EP1905120A1 - Coaxial automatic impedance adaptor - Google Patents
Coaxial automatic impedance adaptorInfo
- Publication number
- EP1905120A1 EP1905120A1 EP06778882A EP06778882A EP1905120A1 EP 1905120 A1 EP1905120 A1 EP 1905120A1 EP 06778882 A EP06778882 A EP 06778882A EP 06778882 A EP06778882 A EP 06778882A EP 1905120 A1 EP1905120 A1 EP 1905120A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- probes
- adapter according
- transmission line
- coaxial
- impedance adapter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/04—Coupling devices of the waveguide type with variable factor of coupling
Definitions
- the present invention relates to the field of electronics and communication technologies.
- the present invention relates more particularly to a coaxial automatic impedance adapter.
- the displacement of the divers according to the two axes is carried out by means of piloted motors.
- the plunger For displacement along the axis Oy, ie perpendicular to the axis of the coaxial line, the plunger approaches or moves away from the central conductor locally varying the distance between the central line and the plunger, that is to say say the characteristic impedance of the line.
- the tuner has an impedance equal to 50 ⁇ .
- These automatic coaxial tuners have the major advantage of being calibrated before measuring the components.
- the input and output of the tuner are connected to a vector network analyzer.
- a control software of the vector network analyzer and the tuner makes it possible to acquire the dispersion parameters of the tuner at several frequencies.
- Calibration of the tuner being completed it is possible to very quickly characterize a power component and / or noise easily without assembly and disassembly of the measurement system.
- Coaxial tuners have excellent performance but these are quickly reduced by the insertion losses of the tuner related to the transition between the coaxial connector and the central conductor. The higher the losses at the transition, the lower the modulus of the reflection coefficient of the load impedance achieved. Therefore, it will not be possible to synthesize all the impedances of the Smith chart.
- Coaxial tuners have the advantage of being broadband and allowing the passage of DC voltages, but loss of insertions reduces their performance at high frequency. These tuners are also very bulky and heavy which presents a great disadvantage when the components are measured directly on "wafer” (cake) using microwave spikes. Indeed, given the size of the tuner, the latter is connected to the component by a cable with losses. The distance separating the tuner from the component is increased and the insertion losses between the tuner and the component as well. Under these conditions, the dead zone is then larger. In order to reduce this area, a pre-adaptation system is placed between the tip and the tuner. However, this device does not completely eliminate the limitation mentioned above. In addition, this pre-adaptation is very rigid. This considerably increases the vibrations, in the plane of the microwave peaks, induced by the displacement of the blocks.
- tuners have, as we have already mentioned, a translational movement of the blocks along the axis Ox.
- the rapid movement of these blocks (trolley + engine + plunger), whose mass is important, causes significant inertia movements and therefore vibrations.
- these vibrations quickly degrade the quality of the contacts between the tips and the component and therefore the quality of the measurement.
- this effect can cause the destruction of this one and spikes especially if the component is polarized at high voltage.
- the present invention intends to overcome the drawbacks of the prior art by proposing a coaxial tuner with double "slug” (double probes).
- This new impedance adapter best meets the characterization of power and noise transistors.
- This tuner is designed to operate for wide frequency bands and has only a lateral translational movement along the axis Ox.
- the present invention relates, in its most general sense, a coaxial impedance adapter having two probes (“slugs”) and only has a lateral translational movement along the Ox axis.
- a coaxial impedance adapter for a transmission line comprising in the longitudinal direction a conductive central line Ox axis, the adapter having two probes in the transmission line adapted to move according to a translational movement along the axis Ox, and two motors driving in translation, each, one of said probes, said motors being isolated from the probes by elastic couplings.
- said impedance adapter operates in the frequency band extending from 0.25 GHz to 240 GHz.
- said probes are of circular section and slide longitudinally in the transmission line. They adapt particularly well to transmission guides of circular section. In the case where these guides are of rectangular section or any other shape, probes of identical section will preferably be chosen in order to "fill" the zone of the waveguide.
- "resonator" probes which comprise a stack of metal layers separated by at least one insulating layer in the longitudinal direction, or "broadband” probes formed of metal cylinders whose faces side have a recess centered towards the inside of the cylinder.
- a dielectric is deposited on the center line of the impedance adapter or on the slugs (outer and inner diameter). This is to limit short circuits and improve microwave performance.
- the probes are interchangeable. It is noted that motors are isolated from the rest of the system via resilient couplings to minimize vibration.
- the principle of the double slug tuner is based on the displacement of two ends of a characteristic impedance line different from 50 ⁇ inside a cylinder closed on both sides by standard connectors.
- the principle of this tuner is based on the displacement of two impedance characteristic slugs different from 50 ⁇ in a 50 ohm coaxial line.
- said probes have a characteristic impedance different from the characteristic impedance of said transmission line, which is 50 ohms in many waveguides.
- the first slug locally decreases the impedance of the line by changing the value of the diameter D of the outer conductor.
- Automatic piloting is provided, for example by computer and / or electronic means, probes to allow accurate and reproducible positioning thereof.
- each probe is secured to a carriage by the elastic coupling, the adapter further comprising motors adapted to drive the carriages in translation in the longitudinal direction of the transmission line. The motors are then driven automatically.
- each motor is a rotary motor which rotates a precision ground screw driving a corresponding translational carriage to which an associated probe is connected.
- said motors are optimized in order to have low travel times as well as precise control of the acceleration and servo profiles.
- one of the so-called pre-adaptation probes is arranged to move over a distance of ⁇ / 2, where ⁇ is the working wavelength, and the second probe is arranged to move over a distance of ⁇ / 2 relative to said pre-adaptation probe.
- the impedance adapter has a reflection coefficient greater than 0.98 at 10 GHz.
- the advantages of the coaxial automatic tuner according to the present invention are as follows: - Microwave performance significantly better than existing systems. Indeed, according to the present invention, the system offers a very high flexibility of impedance synthesis with a high reflection coefficient.
- the frequency band that can be realized for coaxial tuners ranges from 0.25 GHz to 240 GHz.
- the proposed system proposes a very high repeatability with a high reflection coefficient - a single displacement along the transmission line exists whereas in the existing systems, there are two movements of which one of them is perpendicular to the line of transmission (with displacements very close to this line).
- the moving probe In conventional systems, the moving probe must approach the suspended central line (a few tens of microns) and this over a long distance. This causes great fragility. In our system, this problem is totally avoided.
- the tuner can even operate on an inclined plane without loss of efficiency.
- the deposition of a dielectric improves performance and avoid short circuits.
- the proposed system is much more stable (from a vibratory point of view) than conventional systems. Indeed, the motors are isolated from the rest of the system via elastic couplings. This is a very important point when measuring under spikes.
- the motors and the associated electronics have been optimized to provide low travel times and accurate control of acceleration and servo profiles (to minimize vibration problems). Under these conditions, the cost of implementation is significantly lower than existing systems.
- the system according to the invention allows a great strength of the central line. Indeed, it is maintained at a constant distance: there is no suspended line as in the tuners according to the prior art.
- the tuner according to the invention does not pose a problem for transport.
- the tuner according to the invention supports high polarization voltages thanks to the design of the tuner.
- FIG. impedance according to the prior art illustrates an exemplary arrangement of the probes in an impedance adapter according to the present invention
- FIG. 3 illustrates the operation of an impedance adapter according to the invention
- Figure 4 shows two examples of interchangeable probes used in the present invention.
- This tuner is based on the displacement of two characteristic impedance slugs different from 50 ⁇ in a 50 ohm coaxial line.
- the characteristic impedances of coaxial slugs are given by relation (1) below.
- This impedance adapter is shown in Figure 2.
- ⁇ r is the dielectric constant of the medium.
- FIG. 2 shows the cylindrical transmission line 4 comprising in the longitudinal direction and at its center a conductive central line 5.
- the transmission line 4 has a diameter of 6.91 mm and the central line 5 has a diameter of 3 mm. .
- the set "transmission line + central line" thus composed has a characteristic impedance of 50 ohms.
- the probes (“slugs”) 6a and 6b are cylindrical in shape of length 3.75 mm and outer diameter slightly smaller than the internal diameter of the transmission line, about 6.9 mm. They have a longitudinal bore at its center of diameter 3.1 mm allowing the passage of the central line 5. The probes can easily slide along the center line (see the arrows in Figure 2). Each probe has a characteristic impedance significantly different from that of the transmission line, in this case by the aforementioned dimensions, the impedance of the probes is about 2 ohms.
- Figure 4 illustrates two examples of probes that can be used in pairs.
- the probe of FIG. 4a is a "resonator" probe of cylindrical shape and composed in the longitudinal direction of two metal layers separated by an insulating layer. This arrangement reduces the frequency band so that the probe behaves like a resonator.
- the advantage of reducing the frequency band at which the slug takes effect lies in the ability to control the value of the reflection coefficient presented to the component under test not at one frequency but at several.
- the probe of FIG. 4b is made of cylindrical metal having at both end faces a progressive recess from the outside towards the center, where the conductive central line 5 slides. This recess has the effect of increasing the band of frequency of the probe. The latter behaves like a broadband probe.
- the slug locally varies the impedance of the line by changing the value of the diameter D of the outer conductor. This local variation of impedance modifies the reflection coefficient of the tuner so the impedance of it.
- the impedance of the tuner moves on a constant TOS (steady state wave) circle centered on Z 0 .
- a displacement of ⁇ / 2 makes it possible to describe the whole circle on the Smith chart.
- the radius of the circle, on the Smith chart varies. It is then impossible to cover the entire abacus with a single slug with non-parametric characteristics.
- the impedance of the tuner no longer moves on a circle with constant TOS. If we move the first slug 6b by a distance ⁇ / 2 along the conductor, we describe the entire circle on the chart around the pre-adaptation impedance.
- the adapter made was automated using two stepper motors of very high precision associated with an encoding system to achieve the removal of slugs.
- the motors rotate, each, a precision ground screw that drives a carriage.
- Each carriage mounted on a screw moves a slug.
- the tuner could be placed closer to the component under test, thus not affecting the size of the dead zone.
- automatic tuner calibration can be used to characterize a component in minutes and accurately.
- the motor (1) is linear type allowing, unlike rotary engines, to limit the vibrations generated during its operation.
- the probes 6a and 6b are each connected to a block "carriage 2 + motor 1 + guide 3" by a coupling arm 7 provided with elastic vibration absorption means. Vibration absorption is performed at the coupling arm by means of a tongue of flexible material sandwiched between the two metal parts located respectively to the block "motor + carriage + guide” and to the probe.
- the outer conductor 4 of the transmission line is provided with a slot in the longitudinal direction of the line.
Landscapes
- Control Of Motors That Do Not Use Commutators (AREA)
- Measuring Leads Or Probes (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
Description
ADAPTEUR D' IMPEDANCE AUTOMATIQUE COAXIAL AUTOMATIC COAXIAL IMPEDANCE ADAPTER
La présente invention se rapporte au domaine de l'électronique et des technologies de communication. La présente invention se rapporte plus particulièrement à un adaptateur d'impédance automatique coaxial.The present invention relates to the field of electronics and communication technologies. The present invention relates more particularly to a coaxial automatic impedance adapter.
L'art antérieur connaît déjà, par le brevet américain US 3 792 385 (« RCA »), un tuner (adaptateur d'impédance) magnétique à sonde coaxial. Une sonde magnétique d'adaptation déplaçable couplée de façon capacitive au conducteur central et au conducteur extérieur d'une ligne de transmission électromagnétique est utilisée pour fournir une impédance de ligne de transmission en réponse à un champ magnétique appliqué.The prior art already knows, from US Pat. No. 3,792,385 ("RCA"), a magnetic tuner (impedance adapter) with a coaxial probe. A displaceable adaptive magnetic probe capacitively coupled to the center conductor and the outer conductor of an electromagnetic transmission line is used to provide a transmission line impedance in response to an applied magnetic field.
L'art antérieur connaît également, par le brevet américain US 6 297 649 (« Focus Microwaves »), un tuner (adaptateur d'impédance) coaxial capable de réaliser de la réjection d'harmoniques.The prior art also knows, from US Pat. No. 6,297,649 ("Focus Microwaves"), a coaxial tuner (impedance adapter) capable of performing harmonic rejection.
Les deux principaux fabricants d'adaptateurs d'impédance : « Maury Microwave Corporation » et « Focus Microwaves » (marques déposées) utilisent' un ou plusieurs plongeurs qui se déplacent indépendamment l'un par rapport à l'autre suivant l'axe Ox et Oy comme l'indiquent les flèches de la figure 1.The two main manufacturers of impedance adapters: "Maury Microwave Corporation" and "Focus Microwaves" (registered trademarks) use 'one or more divers who move independently of each other along the axis Ox and Oy as indicated by the arrows in Figure 1.
Le déplacement des plongeurs suivant les deux axes est réalisé par l'intermédiaire de moteurs pilotés.The displacement of the divers according to the two axes is carried out by means of piloted motors.
Pour le déplacement suivant l'axe Ox, c'est-à- dire dans l'axe de la ligne coaxiale, tout le bloc (moteurs + plongeur) se déplace grâce à un axe de guidage. Un logiciel de commande permet d'éviter les collisions entre les deux blocs puisqu'ils se déplacent sur le même axe de guidage .For movement along the axis Ox, that is to say in the axis of the coaxial line, the entire block (motors + plunger) moves through a guide axis. A control software avoids collisions between the two blocks since they move on the same guide axis.
Pour le déplacement suivant l'axe Oy, soit perpendiculairement à l'axe de la ligne coaxiale, le plongeur s'approche ou s'éloigne du conducteur central faisant varier localement la distance entre la ligne centrale et le plongeur, c'est-à-dire l'impédance caractéristique de la ligne. Lorsque le ou les plongeur(s) se trouve (nt) le plus éloigné(s) possible de la ligne centrale (plongeurs sortis), le tuner présente une impédance égale à 50Ω.For displacement along the axis Oy, ie perpendicular to the axis of the coaxial line, the plunger approaches or moves away from the central conductor locally varying the distance between the central line and the plunger, that is to say say the characteristic impedance of the line. When the plunger (s) is (are) as far as possible from the center line (plungers removed), the tuner has an impedance equal to 50Ω.
Ces tuners coaxiaux automatiques présentent l'avantage majeur de pouvoir être étalonnés avant la mesure des composants. L'entrée et la sortie du tuner sont connectées à un analyseur de réseaux vectoriel. Pour plusieurs centaines de positions, un logiciel de commande de l'analyseur de réseaux vectoriel et du tuner permet de faire l'acquisition des paramètres de dispersion du tuner à plusieurs fréquences. Le calibrage du tuner étant terminé, il est possible de caractériser très rapidement un composant en puissance et/ou en bruit aisément sans montage et démontage du système de mesure. Les tuners coaxiaux présentent d'excellentes performances mais ces dernières sont rapidement réduites par les pertes d'insertion du tuner liées à la transition entre le connecteur coaxial et le conducteur central. Plus les pertes au niveau de la transition sont importantes, plus le module du coefficient de réflexion de l'impédance de charge réalisée est faible. Par conséquent, il ne sera pas possible de synthétiser toutes les impédances de l'abaque de Smith.These automatic coaxial tuners have the major advantage of being calibrated before measuring the components. The input and output of the tuner are connected to a vector network analyzer. For several hundred positions, a control software of the vector network analyzer and the tuner makes it possible to acquire the dispersion parameters of the tuner at several frequencies. Calibration of the tuner being completed, it is possible to very quickly characterize a power component and / or noise easily without assembly and disassembly of the measurement system. Coaxial tuners have excellent performance but these are quickly reduced by the insertion losses of the tuner related to the transition between the coaxial connector and the central conductor. The higher the losses at the transition, the lower the modulus of the reflection coefficient of the load impedance achieved. Therefore, it will not be possible to synthesize all the impedances of the Smith chart.
On pourra remarquer sur un abaque de Smith qu'il y a des « zones mortes » : la zone comprise entre le « bord » de l'abaque et le cercle d'impédance à une fréquence donnée est dite « zone morte » . Les impédances présentes dans cette zone ne seront pas réalisables à la fréquence donnée.It can be seen on a Smith chart that there are "dead zones": the area between the "Edge" of the abacus and the impedance circle at a given frequency is called "dead zone". Impedances in this area will not be achievable at the given frequency.
Les tuners coaxiaux présentent l'avantage d'être large bande et de permettre le passage des tensions continues mais les pertes d'insertions réduisent leurs performances à haute fréquence. Ces tuners sont également très volumineux et lourds ce qui présente un grand désavantage lorsque les composants sont mesurés directement sur « wafer » (galette) à l'aide de pointes hyperfréquences . Effectivement, étant donné la taille du tuner, ce dernier est relié au composant par un câble présentant des pertes. La distance séparant le tuner du composant est augmentée et les pertes d'insertion entre le tuner et le composant également. Dans ces conditions, la zone morte est alors plus importante. Afin de réduire cette zone, un système de préadaptation est placé entre la pointe et le tuner. Cependant ce dispositif ne permet pas de supprimer totalement la limitation précédemment citée. De plus, cette préadaptation est très rigide. Ceci augmente considérablement les vibrations, dans le plan des pointes hyperfréquence , induites par le déplacement des blocs.Coaxial tuners have the advantage of being broadband and allowing the passage of DC voltages, but loss of insertions reduces their performance at high frequency. These tuners are also very bulky and heavy which presents a great disadvantage when the components are measured directly on "wafer" (cake) using microwave spikes. Indeed, given the size of the tuner, the latter is connected to the component by a cable with losses. The distance separating the tuner from the component is increased and the insertion losses between the tuner and the component as well. Under these conditions, the dead zone is then larger. In order to reduce this area, a pre-adaptation system is placed between the tip and the tuner. However, this device does not completely eliminate the limitation mentioned above. In addition, this pre-adaptation is very rigid. This considerably increases the vibrations, in the plane of the microwave peaks, induced by the displacement of the blocks.
Ces tuners ont, comme nous l'avons déjà évoqué, un mouvement de translation des blocs suivant l'axe Ox. Le déplacement rapide de ces blocs (chariot + moteur + plongeur), dont la masse est importante, provoque des mouvements d'inertie importants et donc des vibrations. Or, en mesure sous pointes, ces vibrations dégradent rapidement la qualité des contacts entre les pointes et le composant et donc de la qualité de la mesure. Lorsque le composant est sous test, cet effet peut engendrer la destruction de celui-ci et des pointes surtout si le composant est polarisé à forte tension.These tuners have, as we have already mentioned, a translational movement of the blocks along the axis Ox. The rapid movement of these blocks (trolley + engine + plunger), whose mass is important, causes significant inertia movements and therefore vibrations. However, in measurement under spikes, these vibrations quickly degrade the quality of the contacts between the tips and the component and therefore the quality of the measurement. When the component is under test, this effect can cause the destruction of this one and spikes especially if the component is polarized at high voltage.
On connaît également, par les brevets US-2 403 252 et US-3 792 385, des tuners manuels d'adaptation d'impédance dont le fonctionnement d'ajustement est très fastidieux, notamment par l'utilisation de vis à desserrer pour déplacer un élément d'adaptation.Also known from US Pat. No. 2,403,252 and US Pat. No. 3,792,385 are manual impedance matching tuners whose adjustment operation is very tedious, in particular by the use of screws to be loosened in order to displace an impedance. adaptation element.
On connaît également, par les documents US-6 297 649 et US-2003/0122633, des adaptateurs d'impédance comprenant deux modules type plongeurs tels que décrits précédemment. Ces plongeurs sont des éléments saillants venant occuper une partie, généralement haute, de la ligne de transmission. De tels plongeurs occupent inégalement l'espace de la ligne de transmission et peuvent provoquer des fuites de charge. En outre, la dissymétrie engendrée par ces plongeurs n'est pas propice à une utilisation de l'adaptateur sur un plan incliné.Document US-6,297,649 and US-2003/0122633 also disclose impedance adapters comprising two plunger type modules as described above. These divers are salient elements coming to occupy a part, generally high, of the transmission line. Such divers unequally occupy the space of the transmission line and can cause load leaks. In addition, the dissymmetry generated by these divers is not conducive to use of the adapter on an inclined plane.
Les solutions décrites dans ces deux documents ainsi que la solution décrite dans le document JP-57063901 reposent sur l'utilisation de chariots mobiles équipés de moteurs. Une problématique évoquée précédemment subsiste alors : les vibrations engendrées par le fonctionnement des moteurs sont susceptibles d'altérer les sondes à l'intérieur de la ligne de transmission ou de rendre inopérante toute mesure hyperfréquence à l'aide de pointes.The solutions described in these two documents as well as the solution described in document JP-57063901 are based on the use of mobile carts equipped with motors. A previously mentioned problem then remains: the vibrations generated by the operation of the motors are likely to alter the probes inside the transmission line or render inoperative any microwave measurement using spikes.
La présente invention entend remédier aux inconvénients de l'art antérieur en proposant un tuner coaxial à double « slug » (à double sondes). Ce nouvel adaptateur d'impédance répond au mieux à la caractérisation des transistors de puissance et de bruit. Ce tuner est prévu pour fonctionner pour des larges bandes de fréquence et ne présente qu'un mouvement de translation latéral suivant l'axe Ox. A cet effet, la présente invention concerne, dans son acception la plus générale, un adaptateur d'impédance coaxial comportant deux sondes (« slugs ») et ne présente qu'un mouvement de translation latéral suivant l'axe Ox.The present invention intends to overcome the drawbacks of the prior art by proposing a coaxial tuner with double "slug" (double probes). This new impedance adapter best meets the characterization of power and noise transistors. This tuner is designed to operate for wide frequency bands and has only a lateral translational movement along the axis Ox. For this purpose, the present invention relates, in its most general sense, a coaxial impedance adapter having two probes ("slugs") and only has a lateral translational movement along the Ox axis.
Selon un mode de réalisation, il s'agit d'un adaptateur d'impédance coaxial pour ligne de transmission comprenant dans le sens longitudinal une ligne centrale conductrice d'axe Ox, l'adaptateur comportant deux sondes dans la ligne de transmission aptes à se déplacer selon un mouvement de translation suivant l'axe Ox, et deux moteurs entraînant en translation, chacun, une desdites sondes, lesdits moteurs étant isolés des sondes par des accouplements élastiques. On obtient ainsi à la fois un dispositif efficace pour parcourir l'ensemble des impédances de l'abaque de Smith et un adaptateur stable quant aux vibrations émises par les moteurs .According to one embodiment, it is a coaxial impedance adapter for a transmission line comprising in the longitudinal direction a conductive central line Ox axis, the adapter having two probes in the transmission line adapted to move according to a translational movement along the axis Ox, and two motors driving in translation, each, one of said probes, said motors being isolated from the probes by elastic couplings. This provides both an efficient device to cover all the impedances of the Smith chart and a stable adapter for the vibrations emitted by the motors.
Avantageusement, ledit adaptateur d'impédance fonctionne dans la bande de fréquence s 'étendant de 0.25 GHz à 240 GHz.Advantageously, said impedance adapter operates in the frequency band extending from 0.25 GHz to 240 GHz.
Selon un mode de réalisation, lesdites sondes sont de section circulaire et coulissent longitudinalement, dans la ligne de transmission. Elles s'adaptent particulièrement bien à des guides de transmission de section circulaire. Dans le cas où ces guides sont à section rectangulaire ou tout autre forme, on choisira de préférence des sondes de section identique afin de « remplir » la zone du guide d'ondes.According to one embodiment, said probes are of circular section and slide longitudinally in the transmission line. They adapt particularly well to transmission guides of circular section. In the case where these guides are of rectangular section or any other shape, probes of identical section will preferably be chosen in order to "fill" the zone of the waveguide.
Selon les application souhaitées, on recherche des sondes « résonateur » comprenant un empilement de couches métalliques séparées par au moins une couche isolante dans le sens longitudinal, ou des sondes « large bande » formées des cylindres métalliques dont les faces latérales présentent un renfoncement centré vers l'intérieur du cylindre. En jouant sur des combinaisons de sondes, grâce à leur interchangeabilité, l'on peut obtenir une efficacité accrue dans le recouvrement des impédances de l'abaque Smith tout en évitant des fuites de charge ou autre interférence hyperfréquence .According to the desired applications, "resonator" probes are sought which comprise a stack of metal layers separated by at least one insulating layer in the longitudinal direction, or "broadband" probes formed of metal cylinders whose faces side have a recess centered towards the inside of the cylinder. By playing on probe combinations, thanks to their interchangeability, it is possible to obtain an increased efficiency in the recovery of the impedances of the Smith chart while avoiding load leaks or other microwave interference.
Afin d'éviter des courts-circuits, un diélectrique est déposé sur la ligne centrale de l'adaptateur d'impédance ou sur les slugs (diamètre extérieur et intérieur) . Ceci afin de limiter les courts- circuits et d'améliorer les performances hyperfréquences .In order to avoid short-circuits, a dielectric is deposited on the center line of the impedance adapter or on the slugs (outer and inner diameter). This is to limit short circuits and improve microwave performance.
Avantageusement, les sondes (« slugs ») sont interchangeables . On note que les moteurs sont isolés du reste du système via des accouplements élastiques afin de minimiser les vibrations.Advantageously, the probes ("slugs") are interchangeable. It is noted that motors are isolated from the rest of the system via resilient couplings to minimize vibration.
Selon un aspect, le principe du tuner double slugs est basé sur le déplacement de deux bouts de ligne d'impédance caractéristique différente de 50 Ω à l'intérieur d'un cylindre fermé de part et d'autre par des connecteurs standard.In one aspect, the principle of the double slug tuner is based on the displacement of two ends of a characteristic impedance line different from 50 Ω inside a cylinder closed on both sides by standard connectors.
Selon un second aspect, le principe de ce tuner est basé sur le déplacement de deux slugs d'impédance caractéristique différente de 50 Ω dans une ligne coaxiale 50 ohms.According to a second aspect, the principle of this tuner is based on the displacement of two impedance characteristic slugs different from 50 Ω in a 50 ohm coaxial line.
Généralement il est donc choisi que lesdites sondes ont une impédance caractéristique différente de l'impédance caractéristique de ladite ligne de transmission, laquelle est de 50 ohms dans de nombreux guides d'onde.Generally, it is therefore chosen that said probes have a characteristic impedance different from the characteristic impedance of said transmission line, which is 50 ohms in many waveguides.
Avantageusement, le premier slug fait diminuer localement l'impédance de la ligne en changeant la valeur du diamètre D du conducteur extérieur. On prévoit un pilotage automatique, par exemple par des moyens informatiques et/ou électroniques, des sondes pour permettre un positionnement précis et reproductible de celles-ci. Dans ce dessein, chaque sonde est solidaire d'un chariot par l'accouplement élastique, l'adaptateur comprenant, en outre, des moteurs aptes à entraîner les chariots en translation dans le sens longitudinal de la ligne de transmission. Les moteurs sont alors pilotés automatiquement.Advantageously, the first slug locally decreases the impedance of the line by changing the value of the diameter D of the outer conductor. Automatic piloting is provided, for example by computer and / or electronic means, probes to allow accurate and reproducible positioning thereof. For this purpose, each probe is secured to a carriage by the elastic coupling, the adapter further comprising motors adapted to drive the carriages in translation in the longitudinal direction of the transmission line. The motors are then driven automatically.
Eventuellement, lesdits moteurs sont des moteurs linéaires pas-à-pas ou piézoélectriques et les chariots sont montés sur des guides parallèles à la ligne de transmission et entraînés par les moteurs. Selon une alternative, chaque moteur est un moteur rotatif qui met en rotation une vis rectifiée de précision entraînant un chariot correspondant en translation auquel est reliée une sonde associée.Optionally, said motors are step-by-step or piezoelectric linear motors and the carriages are mounted on guides parallel to the transmission line and driven by the motors. According to an alternative, each motor is a rotary motor which rotates a precision ground screw driving a corresponding translational carriage to which an associated probe is connected.
Avantageusement, lesdits moteurs sont optimisés afin de présenter des temps de déplacements faibles ainsi qu'un contrôle précis des profils d'accélérations et d'asservissements.Advantageously, said motors are optimized in order to have low travel times as well as precise control of the acceleration and servo profiles.
En fonctionnement, l'une des sondes dite de pré-adaptation est agencée pour se déplacer sur une distance de λ/2, où λ est la longueur d'onde de travail, et la deuxième sonde est agencée pour se déplacer sur une distance de λ/2 relativement à ladite sonde de préadaptation.In operation, one of the so-called pre-adaptation probes is arranged to move over a distance of λ / 2, where λ is the working wavelength, and the second probe is arranged to move over a distance of λ / 2 relative to said pre-adaptation probe.
Selon un mode de réalisation, l'adaptateur d'impédance présente un coefficient de réflexion supérieur à 0,98 à 10 GHz.According to one embodiment, the impedance adapter has a reflection coefficient greater than 0.98 at 10 GHz.
Les avantages du tuner automatique coaxial selon la présente invention sont les suivants : - Des performances hyperfréquences nettement meilleures que les systèmes existants. En effet, selon la présente invention, Le système propose une très grande souplesse de synthèse d'impédance à fort coefficient de réflexion.The advantages of the coaxial automatic tuner according to the present invention are as follows: - Microwave performance significantly better than existing systems. Indeed, according to the present invention, the system offers a very high flexibility of impedance synthesis with a high reflection coefficient.
- La bande de fréquence pouvant être réalisée pour les tuners coaxiaux s'étend de 0.25 GHz à 240 GHz.- The frequency band that can be realized for coaxial tuners ranges from 0.25 GHz to 240 GHz.
- Possibilité d' interchanger aisément les slugs pour des applications spécifiques afin d'adapter les performances du tuner au regard des composants étudiés .- Ability to easily interchange slugs for specific applications to adapt tuner performance to the components studied.
- Le système proposé propose une très grande répétabilité à fort coefficient de réflexion - un seul déplacement selon la ligne de transmission existe alors que dans les systèmes existants, il y a deux mouvements dont l'un d'entre eux est perpendiculaire à la ligne de transmission (avec des déplacements très proches de cette ligne). - Une très forte robustesse par rapport aux systèmes existants. Dans les systèmes classiques, la sonde mobile doit s'approcher de la ligne centrale suspendue (à quelques dizaines de μm) et cela sur une longue distance. Cela provoque une grande fragilité. Dans notre système, ce problème est totalement éludé. Le tuner peut même fonctionner sur un plan incliné sans pertes d'efficacité. De plus, le dépôt d'un diélectrique permet d'améliorer les performances et d'éviter les courts-circuits. - Le système proposé est beaucoup plus stable (d'un point de vue vibratoire) que les systèmes classiques. En effet, les moteurs sont isolés du reste du système via des accouplements élastiques. Ceci est un point très important lors de mesures sous pointes.- The proposed system proposes a very high repeatability with a high reflection coefficient - a single displacement along the transmission line exists whereas in the existing systems, there are two movements of which one of them is perpendicular to the line of transmission (with displacements very close to this line). - A very strong robustness compared to existing systems. In conventional systems, the moving probe must approach the suspended central line (a few tens of microns) and this over a long distance. This causes great fragility. In our system, this problem is totally avoided. The tuner can even operate on an inclined plane without loss of efficiency. In addition, the deposition of a dielectric improves performance and avoid short circuits. - The proposed system is much more stable (from a vibratory point of view) than conventional systems. Indeed, the motors are isolated from the rest of the system via elastic couplings. This is a very important point when measuring under spikes.
- Masse des slugs très faible n'induisant pas de problème de centre de gravité mobile. - Le système de maintien des slugs (remplaçant le système de plongeurs des systèmes classiques) permet un positionnement précis ainsi qu'une très bonne reproductibilité.- Mass of very weak slugs not inducing a problem of mobile center of gravity. - The system of slugs maintenance (replacing the system of divers of the classic systems) allows a precise positioning as well as a very good reproducibility.
- Les moteurs et l'électronique associée ont été optimisés afin de présenter des temps de déplacements faibles ainsi qu'un contrôle précis des profils d'accélérations et d'asservissements (afin de minimiser les problèmes de vibrations). Dans ces conditions, le coût de réalisation est nettement plus faible que les systèmes existants.- The motors and the associated electronics have been optimized to provide low travel times and accurate control of acceleration and servo profiles (to minimize vibration problems). Under these conditions, the cost of implementation is significantly lower than existing systems.
Il n'y a pas de modification du centre de gravité grâce à la position des moteurs isolés des slugs et à la légèreté du système.There is no change in the center of gravity due to the position of motors isolated slugs and the lightness of the system.
Le système selon l'invention permet une grande robustesse de la ligne centrale. En effet, celle-ci est maintenue à distance constante : il n'y a pas de ligne suspendue comme dans les tuners selon l'art antérieur. Le tuner selon l'invention ne pose pas de problème pour le transport. - Le tuner selon l'invention supporte de fortes tensions de polarisation grâce à la conception du tuner.The system according to the invention allows a great strength of the central line. Indeed, it is maintained at a constant distance: there is no suspended line as in the tuners according to the prior art. The tuner according to the invention does not pose a problem for transport. The tuner according to the invention supports high polarization voltages thanks to the design of the tuner.
On comprendra mieux l'invention à l'aide de la description, faite ci-après à titre purement explicatif, d'un mode de réalisation de l'invention, en référence aux figures annexées : la figure 1 illustre un exemple d'adaptateur d'impédance selon l'art antérieur ; la figure 2 illustre un exemple d'agencement des sondes dans un adaptateur d'impédance selon la présente invention ; la figure 3 illustre le fonctionnement d'un adaptateur d'impédance selon l'invention ; et la figure 4 représente deux exemples de sondes interchangeables utilisées dans la présente invention.The invention will be better understood from the following description, given purely for explanatory purposes, of one embodiment of the invention, with reference to the appended figures: FIG. impedance according to the prior art; Fig. 2 illustrates an exemplary arrangement of the probes in an impedance adapter according to the present invention; FIG. 3 illustrates the operation of an impedance adapter according to the invention; and Figure 4 shows two examples of interchangeable probes used in the present invention.
Le principe de ce tuner est basé sur le déplacement de deux slugs d'impédance caractéristique différente de 50 Ω dans une ligne coaxiale 50 ohms. Les impédances caractéristiques des slugs coaxiaux sont données par la relation (1) ci-dessous. Cet adaptateur d'impédance est représenté Figure 2.The principle of this tuner is based on the displacement of two characteristic impedance slugs different from 50 Ω in a 50 ohm coaxial line. The characteristic impedances of coaxial slugs are given by relation (1) below. This impedance adapter is shown in Figure 2.
Où εr est la constante diélectrique du milieu.Where ε r is the dielectric constant of the medium.
La figure 2 montre la ligne de transmission 4 de forme cylindrique comprenant dans le sens longitudinal et en son centre une ligne centrale conductrice 5. La ligne de transmission 4 a un diamètre de 6,91 mm et la ligne centrale 5 un diamètre de 3 mm. L'ensemble « ligne de transmission + ligne centrale » ainsi composé présente une impédance caractéristique de 50 ohms.FIG. 2 shows the cylindrical transmission line 4 comprising in the longitudinal direction and at its center a conductive central line 5. The transmission line 4 has a diameter of 6.91 mm and the central line 5 has a diameter of 3 mm. . The set "transmission line + central line" thus composed has a characteristic impedance of 50 ohms.
Les sondes ( « slugs » ) 6a et 6b sont de forme cylindrique de longueur 3,75 mm et de diamètre extérieur légèrement inférieur au diamètre intérieur de la ligne de transmission, soit environ 6,9 mm. Elles présentent un perçage longitudinal en son centre de diamètre 3,1 mm permettant le passage de la ligne centrale 5. Les sondes peuvent ainsi aisément coulisser le long de la ligne centrale (voir les flèches de la figure 2). Chaque sonde présente une impédance caractéristique nettement différente de celle de la ligne de transmission, en l'occurrence, par les dimensions susmentionnées, l'impédance des sondes est d'environ 2 ohms.The probes ("slugs") 6a and 6b are cylindrical in shape of length 3.75 mm and outer diameter slightly smaller than the internal diameter of the transmission line, about 6.9 mm. They have a longitudinal bore at its center of diameter 3.1 mm allowing the passage of the central line 5. The probes can easily slide along the center line (see the arrows in Figure 2). Each probe has a characteristic impedance significantly different from that of the transmission line, in this case by the aforementioned dimensions, the impedance of the probes is about 2 ohms.
La figure 4 illustre deux exemples de sondes qui peuvent être utilisées par paire. La sonde de la figure 4a est une sonde « résonateur » de forme cylindrique et composée dans le sens longitudinal de deux couches de métal séparées par une couche d'isolant. Cet agencement réduit la bande de fréquence de telle sorte que la sonde se comporte telle un résonateur. L'avantage de la réduction de la bande de fréquence à laquelle le slug fait effet réside dans la possibilité de contrôler la valeur du coefficient de réflexion présenté au composant sous test non pas à une fréquence mais à plusieurs.Figure 4 illustrates two examples of probes that can be used in pairs. The probe of FIG. 4a is a "resonator" probe of cylindrical shape and composed in the longitudinal direction of two metal layers separated by an insulating layer. This arrangement reduces the frequency band so that the probe behaves like a resonator. The advantage of reducing the frequency band at which the slug takes effect lies in the ability to control the value of the reflection coefficient presented to the component under test not at one frequency but at several.
La sonde de la figure 4b est en métal de forme cylindrique présentant aux deux faces d'extrémité un renfoncement progressif de l'extérieur vers le centre, là où coulisse la ligne centrale conductrice 5. Ce renfoncement a pour effet d'augmenter la bande de fréquence de la sonde. Cette dernière se comporte donc comme une sonde large bande.The probe of FIG. 4b is made of cylindrical metal having at both end faces a progressive recess from the outside towards the center, where the conductive central line 5 slides. This recess has the effect of increasing the band of frequency of the probe. The latter behaves like a broadband probe.
Toute autre forme de la ligne de transmission 4Any other form of transmission line 4
(par exemple section carré ou rectangulaire) peut également convenir pour autant que les sondes utilisées aient sensiblement la même section que la ligne de transmission et épousent au mieux la forme intérieure de cette ligne de transmission à l'exception de la ligne centrale conductrice 5 sur laquelle coulissent les sondes.(For example square or rectangular section) may also be suitable provided that the probes used have substantially the same section as the transmission line and best fit the inner shape of this transmission line with the exception of the conductive center line 5 on which slides the probes.
Le slug fait varier localement l'impédance de la ligne en changeant la valeur du diamètre D du conducteur extérieur. Cette variation locale d'impédance modifie le coefficient de réflexion du tuner donc l'impédance de celui-ci.The slug locally varies the impedance of the line by changing the value of the diameter D of the outer conductor. This local variation of impedance modifies the reflection coefficient of the tuner so the impedance of it.
Si on coulisse le slug 6b sur la ligne d'impédance Z0, l'impédance du tuner se déplace sur un cercle à TOS (taux d'onde stationnaire) constant centré sur Z0. Un déplacement de λ/2 (où λ représente la longueur d'onde de travail) permet de décrire l'ensemble du cercle sur l'abaque de Smith. Selon les caractéristiques du slug (diamètre intérieur et longueur), le rayon du cercle, sur l'abaque de Smith, varie. Il est alors impossible de couvrir l'ensemble de l'abaque avec un seul slug aux caractéristiques non paramétrables. On ajoute alors un deuxième slug 6a devant le premier. Celui-ci va permettre d'effectuer une pré-adaptation ou « prématching » : en déplaçant le centre du cercle décrit.If the slug 6b is slid on the impedance line Z 0 , the impedance of the tuner moves on a constant TOS (steady state wave) circle centered on Z 0 . A displacement of λ / 2 (where λ represents the working wavelength) makes it possible to describe the whole circle on the Smith chart. Depending on the characteristics of the slug (inside diameter and length), the radius of the circle, on the Smith chart, varies. It is then impossible to cover the entire abacus with a single slug with non-parametric characteristics. We then add a second slug 6a in front of the first. This will allow to perform a pre-adaptation or "prematching": by moving the center of the circle described.
L'impédance du tuner ne se déplace plus sur un cercle à TOS constant. Si on déplace le premier slug 6b d'une distance λ/2 le long du conducteur, on décrit le cercle entier sur l'abaque autour de l'impédance de préadaptation.The impedance of the tuner no longer moves on a circle with constant TOS. If we move the first slug 6b by a distance λ / 2 along the conductor, we describe the entire circle on the chart around the pre-adaptation impedance.
Si on fait varier la position du second slug, le centre du cercle décrit se déplace sur un cercle à TOS constant. Parcourir une distance de λ/2 avec le deuxième slug, et pour chaque position de celui-ci balayer une distance de λ/2 avec le premier permet de tracer une multitude de cercles qui permettent de couvrir l'abaque de Smith dans sa globalité.If the position of the second slug is varied, the center of the circle described moves on a circle with constant TOS. To traverse a distance of λ / 2 with the second slug, and for each position of this one to scan a distance of λ / 2 with the first one makes it possible to trace a multitude of circles which makes it possible to cover the abacus of Smith in its entirety.
Les caractéristiques des cercles tracésThe characteristics of the circles drawn
(rayon, cercle à TOS constant sur lequel se déplace le centre) dépendent des caractéristiques des slugs utilisés. Ainsi, par exemple, une combinaison de slugs permettra d'avoir de nombreux points au bord de l'abaque tandis qu'une autre combinaison permettra une meilleure couverture de l'abaque. Ceci ajoute une souplesse supplémentaire d'utilisation.(radius, circle at constant TOS on which the center moves) depend on the characteristics of the slugs used. So, for example, a combination of slugs will have many points on the edge of the abacus while that another combination will allow a better coverage of the abacus. This adds additional flexibility of use.
L'adaptateur réalisé a été automatisé en utilisant deux moteurs pas à pas de très grande précision associés à un système d'encodage pour réaliser le déplacement des slugs. Les moteurs font tourner, chacun, une vis rectifiée de précision qui entraîne un chariot. Chaque chariot monté sur une vis entraîne le déplacement d'un slug.The adapter made was automated using two stepper motors of very high precision associated with an encoding system to achieve the removal of slugs. The motors rotate, each, a precision ground screw that drives a carriage. Each carriage mounted on a screw moves a slug.
Le tuner pourrait être placé au plus près du composant sous test, n'affectant pas ainsi la taille de la zone morte. Comme pour les tuners commerciaux, l'étalonnage automatique du tuner permet de caractériser un composant en quelques minutes et de façon précise.The tuner could be placed closer to the component under test, thus not affecting the size of the dead zone. As with commercial tuners, automatic tuner calibration can be used to characterize a component in minutes and accurately.
En référence à la figure 3, un mode de réalisation de l'adaptateur d'impédance est proposé. Il comprend :With reference to FIG. 3, an embodiment of the impedance adapter is proposed. He understands :
- un conducteur intérieur de diamètre dx (5) et un conducteur extérieur de diamètre d2 ( 4 ) , l ' ensemble constituant une ligne de transmission, ainsi que deux sondes 6a et 6b. Cet ensemble est similaire à celui décrit en référence à la figure 2 ;- An inner conductor of diameter dx (5) and an outer conductor of diameter d 2 (4), the assembly constituting a transmission line, and two probes 6a and 6b. This set is similar to that described with reference to Figure 2;
- un connecteur coaxial standard (non représenté) de chaque côté de la ligne de transmission ;a standard coaxial connector (not shown) on each side of the transmission line;
- un chariot (2) équipée d'un moteur (1) permettant de coulisser le long d'un guide (3). Le moteur (1) est de type linéaire permettant, à l'inverse des moteurs rotatifs, de limiter les vibrations engendrées lors de son fonctionnement. Les sondes 6a et 6b sont chacune reliées à un bloc « chariot 2 + moteur 1 + guide 3 » par un bras d'accouplement 7 muni de moyens élastiques d'absorption de vibration. L'absorption des vibrations est réalisée au niveau du bras d'accouplement à l'aide d'une languette de matériau souple prise en sandwich entre les deux parties métalliques situées respectivement vers le bloc « moteur + chariot + guide » et vers la sonde.- A carriage (2) equipped with a motor (1) for sliding along a guide (3). The motor (1) is linear type allowing, unlike rotary engines, to limit the vibrations generated during its operation. The probes 6a and 6b are each connected to a block "carriage 2 + motor 1 + guide 3" by a coupling arm 7 provided with elastic vibration absorption means. Vibration absorption is performed at the coupling arm by means of a tongue of flexible material sandwiched between the two metal parts located respectively to the block "motor + carriage + guide" and to the probe.
Pour permettre le déplacement des sondes 6 par les bras de liaison 7, le conducteur extérieur 4 de la ligne de transmission est pourvu d'une fente dans le sens longitudinal de la ligne. To allow the probes 6 to be displaced by the connecting arms 7, the outer conductor 4 of the transmission line is provided with a slot in the longitudinal direction of the line.
Claims
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0507607A FR2888670B1 (en) | 2005-07-18 | 2005-07-18 | AUTOMATIC COAXIAL IMPEDANCE ADAPTER |
| PCT/FR2006/001759 WO2007010134A1 (en) | 2005-07-18 | 2006-07-18 | Coaxial automatic impedance adaptor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP1905120A1 true EP1905120A1 (en) | 2008-04-02 |
| EP1905120B1 EP1905120B1 (en) | 2017-08-30 |
Family
ID=36088428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP06778882.8A Not-in-force EP1905120B1 (en) | 2005-07-18 | 2006-07-18 | Coaxial automatic impedance adaptor |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7936233B2 (en) |
| EP (1) | EP1905120B1 (en) |
| JP (1) | JP4782833B2 (en) |
| FR (1) | FR2888670B1 (en) |
| WO (1) | WO2007010134A1 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008137477A1 (en) * | 2007-05-02 | 2008-11-13 | Viasat, Inc. | Low-loss impedance coaxial interface for integrated circuits |
| US8525518B1 (en) * | 2008-11-04 | 2013-09-03 | The Florida State University Research Foundation, Inc. | Impedance matching in NMR probe with an adjustable segmented transmission line |
| JP4852091B2 (en) * | 2008-12-22 | 2012-01-11 | 株式会社日立メディコ | Gradient magnetic field coil apparatus, nuclear magnetic resonance imaging apparatus, and coil pattern design method |
| US8259025B2 (en) * | 2009-03-26 | 2012-09-04 | Laird Technologies, Inc. | Multi-band antenna assemblies |
| CN102365785B (en) * | 2009-03-27 | 2014-02-26 | 东京毅力科创株式会社 | Tuner and microwave plasma source |
| US8203348B1 (en) * | 2009-05-01 | 2012-06-19 | Christos Tsironis | Autonomous impedance tuner with human control interface |
| FR2972858B1 (en) * | 2011-03-18 | 2014-01-03 | Arnaud Curutchet | SYNTHESIZER OF COAXIAL IMPEDANCE |
| US8823392B2 (en) | 2011-04-06 | 2014-09-02 | Maury Microwave, Inc. | Web-enabled controller for impedance tuner systems |
| JP6444782B2 (en) * | 2015-03-17 | 2018-12-26 | 東京エレクトロン株式会社 | Tuner and microwave plasma source |
| KR20200026848A (en) * | 2020-02-21 | 2020-03-11 | 박상규 | Microwave System |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE474967A (en) * | 1944-11-16 | |||
| DE2017999A1 (en) * | 1970-04-15 | 1971-10-28 | Jörn, Raoul, Dipl.-Ing., 8990 Lindau | Spring element, in particular for the elastic mounting of engines |
| US3792385A (en) * | 1972-11-06 | 1974-02-12 | Rca Corp | Coaxial magnetic slug tuner |
| JPS49112552A (en) * | 1973-02-24 | 1974-10-26 | ||
| JPS5229041A (en) * | 1975-08-31 | 1977-03-04 | Toshinori Chiyo | Foot pedal vehicle |
| JPS5763901A (en) * | 1980-10-07 | 1982-04-17 | Toshiba Corp | High-frequency impedance variable device |
| JPH09317824A (en) * | 1996-03-29 | 1997-12-12 | Nok Megurasutikku Kk | Vibration isolation mount |
| US6297649B1 (en) * | 1999-09-30 | 2001-10-02 | Focus Microwaves Inc. | Harmonic rejection load tuner |
| US7034629B2 (en) * | 2001-12-31 | 2006-04-25 | Christos Tsironis | High frequency, high reflection pre-matching tuners with variable zero initialization |
| JP3845598B2 (en) * | 2002-05-21 | 2006-11-15 | 長野日本無線株式会社 | Coaxial impedance matcher |
| JP2004031678A (en) | 2002-06-26 | 2004-01-29 | Mitsubishi Electric Corp | Semiconductor device, and holder for mounting semiconductor element |
| JP2004316782A (en) * | 2003-04-16 | 2004-11-11 | Toyo Tire & Rubber Co Ltd | Anti-vibration rubber for motor |
-
2005
- 2005-07-18 FR FR0507607A patent/FR2888670B1/en not_active Expired - Fee Related
-
2006
- 2006-07-18 US US11/988,953 patent/US7936233B2/en not_active Expired - Fee Related
- 2006-07-18 EP EP06778882.8A patent/EP1905120B1/en not_active Not-in-force
- 2006-07-18 JP JP2008522016A patent/JP4782833B2/en not_active Expired - Fee Related
- 2006-07-18 WO PCT/FR2006/001759 patent/WO2007010134A1/en active Application Filing
Non-Patent Citations (1)
| Title |
|---|
| See references of WO2007010134A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2888670B1 (en) | 2009-11-20 |
| WO2007010134A1 (en) | 2007-01-25 |
| US20090146757A1 (en) | 2009-06-11 |
| JP4782833B2 (en) | 2011-09-28 |
| JP2009502075A (en) | 2009-01-22 |
| US7936233B2 (en) | 2011-05-03 |
| EP1905120B1 (en) | 2017-08-30 |
| FR2888670A1 (en) | 2007-01-19 |
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