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EP1677368A3 - Piezoelectric devices with conductive perovskite layers - Google Patents

Piezoelectric devices with conductive perovskite layers Download PDF

Info

Publication number
EP1677368A3
EP1677368A3 EP20050028010 EP05028010A EP1677368A3 EP 1677368 A3 EP1677368 A3 EP 1677368A3 EP 20050028010 EP20050028010 EP 20050028010 EP 05028010 A EP05028010 A EP 05028010A EP 1677368 A3 EP1677368 A3 EP 1677368A3
Authority
EP
European Patent Office
Prior art keywords
piezoelectric
piezoelectric devices
conductive layer
conductive perovskite
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20050028010
Other languages
German (de)
French (fr)
Other versions
EP1677368B1 (en
EP1677368A2 (en
Inventor
Setsuya Iwashita
Takeshi Kijima
Koji Ohashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of EP1677368A2 publication Critical patent/EP1677368A2/en
Publication of EP1677368A3 publication Critical patent/EP1677368A3/en
Application granted granted Critical
Publication of EP1677368B1 publication Critical patent/EP1677368B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0542—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a lateral arrangement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/173—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/176—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of ceramic material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
    • H10N30/708—Intermediate layers, e.g. barrier, adhesion or growth control buffer layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Oscillators With Electromechanical Resonators (AREA)

Abstract

A piezoelectric device includes: a substrate (1); a first conductive layer (4) formed over the substrate, the first conductive layer including at least one buffer layer (41) formed of a (001) preferentially oriented lanthanum-based layered perovskite compound; a piezoelectric layer (5) formed over the first conductive layer and including a piezoelectric having a perovskite structure; and a second conductive layer (6) electrically connected with the piezoelectric layer.
EP20050028010 2004-12-28 2005-12-21 Piezoelectric devices with conductive perovskite layers Not-in-force EP1677368B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004380988A JP4431891B2 (en) 2004-12-28 2004-12-28 Piezoelectric element, piezoelectric actuator, piezoelectric pump, ink jet recording head, ink jet printer, surface acoustic wave element, thin film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic equipment

Publications (3)

Publication Number Publication Date
EP1677368A2 EP1677368A2 (en) 2006-07-05
EP1677368A3 true EP1677368A3 (en) 2007-07-11
EP1677368B1 EP1677368B1 (en) 2011-06-22

Family

ID=36051493

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20050028010 Not-in-force EP1677368B1 (en) 2004-12-28 2005-12-21 Piezoelectric devices with conductive perovskite layers

Country Status (5)

Country Link
US (1) US7622850B2 (en)
EP (1) EP1677368B1 (en)
JP (1) JP4431891B2 (en)
KR (1) KR100682432B1 (en)
CN (1) CN100511744C (en)

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JP2009255531A (en) * 2008-03-28 2009-11-05 Seiko Epson Corp Liquid ejecting head, liquid ejecting apparatus and actuator
WO2009128245A1 (en) * 2008-04-17 2009-10-22 株式会社村田製作所 Stacked piezoelectric element and piezoelectric pump
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US9735338B2 (en) 2009-01-26 2017-08-15 Cymatics Laboratories Corp. Protected resonator
US8164234B2 (en) * 2009-02-26 2012-04-24 Fujifilm Corporation Sputtered piezoelectric material
WO2010122707A1 (en) * 2009-04-20 2010-10-28 パナソニック株式会社 Piezoelectric thin film and manufacturing method therefor, inkjet head, method for forming images using an inkjet head, angular velocity sensor, method for measuring angular velocity using an angular velocity sensor, piezoelectric element, and method for generating electricity using piezoelectric elements
JP5305027B2 (en) * 2009-07-16 2013-10-02 セイコーエプソン株式会社 Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
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JP5998537B2 (en) * 2012-03-12 2016-09-28 株式会社リコー Electro-mechanical conversion element, droplet discharge head, and droplet discharge apparatus
JP5998543B2 (en) * 2012-03-13 2016-09-28 株式会社リコー Electro-mechanical conversion element, droplet discharge head, and droplet discharge apparatus
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US8994251B2 (en) * 2012-08-03 2015-03-31 Tdk Corporation Piezoelectric device having first and second non-metal electroconductive intermediate films
JP6376690B2 (en) * 2014-08-28 2018-08-22 東芝テック株式会社 Droplet ejecting apparatus and image forming apparatus
JP6575743B2 (en) * 2015-01-30 2019-09-18 セイコーエプソン株式会社 Method of driving liquid jet head, piezoelectric element, and liquid jet head
KR102576924B1 (en) 2016-03-09 2023-09-11 (주)와이솔 SAW Resonator having negative profile Metal Structure and the Manufacturing Method thefeof
TWI717498B (en) * 2016-06-21 2021-02-01 日商前進材料科技股份有限公司 Membrane structure and manufacturing method thereof
US10272692B2 (en) * 2016-09-13 2019-04-30 Toshiba Tec Kabushiki Kaisha Liquid circulation device, liquid ejection apparatus, and liquid ejection method
JP6790776B2 (en) * 2016-12-07 2020-11-25 Tdk株式会社 Piezoelectric thin film laminates, piezoelectric thin film substrates, piezoelectric thin film elements, piezoelectric actuators, piezoelectric sensors, head assemblies, head stack assemblies, hard disk drives, printer heads, and inkjet printer devices.
CN107443919A (en) * 2017-09-19 2017-12-08 吉林大学 A kind of printer ink supply system with pressurization piezoelectric pump
JP7167337B2 (en) * 2019-06-12 2022-11-08 富士フイルム株式会社 Piezoelectric element and method for manufacturing piezoelectric element
CN113966552A (en) * 2019-06-12 2022-01-21 富士胶片株式会社 Piezoelectric element
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JP7237032B2 (en) * 2020-02-17 2023-03-10 富士フイルム株式会社 Substrate with piezoelectric film, piezoelectric element and vibration power generation element
CN116134186A (en) 2020-07-28 2023-05-16 富士胶片株式会社 Substrate with piezoelectric film and piezoelectric element
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Also Published As

Publication number Publication date
US7622850B2 (en) 2009-11-24
CN1805164A (en) 2006-07-19
KR100682432B1 (en) 2007-02-15
CN100511744C (en) 2009-07-08
JP4431891B2 (en) 2010-03-17
KR20060076694A (en) 2006-07-04
EP1677368B1 (en) 2011-06-22
JP2006186258A (en) 2006-07-13
US20060139414A1 (en) 2006-06-29
EP1677368A2 (en) 2006-07-05

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