EP3413065A4 - DEVICE HAVING FISSURE DETECTION CIRCUIT AND DETECTION SYSTEM - Google Patents
DEVICE HAVING FISSURE DETECTION CIRCUIT AND DETECTION SYSTEM Download PDFInfo
- Publication number
- EP3413065A4 EP3413065A4 EP16920069.8A EP16920069A EP3413065A4 EP 3413065 A4 EP3413065 A4 EP 3413065A4 EP 16920069 A EP16920069 A EP 16920069A EP 3413065 A4 EP3413065 A4 EP 3413065A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- fissure
- detection
- detection circuit
- detection system
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 title 2
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2856—Internal circuit aspects, e.g. built-in test features; Test chips; Measuring material aspects, e.g. electro migration [EM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Automation & Control Theory (AREA)
- Power Engineering (AREA)
- Environmental & Geological Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2016/103732 WO2018076272A1 (en) | 2016-10-28 | 2016-10-28 | Device provided with crack detection circuit, and detection system |
Publications (3)
Publication Number | Publication Date |
---|---|
EP3413065A1 EP3413065A1 (en) | 2018-12-12 |
EP3413065A4 true EP3413065A4 (en) | 2019-02-06 |
EP3413065B1 EP3413065B1 (en) | 2023-08-30 |
Family
ID=62023310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP16920069.8A Active EP3413065B1 (en) | 2016-10-28 | 2016-10-28 | Device provided with crack detection circuit, and detection system |
Country Status (6)
Country | Link |
---|---|
US (1) | US10996265B2 (en) |
EP (1) | EP3413065B1 (en) |
JP (1) | JP6892506B2 (en) |
KR (1) | KR102276266B1 (en) |
CN (1) | CN108496087B (en) |
WO (1) | WO2018076272A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10908210B2 (en) * | 2018-09-28 | 2021-02-02 | Sandisk Technologies Llc | Die crack detection |
KR20200124576A (en) * | 2019-04-24 | 2020-11-03 | 에스케이하이닉스 주식회사 | Die edge crack monitoring system |
CN113467140B (en) * | 2020-03-31 | 2022-06-07 | 荣耀终端有限公司 | Display screen, electronic equipment and crack detection method |
KR20220045684A (en) * | 2020-10-06 | 2022-04-13 | 에스케이하이닉스 주식회사 | Semiconductor Package Including a Wire Having a Zigzag Shape |
CN113473826B (en) * | 2021-06-09 | 2022-07-05 | 荣耀终端有限公司 | Glass substrates, display panels, displays and electronic equipment |
CN113552177B (en) * | 2021-07-30 | 2023-05-12 | 武汉天马微电子有限公司 | Display panel testing method, display panel and display device |
CN114264700A (en) * | 2021-12-23 | 2022-04-01 | 东华大学 | A flexible wheel crack monitoring device and method |
CN115561571B (en) * | 2022-01-13 | 2023-12-08 | 深圳荣耀智能机器有限公司 | Crack detection circuit, system, integrated circuit and electronic equipment |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050212147A1 (en) * | 2004-03-26 | 2005-09-29 | Nec Electronics Corporation | Semiconductor wafer, semiconductor chip, and semiconductor chip inspection method |
US20070262370A1 (en) * | 2006-05-10 | 2007-11-15 | Nec Electronics Corporation | Semiconductor device |
CN105372857A (en) * | 2015-12-16 | 2016-03-02 | 上海天马微电子有限公司 | Glass substrate, liquid crystal display panel and liquid crystal display device |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2526514B2 (en) * | 1993-11-22 | 1996-08-21 | 日本電気株式会社 | Hybrid integrated circuit board |
US5969260A (en) * | 1998-03-30 | 1999-10-19 | Mcdonnell Douglas Corporation | Remotely interrogatable apparatus and method for detecting defects in structural members |
JP2001201477A (en) * | 1999-11-09 | 2001-07-27 | Horyo Sangyo Kk | Structure maintenance support system |
US7180302B2 (en) * | 2004-07-16 | 2007-02-20 | Simula, Inc | Method and system for determining cracks and broken components in armor |
JP2006041420A (en) | 2004-07-30 | 2006-02-09 | Seiko Epson Corp | Evaluation device for electronic device and evaluation method for electronic device |
JP2008021864A (en) | 2006-07-13 | 2008-01-31 | Nec Electronics Corp | Semiconductor device |
JP2008191995A (en) * | 2007-02-06 | 2008-08-21 | Toshiba Corp | Ic card |
CN101261246A (en) * | 2007-03-09 | 2008-09-10 | 清华大学 | Far-field eddy current detection method for pipeline cracks |
US7701231B2 (en) | 2007-03-20 | 2010-04-20 | Cummins Filtration Ip, Inc | Apparatus, system, and method for detecting cracking within an aftertreatment device |
JP2009063532A (en) * | 2007-09-10 | 2009-03-26 | Ihi Corp | Crack detector |
CN101750556A (en) | 2008-12-04 | 2010-06-23 | 鸿富锦精密工业(深圳)有限公司 | Driver failure detection system and method |
JP4748231B2 (en) | 2009-02-24 | 2011-08-17 | トヨタ自動車株式会社 | Eddy current measuring sensor and inspection method therefor |
US8253420B2 (en) * | 2009-12-04 | 2012-08-28 | Volterra Semiconductor Corporation | Integrated electrical circuit and test to determine the integrity of a silicon die |
US9057760B2 (en) | 2011-01-20 | 2015-06-16 | International Business Machines Corporation | Circuit for detecting structural defects in an integrated circuit chip, methods of use and manufacture and design structures |
JP2012220792A (en) * | 2011-04-11 | 2012-11-12 | Japan Display East Co Ltd | Liquid crystal display device and method for manufacturing liquid crystal display device |
CN102171579A (en) | 2011-04-19 | 2011-08-31 | 华为终端有限公司 | Integrated circuit device |
WO2015065110A1 (en) | 2013-10-31 | 2015-05-07 | 엘지전자(주) | Method for transmitting discovery message in wireless communication system and apparatus for same |
CN203587560U (en) * | 2013-11-01 | 2014-05-07 | 绍兴文理学院元培学院 | Metal crack detector |
JP6267601B2 (en) * | 2014-08-12 | 2018-01-24 | 東芝テック株式会社 | Passive crack sensor |
CN104914157B (en) * | 2015-05-08 | 2017-11-07 | 上海海事大学 | A kind of defect the cannot-harm-detection device in metal structure short space |
CN205016497U (en) | 2015-10-13 | 2016-02-03 | 中芯国际集成电路制造(北京)有限公司 | Survey test structure of chip layering |
-
2016
- 2016-10-28 EP EP16920069.8A patent/EP3413065B1/en active Active
- 2016-10-28 CN CN201680079779.8A patent/CN108496087B/en active Active
- 2016-10-28 KR KR1020197014874A patent/KR102276266B1/en active IP Right Grant
- 2016-10-28 JP JP2019522758A patent/JP6892506B2/en not_active Expired - Fee Related
- 2016-10-28 WO PCT/CN2016/103732 patent/WO2018076272A1/en active Application Filing
- 2016-10-28 US US16/095,858 patent/US10996265B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050212147A1 (en) * | 2004-03-26 | 2005-09-29 | Nec Electronics Corporation | Semiconductor wafer, semiconductor chip, and semiconductor chip inspection method |
US20070262370A1 (en) * | 2006-05-10 | 2007-11-15 | Nec Electronics Corporation | Semiconductor device |
CN105372857A (en) * | 2015-12-16 | 2016-03-02 | 上海天马微电子有限公司 | Glass substrate, liquid crystal display panel and liquid crystal display device |
Non-Patent Citations (1)
Title |
---|
"TEST STRUCTURES FOR BUMPY INTEGRATED CIRCUITS", NTIS TECH NOTES, US DEPARTMENT OF COMMERCE. SPRINGFIELD, VA, US, 1 April 1990 (1990-04-01), XP000127996, ISSN: 0889-8464 * |
Also Published As
Publication number | Publication date |
---|---|
US20190324080A1 (en) | 2019-10-24 |
JP6892506B2 (en) | 2021-06-23 |
US10996265B2 (en) | 2021-05-04 |
CN108496087A (en) | 2018-09-04 |
WO2018076272A1 (en) | 2018-05-03 |
KR102276266B1 (en) | 2021-07-12 |
EP3413065B1 (en) | 2023-08-30 |
CN108496087B (en) | 2020-12-08 |
EP3413065A1 (en) | 2018-12-12 |
KR20190076000A (en) | 2019-07-01 |
JP2019533164A (en) | 2019-11-14 |
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