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EP2765116A4 - OZONE GENERATING UNIT USING LESS ADDED NITROGEN - Google Patents

OZONE GENERATING UNIT USING LESS ADDED NITROGEN

Info

Publication number
EP2765116A4
EP2765116A4 EP11873749.3A EP11873749A EP2765116A4 EP 2765116 A4 EP2765116 A4 EP 2765116A4 EP 11873749 A EP11873749 A EP 11873749A EP 2765116 A4 EP2765116 A4 EP 2765116A4
Authority
EP
European Patent Office
Prior art keywords
generating unit
ozone generating
added nitrogen
less added
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11873749.3A
Other languages
German (de)
French (fr)
Other versions
EP2765116A1 (en
EP2765116B1 (en
Inventor
Noriyuki Nakamura
Yoichiro Tabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Mitsubishi Electric Industrial Systems Corp
Original Assignee
Toshiba Mitsubishi Electric Industrial Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=48043289&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP2765116(A4) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Toshiba Mitsubishi Electric Industrial Systems Corp filed Critical Toshiba Mitsubishi Electric Industrial Systems Corp
Publication of EP2765116A1 publication Critical patent/EP2765116A1/en
Publication of EP2765116A4 publication Critical patent/EP2765116A4/en
Application granted granted Critical
Publication of EP2765116B1 publication Critical patent/EP2765116B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10Preparation of ozone
    • C01B13/11Preparation of ozone by electric discharge
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873Materials to be treated
    • B01J2219/0892Materials to be treated involving catalytically active material
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00Preparation of ozone by electrical discharge
    • C01B2201/20Electrodes used for obtaining electrical discharge
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00Preparation of ozone by electrical discharge
    • C01B2201/30Dielectrics used in the electrical dischargers
    • C01B2201/32Constructional details of the dielectrics
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00Preparation of ozone by electrical discharge
    • C01B2201/70Cooling of the discharger; Means for making cooling unnecessary

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Catalysts (AREA)
EP11873749.3A 2011-10-04 2011-10-04 Ozone generation unit with less nitrogen added Active EP2765116B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2011/072817 WO2013051097A1 (en) 2011-10-04 2011-10-04 Ozone generation unit with less nitrogen added

Publications (3)

Publication Number Publication Date
EP2765116A1 EP2765116A1 (en) 2014-08-13
EP2765116A4 true EP2765116A4 (en) 2015-08-05
EP2765116B1 EP2765116B1 (en) 2021-08-11

Family

ID=48043289

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11873749.3A Active EP2765116B1 (en) 2011-10-04 2011-10-04 Ozone generation unit with less nitrogen added

Country Status (7)

Country Link
US (1) US9295967B2 (en)
EP (1) EP2765116B1 (en)
JP (1) JP5824062B2 (en)
KR (1) KR101596178B1 (en)
CN (1) CN103857620B (en)
TW (1) TWI435844B (en)
WO (1) WO2013051097A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10384939B2 (en) 2014-10-29 2019-08-20 Toshiba Mitsubishi-Electric Industrial Systems Corporation Ozone generation apparatus
CN107079575B (en) * 2014-10-29 2020-08-04 东芝三菱电机产业系统株式会社 Discharge generating device
KR102370276B1 (en) * 2015-12-08 2022-03-04 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 How ozone is generated
JP6884034B2 (en) * 2017-05-18 2021-06-09 東京エレクトロン株式会社 Output inspection method for ozone mass flow controller
TWI667047B (en) * 2018-10-01 2019-08-01 泉康科技有限公司 Device with the function of automatic adjusting ozone emission and operation method thereof
KR102656912B1 (en) * 2020-02-27 2024-04-16 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 active gas generation device
JP7334309B1 (en) 2022-07-15 2023-08-28 日本特殊陶業株式会社 Ozone generator and ozone generator

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040223893A1 (en) * 2003-05-09 2004-11-11 Toshiba Mitsubishi-Electric Industrial Systems Corporation Ozone generator
US20060049738A1 (en) * 2004-02-25 2006-03-09 Toshiba Mitsbishi-Electric Industrial Systems Corporation Ozone generator system and ozone generating method
EP1905512A1 (en) * 2005-07-15 2008-04-02 Toshiba Mitsubishi-Electric Industrial Systems Corporation Method for producing photocatalytic material and apparatus for producing photocatalytic material
US20080245659A1 (en) * 2006-03-22 2008-10-09 Sumitomo Precision Products Co., Ltd. Discharge cell for ozonizer

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5130595A (en) 1974-09-10 1976-03-15 Mitsubishi Heavy Ind Ltd OZONHATSUSE ISOCHI
JPS6086008A (en) 1983-10-17 1985-05-15 Senichi Masuda Ozonizer with high performance
JP2641886B2 (en) 1988-02-15 1997-08-20 東京エレクトロン株式会社 Ozone generator
JP3124124B2 (en) * 1992-09-04 2001-01-15 旭光学工業株式会社 Image information reader
US5377215A (en) * 1992-11-13 1994-12-27 Cymer Laser Technologies Excimer laser
US5520893A (en) * 1993-09-29 1996-05-28 Oxidyn, Incorporated Apparatus with safety means for sterilizing articles with ozone
JP3855287B2 (en) 1995-11-29 2006-12-06 石川島播磨重工業株式会社 Ozone generator
JP3968762B2 (en) 1997-09-19 2007-08-29 石川島播磨重工業株式会社 High concentration ozone generator
JP3607905B2 (en) * 2002-10-22 2005-01-05 東芝三菱電機産業システム株式会社 Ozone generator
EP1899781B1 (en) 2005-07-07 2014-09-03 MKS Instruments, Inc. Ozone system for multi-chamber tools
WO2008004278A1 (en) 2006-07-04 2008-01-10 Toshiba Mitsubishi-Electric Industrial Systems Corporation Apparatus for concentrating/diluting specific gas and method of concentrating/diluting specific gas
JP5189269B2 (en) 2006-07-26 2013-04-24 トヨタ自動車株式会社 Fuel cell
JP5180460B2 (en) 2006-12-07 2013-04-10 メタウォーター株式会社 Ozone generator
JP5492566B2 (en) 2007-11-30 2014-05-14 東芝三菱電機産業システム株式会社 High concentration ozone gas generation apparatus and high concentration ozone gas generation method
WO2011108410A1 (en) 2010-03-02 2011-09-09 三菱電機株式会社 Silent discharge plasma device and method for generating plasma by silent discharge

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040223893A1 (en) * 2003-05-09 2004-11-11 Toshiba Mitsubishi-Electric Industrial Systems Corporation Ozone generator
US20060049738A1 (en) * 2004-02-25 2006-03-09 Toshiba Mitsbishi-Electric Industrial Systems Corporation Ozone generator system and ozone generating method
EP1905512A1 (en) * 2005-07-15 2008-04-02 Toshiba Mitsubishi-Electric Industrial Systems Corporation Method for producing photocatalytic material and apparatus for producing photocatalytic material
US20080245659A1 (en) * 2006-03-22 2008-10-09 Sumitomo Precision Products Co., Ltd. Discharge cell for ozonizer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2013051097A1 *

Also Published As

Publication number Publication date
US20140255256A1 (en) 2014-09-11
US9295967B2 (en) 2016-03-29
KR20140053305A (en) 2014-05-07
CN103857620B (en) 2016-01-13
WO2013051097A1 (en) 2013-04-11
JP5824062B2 (en) 2015-11-25
TWI435844B (en) 2014-05-01
KR101596178B1 (en) 2016-02-19
TW201315678A (en) 2013-04-16
JPWO2013051097A1 (en) 2015-03-30
EP2765116A1 (en) 2014-08-13
CN103857620A (en) 2014-06-11
EP2765116B1 (en) 2021-08-11

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