Original Assignee
Kaneka Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaneka Corp filed Critical Kaneka Corp
Publication of EP3457448A1 publication Critical patent/EP3457448A1/en
Publication of EP3457448A4 publication Critical patent/EP3457448A4/en
Application granted granted Critical
Publication of EP3457448B1 publication Critical patent/EP3457448B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/70Surface textures, e.g. pyramid structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/161Photovoltaic cells having only PN heterojunction potential barriers comprising multiple PN heterojunctions, e.g. tandem cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/164Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/121The active layers comprising only Group IV materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/138Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
    • H10F71/1385Etching transparent electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/12Active materials
    • H10F77/122Active materials comprising only Group IV materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers
    • H10F77/211Electrodes for devices having potential barriers for photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/244Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
    • H10F77/251Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers comprising zinc oxide [ZnO]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/70Surface textures, e.g. pyramid structures
    • H10F77/703Surface textures, e.g. pyramid structures of the semiconductor bodies, e.g. textured active layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/80Constructional details
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/50Organic perovskites; Hybrid organic-inorganic perovskites [HOIP], e.g. CH3NH3PbI3
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Photovoltaic Devices (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
EP17796083.8A 2016-05-09 2017-05-08 Stacked photoelectric conversion device and method for producing same Active EP3457448B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016094106 2016-05-09
PCT/JP2017/017356 WO2017195722A1 (en) 2016-05-09 2017-05-08 Stacked photoelectric conversion device and method for producing same

Publications (3)

Publication Number Publication Date
EP3457448A1 EP3457448A1 (en) 2019-03-20
EP3457448A4 true EP3457448A4 (en) 2019-12-25
EP3457448B1 EP3457448B1 (en) 2022-06-15

Family

ID=60267190

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17796083.8A Active EP3457448B1 (en) 2016-05-09 2017-05-08 Stacked photoelectric conversion device and method for producing same

Country Status (5)

Country Link
US (1) US10944017B2 (en)
EP (1) EP3457448B1 (en)
JP (1) JP6670377B2 (en)
CN (1) CN109196678B (en)
WO (1) WO2017195722A1 (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201820427D0 (en) 2018-12-14 2019-01-30 Univ Oxford Innovation Ltd Device interlayer
CN109473502B (en) * 2018-12-19 2024-07-23 赵怡程 Solar cell lamination structure and preparation method thereof
JP7244031B2 (en) * 2019-02-27 2023-03-22 株式会社カネカ Photoelectric conversion element and method for manufacturing photoelectric conversion element
US20220344106A1 (en) 2019-08-12 2022-10-27 Arizona Board Of Regents On Behalf Of Arizona State University Perovskite/silicon tandem photovoltaic device
EP4023431B1 (en) * 2019-08-30 2025-02-19 Keihin Ramtech Co., Ltd. Multilayer structure and method for producing multilayer structure
US11398355B2 (en) 2019-10-01 2022-07-26 Seoul National University R&Db Foundation Perovskite silicon tandem solar cell and method for manufacturing the same
US11437537B2 (en) 2020-03-02 2022-09-06 King Fahd University Of Petroleum And Minerals Perovskite-silicon tandem solar cell
US11522096B2 (en) 2020-03-03 2022-12-06 King Fahd University Of Petroleum And Minerals Perovskite-silicon tandem structure and photon upconverters
KR20210112160A (en) * 2020-03-04 2021-09-14 엘지전자 주식회사 Solar cell and method for manufacturing the same
CN111554763B (en) * 2020-04-01 2023-06-09 南开大学 High-pressure high-efficiency perovskite/crystalline silicon laminated battery
CN111916561A (en) * 2020-07-22 2020-11-10 隆基绿能科技股份有限公司 Perovskite solar cell, tandem solar cell and battery pack
CN114122180A (en) * 2020-08-31 2022-03-01 隆基绿能科技股份有限公司 Laminated photovoltaic device and production method
WO2022071302A1 (en) 2020-09-30 2022-04-07 株式会社カネカ Perovskite thin film solar cell production method
WO2022102128A1 (en) * 2020-11-16 2022-05-19 株式会社 東芝 Multilayer junction-type photoelectric conversion element and method for manufacturing same
JPWO2023037885A1 (en) * 2021-09-13 2023-03-16
WO2023042614A1 (en) * 2021-09-14 2023-03-23 株式会社カネカ Solar cell
JP7114821B1 (en) 2022-03-18 2022-08-08 株式会社東芝 Multilayer junction photoelectric conversion element and method for manufacturing multilayer junction photoelectric conversion element
CN115411065B (en) * 2022-09-29 2024-02-13 隆基绿能科技股份有限公司 A solar cell and its preparation method
CN116885046B (en) * 2023-09-07 2023-11-17 无锡松煜科技有限公司 Monocrystalline silicon slice texturing method
CN117117020A (en) * 2023-09-15 2023-11-24 晶科能源股份有限公司 Solar cells and photovoltaic modules

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3308401A1 (en) * 2015-06-12 2018-04-18 Oxford Photovoltaics Limited Multijunction photovoltaic device
EP3308412A1 (en) * 2015-06-12 2018-04-18 Oxford Photovoltaics Limited Method of depositing a perovskite material

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3762086B2 (en) * 1998-01-28 2006-03-29 株式会社カネカ Tandem silicon thin film photoelectric conversion device
US20030044539A1 (en) * 2001-02-06 2003-03-06 Oswald Robert S. Process for producing photovoltaic devices
JP2002319688A (en) * 2001-04-20 2002-10-31 Sharp Corp Laminated solar battery
JP2003069061A (en) * 2001-08-24 2003-03-07 Sharp Corp Multilayer photoelectric conversion element
JP2004153028A (en) * 2002-10-30 2004-05-27 Kyocera Corp Thin film photoelectric conversion device
JP2009016179A (en) * 2007-07-04 2009-01-22 Kaneka Corp Transparent conductive film, and manufacturing method thereof
KR20090028883A (en) * 2007-09-17 2009-03-20 주성엔지니어링(주) Solar cell and manufacturing method
US20090229663A1 (en) * 2008-03-17 2009-09-17 Nanopv Technologies Inc. Nanocrystalline photovoltaic device
CN102187471B (en) * 2008-10-14 2013-07-31 株式会社钟化 Silicon thin film solar cell and method for manufacturing same
JP5559704B2 (en) * 2009-02-03 2014-07-23 株式会社カネカ MANUFACTURING METHOD FOR SUBSTRATE WITH TRANSPARENT CONDUCTIVE FILM, MULTI-JUNCTION TYPE THIN-FILM PHOTOELECTRIC CONVERSION DEVICE AND LIGHT-EMITTING DEVICE
JP5324966B2 (en) * 2009-03-06 2013-10-23 三菱重工業株式会社 Photoelectric conversion device manufacturing method and film forming device
JP5514207B2 (en) * 2009-07-03 2014-06-04 株式会社カネカ Crystalline silicon solar cell and manufacturing method thereof
JP4902779B2 (en) * 2009-11-30 2012-03-21 三洋電機株式会社 Photoelectric conversion device and manufacturing method thereof
NZ601330A (en) * 2009-12-21 2015-05-29 Univ Houston Vertically stacked photovoltaic and thermal solar cell
JP5409490B2 (en) * 2010-04-05 2014-02-05 三菱電機株式会社 Photovoltaic device and manufacturing method thereof
WO2012043124A1 (en) * 2010-10-01 2012-04-05 株式会社カネカ Method for manufacturing photoelectric conversion device
ITMI20111559A1 (en) * 2011-08-30 2013-03-01 St Microelectronics Srl LAYER TCO OF FRONTAL CONTACT OF A SOLAR FILM WITH A THIN FILM WITH LAYER REFRACTORY METAL BARRIER AND MANUFACTURING PROCESS
JP5945379B2 (en) * 2012-02-23 2016-07-05 国立大学法人埼玉大学 Method for forming organic thin film and solar cell formed using the same
JP6103867B2 (en) * 2012-09-12 2017-03-29 シャープ株式会社 Photoelectric conversion element and method for producing photoelectric conversion element
US10615297B2 (en) * 2013-02-22 2020-04-07 International Business Machines Corporation Electrode formation for heterojunction solar cells
JP5991945B2 (en) * 2013-06-07 2016-09-14 信越化学工業株式会社 Solar cell and solar cell module
US20160190377A1 (en) * 2013-08-06 2016-06-30 Newsouth Innovations Pty Limited A high efficiency stacked solar cell
WO2017057646A1 (en) * 2015-09-30 2017-04-06 株式会社カネカ Multi-junction photoelectric conversion device and photoelectric conversion module

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3308401A1 (en) * 2015-06-12 2018-04-18 Oxford Photovoltaics Limited Multijunction photovoltaic device
EP3308412A1 (en) * 2015-06-12 2018-04-18 Oxford Photovoltaics Limited Method of depositing a perovskite material

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MIHA FILIPIČ ET AL: "CH_3NH_3PbI_3 perovskite / silicon tandem solar cells: characterization based optical simulations", OPTICS EXPRESS, VOL. 16, NO. 7, PP. 4479-4486 (2008), vol. 23, no. 7, 6 April 2015 (2015-04-06), pages A263, XP055200701, ISSN: 2161-2072, DOI: 10.1364/OE.23.00A263 *

Also Published As

Publication number Publication date
CN109196678B (en) 2022-07-15
US10944017B2 (en) 2021-03-09
JPWO2017195722A1 (en) 2018-12-20
US20190081189A1 (en) 2019-03-14
EP3457448B1 (en) 2022-06-15
CN109196678A (en) 2019-01-11
WO2017195722A1 (en) 2017-11-16
JP6670377B2 (en) 2020-03-18
EP3457448A1 (en) 2019-03-20

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