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EP1506567B1 - Dielectric barrier discharge lamp with a base - Google Patents

Dielectric barrier discharge lamp with a base Download PDF

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Publication number
EP1506567B1
EP1506567B1 EP03752699A EP03752699A EP1506567B1 EP 1506567 B1 EP1506567 B1 EP 1506567B1 EP 03752699 A EP03752699 A EP 03752699A EP 03752699 A EP03752699 A EP 03752699A EP 1506567 B1 EP1506567 B1 EP 1506567B1
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EP
European Patent Office
Prior art keywords
dielectric barrier
discharge lamp
barrier discharge
lamp
base according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP03752699A
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German (de)
French (fr)
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EP1506567A2 (en
Inventor
Rainer Kling
Reinhold Wittkötter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osram GmbH
Original Assignee
Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
    • H01J5/56—Shape of the separate part
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel

Definitions

  • the invention is based on a dielectric barrier discharge lamp.
  • dielectric barrier discharge lamp includes sources of electromagnetic radiation based on dielectrically impeded gas discharges.
  • the spectrum of the radiation may include both the visible range and the UV (ultraviolet) / VUV (vacuum ultraviolet) range and the IR (infrared) range.
  • a phosphor layer for converting VUV radiation into longer wavelength radiation e.g. UVA or visible radiation (light) may be provided.
  • a dielectric barrier discharge lamp requires at least one so-called dielectrically impeded electrode.
  • a dielectrically impeded electrode is separated from the interior of the discharge vessel or the discharge gas by means of a dielectric.
  • This dielectric - the dielectric barrier - can be embodied, for example, as a dielectric layer covering the electrode, or it is formed by the discharge vessel of the lamp itself, namely when the electrode is arranged on the outside of the wall of the discharge vessel. The latter is abbreviated hereafter as "external electrode”.
  • the present invention relates to a dielectric barrier discharge lamp comprising at least one substantially strip-shaped outer electrode of the aforementioned type.
  • the lamp includes an oblong or tubular, sealed on both sides discharge vessel, which encloses an ionizable filling.
  • the ionizable filling usually consists of a noble gas, for example xenon or a gas mixture.
  • a noble gas for example xenon or a gas mixture.
  • excimers are formed.
  • Excimers are excited molecules, such as Xe 2 *, which emit electromagnetic radiation when they return to the normally unbound ground state. In the case of Xe 2 *, the maximum of the molecular beam radiation is about 172 nm.
  • such lamps are suitable as UV / VUV lamps in process technology, for example, surface cleaning, photolytics, ozone generation, metallization, and UV curing.
  • process technology for example, surface cleaning, photolytics, ozone generation, metallization, and UV curing.
  • suitable measures for the gas-tight installation of such radiators are to be made in a corresponding process chamber.
  • the EP-A 1 088 335 discloses a single-socket dielectric barrier discharge lamp suitable for UV irradiation.
  • the base has a flange which is connected by means of potting compound with the squeeze of the lamp and suitable for vacuum applications.
  • this concept is less suitable for high vacuum.
  • Another disadvantage is that a relatively large amount of potting compound is required if it covers the entire space to fill between the pinch and the circular cylindrical inner wall of the base sleeve. If, however, gaps are left free, negative pressure prevails in the area between the squeeze foot end and the following seal. Then there is the risk of parasitic gas discharges between the power supply lines.
  • the DE-A 100 48 986 also discloses a single barrier dielectric barrier discharge lamp suitable for UV radiation.
  • the lamp itself corresponds generically to the one already mentioned US Pat. No. 6,060,828 , Figures 5a to 5c, disclosed lamp.
  • the base has a base sleeve with contact springs.
  • the base sleeve surrounds the lamp base or the corresponding lamp end such that each contact spring is in electrically conductive contact with a corresponding strip-shaped outer electrode.
  • the base or the base sleeve in the region of the contact springs is not connected gas-tight to the lamp vessel, there is also the risk of parasitic gas discharges between the power supply lines for the outer electrodes, here in particular the contact springs of the base sleeve, and for the inner electrode.
  • the object of the present invention is to provide an improved dielectric barrier discharge lamp. Another aspect is that the dielectric barrier discharge lamp should be usable in a negative pressure environment.
  • a dielectric barrier discharge lamp with a pedestal comprising: an elongate discharge vessel closed on both sides, the wall of which encloses an ionizable filling, electrodes, wherein at least one of the electrodes is an inner electrode, ie arranged inside the discharge vessel and at least one of the electrodes is an outer electrode, that is, disposed on the outside of the wall of the discharge vessel, a power supply for the at least one inner electrode and a lamp base, through which the at least one inner electrode is gas-tightly connected to the power supply, characterized in that the base comprises a tube which is attached gas-tight at the lampenfuß solutionen end of the discharge vessel and surrounds the lamp base.
  • the basic idea of the invention is to gas-tightly attach a pipe surrounding the lamp base to the end of the lamp base of the discharge vessel of the dielectric barrier discharge lamp. This is a gas-tight separation between the two power supply lines for the outer and inner electrode possible. In this way, the parasitic gas discharges mentioned above can be prevented between the power supply lines at negative pressure.
  • the tube comprises a cylindrical and a conical portion, wherein the conical portion connects the discharge vessel with the cylindrical portion.
  • the tube expediently additionally comprises a means for sealing.
  • this means for sealing is realized by a small flange seal which is inserted over the pipe.
  • a small flange seal which is inserted over the pipe.
  • the power supply for the outer electrodes is, as well as the outer electrodes themselves, designed as a track-like structure. The thickness of these structures is typically only a few microns. This allows a gas-tight passage of the arranged on the outside of the tube power supply of the outer electrodes by the vacuum usually used as a gasket O-ring.
  • a connection plug e.g. of the type BNC - HT, which is connected to the two power supply lines. Further details can be found in the embodiment.
  • either a metallic vacuum flange may be connected by means of transitional glasses or a glass flange by direct fusing to the free end of the tube.
  • the power supply for the outer electrode does not necessarily have to be arranged on the outside of the pipe like a track.
  • outer electrodes are preferably connected to ground potential, it may also be advantageous to connect the outer electrodes directly, for example by means of a suitable contact spring, to the metallic process chamber.
  • the attached pipe separates the air pressure-surrounded power supply of the inner electrode from that part of the power supply connected to the external electrodes, which is exposed to the process gas atmosphere or vacuum.
  • a top view of a dielectric barrier discharge lamp with socket according to the invention including socket adapter (sectional view).
  • a dielectric barrier discharge lamp 1 according to the invention with socket is shown schematically.
  • This is a UV / VUV radiator, e.g. for surface cleaning, photolytics, ozone generation, metallization or UV curing.
  • This spotlight is designed for an electrical power consumption of about 20 W.
  • the discharge lamp 1 has a circular cylindrical discharge vessel 2 made of 0.7 mm to 1.5 mm thick quartz glass.
  • the discharge vessel 2 has a Outside diameter of about 40 mm and a length of about 120 mm.
  • the inside of the discharge vessel 2 is filled with xenon at a pressure of 20 kPa.
  • the discharge vessel 2 is closed like a dome and has a pump tip 3 in the middle of the dome.
  • a quartz tube 4 is fused to the discharge vessel 2.
  • this quartz tube may also be attached by means of glass solder.
  • the quartz tube 4 has a conical section 5 and a circular cylindrical section 6.
  • the conical section 5 connects the tubular discharge vessel 2 with the circular-cylindrical section 6, the outer diameter of which is approximately 25 mm.
  • a connector 7 of the type BNC - HT is arranged at the lamp remote end of the quartz tube 4.
  • outer electrodes 8a-8f On the outside of the discharge vessel 2 are six outer electrodes 8a-8f (the outer electrodes 8d-8f are not visible in Fig. 1) in the form of 12 cm long, about 1 to 1.5 mm wide, thin platinum strips equidistant and parallel attached to the lamp's longitudinal axis.
  • the ends of the electrode strips 8a-8f are each connected to a peripheral Platinstteifen 9, 10 with each other.
  • the one platinum strip 9, which is mounted in the immediate vicinity of the connection between the discharge vessel 2 and the quartz tube 4, is connected to a further platinum strip 11.
  • This further platinum strip 11 extends on the outside of the quartz tube 4 and ends at the connector 7, with the first pole he is connected. In this way, this platinum strip 11 acts as a power supply for the outer electrodes 8a-8f.
  • a modified base adapter 12 ISO KF 40 is arranged (sectional view). It comprises a vacuum small flange 13 and an inner sleeve 14 screwed thereto.
  • the inner sleeve 14 presses an O-ring 16 against a bevel 17 of the small flange 13 via a metal ring 15.
  • O-ring 16 against the outside of the quartz tube 4.
  • Another O-ring 18 is inserted in an inner groove 19 at the unthreaded end of the inner sleeve 14.
  • An annular groove 20 on the sealing side of the small flange 13 serves to receive a known centering ring with O-ring (not shown) for installation in a (not shown) process chamber.
  • the discharge vessel 3 tapers and merges into a pinch seal 21.
  • the pinch seal 21 ensures by means of a sealing foil 22 made of molybdenum a gas-tight connection of the inner electrode 23 with an outer power supply 24.
  • This power supply 24 is connected to the second pole of the connector plug 7 (not shown).
  • the inner electrode 23 is a coiled inside the discharge vessel 2 coiled metal wire.
  • the pinch seal 21 opposite end of the coil electrode 23 is fixed in the pump tip 3.
  • the respective diameters of the metal wire and the helix are 1 mm and 8 mm, respectively.
  • the pitch - i. the distance within which the helix makes a full turn - is 12 mm.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)

Description

Technisches GebietTechnical area

Die Erfindung geht aus von einer dielektrischen Barriere-Entladungslampe.The invention is based on a dielectric barrier discharge lamp.

Der Begriff "dielektrische Barriere-Entladungslampe" umfasst dabei Quellen elektromagnetischer Strahlung auf der Basis von dielektrisch behinderten Gasentladungen. Das Spektrum der Strahlung kann dabei sowohl den sichtbaren Bereich als auch den UV(Ultraviolett)/VUV(Vakuumultraviolett)-Bereich sowie den IR(Infrarot)-Bereich umfassen. Ferner kann auch eine Leuchtstoffschicht zur Konvertierung von VUV-Strahlung in Strahlung mit längeren Wellenlängen, z.B. UVA- oder sichtbare Strahlung (Licht) vorgesehen sein.The term "dielectric barrier discharge lamp" includes sources of electromagnetic radiation based on dielectrically impeded gas discharges. The spectrum of the radiation may include both the visible range and the UV (ultraviolet) / VUV (vacuum ultraviolet) range and the IR (infrared) range. Further, a phosphor layer for converting VUV radiation into longer wavelength radiation, e.g. UVA or visible radiation (light) may be provided.

Eine dielektrische Barriere-Entladungstampe setzt definitionsgemäß mindestens eine sogenannte dielektrisch behinderte Elektrode voraus. Eine dielektrisch behinderte Elektrode ist gegenüber dem Innern des Entladungsgefäßes bzw. des Entladungsgases mittels eines Dielektrikums getrennt. Dieses Dielektrikum - die dielektrische Barriere - kann beispielsweise als eine die Elektrode bedeckende dielektrische Schicht ausgeführt sein, oder sie ist durch das Entladungsgefäß der Lampe selbst gebildet, nämlich wenn die Elektrode auf der Außenseite der Wand des Entladungsgefäßes angeordnet ist. Letztere wird im Folgenden verkürzend als "Außenetektrode" bezeichnet.By definition, a dielectric barrier discharge lamp requires at least one so-called dielectrically impeded electrode. A dielectrically impeded electrode is separated from the interior of the discharge vessel or the discharge gas by means of a dielectric. This dielectric - the dielectric barrier - can be embodied, for example, as a dielectric layer covering the electrode, or it is formed by the discharge vessel of the lamp itself, namely when the electrode is arranged on the outside of the wall of the discharge vessel. The latter is abbreviated hereafter as "external electrode".

Die vorliegende Erfindung betrifft eine dielektrische Barriere-Entladungslampe, die mindestens eine im wesentlichen streifenförmige Außenelektrode der vorgenannten Art aufweist. Außerdem umfasst die Lampe ein längliches oder rohrförmiges, beidseitig verschlossenes Entladungsgefäß, welches eine ionisierbare Füllung umschließt.The present invention relates to a dielectric barrier discharge lamp comprising at least one substantially strip-shaped outer electrode of the aforementioned type. In addition, the lamp includes an oblong or tubular, sealed on both sides discharge vessel, which encloses an ionizable filling.

Die ionisierbare Füllung besteht üblicherweise aus einem Edelgas, beispielsweise Xenon oder einer Gasmischung. Während der Gasentladung, die bevorzugt mittels eines in der US 5 604 410 beschriebenen gepulsten Betriebsverfahrens betrieben wird, werden sogenannte Excimere gebildet. Excimere sind angeregte Moleküle, z.B. Xe2*, die bei der Rückkehr in den in der Regel ungebundenen Grundzustand elektromagnetische Strahlung emittieren. Im Falle von Xe2* liegt das Maximum der Molekülbandenstrahlung bei ca. 172 nm.The ionizable filling usually consists of a noble gas, for example xenon or a gas mixture. During the gas discharge, preferably by means of in the US 5 604 410 operated pulsed operating method, so-called excimers are formed. Excimers are excited molecules, such as Xe 2 *, which emit electromagnetic radiation when they return to the normally unbound ground state. In the case of Xe 2 *, the maximum of the molecular beam radiation is about 172 nm.

Dadurch eignen sich derartige Lampen als UV/VUV-Strahler in der Prozesstechnik, beispielsweise der Oberflächenreinigung, Photolytik, Ozonerzeugung, Metallisierung, und UV-Curing. Hierzu ist es in der Regel erforderlich, die Lampe direkt in einer Unterdruck-Prozessgasatmosphäre oder Vakuum zu betreiben. Dabei sind geeignete Vorkehrungen zum gasdichten Einbau derartiger Strahler in eine entsprechende Prozesskammer zu treffen.As a result, such lamps are suitable as UV / VUV lamps in process technology, for example, surface cleaning, photolytics, ozone generation, metallization, and UV curing. For this purpose, it is usually necessary to operate the lamp directly in a vacuum process gas atmosphere or vacuum. In this case, suitable measures for the gas-tight installation of such radiators are to be made in a corresponding process chamber.

Stand der TechnikState of the art

Aus der Schrift US 6 060 828 , insbesondere Figuren 5a bis 5c, ist bereits eine derartige Lampe mit Edison-Schraubsockel für die Allgemeinbeleuchtung bekannt. Diese Lampe weist eine wendelförmige Elektrode innerhalb des Entladungsgefäßes auf. Außerdem sind vier streifenförmige Elektroden auf der Außenwand des Entladungsgefäßes angeordnet.From the Scriptures US Pat. No. 6,060,828 , In particular Figures 5a to 5c, such a lamp with Edison screw base for general lighting is already known. This lamp has a helical electrode inside the discharge vessel. In addition, four strip-shaped electrodes are arranged on the outer wall of the discharge vessel.

Die EP-A 1 088 335 offenbart eine für UV-Bestrahlung geeignete dielektrische Barriere-Entladungslampe mit einen Sockel. Der Sockel weist zwar einen Flansch auf, der mittels Vergussmasse mit dem Quetschfuß der Lampe verbunden und für Unterdruckanwendungen geeignet ist. Allerdings ist diese Konzeption für Hochvakuum weniger geeignet. Nachteilig ist außerdem, dass relativ viel Vergussmasse benötigt wird, wenn diese den gesamten Raum zwischen dem Quetschfuß und der kreiszylindrischen Innenwand der Sockelhülse ausfüllen soll. Falls aber Lücken freigelassen werden, herrscht bei Unterdruckanwendungen auch in dem Bereich zwischen dem Quetschfußende und der nachfolgenden Dichtung ein Unterdruck. Dann besteht die Gefahr von parasitären Gasentladungen zwischen den Stromzuführungen.The EP-A 1 088 335 discloses a single-socket dielectric barrier discharge lamp suitable for UV irradiation. Although the base has a flange which is connected by means of potting compound with the squeeze of the lamp and suitable for vacuum applications. However, this concept is less suitable for high vacuum. Another disadvantage is that a relatively large amount of potting compound is required if it covers the entire space to fill between the pinch and the circular cylindrical inner wall of the base sleeve. If, however, gaps are left free, negative pressure prevails in the area between the squeeze foot end and the following seal. Then there is the risk of parasitic gas discharges between the power supply lines.

Die DE-A 100 48 986 offenbart ebenfalls eine für die UV-Bestrahlung geeignete dielektrische Barriere-Entladungslampe mit einen Sockel. Die Lampe selbst entspricht gattungsgemäß der in der bereits erwähnten US 6 060 828 , Figuren 5a bis 5c, offenbarten Lampe. Der Sockel weist eine Sockelhülse mit Kontaktfedern auf. Die Sockelhülse umschließt den Lampenfuß bzw. das entsprechende Lampenende derart, dass jede Kontaktfeder mit einer korrespondierenden streifenförmigen Außenelektrode in elektrisch leitfähigem Kontakt steht. Da der Sockel bzw. die Sockelhülse im Bereich der Kontaktfedern nicht gasdicht mit dem Lampengefäß verbunden ist, besteht auch hier die Gefahr von parasitären Gasentladungen zwischen den Stromzuführungen für die Außenelektroden, hier insbesondere auch den Kontaktfedern der Sockelhülse, und für die Innenelektrode.The DE-A 100 48 986 also discloses a single barrier dielectric barrier discharge lamp suitable for UV radiation. The lamp itself corresponds generically to the one already mentioned US Pat. No. 6,060,828 , Figures 5a to 5c, disclosed lamp. The base has a base sleeve with contact springs. The base sleeve surrounds the lamp base or the corresponding lamp end such that each contact spring is in electrically conductive contact with a corresponding strip-shaped outer electrode. Since the base or the base sleeve in the region of the contact springs is not connected gas-tight to the lamp vessel, there is also the risk of parasitic gas discharges between the power supply lines for the outer electrodes, here in particular the contact springs of the base sleeve, and for the inner electrode.

Darstellung der ErfindungPresentation of the invention

Die Aufgabe der vorliegenden Erfindung ist es, eine verbesserte dielektrische Barriere-Entladungslampe bereit zu stellen. Ein weiterer Aspekt ist, dass die dielektrische Barriere-Entladungslampe in einer Unterdruck-Umgebung einsetzbar sein soll.The object of the present invention is to provide an improved dielectric barrier discharge lamp. Another aspect is that the dielectric barrier discharge lamp should be usable in a negative pressure environment.

Diese Aufgabe wird gelöst mit einer dielektrischen Barriere-Entladungslampe mit Sockel, wobei die Entladungslampe Folgendes aufweist: ein längliches, beidseitig verschlossenes Entladungsgefäß, dessen Wand eine ionisierbare Füllung umschließt, Elektroden, wobei mindestens eine der Elektroden eine Innenelektrode ist, d.h. innerhalb des Entladungsgefäßes angeordnet ist und mindestens eine der Elektroden eine Außenelektrode ist, d.h. auf der Außenseite der Wand des Entladungsgefäßes angeordnet ist, eine Stromzuführung für die mindestens eine Innenelektrode und einen Lampenfuß, durch den hindurch die mindestens eine Innenelektrode gasdicht mit der Stromzuführung verbunden ist, dadurch gekennzeichnet, dass der Sockel ein Rohr umfasst, das am lampenfußseitigen Ende das Entladungsgefäßes gasdicht angesetzt ist und den Lampenfuß umgibt.This object is achieved with a dielectric barrier discharge lamp with a pedestal, the discharge lamp comprising: an elongate discharge vessel closed on both sides, the wall of which encloses an ionizable filling, electrodes, wherein at least one of the electrodes is an inner electrode, ie arranged inside the discharge vessel and at least one of the electrodes is an outer electrode, that is, disposed on the outside of the wall of the discharge vessel, a power supply for the at least one inner electrode and a lamp base, through which the at least one inner electrode is gas-tightly connected to the power supply, characterized in that the base comprises a tube which is attached gas-tight at the lampenfußseitigen end of the discharge vessel and surrounds the lamp base.

Besonders vorteilhafte Ausgestaltungen finden sich in den abhängigen Ansprüchen.Particularly advantageous embodiments can be found in the dependent claims.

Der Grundgedanke der Erfindung besteht darin, an das lampenfußseitige Ende des Entladungsgefäßes der dielektrischen Barriere-Entladungslampe ein Rohr gasdicht anzusetzen, das den Lampenfuß umgibt. Dadurch ist eine gasdichte Trennung zwischen den beiden Stromzuführungen für die Außen- bzw. Innenelektrode möglich. Auf diese Weise lassen sich die eingangs erwähnten parasitären Gasentladungen zwischen den Stromzuführungen bei Unterdruck verhindern.The basic idea of the invention is to gas-tightly attach a pipe surrounding the lamp base to the end of the lamp base of the discharge vessel of the dielectric barrier discharge lamp. This is a gas-tight separation between the two power supply lines for the outer and inner electrode possible. In this way, the parasitic gas discharges mentioned above can be prevented between the power supply lines at negative pressure.

Um auch unterschiedliche Durchmesser für das Entladungsgefäß und das daran angesetzte Rohr zu ermöglichen kann es zweckmäßig sein, einen geeigneten Übergangsbereich vorzusehen. In diesem Fall umfasst das Rohr einen zylindrischen sowie einen konischen Abschnitt, wobei der konische Abschnitt das Entladungsgefäß mit dem zylindrischen Abschnitt verbindet.In order to also allow different diameters for the discharge vessel and the tube attached thereto, it may be expedient to provide a suitable transition region. In this case, the tube comprises a cylindrical and a conical portion, wherein the conical portion connects the discharge vessel with the cylindrical portion.

Zum gasdichten Einbau der erfindungsgemäßen Lampe in eine Prozesskammer weist das Rohr zweckmäßigerweise zusätzlich ein Mittel zum Dichten auf.For gas-tight installation of the lamp according to the invention in a process chamber, the tube expediently additionally comprises a means for sealing.

In einer bevorzugten Ausführungsform ist dieses Mittel zum Dichten durch eine Kleinflanschdichtung realisiert, die über das Rohr gesteckt ist. Hierfür eignen sich prinzipiell handelsübliche, eventuell geeignet modifizierte Vakuum-Kleinflanschdichtungen für Glasrohre. Die Stromzuführung für die Außenelektroden ist, ebenso wie die Außenelektroden selbst, als leiterbahnähnliche Struktur ausgebildet. Die Dicke dieser Strukturen beträgt typischerweise nur wenige Mikrometer. Dies ermöglicht ein gasdichtes Hindurchführen der auf der Außenseite des Rohres angeordneten Stromzuführung der Außenelektroden durch den bei Vakuum-Kleinflanschen üblicherweise als Dichtung verwendeten O-Ring. Außerdem ist am lampenabgewandten Ende des Rohres zweckmäßigerweise ein Anschlussstecker, z.B. vom Typ BNC - HT, vorgesehen, der mit den beiden Stromzuführungen verbunden ist. Weitere Details hierzu findet sich im Ausführungsbeispiel.In a preferred embodiment, this means for sealing is realized by a small flange seal which is inserted over the pipe. For this purpose, commercially available, possibly suitably modified vacuum small flange seals for glass tubes are suitable in principle. The power supply for the outer electrodes is, as well as the outer electrodes themselves, designed as a track-like structure. The thickness of these structures is typically only a few microns. This allows a gas-tight passage of the arranged on the outside of the tube power supply of the outer electrodes by the vacuum usually used as a gasket O-ring. In addition, at the lamp-remote end of the tube expediently a connection plug, e.g. of the type BNC - HT, which is connected to the two power supply lines. Further details can be found in the embodiment.

Alternativ kann entweder ein metallischer Vakuumflansch mittels Übergangsgläser oder ein Glasflansch durch direktes Anschmelzen mit dem freien Ende des Rohres verbunden sein.Alternatively, either a metallic vacuum flange may be connected by means of transitional glasses or a glass flange by direct fusing to the free end of the tube.

Außerdem muss die Stromzuführung für die Außenelektrode nicht notwendigerweise leiterbahnähnlich auf der Außenseite des Rohres angeordnet sein.In addition, the power supply for the outer electrode does not necessarily have to be arranged on the outside of the pipe like a track.

Da die Außenelektroden vorzugsweise auf Massepotential gelegt werden, kann es auch vorteilhaft sein, die Außenelektroden direkt, beispielsweise mittels einer geeigneten Kontaktfeder, mit der metallischen Prozesskammer zu verbinden.Since the outer electrodes are preferably connected to ground potential, it may also be advantageous to connect the outer electrodes directly, for example by means of a suitable contact spring, to the metallic process chamber.

Wenn jedenfalls, wie vorstehend erläutert, die erfindungsgemäße Lampe mit Hilfe des Dichtungssockels gasdicht in eine Prozesskammer eingebaut ist, trennt das angesetzte Rohr die vom Luftdruck umgebene Stromzuführung der Innenelektrode von demjenigen Teil der mit den Außenelektroden verbundenen Stromzuführung, der der Prozessgasatmosphäre oder Vakuum ausgesetzt ist. Dadurch werden die eingangs erwähnten parasitären Entladungen zwischen den im Betrieb auf unterschiedlichem Potential liegenden Stromzuführungen wirkungsvoll verhindert.In any case, as explained above, if the lamp according to the invention is installed gas-tightly in a process chamber by means of the sealing base, the attached pipe separates the air pressure-surrounded power supply of the inner electrode from that part of the power supply connected to the external electrodes, which is exposed to the process gas atmosphere or vacuum. As a result, the above-mentioned parasitic discharges are effectively prevented between lying in operation at different potential power supply lines.

Kurze Beschreibung der ZeichnungShort description of the drawing

Im Folgenden soll die Erfindung anhand eines Ausführungsbeispiels näher erläutert werden. Die Figur zeigt:In the following, the invention will be explained in more detail with reference to an embodiment. The figure shows:

eine Draufsicht einer erfindungsgemäßen dielektrischen Barriere-Entladungslampe mit Sockel, einschließlich Sockel-Adapter (Schnittdarstellung).a top view of a dielectric barrier discharge lamp with socket according to the invention, including socket adapter (sectional view).

Bevorzugte Ausführung der ErfindungPreferred embodiment of the invention

In der Figur ist eine erfindungsgemäße dielektrische Barriere-Entladungslampe 1 mit Sockel schematisch dargestellt. Dabei handelt es sich um einen UV/VUV-Strahler, z.B. für die Oberflächenreinigung, Photolytik, Ozonerzeugung, Metallisierung oder UV-Curing. Dieser Strahler ist für eine elektrische Leistungsaufnahme von ca. 20 W ausgelegt.In the figure, a dielectric barrier discharge lamp 1 according to the invention with socket is shown schematically. This is a UV / VUV radiator, e.g. for surface cleaning, photolytics, ozone generation, metallization or UV curing. This spotlight is designed for an electrical power consumption of about 20 W.

Die Entladungslampe 1 weist ein kreiszylindrisches Entladungsgefäß 2 aus 0,7 mm bis 1,5 mm dickem Quarzglas auf. Das Entladungsgefäß 2 weist einen Außendurchmesser von ca. 40 mm und eine Länge von ca. 120 mm auf. Das -Innere des Entladungsgefäßes 2 ist mit Xenon bei einem Druck von 20 kPa gefüllt.The discharge lamp 1 has a circular cylindrical discharge vessel 2 made of 0.7 mm to 1.5 mm thick quartz glass. The discharge vessel 2 has a Outside diameter of about 40 mm and a length of about 120 mm. The inside of the discharge vessel 2 is filled with xenon at a pressure of 20 kPa.

An einem ersten Ende ist das Entladungsgefäß 2 kuppelartig verschlossen und weist in der Mitte der Kuppel eine Pumpspitze 3 auf. Im Bereich des der Pumpspitze 3 entgegengesetzten Lampenfußes ist am Entladungsgefäß 2 ein Quarzrohr 4 angeschmolzen. Alternativ kann dieses Quarzrohr auch mittels Glaslot angefügt sein. Das Quarzrohr 4 weist einen konischen Abschnitt 5 und einen kreiszylindrischen Abschnitt 6 auf. Der konische Abschnitt 5 verbindet das rohrförmige Entladungsgefäß 2 mit dem kreiszylindrischen Abschnitt 6, dessen Außendurchmesser ca. 25 mm beträgt. Am lampenabgewandten Ende des Quarzrohres 4 ist ein Anschlussstecker 7 vom Typ BNC - HT angeordnet.At a first end, the discharge vessel 2 is closed like a dome and has a pump tip 3 in the middle of the dome. In the region of the lamp tip opposite the pump tip 3, a quartz tube 4 is fused to the discharge vessel 2. Alternatively, this quartz tube may also be attached by means of glass solder. The quartz tube 4 has a conical section 5 and a circular cylindrical section 6. The conical section 5 connects the tubular discharge vessel 2 with the circular-cylindrical section 6, the outer diameter of which is approximately 25 mm. At the lamp remote end of the quartz tube 4, a connector 7 of the type BNC - HT is arranged.

Auf der Außenseite des Entladungsgefäßes 2 sind sechs Außenelektroden 8a-8f (die Außenelektroden 8d-8f sind in der Fig. 1 nicht zu sehen) in Form von 12 cm langen, ca. 1 bis 1,5 mm breiten, dünnen Platinstreifen äquidistant und parallel zur Lampenlängsachse angebracht. Die Enden der Elektrodenstreifen 8a-8f sind jeweils mit einem umlaufenden Platinstteifen 9, 10 miteinander verbunden. Der eine Platinstreifen 9, der in der unmittelbaren Nähe der Verbindung zwischen Entladungsgefäß 2 und Quarzrohr 4 angebracht ist, ist mit einem weiteren Platinstreifen 11 verbunden. Dieser weitere Platinstreifen 11 verläuft auf der Außenseite des Quarzrohrs 4 und endet am Anschlussstecker 7, mit dessen erstem Pol er verbunden ist. Auf diese Weise fungiert dieser Platinstreifen 11 als Stromzuführung für die Außenelektroden 8a-8f.On the outside of the discharge vessel 2 are six outer electrodes 8a-8f (the outer electrodes 8d-8f are not visible in Fig. 1) in the form of 12 cm long, about 1 to 1.5 mm wide, thin platinum strips equidistant and parallel attached to the lamp's longitudinal axis. The ends of the electrode strips 8a-8f are each connected to a peripheral Platinstteifen 9, 10 with each other. The one platinum strip 9, which is mounted in the immediate vicinity of the connection between the discharge vessel 2 and the quartz tube 4, is connected to a further platinum strip 11. This further platinum strip 11 extends on the outside of the quartz tube 4 and ends at the connector 7, with the first pole he is connected. In this way, this platinum strip 11 acts as a power supply for the outer electrodes 8a-8f.

Auf dem kreiszylindrischen Abschnitt 6 des Quarzrohres 4 ist ein modifizierter Sockel-Adapter 12 vom Typ ISO KF 40 angeordnet (Schnittdarstellung). Er umfasst einen Vakuum-Kleinflansch 13 und eine damit verschraubte Innenhülse 14. Die Innenhülse 14 drückt über einen Metallring 15 einen O-Ring 16 gegen eine Schräge 17 des Kleinflansches 13. Dadurch dichtet dieser, O-Ring 16 gegen die Außenseite des Quarzrohres 4. Ein weiterer O-Ring 18 ist in einer Innennut 19 am gewindefreien Ende der Innenhülse 14 eingelegt. Dadurch wird eine spannungsfreie, gasdichte Lagerung der Lampe 1 im Sockel-Adapter 12 erzielt. Eine Ringnut 20 auf der Dichtseite des Kleinflansches 13 dient zur Aufnahme eines an sich bekannten Zentrierringes mit O-Ring (nicht dargestellt) zum Einbau in eine (nicht dargestellte) Prozesskammer.On the circular cylindrical portion 6 of the quartz tube 4, a modified base adapter 12 ISO KF 40 is arranged (sectional view). It comprises a vacuum small flange 13 and an inner sleeve 14 screwed thereto. The inner sleeve 14 presses an O-ring 16 against a bevel 17 of the small flange 13 via a metal ring 15. O-ring 16 against the outside of the quartz tube 4. Another O-ring 18 is inserted in an inner groove 19 at the unthreaded end of the inner sleeve 14. As a result, a stress-free, gas-tight mounting of the lamp 1 in the socket adapter 12 is achieved. An annular groove 20 on the sealing side of the small flange 13 serves to receive a known centering ring with O-ring (not shown) for installation in a (not shown) process chamber.

An dem der Pumpspitze 3 gegenüberliegenden Ende verjüngt sich das Entladungsgefäß 3 und geht in eine Quetschdichtung 21 über. Die Quetschdichtung 21 gewährleistet mit Hilfe einer Dichtungsfolie 22 aus Molybdän eine gasdichte Verbindung der Innenelektrode 23 mit einer äußeren Stromzuführung 24. Diese Stromzuführung 24 ist mit dem zweiten Pol des Anschlusssteckers 7 verbunden (nicht dargestellt).At the end opposite the pump tip 3, the discharge vessel 3 tapers and merges into a pinch seal 21. The pinch seal 21 ensures by means of a sealing foil 22 made of molybdenum a gas-tight connection of the inner electrode 23 with an outer power supply 24. This power supply 24 is connected to the second pole of the connector plug 7 (not shown).

Die Innenelektrode 23 ist ein innerhalb des Entladungsgefäßes 2 zentrisch angeordneter gewendelter Metalldraht. Das der Quetschdichtung 21 entgegengesetzte Ende der Wendelelektrode 23 ist in der Pumpspitze 3 fixiert. Die jeweiligen Durchmesser des Metalldrahtes und der Wendel betragen 1 mm bzw. 8 mm. Die Ganghöhe - d.h. die Strecke, innerhalb der die Wendel eine vollständige Umdrehung ausführt - beträgt 12 mm.The inner electrode 23 is a coiled inside the discharge vessel 2 coiled metal wire. The pinch seal 21 opposite end of the coil electrode 23 is fixed in the pump tip 3. The respective diameters of the metal wire and the helix are 1 mm and 8 mm, respectively. The pitch - i. the distance within which the helix makes a full turn - is 12 mm.

Details zu der Funktionsweise der Elektroden während des Lampenbetriebs sind in der bereits zitierten US 6 060 828 , insbesondere in der Beschreibung zu den Figuren 5a bis 5c, beschrieben.Details on the operation of the electrodes during lamp operation are in the already cited US Pat. No. 6,060,828 , in particular in the description of FIGS. 5a to 5c.

Claims (13)

  1. Dielectric barrier discharge lamp (1) having a base, the discharge lamp (1) having the following:
    - an elongate discharge vessel (2), which is sealed at both ends, and whose wall surrounds an ionizable filling,
    - electrodes (8a-8f, 23), at least one of the electrodes being an inner electrode (23), i.e. being arranged within the discharge vessel (2), and at least one of the electrodes being an outer electrode (8a-8f), i.e. being arranged on the outside of the wall of the discharge vessel (2),
    - a power supply line (24) for the at least one inner electrode (23) and a lamp foot (21), through which the at least one inner electrode (23) is connected in a gas-tight manner to the power supply line (24),
    characterized in that the base comprises
    • a tube (4) which is fitted in a gas-tight manner to the lamp foot-side end of the discharge vessel (2) and surrounds the lamp foot (21).
  2. Dielectric barrier discharge lamp having a base according to Claim 1, the tube (4) also having a sealing means (12).
  3. Dielectric barrier discharge lamp having a base according to Claim 2, the sealing means (12) comprising a vacuum flange (13).
  4. Dielectric barrier discharge lamp having a base according to Claim 3, the vacuum flange (13) being plugged onto the tube.
  5. Dielectric barrier discharge lamp having a base according to one of the preceding claims, a power supply line (11) for the at least one outer electrode (8a-8f) being arranged on the outside of the tube and being passed through the sealing means (12).
  6. Dielectric barrier discharge lamp having a base according to one of the preceding claims having a connection plug (7) on that end of the tube (4) which faces away from the lamp, at least the power supply line (24) for the inner electrode (23) being connected to said connection plug (7).
  7. Dielectric barrier discharge lamp having a base according to Claim 6, the connection plug (7) being of the type BNC - HT.
  8. Dielectric barrier discharge lamp having a base according to one of the preceding claims, the outer electrode(s) (8a-8f) and the power supply line (11) for the outer electrode(s) having conductor track-like structures.
  9. Dielectric barrier discharge lamp having a base according to Claim 8, the conductor track-like structures comprising two or more strips (8a-8f, 11) which are fitted in the axial direction and with a mutual spacing on the outside of the discharge vessel (2).
  10. Dielectric barrier discharge lamp having a base according to Claim 3, the vacuum flange (13) being made of the same material as the tube and being fused to the free end of the tube.
  11. Dielectric barrier discharge lamp having a base according to Claim 3, the vacuum flange (13) being made of metal and being fused to the free end of the tube by means of glass transition elements.
  12. Dielectric barrier discharge lamp having a base according to one of the preceding claims, the inner electrode (23) being helical and being oriented axially with respect to the discharge vessel (2).
  13. Dielectric barrier discharge lamp having a base according to one of the preceding claims, the tube (4) having a cylindrical (6) and a conical section (5), and the conical section (5) connecting the discharge vessel (2) to the cylindrical section (6).
EP03752699A 2002-05-17 2003-05-14 Dielectric barrier discharge lamp with a base Expired - Lifetime EP1506567B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10222100 2002-05-17
DE10222100A DE10222100A1 (en) 2002-05-17 2002-05-17 Dielectric barrier discharge lamp for producing visible, ultraviolet, vacuum ultraviolet and infrared radiation has base with tube fitted to lamp foot end of discharge vessel and enclosing lamp foot
PCT/DE2003/001554 WO2003098653A2 (en) 2002-05-17 2003-05-14 Dielectric barrier discharge lamp with a base

Publications (2)

Publication Number Publication Date
EP1506567A2 EP1506567A2 (en) 2005-02-16
EP1506567B1 true EP1506567B1 (en) 2007-07-18

Family

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Application Number Title Priority Date Filing Date
EP03752699A Expired - Lifetime EP1506567B1 (en) 2002-05-17 2003-05-14 Dielectric barrier discharge lamp with a base

Country Status (8)

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US (1) US7224111B2 (en)
EP (1) EP1506567B1 (en)
JP (1) JP4330527B2 (en)
KR (1) KR100697452B1 (en)
CA (1) CA2486200A1 (en)
DE (2) DE10222100A1 (en)
TW (1) TWI287820B (en)
WO (1) WO2003098653A2 (en)

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DE102010043208A1 (en) 2010-11-02 2012-05-03 Osram Ag Device for irradiating surfaces
DE102010043215A1 (en) 2010-11-02 2012-05-03 Osram Ag Spotlight with base for the irradiation of surfaces

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DE102010043208A1 (en) 2010-11-02 2012-05-03 Osram Ag Device for irradiating surfaces
DE102010043215A1 (en) 2010-11-02 2012-05-03 Osram Ag Spotlight with base for the irradiation of surfaces
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Also Published As

Publication number Publication date
US7224111B2 (en) 2007-05-29
WO2003098653A2 (en) 2003-11-27
JP4330527B2 (en) 2009-09-16
DE10222100A1 (en) 2003-11-27
KR20050000547A (en) 2005-01-05
CA2486200A1 (en) 2003-11-27
EP1506567A2 (en) 2005-02-16
TWI287820B (en) 2007-10-01
WO2003098653A3 (en) 2004-12-23
TW200307309A (en) 2003-12-01
US20050218775A1 (en) 2005-10-06
KR100697452B1 (en) 2007-03-20
DE50307709D1 (en) 2007-08-30
JP2005526361A (en) 2005-09-02

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