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EP1706645B1 - Pompe à vide à frottement à plusieurs étages - Google Patents

Pompe à vide à frottement à plusieurs étages Download PDF

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Publication number
EP1706645B1
EP1706645B1 EP04790966A EP04790966A EP1706645B1 EP 1706645 B1 EP1706645 B1 EP 1706645B1 EP 04790966 A EP04790966 A EP 04790966A EP 04790966 A EP04790966 A EP 04790966A EP 1706645 B1 EP1706645 B1 EP 1706645B1
Authority
EP
European Patent Office
Prior art keywords
compressor stage
turbo
rotor
circular
compressor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP04790966A
Other languages
German (de)
English (en)
Other versions
EP1706645A1 (fr
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1706645A1 publication Critical patent/EP1706645A1/fr
Application granted granted Critical
Publication of EP1706645B1 publication Critical patent/EP1706645B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Definitions

  • the invention relates to a multi-stage friction vacuum pump with at least one axially compressing turbo compressor stage, which has a rotor rotating about its axis with rotor disks projecting between stationary stator disks.
  • Turbomolecular pumps belong to the group of friction vacuum pumps with which a high vacuum can be generated, for example for recipients for semiconductor production or also for mass spectrometers.
  • a multi-stage friction vacuum pump which in DE 100 04 271 A1 (Leybold Vakuum GmbH), has one or more turbo compressor stages, each comprising a rotor with radially projecting rotor disks and a stator with consist radially protruding stator discs. The rotor discs and stator discs mesh with each other at a small distance. They cause a molecular flow axially to the rotor axis.
  • a circular compressor stage which has a rotor with axially projecting rotor blades arranged on circular paths and a stator with axially projecting stator blades arranged on circular paths.
  • Rotor blades and stator blades alternately engage each other and cause a molecular flow, which is directed either radially inward or radially outward depending on the direction of rotation of the rotor and angle of attack of the blades.
  • a similar multi-stage friction vacuum pump is also off WO 94/25760 known.
  • the invention has for its object to provide a multi-stage friction vacuum pump with at least one turbo compressor stage, in which the stages are arranged in the flow path in series, and to provide increased compression.
  • the multi-stage friction type vacuum pump comprises the features of claim 1.
  • the vacuum pump includes a turbo-compressor stage and a downstream in the flow path circular compressor stage. While the turbo-compressor stage is capable of generating a high vacuum, the downstream circular compressor stage serves to effect an increase in pressure. Consequently, the circular compressor stage may have small dimensions because of the compression volume of the gas reduced.
  • the circular compressor stage has a small axial extent, because it is flowed through mainly in the radial direction.
  • the overall dimensions of the friction pump are not significantly increased by the circular compressor stage, but the compression is significantly increased over single-stage friction vacuum pumps.
  • the inventive combination of an upstream turbo compressor stage and a downstream circular compressor stage offers the advantage of a small footprint with high compression power.
  • the turbo-compressor stage and the circular compressor stage are integrated into a common combination of rotor and stator.
  • the rotors of both compressor stages consist of a single overall rotor and that the stators of both compressor stages also consist of a single overall stator. In this way, the dimensions and weight can be further reduced.
  • the friction vacuum pump according to the invention is preferably designed as a multiple-inlet pump. It has at least two axially spaced, in-line compression turbo compressor stages, between which there is an intermediate inlet. On the compressor side of the first turbo-compressor stage and / or the second turbo-compressor stage a circular compressor stage is arranged. Such a pump is particularly suitable for use in conjunction with mass spectrometers.
  • the increased gas flow at the intermediate inlet, to which the analyzer of the mass spectrometer is connected increases the gas flow at the intermediate inlet, without adversely affecting the pressure at the high-vacuum inlet.
  • the increase of the gas flow at the intermediate inlet means for the mass spectrometer an increase of the sensitivity.
  • friction vacuum pump has a housing 10 which is designed substantially cylindrical and at one end has a high vacuum port HV.
  • housing wall In the housing wall is an intermediate inlet ZE1, which is open at the side.
  • the intermediate inlet ZE1 is bridged by webs 18 which connect the stator parts together.
  • first turbo-compressor stage 11 consisting of a stator 12 and a rotor 13.
  • the stator 12 has a plurality of stator disks 15 directed radially inwardly from a circumferential wall 14.
  • the rotor 13 has a plurality of radially outwardly projecting rotor disks 16 projecting between the stator disks 15.
  • the rotor 13 is driven by a drive 17, which includes a schneil Stanfordden electric motor, at a rotational speed of 30,000 to 60,000 U / min. driven.
  • a second turbo-compressor stage 21 is arranged on the compressor side of the first turbo-compressor stage 11 and connected on the inlet side to the intermediate inlet ZE1.
  • the turbo-compressor stage 21 consists of a stator 22 and a rotor 23.
  • the stator 22 has a plurality of stator disks 25 directed radially inwardly from a circumferential wall 22.
  • the rotor 23 has a plurality of projecting radially outwardly projecting between the stator 25 Rotor disks 26 on.
  • the rotors 13 and 23 are fixedly connected to each other and are driven in common by the drive 17.
  • the compressor stage 30 is for example a Holweck stage or another molecular pump, for example a Gaede, Siegbahn, Engtractors or side channel pump.
  • a circular compressor stage 33 is provided following the first turbo-compressor stage 11. This has a rotor disk 34, which is part of the rotor 13 of the turbo compressor stage 11, and a stator 32, which is part of the stator 12.
  • the rotor disk 34 has rotor blades 35 arranged on concentric circles
  • the stator disk 32 has stator blades 36, which are also arranged on concentric circles and engage in the gaps between the rotor circuits, as shown in FIG FIG. 2 is shown.
  • the stator vanes and rotor blades have opposing skews with respect to the radial direction.
  • the circular compressor stage 33 conveys either radially outward or radially inward.
  • the conveying direction is indicated by the arrow 37 in the present embodiment.
  • the gas transport passes from the high vacuum inlet HV through the turbo-compressor stage 11 and from its circumference radially inwardly through the circular compressor stage 33 and from there through a gap 38 to the intermediate inlet ZE1.
  • the turbo-compressor stage 21 conveys the gas to the compressor stage 30.
  • the second intermediate inlet ZE2 also opens into the compressor stage 30.
  • the compressor stage 30 delivers to an outlet (not shown).
  • One of the rotor disks 16 of the turbo-compressor stage 11 is the carrier disk for the rotor blades of the circular compressor stage 33.
  • the stator disk of the Circular compressor stage also forms the end wall for the pressure-side end of the turbo-compressor stage 11.
  • a particular advantage is that the circular compressor stage 33 is to some extent integrated into the turbo-compressor stage 11. The only additional effort required is in the rotor and stator blades 35,36, which are additionally provided on the rotor and stator of the turbo compressor stage.
  • a circular compressor stage 33 can also be provided behind the second turbo-compressor stage 21.
  • the pressure side of the respective turbo compressor stage provided and integrated into the turbo compressor stage circular compressor stage of the gas flow is increased on the pressure side. For a connected mass spectrometer, this means an increase in sensitivity.
  • FIG. 3 shows the gas flow 40 through the circular compressor stage 33 radially from outside to inside.
  • the blade surface of the rotor disk 34 is conical.
  • the rotor blades 35 have an axial length which decreases with decreasing radius of the circular path.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Claims (8)

  1. Pompe à vide à friction à plusieurs étages comprenant au moins un étage de turbocompression (11, 21) comprimant axialement qui présente un rotor (13) en rotation autour de son axe avec des plaques de rotor (16) saillant entre des plaques de stator (15) fixes, et un étage de compression circulaire (33) comprimant radialement disposée sur le côté compresseur de l'étage de turbocompression (11) qui présente un rotor (34) avec des aubes de rotor (35) saillant axialement disposées sur des orbites et un stator (39) avec des aubes de stator (36) disposées sur des orbites,
    caractérisée en ce que les aubes de stator (36) s'engrènent dans des interstices radiaux entre orbites voisines d'aubes de rotor (35).
  2. Pompe à vide à friction selon la revendication 1, caractérisée en ce que les aubes de rotor (35) de l'étage de compression circulaire sont disposées sur un corps de rotor de l'étage de turbocompression (11) portant les plaques de rotor (16).
  3. Pompe à vide à friction selon la revendication 1 ou 2, caractérisée en ce que les aubes de stator (36) sont disposées sur un corps de stator de l'étage de turbocompression (11) portant les plaques de stator (15).
  4. Pompe à vide à friction selon l'une des revendications 1 à 3, en forme de pompe à plusieurs étages, caractérisée en ce qu'au moins deux étages de turbocompression (11, 21) distancées axialement comprimant en série sont prévues, entre lesquelles est située une entrée intermédiaire (ZE1), et un étage de compression circulaire (33) est disposée sur le côté compresseur du premier étage de turbocompression (11).
  5. Pompe à vide à friction selon l'une des revendications 1 à 3, en forme de pompe à plusieurs étages, caractérisée en ce qu'au moins deux étages de turbocompression (11, 21) distancées axialement comprimant en série sont prévues, entre lesquelles est située une entrée intermédiaire (ZE1), et un étage de compression circulaire (33) est disposée sur le côté compresseur du deuxième étage de turbocompression (21).
  6. Pompe à vide à friction selon l'une des revendications 1 à 5, caractérisée en ce que l'étage de compression circulaire (33) comprime radialement vers l'intérieur.
  7. Pompe à vide à friction selon l'une des revendications 1 à 6, caractérisée en ce que l'étage de compression circulaire (33) est formé à au moins deux étages et comprime en alternance radialement vers l'intérieur et radialement vers l'extérieur (ou inversement).
  8. Pompe à vide à friction selon l'une des revendications 1 à 7, caractérisée en ce que les aubes de rotor (35) présentent une longueur axiale qui se rétrécit en direction de compression.
EP04790966A 2003-11-13 2004-10-28 Pompe à vide à frottement à plusieurs étages Expired - Lifetime EP1706645B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10353034A DE10353034A1 (de) 2003-11-13 2003-11-13 Mehrstufige Reibungsvakuumpumpe
PCT/EP2004/012196 WO2005047707A1 (fr) 2003-11-13 2004-10-28 Pompe à vide à frottement à plusieurs étages

Publications (2)

Publication Number Publication Date
EP1706645A1 EP1706645A1 (fr) 2006-10-04
EP1706645B1 true EP1706645B1 (fr) 2008-12-17

Family

ID=34559626

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04790966A Expired - Lifetime EP1706645B1 (fr) 2003-11-13 2004-10-28 Pompe à vide à frottement à plusieurs étages

Country Status (7)

Country Link
US (1) US20070081889A1 (fr)
EP (1) EP1706645B1 (fr)
JP (1) JP2007510853A (fr)
CN (1) CN100453817C (fr)
CA (1) CA2545566A1 (fr)
DE (2) DE10353034A1 (fr)
WO (1) WO2005047707A1 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE102007048703A1 (de) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Mehrstufiger Turbomolekularpumpen-Pumpenrotor
CN101392749B (zh) * 2008-10-31 2012-05-23 东北大学 旋涡式真空泵
GB0901872D0 (en) * 2009-02-06 2009-03-11 Edwards Ltd Multiple inlet vacuum pumps
DE102009011082A1 (de) * 2009-02-28 2010-09-02 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
US9217439B2 (en) 2010-07-02 2015-12-22 Edwards Japan Limited Vacuum pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2620649B1 (fr) 2012-01-27 2019-03-13 Edwards Limited Pompe à vide de transfert gazeux
JP6079052B2 (ja) * 2012-08-24 2017-02-15 株式会社島津製作所 真空ポンプ
WO2015055374A1 (fr) * 2013-10-16 2015-04-23 Asml Netherlands B.V. Source de rayonnement, procédé de fabrication d'un appareil lithographique, système de détection et procédé de détection
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2558921B (en) * 2017-01-20 2020-06-17 Edwards Ltd A multiple stage turbomolecular pump with inter-stage inlet
CN108105121B (zh) * 2017-12-29 2020-03-24 东北大学 一种多级复合高真空干泵
WO2021102583A1 (fr) * 2019-11-28 2021-06-03 Laminar Lift Systems Inc. Pompe à turbine tesla et procédés associés
CN112160919A (zh) * 2020-09-28 2021-01-01 东北大学 涡轮分子泵和包括该分子泵的复合分子泵

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (fr) * 1973-03-30 1974-10-25 Cit Alcatel
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
US6508631B1 (en) * 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
DE10004271A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Reibungsvakuumpumpe
DE10004263A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide

Also Published As

Publication number Publication date
WO2005047707A1 (fr) 2005-05-26
DE10353034A1 (de) 2005-06-09
DE502004008709D1 (de) 2009-01-29
CA2545566A1 (fr) 2005-05-26
JP2007510853A (ja) 2007-04-26
EP1706645A1 (fr) 2006-10-04
US20070081889A1 (en) 2007-04-12
CN100453817C (zh) 2009-01-21
CN1878962A (zh) 2006-12-13

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