EP2194275B1 - Lobe type vacuum pump - Google Patents
Lobe type vacuum pump Download PDFInfo
- Publication number
- EP2194275B1 EP2194275B1 EP09014528.5A EP09014528A EP2194275B1 EP 2194275 B1 EP2194275 B1 EP 2194275B1 EP 09014528 A EP09014528 A EP 09014528A EP 2194275 B1 EP2194275 B1 EP 2194275B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- piston
- shaft
- vacuum pump
- axis
- roots vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Not-in-force
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/20—Rotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/60—Shafts
Definitions
- the invention relates to a Roots vacuum pump according to the preamble of the first claim.
- Roots vacuum pumps are an indispensable part of many industrial applications. Examples of such applications include metallurgy, vacuum drying and chemical engineering.
- Roots vacuum pumps provide to operate two waves in opposite directions at the same speed. This is ensured for example by a mechanical synchromesh.
- pistons On these shafts are provided pistons which cooperate, trapping gas volumes and transferring them from the pump inlet to the pump outlet.
- a well-known in the art construction principle proposes to make the piston of a metal material and to make it easier through drilled cavities. Through a central bore a steel shaft is inserted through and fixed, for example by gluing the components.
- the GB 891 524 A describes a similar Roots pump in which channels are arranged in a piston.
- An object of the invention is to provide a Roots vacuum pump with a cost-producible and stable piston.
- a cavity is provided according to the invention. This reduces the weight of the piston while maintaining stability. A lower weight reduces the costs, at the same time it allows an increase in the shaft speed, since the mass distribution is cheaper. A lower weight also increases the smoothness of the Roots vacuum pump. It is therefore possible to increase the suction capacity over the prior art.
- Roots pump is significantly simplified, since the shaft journal and piston are parts of a one-piece casting according to the invention. Furthermore, the interior of the piston is hollow and the cavity is designed to be comprehensive. This enhances the above-mentioned advantageous effects.
- the stability of this arrangement is inventively increased by a longitudinal web between the shaft journal.
- the weight is further reduced, in which two shaft journals are arranged on the piston, between which there is a cavity.
- the piston wall can be made thin and with low material costs, if more webs are used for stiffening.
- FIG. 1 A section along the axes of a Roots vacuum pump shows FIG. 1 ,
- the pump chamber 2 In the housing 1 of the vacuum pump is the pump chamber 2. This is penetrated by a first shaft 10 and a second shaft 14. In the direction of the shaft axes, it is limited by a first end shield 4 and a second end shield 5.
- a first piston 12 with the first shaft and second piston 16 are connected to the second shaft.
- Both shafts are supported by bearing arrangements rotatably in the end shields.
- the first bearing plate In the first bearing plate are the floating bearing 22 of the first shaft and the movable bearing 26 of the second shaft.
- the second bearing plate In the second bearing plate are the fixed bearing 24 of the first shaft and the bearing 28 of the second shaft.
- a gear chamber 3 On the side facing away from the pump chamber side of the first bearing plate, a gear chamber 3 is provided, in which protrude the ends of the first and second shaft. On the shaft ends sit a first and a second synchronous wheel 18 and 20, which transmit the rotation of the first waves to the second shaft, so that they rotate at the same speed but in opposite directions.
- a first centrifugal disc 30 dips into a lubricant reservoir and distributes the lubricant in the gear compartment.
- a gap 8 On the side facing away from the pump chamber side of the second bearing plate is a gap 8. This is penetrated by the first wave, while the second wave ends in him. At its end is a second centrifugal disk 32 arranged, which also immersed in a lubricant supply and causes a distribution of the lubricant in the intermediate space.
- the intermediate space passing through the end of the first shaft terminates in the motor housing 6.
- the shaft end with the inner magnet is surrounded by a split pot 40 which is mounted airtight by means of a split-top flange on the housing.
- a magnetic carrier 48 carries outer magnets 46, which cooperate with the inner magnet force and rotation transmitting.
- the magnet carrier is arranged on a motor shaft 50, which is mounted in an engine mount 52.
- the motor magnets 54 also arranged on the motor shaft cooperate with coils 56 to convert electrical energy into mechanical rotation. Coils and motor magnets form the drive of the Roots pump.
- FIG. 1 The pistons of FIG. 1 are shown there schematically and not cut. Both pistons, apart from the length of the motor-side shaft end, can be constructed identically. Therefore, the characteristics that result from the FIGS. 2 to 5 result, apply to both pistons.
- the piston is designed as a hollow body. It has a piston wall 60 which surrounds the hollow interior.
- Transverse webs 64 are oriented substantially perpendicular to the axis of rotation and arranged on the inner wall of the piston. They stiffen the rotor against occurring centrifugal forces. It is thus avoided that the piston wall bulges out at its point parallel to the axis 100 from the axis outwards and thereby consumes the narrow gaps between the piston with each other and the housing. Tighter gaps can be selected by the stiffening, which improves the vacuum technical performance of the Roots vacuum pump and a tarnishing of the piston, that is, a mutual contact or contact of the Housing, prevented.
- Along the axis are located at the piston end integral with this executed shaft journals 62 and 63, which are provided to cooperate with the shaft bearings described above, synchronous wheels, the drive and the centrifugal discs.
- the piston Inside the piston is located between the shaft journal and along the axis of the core portion 58. In this core region according to the invention, the cavity 80 is provided. Only edge webs 70 on the shaft journal and a longitudinal web 66 extending parallel to the axis on the inside of the piston wall are arranged in this region. The longitudinal bar stiffens the piston wall, so that here centrifugal forces can not develop a negative effect. An additional stiffening results from the central web 68. All webs 64, 66 and 68 make it possible to make the piston wall 60 as thin as possible and thus easy.
- an outer opening 72 is provided in an axis perpendicular to the axis portion of the piston wall. Since the interior 82 of the piston constitutes an undivided cavity, the outer opening allows the piston with the shaft journals to be manufactured as a casting. This is a very cost effective design. Filling material, which keeps the interior of the piston free of material during casting, is removed through the outer opening. This opening is closed in the assembled Roots vacuum pump by a plug or the like. It is advantageous to provide a plurality of outer openings, preferably four, since this simplifies and clarifies the mounting of the casting core.
- the piston has an approximately eight-shaped cross-section.
- the piston wall 60 encloses the hollow interior of the piston.
- To this hollow and undivided interior space 82 belongs the cavity 80 in the core area 58 of the piston.
- the eight are provided on the inside of the piston wall, the stiffening longitudinal webs 66, the effect of which has been described above.
- FIG. 4 A section along the axis and along the line II-II 'is in FIG. 4 shown. Between the shaft journals 62 and 63 is located in the interior of the piston, the cavity 80 which extends along the axis. Extending parallel to the axis 60 on the inside of the piston wall longitudinal webs 66. The central web 68 extends transversely to the axis and connects the longitudinal webs. As a result, the piston is stiffened to a high degree against the centrifugal forces. Likewise, the edge webs 70 cause a stiffening with this effect. Depending on the length of the piston, a plurality of central webs may be provided, wherein the interior of the piston preferably remains undivided, so that it can be produced as a one-piece cast part.
- FIG. 5 A section along the line III-III 'at the level of the shaft journal 63 shows FIG. 5 ,
- the outer opening 72 is provided, which connects the interior of the piston such that filling material of the casting process can be removed thereby.
- a release structure 74 is provided in the piston wall.
- Several radial webs 76 alternate in the circumferential direction with end openings 78. The front openings are closed with a soft material. In the case of a contact of the piston, for example, in a damage of the synchronizer wheels or by a occurred foreign body, the radial webs are deformed. Even the complete tearing of the radial webs is possible.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
Die Erfindung betrifft eine Wälzkolbenvakuumpumpe nach dem Oberbegriff des ersten Anspruchs.The invention relates to a Roots vacuum pump according to the preamble of the first claim.
Wälzkolbenvakuumpumpen sind aus vielen industriellen Anwendungen nicht mehr wegzudenken. Beispielhaft seien für diese Anwendungen Metallurgie, Vakuumtrocknung und Chemietechnik genannt.Roots vacuum pumps are an indispensable part of many industrial applications. Examples of such applications include metallurgy, vacuum drying and chemical engineering.
Der Grundaufbau dieser Wälzkolbenvakuumpumpen sieht vor, zwei Wellen gegenläufig mit gleicher Drehzahl zu betreiben. Dies wird beispielsweise durch ein mechanisches Synchrongetriebe gewährleistet. Auf diesen Wellen sind Kolben vorgesehen, die zusammenwirken, Gasvolumina einschließen und vom Pumpeneinlass zum Pumpenauslass transferieren.The basic structure of these Roots vacuum pumps provides to operate two waves in opposite directions at the same speed. This is ensured for example by a mechanical synchromesh. On these shafts are provided pistons which cooperate, trapping gas volumes and transferring them from the pump inlet to the pump outlet.
Ein im Stand der Technik bekanntes Bauprinzip schlägt vor, den Kolben aus einem Metallwerkstoff herzustellen und durch gebohrte Hohlräume leichter zu machen. Durch eine zentrale Bohrung wird eine Stahlwelle hindurch gesteckt und fixiert, beispielsweise durch eine Verklebung der Bauteile.A well-known in the art construction principle proposes to make the piston of a metal material and to make it easier through drilled cavities. Through a central bore a steel shaft is inserted through and fixed, for example by gluing the components.
Nachteilig an diesem Aufbau ist beispielsweise der Fertigungsaufwand, da Nachbearbeitung der Bauteile und folgende Montageschritte notwendig sind. Auf der anderen Seite ist bei Veränderungen zu berücksichtigen, dass die Stabilität gegen Verformung gesichert sein muss.A disadvantage of this structure, for example, the manufacturing cost, as reworking of the components and subsequent assembly steps are necessary. On the other hand, changes must take into account that stability against deformation must be ensured.
Aus der
In der
Die
In der
Eine Aufgabe der Erfindung besteht darin, eine Wälzkolbenvakuumpumpe mit einem kostengünstig herstellbaren und stabilen Kolben zu schaffen.An object of the invention is to provide a Roots vacuum pump with a cost-producible and stable piston.
Diese Aufgabe wird gelöst durch eine Wälzkolbenvakuumpumpe mit den Merkmalen des ersten Anspruchs. Die abhängigen Ansprüche 2 bis 5 geben vorteilhafte Weiterbildungen der Erfindung an.This object is achieved by a Roots vacuum pump with the features of the first claim. The dependent claims 2 to 5 indicate advantageous developments of the invention.
Im Bereich der Welle, dem Kernbereich, ist erfindungsgemäß ein Hohlraum vorgesehen. Dies reduziert das Gewicht des Kolbens, wobei die Stabilität gewahrt bleibt. Ein geringeres Gewicht reduziert die Kosten, zugleich erlaubt es eine Steigerung der Wellendrehzahl, da die Massenverteilung günstiger ist. Ein geringeres Gewicht erhöht zudem die Laufruhe der Wälzkolbenvakuumpumpe. Es wird daher ermöglicht, das Saugvermögen gegenüber dem Stand der Technik zu erhöhen.In the region of the shaft, the core region, a cavity is provided according to the invention. This reduces the weight of the piston while maintaining stability. A lower weight reduces the costs, at the same time it allows an increase in the shaft speed, since the mass distribution is cheaper. A lower weight also increases the smoothness of the Roots vacuum pump. It is therefore possible to increase the suction capacity over the prior art.
Die Herstellung der Wälzkolbenpumpe wird deutlich vereinfacht, da Wellenzapfen und Kolben erfindungsgemäß Teile eines einstückigen Gussteils sind. Ferner ist der Innenraum des Kolbens hohl und der Hohlraum umfassend gestaltet. Dies verstärkt die oben genannten vorteilhaften Effekte. Die Stabilität dieser Anordnung wird erfindungsgemäß durch einen Längssteg zwischen den Wellenzapfen erhöht.The manufacture of the Roots pump is significantly simplified, since the shaft journal and piston are parts of a one-piece casting according to the invention. Furthermore, the interior of the piston is hollow and the cavity is designed to be comprehensive. This enhances the above-mentioned advantageous effects. The stability of this arrangement is inventively increased by a longitudinal web between the shaft journal.
Das Gewicht wird weiter reduziert, in dem zwei Wellenzapfen am Kolben angeordnet sind, zwischen denen sich ein Hohlraum befindet. Die Kolbenwandung kann dünn und mit geringem Materialaufwand hergestellt werden, wenn weitere Stege zur Versteifung eingesetzt werden. Schließlich schlägt eine Weiterbildung vor, eine Freigabestruktur zwischen Wellenlagerung und Kolben vorzusehen. Sie erhöht die Sicherheit, denn bei Einleitung von hohen Kräften durch den Kolben wird die Übertragung auf die Wellenlagerung deutlich verringert.The weight is further reduced, in which two shaft journals are arranged on the piston, between which there is a cavity. The piston wall can be made thin and with low material costs, if more webs are used for stiffening. Finally, a development proposes to provide a release structure between shaft bearing and piston. It increases safety, because when high forces are introduced by the piston, transmission to the shaft bearing is significantly reduced.
Anhand eines Ausführungsbeispiels und seiner Weiterbildungen soll die Erfindung erläutert und die Darstellung ihrer Vorteile vertieft werden. Es zeigen:
- Fig. 1: :
- Schnitt durch eine Wälzkolbenvakuumpumpe.
- Fig. 2: :
- Axialer Schnitt durch eine Anordnung aus Welle und Kolben.
- Fig. 3:
- Schnitt durch einen Kolben senkrecht zur Achse, entlang der Linie I-I'.
- Fig. 4:
- Schnitt entlang der Kolbenachse, entlang der Linie II-II'.
- Fig. 5:
- Schnitt durch einen Kolben senkrecht zur Achse, entlang der Linie III-III'.
- Fig. 1:
- Section through a Roots vacuum pump.
- 2:
- Axial section through an arrangement of shaft and piston.
- 3:
- Section through a piston perpendicular to the axis, along the line I-I '.
- 4:
- Section along the piston axis, along the line II-II '.
- Fig. 5:
- Section through a piston perpendicular to the axis, along the line III-III '.
Einen Schnitt entlang der Achsen einer Wälzkolbenvakuumpumpe zeigt
Beide Wellen stützen sich durch Lageranordnungen drehbar in den Lagerschilden ab. Im ersten Lagerschild befinden sich das Loslager 22 der ersten Welle und das Loslager 26 der zweiten Welle. Im zweiten Lagerschild befinden sich das Festlager 24 der ersten Welle und das Festlager 28 der zweiten Welle.Both shafts are supported by bearing arrangements rotatably in the end shields. In the first bearing plate are the floating bearing 22 of the first shaft and the movable bearing 26 of the second shaft. In the second bearing plate are the fixed bearing 24 of the first shaft and the bearing 28 of the second shaft.
Auf der dem Pumpraum abgewandten Seite des ersten Lagerschildes ist ein Getrieberaum 3 vorgesehen, in den die Enden von erster und zweiter Welle hineinragen. Auf den Wellenenden sitzen ein erstes und ein zweites Synchronrad 18 und 20, welche die Drehung der ersten Wellen auf die zweite Welle übertragen, so dass diese sich mit gleicher Drehzahl aber gegenläufig dreht. Eine erste Schleuderscheibe 30 taucht in einen Schmiermittelvorrat und verteilt das Schmiermittel im Getrieberaum.On the side facing away from the pump chamber side of the first bearing plate, a
Auf der dem Pumpraum abgewandten Seite des zweiten Lagerschildes befindet sich ein Zwischenraum 8. Dieser wird von der ersten Welle durchsetzt, während die zweite Welle in ihm endet. Auf ihrem Ende ist eine zweite Schleuderscheibe 32 angeordnet, die ebenfalls in einem Schmiermittelvorrat eintaucht und eine Verteilung des Schmiermittels im Zwischenraum bewirkt.On the side facing away from the pump chamber side of the second bearing plate is a
Das den Zwischenraum durchsetzende Ende der ersten Welle endet im Motorgehäuse 6. Dort sind auf dem Wellenende Innenmagnete 44 befestigt. Das Wellenende mit den Innenmagneten ist von einem Spalttopf 40 umgeben, der mittels eines Spalttopfflansches am Gehäuse luftdicht angebracht ist. Ein Magneträger 48 trägt Außenmagnete 46, die mit den Innenmagneten kraft- und drehungsübertragend zusammenwirken. Der Magnetträger ist auf einer Motorwelle 50 angeordnet, welche in einem Motorlager 52 gelagert ist. Die ebenfalls auf der Motorwelle angeordneten Motormagnete 54 wirken mit Spulen 56 zusammen um elektrische Energie in mechanische Drehung umzusetzen. Spulen und Motormagnete bilden den Antrieb der Wälzkolbenpumpe.The intermediate space passing through the end of the first shaft terminates in the
Die Kolben der
Ein Schnitt entlang der Wellenachse ist in
Im Inneren des Kolbens befindet sich zwischen den Wellenzapfen und entlang der Achse der Kernbereich 58. In diesem Kernbereich ist erfindungsgemäß der Hohlraum 80 vorgesehen. Lediglich Randstege 70 an den Wellenzapfen und ein an der Innenseite der Kolbenwandung parallel zur Achse verlaufender Längssteg 66 sind in diesem Bereich angeordnet. Der Längssteg versteift die Kolbenwandung, so dass auch hier Fliehkräfte keinen negative Wirkung entfalten können. Eine zusätzliche Versteifung ergibt sich aus dem Mittelsteg 68. Alle Stege 64, 66 und 68 ermöglichen es, die Kolbenwandung 60 möglichst dünn und damit leicht zu gestalten.Inside the piston is located between the shaft journal and along the axis of the
In einem zur Achse senkrechten Abschnitt der Kolbenwandung ist eine Außenöffnung 72 vorgesehen. Da der Innenraum 82 des Kolbens einen ungeteilten Hohlraum darstellt, ermöglicht die Außenöffnung, den Kolben mit den Wellenzapfen als ein Gussteil herzustellen. Dies ist eine sehr kostengünstige Bauweise. Füllmaterial, welches während des Gießens den Innenraum des Kolbens frei von Material hält, wird durch die Außenöffnung entnommen. Diese Öffnung wird in der zusammengebauten Wälzkolbenvakuumpumpe durch einen Stopfen oder ähnliches verschlossen. Vorteilhaft ist es, mehrere Außenöffnungen, vorzugsweise vier, vorzusehen, da dies die Lagerung des Gusskerns vereinfacht und präzisiert.In an axis perpendicular to the axis portion of the piston wall, an
Ein Schnitt quer zur Achse entlang der Linie I-I' ist in
Ein Schnitt entlang der Achse und entlang der Linie II-II' ist in
Einen Schnitt entlang der Linie III-III' auf Höhe des Wellenzapfens 63 zeigt
Claims (4)
- A Roots vacuum pump comprising a shaft (10, 14); a piston (12, 16) connected to said shaft; a drive (54, 56) setting the shaft into rotation; and a shaft bearing (22, 24, 26, 28),
wherein a single-piece cast part comprises the piston (12, 16) and two shaft pins (62, 63) arranged at the ends of the piston (12, 16),
characterized in that
at least one hollow space (80) is provided in the piston (12, 16) and at least one elongate web (66) is arranged between the shaft pins (62, 63). - A Roots vacuum pump in accordance with one of the preceding claims, characterized in that the piston has an undivided and hollow inner space (82) which comprises the hollow space (80).
- A Roots vacuum pump in accordance with claim 2, characterized in that webs (64, 66, 68) are provided in the inner space (82).
- A Roots vacuum pump in accordance with any one of the preceding claims, characterized in that it comprises a release structure (74), in which a plurality of radial webs (76) alternate with end-face openings (78) in the peripheral direction of the shaft (10, 14), between the shaft bearing (22, 24, 26, 28) and the piston (12, 16).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008060540A DE102008060540A1 (en) | 2008-12-04 | 2008-12-04 | Roots |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2194275A2 EP2194275A2 (en) | 2010-06-09 |
EP2194275A3 EP2194275A3 (en) | 2014-09-03 |
EP2194275B1 true EP2194275B1 (en) | 2018-08-22 |
Family
ID=41796160
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP09014528.5A Not-in-force EP2194275B1 (en) | 2008-12-04 | 2009-11-20 | Lobe type vacuum pump |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP2194275B1 (en) |
DE (1) | DE102008060540A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2490517B (en) | 2011-05-04 | 2017-12-13 | Edwards Ltd | Rotor for pump |
DE102014104161A1 (en) * | 2014-03-26 | 2015-10-01 | Pfeiffer Vacuum Gmbh | Roots |
DE102014107536A1 (en) | 2014-05-28 | 2015-12-03 | Pfeiffer Vacuum Gmbh | vacuum pump |
EP3064775B1 (en) | 2015-03-02 | 2022-01-26 | Pfeiffer Vacuum GmbH | Vacuum pump and method for detecting a contact between at least one rotor and a stator of a vacuum pump |
GB2571792B (en) * | 2018-03-09 | 2020-12-16 | Edwards Ltd | A vacuum pump with a pressure relief valve |
US11815095B2 (en) * | 2019-01-10 | 2023-11-14 | Elival Co., Ltd | Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2048249A (en) * | 1933-08-22 | 1936-07-21 | Adolf Schnurle | Rotary piston machine |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE882746C (en) * | 1941-04-11 | 1953-07-13 | Auto Union A G | Roots blower with runners made of light metal and provided with steel shafts |
GB809445A (en) * | 1954-02-27 | 1959-02-25 | Heraeus Gmbh W C | Improvements in or relating to rotary high vacuum pumps |
GB891524A (en) * | 1957-04-08 | 1962-03-14 | Expl Du Generatuer A Piston Li | Improved pumps, motors and driving units of the rotor type |
US3302868A (en) * | 1964-04-02 | 1967-02-07 | Leybolds Nachfolger E | Fluid handling apparatus for use as vacuum pump |
JP3836160B2 (en) * | 1998-02-13 | 2006-10-18 | 株式会社荏原製作所 | Rotor for vacuum pump and method for manufacturing the same |
GB0228641D0 (en) * | 2002-12-06 | 2003-01-15 | Adams Ricardo Ltd | Improvements in or relating to rotors for rotary machines |
-
2008
- 2008-12-04 DE DE102008060540A patent/DE102008060540A1/en not_active Withdrawn
-
2009
- 2009-11-20 EP EP09014528.5A patent/EP2194275B1/en not_active Not-in-force
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2048249A (en) * | 1933-08-22 | 1936-07-21 | Adolf Schnurle | Rotary piston machine |
Also Published As
Publication number | Publication date |
---|---|
DE102008060540A1 (en) | 2010-06-10 |
EP2194275A2 (en) | 2010-06-09 |
EP2194275A3 (en) | 2014-09-03 |
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