EP1511627A4 - Controlled penetration subpad - Google Patents

Controlled penetration subpad

Info

Publication number: EP1511627A4
Authority: EP; European Patent Office
Prior art keywords: subpad; controlled penetration; penetration; controlled; penetration subpad
Prior art date: 2002-06-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP03734462A

Other languages

German (de)

French (fr)

Other versions

EP1511627A1 (en

Inventor

Joseph Cianciolo

Brian Scott Lombardo

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Praxair ST Technology Inc

Praxair Technology Inc

Original Assignee

Praxair ST Technology Inc

Praxair Technology Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-06-07

Filing date

2003-06-09

Publication date

2006-06-21

2003-06-09 Application filed by Praxair ST Technology Inc, Praxair Technology Inc filed Critical Praxair ST Technology Inc

2003-06-09 Priority claimed from PCT/US2003/018002 external-priority patent/WO2003103959A1/en

2003-06-09 Priority claimed from US10/457,316 external-priority patent/US8602851B2/en

2005-03-09 Publication of EP1511627A1 publication Critical patent/EP1511627A1/en

2006-06-21 Publication of EP1511627A4 publication Critical patent/EP1511627A4/en

Status Withdrawn legal-status Critical Current

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date	Title
		1998-08-05
US38694302P	2002-06-07	2002-06-07
US386943P		2002-06-07
PCT/US2003/018002 WO2003103959A1 (en)	2002-06-07	2003-06-09	Controlled penetration subpad
US10/457,316 US8602851B2 (en)	2003-06-09	2003-06-09	Controlled penetration subpad

Publications (2)

Publication Number	Publication Date
EP1511627A1 EP1511627A1 (en)	2005-03-09
EP1511627A4 true EP1511627A4 (en)	2006-06-21

Family

ID=35798497

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP03734462A Withdrawn EP1511627A4 (en)	2002-06-07	2003-06-09	Controlled penetration subpad

Country Status (2)

Country	Link
EP (1)	EP1511627A4 (en)
JP (1)	JP4362443B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE102011003006B4 (en) *	2011-01-21	2013-02-07	Siltronic Ag	A method for providing each a level working layer on each of the two working wheels of a double-sided processing device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5692950A (en) *	1996-08-08	1997-12-02	Minnesota Mining And Manufacturing Company	Abrasive construction for semiconductor wafer modification
WO1999006182A1 (en) *	1997-07-30	1999-02-11	Scapa Group Plc	Polishing semiconductor wafers
EP1031398A2 (en) *	1999-02-25	2000-08-30	Obsidian, Inc.	Polishing media stabilizer
US6194317B1 (en) *	1998-04-30	2001-02-27	3M Innovative Properties Company	Method of planarizing the upper surface of a semiconductor wafer

2003
- 2003-06-09 EP EP03734462A patent/EP1511627A4/en not_active Withdrawn
- 2003-06-09 JP JP2004511057A patent/JP4362443B2/en not_active Expired - Lifetime

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5692950A (en) *	1996-08-08	1997-12-02	Minnesota Mining And Manufacturing Company	Abrasive construction for semiconductor wafer modification
WO1999006182A1 (en) *	1997-07-30	1999-02-11	Scapa Group Plc	Polishing semiconductor wafers
US6194317B1 (en) *	1998-04-30	2001-02-27	3M Innovative Properties Company	Method of planarizing the upper surface of a semiconductor wafer
EP1031398A2 (en) *	1999-02-25	2000-08-30	Obsidian, Inc.	Polishing media stabilizer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO03103959A1 *

Also Published As

Publication number	Publication date
EP1511627A1 (en)	2005-03-09
JP4362443B2 (en)	2009-11-11
JP2006502013A (en)	2006-01-19

Publication	Publication Date	Title
AU2003238941A1 (en)	2003-12-22	Controlled penetration subpad
AU153894S (en)	2003-12-01	Planer
AU2003295355A8 (en)	2004-06-15	Anchor
GB0208673D0 (en)	2002-05-29	Control sub
GB0208877D0 (en)	2002-05-29	Behicle control
GB0208928D0 (en)	2002-05-29	Methods
GB0320207D0 (en)	2003-10-01	Methods
EP1511627A4 (en)	2006-06-21	Controlled penetration subpad
GB0221711D0 (en)	2002-10-30	Methods
AU2003215256A8 (en)	2003-09-22	Control procedure selection
GB0204681D0 (en)	2002-04-17	Ink-key control
GB0228658D0 (en)	2003-01-15	Planer
GB0204967D0 (en)	2002-04-17	Methods
AU2003264722A8 (en)	2004-03-11	Methods
GB2392623B (en)	2005-12-07	Subcutaneous tunneller
GB0222276D0 (en)	2002-10-30	Methods
GB0202213D0 (en)	2002-03-20	Methods
GB0224863D0 (en)	2002-12-04	Depth control
GB0200526D0 (en)	2002-02-27	Methods
GB0213580D0 (en)	2002-07-24	Methods
GB0213579D0 (en)	2002-07-24	Methods
GB0214937D0 (en)	2002-08-07	Control agents
GB0202338D0 (en)	2002-03-20	Borgezie bessell setting
GB0315083D0 (en)	2003-07-30	Control agents
GB0229194D0 (en)	2003-01-22	Planer

Legal Events

Date	Code	Title	Description
2005-01-21	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2005-03-09	17P	Request for examination filed	Effective date: 20041206
2005-03-09	AK	Designated contracting states	Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
2005-03-09	AX	Request for extension of the european patent	Extension state: AL LT LV MK
2005-09-28	DAX	Request for extension of the european patent (deleted)
2005-09-28	RBV	Designated contracting states (corrected)	Designated state(s): DE FR GB IE IT
2006-05-03	RIN1	Information on inventor provided before grant (corrected)	Inventor name: LOMBARDO, BRIAN, SCOTT Inventor name: CIANCIOLO, JOSEPH
2006-06-21	A4	Supplementary search report drawn up and despatched	Effective date: 20060524
2010-02-24	17Q	First examination report despatched	Effective date: 20100125
2014-01-10	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
2014-02-12	18D	Application deemed to be withdrawn	Effective date: 20130808
2014-05-26	REG	Reference to a national code	Ref country code: DE Ref legal event code: R079 Free format text: PREVIOUS MAIN CLASS: B32B0031000000 Ipc: B32B0037000000
2014-07-03	REG	Reference to a national code	Ref country code: DE Ref legal event code: R079 Free format text: PREVIOUS MAIN CLASS: B32B0031000000 Ipc: B32B0037000000 Effective date: 20140526