EP1636629A4 - Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge - Google Patents

Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge

Info

Publication number: EP1636629A4
Authority: EP; European Patent Office
Prior art keywords: fabrication; light modulator; spatial light; reflective spatial; high fill
Prior art date: 2003-06-02
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP04710687A

Other languages

German (de)

French (fr)

Other versions

EP1636629A1 (en

Inventor

Shaoher X Pan

Xiao Yang

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Miradia Inc

Original Assignee

Miradia Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2003-06-02

Filing date

2004-02-12

Publication date

2009-04-15

2004-02-12 Application filed by Miradia Inc filed Critical Miradia Inc

2006-03-22 Publication of EP1636629A1 publication Critical patent/EP1636629A1/en

2009-04-15 Publication of EP1636629A4 publication Critical patent/EP1636629A4/en

Status Withdrawn legal-status Critical Current

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/904—Micromirror

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Engineering & Computer Science (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Mechanical Light Control Or Optical Switches (AREA)
Micromachines (AREA)

EP04710687A 2003-06-02 2004-02-12 Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge Withdrawn EP1636629A4 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US47540403P	2003-06-02	2003-06-02
US61096703A	2003-06-30	2003-06-30
PCT/US2004/004357 WO2004109364A1 (en)	2003-06-02	2004-02-12	Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge

Publications (2)

Publication Number	Publication Date
EP1636629A1 EP1636629A1 (en)	2006-03-22
EP1636629A4 true EP1636629A4 (en)	2009-04-15

Family

ID=33514051

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP04710687A Withdrawn EP1636629A4 (en)	2003-06-02	2004-02-12	Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge

Country Status (5)

Country	Link
EP (1)	EP1636629A4 (en)
JP (1)	JP2006526806A (en)
KR (1)	KR20060016800A (en)
TW (1)	TWI356912B (en)
WO (1)	WO2004109364A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US7483198B2 (en)	2003-02-12	2009-01-27	Texas Instruments Incorporated	Micromirror device and method for making the same
CN101084462B (en) *	2003-10-27	2010-06-02	视频有限公司	High-contrast spatial light modulator and method
US7113322B2 (en)	2004-06-23	2006-09-26	Reflectivity, Inc	Micromirror having offset addressing electrode
US7119944B2 (en)	2004-08-25	2006-10-10	Reflectivity, Inc.	Micromirror device and method for making the same
US7436572B2 (en)	2004-08-25	2008-10-14	Texas Instruments Incorporated	Micromirrors and hinge structures for micromirror arrays in projection displays
US7215459B2 (en)	2004-08-25	2007-05-08	Reflectivity, Inc.	Micromirror devices with in-plane deformable hinge
US6980349B1 (en)	2004-08-25	2005-12-27	Reflectivity, Inc	Micromirrors with novel mirror plates
US7019880B1 (en)	2004-08-25	2006-03-28	Reflectivity, Inc	Micromirrors and hinge structures for micromirror arrays in projection displays
US7372617B2 (en) *	2005-07-06	2008-05-13	Peter Enoksson	Hidden hinge MEMS device
JP5176387B2 (en) *	2007-05-18	2013-04-03	大日本印刷株式会社	Membrane structure manufacturing method
US7859971B2 (en)	2007-06-29	2010-12-28	International Business Machines Corporation	Directory hologram forming an anchor location of a pattern of stored holograms
KR100888076B1 (en) *	2008-05-02	2009-03-11	이화여자대학교 산학협력단	Micromirror manufacturing method using self-aligned electrode

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19757197A1 (en) *	1997-12-22	1999-06-24	Bosch Gmbh Robert	Manufacturing method for micromechanical device, esp. for resonant oscillating mirror device
US6204085B1 (en) *	1998-09-15	2001-03-20	Texas Instruments Incorporated	Reduced deformation of micromechanical devices through thermal stabilization
US20020013054A1 (en) *	2000-05-12	2002-01-31	Farmer, Ii Kenneth R.	Single crystal silicon micro-actuator/mirror and method therefor
EP1180848A1 (en) *	2000-08-09	2002-02-20	STMicroelectronics S.r.l.	Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly
US20020149294A1 (en) *	2001-04-13	2002-10-17	Olympus Optical Co., Ltd.	Actuator

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5083857A (en) *	1990-06-29	1992-01-28	Texas Instruments Incorporated	Multi-level deformable mirror device
US5583688A (en) *	1993-12-21	1996-12-10	Texas Instruments Incorporated	Multi-level digital micromirror device
US6529310B1 (en) *	1998-09-24	2003-03-04	Reflectivity, Inc.	Deflectable spatial light modulator having superimposed hinge and deflectable element
US20040004753A1 (en) *	2002-06-19	2004-01-08	Pan Shaoher X.	Architecture of a reflective spatial light modulator

2004
- 2004-02-12 JP JP2006508742A patent/JP2006526806A/en active Pending
- 2004-02-12 KR KR1020057023191A patent/KR20060016800A/en not_active Ceased
- 2004-02-12 WO PCT/US2004/004357 patent/WO2004109364A1/en active Application Filing
- 2004-02-12 EP EP04710687A patent/EP1636629A4/en not_active Withdrawn
- 2004-06-02 TW TW93115847A patent/TWI356912B/en not_active IP Right Cessation

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19757197A1 (en) *	1997-12-22	1999-06-24	Bosch Gmbh Robert	Manufacturing method for micromechanical device, esp. for resonant oscillating mirror device
US6204085B1 (en) *	1998-09-15	2001-03-20	Texas Instruments Incorporated	Reduced deformation of micromechanical devices through thermal stabilization
US20020013054A1 (en) *	2000-05-12	2002-01-31	Farmer, Ii Kenneth R.	Single crystal silicon micro-actuator/mirror and method therefor
EP1180848A1 (en) *	2000-08-09	2002-02-20	STMicroelectronics S.r.l.	Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly
US20020149294A1 (en) *	2001-04-13	2002-10-17	Olympus Optical Co., Ltd.	Actuator

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2004109364A1 *

Also Published As

Publication number	Publication date
TW200525272A (en)	2005-08-01
EP1636629A1 (en)	2006-03-22
WO2004109364A1 (en)	2004-12-16
JP2006526806A (en)	2006-11-24
KR20060016800A (en)	2006-02-22
TWI356912B (en)	2012-01-21

Publication	Publication Date	Title
AU2003239921A1 (en)	2004-01-06	Fabrication of a reflective spatial light modulator
EP1514256A4 (en)	2009-11-11	Architecture of a reflective spatial light modulator
AU2003239924A1 (en)	2004-01-06	Reflective spatial light modulator
IL177048A0 (en)	2006-12-10	Spatial light modulator with integrated optical structure
AU2003295983A1 (en)	2004-06-18	Spatial light modulators with light absorbing areas
AU9583798A (en)	2000-04-10	A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
AU2003299149A1 (en)	2004-04-23	Reconfigurable spatial light modulators
EP1636629A4 (en)	2009-04-15	Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
AU2003239420A1 (en)	2003-11-11	Color management system having a transmissive spatial light modulator and optical isolator
AU2003236616A1 (en)	2003-09-02	High-index contrast distributed bragg reflector
EP1636628A4 (en)	2009-04-15	High fill ratio reflective spatial light modulator with hidden hinge
AU2003281799A1 (en)	2004-02-23	Spatial optical modulator
AU2002365757A1 (en)	2003-06-17	Clocks with diffusion reflector lighting
GB0118236D0 (en)	2001-09-19	A light reflector
AU2003258896A1 (en)	2004-03-29	Spatial optical memory
AU2001260647A1 (en)	2001-12-11	Spatial light modulator
AU2003208872A1 (en)	2003-09-16	Refractive projection lens with a middle part
AU2002258761A1 (en)	2002-10-28	Monochromatic reflective spatial light modulator
GB0403538D0 (en)	2004-03-24	Digital/optical hybrid printer utilizing reflective spatial light modulator technology
GB0114972D0 (en)	2001-08-08	Optically addressed spatial light modulator
AU3262901A (en)	2001-05-30	Spatial light modulator
AU2005902324A0 (en)	2005-05-19	Reflective mode spatial light modulator
AU2002258833A1 (en)	2002-10-28	Decorative hourglass with light reflecting base
AU2003207732A1 (en)	2003-09-02	Multifunctional optical device having a spatial light modulator with an array of micromirrors
AUPQ753300A0 (en)	2000-06-08	Practical optical range estimation using a programmable spatial light modulator

Legal Events

Date	Code	Title	Description
2006-02-03	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2006-03-22	17P	Request for examination filed	Effective date: 20051222
2006-03-22	AK	Designated contracting states	Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
2006-09-06	DAX	Request for extension of the european patent (deleted)
2007-03-28	RIN1	Information on inventor provided before grant (corrected)	Inventor name: YANG, XIAO Inventor name: PAN, SHAOHER, X.
2007-04-18	RIN1	Information on inventor provided before grant (corrected)	Inventor name: YANG, XIAO Inventor name: PAN, SHAOHER, X.
2009-04-15	A4	Supplementary search report drawn up and despatched	Effective date: 20090317
2009-07-22	17Q	First examination report despatched	Effective date: 20090619
2010-03-19	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
2010-04-21	18D	Application deemed to be withdrawn	Effective date: 20091030