EP1473782B1 - Piezoelectric device and method to manufacture a piezoelectric device - Google Patents
Piezoelectric device and method to manufacture a piezoelectric device Download PDFInfo
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- EP1473782B1 EP1473782B1 EP04101828A EP04101828A EP1473782B1 EP 1473782 B1 EP1473782 B1 EP 1473782B1 EP 04101828 A EP04101828 A EP 04101828A EP 04101828 A EP04101828 A EP 04101828A EP 1473782 B1 EP1473782 B1 EP 1473782B1
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- Prior art keywords
- conductive
- piezoelectric
- material layer
- supporting substrate
- piezoelectric device
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
Definitions
- the present invention relates to piezoelectric devices and, more particularly, to a piezoelectric device which is well suited for interconnecting with other components and which is well insulated.
- the present invention also relates to a manufacturing method of such a piezoelectric device.
- Piezoelectric materials are materials capable of converting electrical energy into mechanical energy and vice versa. Such materials can be used as sensors (mechanical input, electrical output), as actuators (electrical input, mechanical output) or as vibration control devices (active where power is supplied to the system and passive where the energy generated is dissipated by an electrical component).
- the piezoelectric material may be in plate form (piezoceramic such as PZT 5A or PZT 5H), in fiber form, or as a single crystal.
- the molecular structure of the piezoelectric material is in crystal form, with the piezoelectric effect occurring along the center axis of the crystal.
- Poling is the operation performed to align all the piezoelectric crystals in one direction.
- the direction of alignment is typically referred as the poling direction in which one side of the material has a negative charge, and the opposite side has a positive charge.
- the maximum efficiency of energy conversion occurs along the poling direction. This is important to know so that there is a direct correlation between the voltage applied and the direction of the motion caused by the piezoelectric material.
- Piezoelectric materials are typically driven in a "d31" direction (through the thickness) or in a "d33" direction (along the surface of the material).
- Piezoelectric materials are typically driven at high voltages (+/- 200V or +/- 400V). The voltages can be hazardous if contacted by an individual during operation. Packaging and electrical insulation is critical for further utilization of such devices in areas where human contact may be possible.
- a piezoelectric device having the features of the preamble of the independent claim 1 and being produced with a method having the features of the preamble of independent claim 13 is already known from JP-A-61 040071 .
- the present invention comprises a novel way to package and manufacture a piezoelectric device.
- the key features of the packaging method include the encapsulation of the conductive piezoelectric material and the ease of electrical connectivity of the device to an external electrical component.
- the present manufacturing process employs a lamination process and a coating process.
- the lamination process is used to adhere one side of the piezoelectric device to a flexible substrate having conductive traces disposed thereon and the coating process is used on the second, opposing side of the piezoelectric device to encapsulate and protect the device.
- the piezoelectric material in fiber, powder or plate composition, is first bonded to the substrate having the conductive traces via the lamination process.
- the bonded device is then coated on the exposed side by insulating material that is applied by a spray-paint or powder coating operation.
- insulating material that is applied by a spray-paint or powder coating operation.
- copper-clad flexible conductive material is used in a middle layer (between the two pieces of piezoceramic material) and both external sides of the device are coated.
- the advantages of the present invention over prior art piezoelectric packaging techniques is the ability to obtain very good energy transfer through the thin copper-clad conductive material, and to provide very good insulation and impact resistance to the outside environment through the coating process. Additionally, the manufacturing process used is straight forward and allows for high volume and low cost manufacture of piezoelectric devices. The use of flex circuitry material makes the electrical connections to the piezoelectric devices very reliable and easy to use.
- the present invention in one embodiment, is a piezoelectric device comprising a supporting substrate having a first conductive trace on a first surface and a second conductive trace on the first surface and spaced from the first conductive trace.
- a piezoelectric material layer has first and second surfaces, the first surface of the piezoelectric material layer being secured to the first surface of the supporting substrate and electrically connected to the first conductive trace.
- the second surface of the piezoelectric material layer is electrically connected to the second conductive trace by a conductive strip, the conductive strip consisting of one of a conductive paint and a coated conductive epoxy.
- a protective coating extends over at least the second surface of the piezoelectric material layer so that at least a portion of the first and second conductive traces are exposed.
- the invention further comprises a method of making a piezoelectric device comprising the steps of: providing a supporting substrate having a first conductive trace on a first surface and a second conductive trace on the first surface and spaced apart from the first conductive trace; securing a first surface of a piezoelectric material layer to the first surface of the supporting substrate so that the first surface of the piezoelectric material layer is electrically connected to the first conductive trace; electrically connecting a second surface of the piezoelectric material layer to the second conductive trace by a conductive strip consisting of one of a conductive paint and a coated conductive epoxy; and applying a protective coating over at least the second surface of the piezoelectric material layer so that at least a portion of the first and second conductive traces are exposed.
- Piezoelectric materials especially piezoceramics
- the electrical connection to such materials is typically done by soldering directly to the electroded ceramic. This method, which requires hand labor, is costly, and is not very reliable because the soldering process may cause the ceramic to crack and break.
- a prior art lamination process requires several layers of materials and its packaging adds to the weight of the piezoelectric device and limits its performance due to the extra layers and increased rigidity in the packaging.
- the present invention uses a combination of flex circuitry and lamination processes, along with coatings and spray painting processes to achieve a reliable and effective package for a piezoceramic component.
- fig. 1 is an exploded diagrammatic view of the components that make up a piezoelectric device 10 in accordance with a preferred embodiment of the present invention.
- the piezoelectric device 10 is comprised of a supporting substrate 12, a piezoelectric material layer 18 and a protective coating 26.
- the supporting substrate 12 is preferably formed of a flexible insulative material such as polyester, polyamide or other suitable insulating materials.
- the supporting substrate 12 is formed of a material known as Kapton TM .
- Kapton TM a material known as Kapton TM .
- the supporting substrate 12 includes a first surface 12a and a second surface 12b.
- a first conductive trace 14 is disposed on the first surface 12a of the supporting substrate 12. As shown in fig. 1, the first conductive trace 14 is generally rectangularly shaped. A second conductive trace 16 is also disposed on the first surface 12a of the supporting substrate 12. As shown in fig. 1, the second conductive trace 16 includes a generally square area 16a and a generally rectangular area 16b. The rectangular area 16b of the second conductive trace 16 extends generally parallel to and is spaced apart from the first conductive trace 14. As will become apparent hereinafter, the distal ends of the conductive traces 14, 16 are used for making an electrical connection between the piezoelectric device 10 and other electrical components (not shown).
- both the first and second conductive traces 14, 16 are formed of copper.
- either or both of the conductive traces 14, 16 could be formed of any other suitable metallic or other electrically conductive material.
- a conductive epoxy paste or film may be used to form either or both of the conductive traces 14, 16.
- the conductive traces 14, 16 may be etched from a copper-clad material, or a bonding process may be employed for securing the conductive traces 14, 16 to the supporting substrate 12.
- the actual size and shape of the first and second conductive traces 14, 16, may vary from that shown in fig. 1 if desired.
- the piezoelectric material layer 18 is comprised of a first or lower surface 18a and a second or upper surface 18b. As is understood by those of ordinary skill in the art, both surfaces 18a and 18b must be electrically connected to another electrical component for operation of the piezoelectric device 10.
- the first surface 18a of the piezoelectric material layer 18 is electrically connected to the rectangular area 16b of the second conductive trace 16 and the second surface 18b of the piezoelectric material layer 18 is electrically connected to the first conductive trace 14.
- mechanical and electrical connection between the first surface 18a of the piezoelectric material layer 18 and the first surface 12a of the supporting substrate 12 is made using a conductive bonding film 20 as shown in fig. 1.
- the conductive bonding film 20 is an epoxy film such as a B-stage or C-stage epoxy film that can be cured at temperatures below 176,6°C (350° Fahrenheit) Temperatures above 176,6°C (350° Fahrenheit) may cause damage to the polarization field of the piezoelectric material layer 18, diminishing the effectiveness of the electro-mechanical coupling.
- the piezoelectric material layer 18 is secured to the supporting substrate 12 utilizing a lamination process in which pressure is applied to the second surface 18b of the piezoelectric material layer 18 and to the second surface 12b of the supporting substrate 12 so that the conductive bonding film 20 flows and creates a good bond between the piezoelectric material layer 18, the square area 16a of the second conductive trace 16 and the first surface 12a of the supporting substrate 12.
- the amount of pressure applied depends upon the thickness of the piezoelectric material layer 18. The thinner the piezoelectric material layer 18, the lighter the pressure that is applied. By controlling the amount of pressure applied, breakage of the fragile piezoceramic material used to form the piezoelectric material layer 18 can be minimized.
- Typical pressures which are used are in the range of about 0,3402 atm (5 PSI) to about 68,04 atm (1000 PSI).
- the insulation 22 is a coating such as Eccobond® or some other insulating epoxy material. Other insulating materials may be used.
- the insulation 22 prevents the second surface 18b of the piezoelectric material layer 18 from contacting the second conductive trace 16 and prevents the first surface 18a of the piezoelectric material layer from contacting the first conductive trace 14 to avoid a short circuit condition.
- a conductive strip 24 is used for making an electrical connection between the second surface 18b of the piezoelectric material layer 18 and the first conductive trace 14.
- the conductive strip 24 is formed of a strip of conductive paint on a strip of a coated conductive epoxy.
- the conductive paint or conductive epoxy may be hand brushed or screened in placed depending upon the need for accuracy and manufacturing quality requirements.
- the conductive strip 24 is applied at room temperature.
- a protective coating 26 is applied over at least the second surface 18b of the piezoelectric material layer 18.
- the protective coating 26 may be applied by spray painting with an electrically insulating paint or using a powder coating process or in any other manner known to those of ordinary skill in the art.
- a powder coating process provides for better control over the insulating properties of the material. For example, a powder coating of approximately 0,0508 mm (0.002 inch) can provide as much as 2000 V insulation resistance.
- the powder coating may be selected to accommodate different environmental conditions of concern. For example, if the piezoelectric device 10 is to be used in a high moisture environment, a highly moisture resistant coating may be employed. Polyester-based coatings allow for a flexible and protective construction. A packaging of this type not only provides the durability and connectivity that is lacking in unpackaged piezoelectric devices but also does not significantly diminish the actuation performance due to the flexibility of the packaging. Tests performed demonstrate a very minimal degradation in actuation performance utilizing such a protective coating 26.
- Typical spray paints that may be employed include Krylon 1302 which has a dielectric strength of 1,350 Volts per 25.4 ⁇ m (mil). or a Sprayon SB-6-665 red epoxy insulating enamel which has a dielectric strength of 1,100 Volts per 25.4 ⁇ m (mil).
- the protective coating 26 may include multiple layers of different coating materials that may include rubber based tapes or epoxies or the like. Such materials will produce a thicker coating but will also provide added protection if the piezoelectric device is exposed to impact and/or harsh environmental agents. It will be appreciated by those of ordinary skill in the art that the protective coating 26 could be formed of other materials and could be applied in some other manner.
- the protective coating 26 while covering the piezoelectric material layer 18 does not extend over the entire surface of the supporting substrate 12. Instead, at least the distal portions of each of the conductive traces 14, 16 remain exposed so that they can be used as connection points for the piezoelectric device 10.
- An electrical connector (not shown) may be connected directly to the distal ends of the conductive traces 14, 16 or, conductive leads (not shown) may be soldered to the conductive traces 14, 16.
- the piezoelectric electric device 10 may be bonded to a structure individually or used in pairs as actuators.
- the piezoelectric device 10 includes a bonding substrate 28 which is applied to the second surface 12b of the supporting substrate 12.
- the bonding substrate 28 could comprise double sided tape, a heat activated epoxy or any other suitable connecting material known to those or ordinary skill in the art.
- the bonding substrate 28 may be secured to the piezoelectric device 10 as part of the manufacturing process or could be added at a later time, for example, when the piezoelectric device 10 is about to be applied to some other supporting structure for use.
- Piezoelectric devices of the type disclosed are often used as an actuator to open or close a valve or in ways that does not require attachment to an existing structure.
- Fig. 4 illustrates a bender formed in accordance with the present invention.
- the bender is essentially the same as the single layer piezoelectric device 10 described above but with the addition of a second piezoelectric device applied to the second surface 12b of the supporting substrate 12 effectively as a mirror image.
- the various components of the second piezoelectric device have been given the same reference numerals as with the piezoelectric electric device 10 but with the addition of a 1 before each reference numeral.
- the second piezoelectric material layer has been given reference numeral 118 and the third and fourth conductive traces have been given reference numerals 114 and 116 respectively. Connections may be made through a hole or other connection scheme known to those of ordinary skill in the art.
- the present invention comprises a package for a piezoelectric device and a method of making the package. It will be appreciated by those skilled in the art that changes could be made to the embodiments described above without departing from the broad inventive concepts thereof.
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
- The present invention relates to piezoelectric devices and, more particularly, to a piezoelectric device which is well suited for interconnecting with other components and which is well insulated.
- The present invention also relates to a manufacturing method of such a piezoelectric device.
- Piezoelectric materials are materials capable of converting electrical energy into mechanical energy and vice versa. Such materials can be used as sensors (mechanical input, electrical output), as actuators (electrical input, mechanical output) or as vibration control devices (active where power is supplied to the system and passive where the energy generated is dissipated by an electrical component).
- The piezoelectric material may be in plate form (piezoceramic such as PZT 5A or PZT 5H), in fiber form, or as a single crystal. The molecular structure of the piezoelectric material is in crystal form, with the piezoelectric effect occurring along the center axis of the crystal.
- Poling is the operation performed to align all the piezoelectric crystals in one direction. The direction of alignment is typically referred as the poling direction in which one side of the material has a negative charge, and the opposite side has a positive charge. The maximum efficiency of energy conversion occurs along the poling direction. This is important to know so that there is a direct correlation between the voltage applied and the direction of the motion caused by the piezoelectric material. Piezoelectric materials are typically driven in a "d31" direction (through the thickness) or in a "d33" direction (along the surface of the material). Piezoelectric materials are typically driven at high voltages (+/- 200V or +/- 400V). The voltages can be hazardous if contacted by an individual during operation. Packaging and electrical insulation is critical for further utilization of such devices in areas where human contact may be possible.
- Furthermore, a piezoelectric device having the features of the preamble of the independent claim 1 and being produced with a method having the features of the preamble of independent claim 13 is already known from
JP-A-61 040071 - The present invention comprises a novel way to package and manufacture a piezoelectric device. The key features of the packaging method include the encapsulation of the conductive piezoelectric material and the ease of electrical connectivity of the device to an external electrical component.
- The present manufacturing process employs a lamination process and a coating process.
- The lamination process is used to adhere one side of the piezoelectric device to a flexible substrate having conductive traces disposed thereon and the coating process is used on the second, opposing side of the piezoelectric device to encapsulate and protect the device.
- More specifically, the piezoelectric material, in fiber, powder or plate composition, is first bonded to the substrate having the conductive traces via the lamination process. The bonded device is then coated on the exposed side by insulating material that is applied by a spray-paint or powder coating operation. When multiple layers of piezoelectric material are used, copper-clad flexible conductive material is used in a middle layer (between the two pieces of piezoceramic material) and both external sides of the device are coated.
- The advantages of the present invention over prior art piezoelectric packaging techniques is the ability to obtain very good energy transfer through the thin copper-clad conductive material, and to provide very good insulation and impact resistance to the outside environment through the coating process. Additionally, the manufacturing process used is straight forward and allows for high volume and low cost manufacture of piezoelectric devices. The use of flex circuitry material makes the electrical connections to the piezoelectric devices very reliable and easy to use.
- Briefly stated, the present invention, in one embodiment, is a piezoelectric device comprising a supporting substrate having a first conductive trace on a first surface and a second conductive trace on the first surface and spaced from the first conductive trace. A piezoelectric material layer has first and second surfaces, the first surface of the piezoelectric material layer being secured to the first surface of the supporting substrate and electrically connected to the first conductive trace. The second surface of the piezoelectric material layer is electrically connected to the second conductive trace by a conductive strip, the conductive strip consisting of one of a conductive paint and a coated conductive epoxy. A protective coating extends over at least the second surface of the piezoelectric material layer so that at least a portion of the first and second conductive traces are exposed.
- The invention further comprises a method of making a piezoelectric device comprising the steps of: providing a supporting substrate having a first conductive trace on a first surface and a second conductive trace on the first surface and spaced apart from the first conductive trace; securing a first surface of a piezoelectric material layer to the first surface of the supporting substrate so that the first surface of the piezoelectric material layer is electrically connected to the first conductive trace; electrically connecting a second surface of the piezoelectric material layer to the second conductive trace by a conductive strip consisting of one of a conductive paint and a coated conductive epoxy; and applying a protective coating over at least the second surface of the piezoelectric material layer so that at least a portion of the first and second conductive traces are exposed.
- The foregoing summary, as well as the following detail description of preferred embodiments of the invention will be better understood when read in conjunction with the appended drawings.
- For the purpose of illustrating the invention, there are shown in the drawings embodiments which are presently preferred. It should be understood, however, that the invention is not limited to the precise arrangements and instrumentality shown.
- In the drawings:
- fig. 1 is an exploded perspective diagram of a piezoelectric device in accordance with a first preferred embodiment of the present invention;
- fig. 2 is a perspective view of the piezoelectric device of fig. 1 in an assembled condition;
- fig. 3 is a perspective view of the piezoelectric device shown in fig. 2 with the addition of a bonding substrate; and
- fig. 4 is an exploded perspective diagram of an alternate embodiment of a dual piezoelectric device in accordance with the present invention.
- Piezoelectric materials, especially piezoceramics, are quite fragile. The electrical connection to such materials is typically done by soldering directly to the electroded ceramic. This method, which requires hand labor, is costly, and is not very reliable because the soldering process may cause the ceramic to crack and break. A prior art lamination process requires several layers of materials and its packaging adds to the weight of the piezoelectric device and limits its performance due to the extra layers and increased rigidity in the packaging. The present invention uses a combination of flex circuitry and lamination processes, along with coatings and spray painting processes to achieve a reliable and effective package for a piezoceramic component.
- Referring to the drawings in which the same reference numerals are used to indicate the same component throughout the several figures, fig. 1 is an exploded diagrammatic view of the components that make up a
piezoelectric device 10 in accordance with a preferred embodiment of the present invention. - The
piezoelectric device 10 is comprised of a supportingsubstrate 12, apiezoelectric material layer 18 and aprotective coating 26. The supportingsubstrate 12 is preferably formed of a flexible insulative material such as polyester, polyamide or other suitable insulating materials. In the present embodiment, the supportingsubstrate 12 is formed of a material known as Kapton™. However, it will appreciated by those of ordinary skill in the art that any other suitable flexible insulating material may alternatively be employed for forming the supportingsubstrate 12. The supportingsubstrate 12 includes afirst surface 12a and asecond surface 12b. - A first
conductive trace 14 is disposed on thefirst surface 12a of the supportingsubstrate 12. As shown in fig. 1, the firstconductive trace 14 is generally rectangularly shaped. A secondconductive trace 16 is also disposed on thefirst surface 12a of the supportingsubstrate 12. As shown in fig. 1, the secondconductive trace 16 includes a generallysquare area 16a and a generallyrectangular area 16b. Therectangular area 16b of the secondconductive trace 16 extends generally parallel to and is spaced apart from the firstconductive trace 14. As will become apparent hereinafter, the distal ends of theconductive traces piezoelectric device 10 and other electrical components (not shown). - In the present embodiment, both the first and second
conductive traces conductive traces conductive traces conductive traces conductive traces substrate 12. Further, the actual size and shape of the first and secondconductive traces - As shown in fig. 1, the
piezoelectric material layer 18 is comprised of a first orlower surface 18a and a second orupper surface 18b. As is understood by those of ordinary skill in the art, bothsurfaces piezoelectric device 10. In the present embodiment, thefirst surface 18a of thepiezoelectric material layer 18 is electrically connected to therectangular area 16b of the secondconductive trace 16 and thesecond surface 18b of thepiezoelectric material layer 18 is electrically connected to the firstconductive trace 14. - In the present embodiment, mechanical and electrical connection between the
first surface 18a of thepiezoelectric material layer 18 and thefirst surface 12a of the supportingsubstrate 12 is made using aconductive bonding film 20 as shown in fig. 1. - In the present embodiment, the
conductive bonding film 20 is an epoxy film such as a B-stage or C-stage epoxy film that can be cured at temperatures below 176,6°C (350° Fahrenheit) Temperatures above 176,6°C (350° Fahrenheit) may cause damage to the polarization field of thepiezoelectric material layer 18, diminishing the effectiveness of the electro-mechanical coupling. Preferably, thepiezoelectric material layer 18 is secured to the supportingsubstrate 12 utilizing a lamination process in which pressure is applied to thesecond surface 18b of thepiezoelectric material layer 18 and to thesecond surface 12b of the supportingsubstrate 12 so that theconductive bonding film 20 flows and creates a good bond between thepiezoelectric material layer 18, thesquare area 16a of the secondconductive trace 16 and thefirst surface 12a of the supportingsubstrate 12. The amount of pressure applied depends upon the thickness of thepiezoelectric material layer 18. The thinner thepiezoelectric material layer 18, the lighter the pressure that is applied. By controlling the amount of pressure applied, breakage of the fragile piezoceramic material used to form thepiezoelectric material layer 18 can be minimized. Typical pressures which are used are in the range of about 0,3402 atm (5 PSI) to about 68,04 atm (1000 PSI). - It will be appreciated by those skilled in the art that by using a
conductive bonding film 20, a good electrical connection is made between thefirst surface 18a of thepiezoelectric material layer 18 and thesquare area 16a of the secondconductive trace 16. It will be appreciated by those of ordinary skill in the art that other materials or techniques may be employed for laminating or otherwise securing thepiezoelectric material layer 18 to the supportingsubstrate 12 and to make the requisite electrical connection between thefirst surface 18a of thepiezoelectric material layer 18 and the secondconductive trace 16. - Once the
piezoelectric material layer 18 has been securely bonded to the supportingsubstrate 12, at least the edge of thepiezoelectric material layer 18 facing the firstconductive trace 14 and therectangular area 16b of the secondconductive trace 16 is covered withinsulation 22. In the present embodiment theinsulation 22 is a coating such as Eccobond® or some other insulating epoxy material. Other insulating materials may be used. Theinsulation 22 prevents thesecond surface 18b of thepiezoelectric material layer 18 from contacting the secondconductive trace 16 and prevents thefirst surface 18a of the piezoelectric material layer from contacting the firstconductive trace 14 to avoid a short circuit condition. - As shown in fig. 1, a
conductive strip 24 is used for making an electrical connection between thesecond surface 18b of thepiezoelectric material layer 18 and the firstconductive trace 14. Theconductive strip 24 is formed of a strip of conductive paint on a strip of a coated conductive epoxy. The conductive paint or conductive epoxy may be hand brushed or screened in placed depending upon the need for accuracy and manufacturing quality requirements. Typically theconductive strip 24 is applied at room temperature. - Once the
piezoelectric material layer 18 has been secured to the supportingsubstrate 12 with bothsurfaces protective coating 26 is applied over at least thesecond surface 18b of thepiezoelectric material layer 18. - The
protective coating 26 may be applied by spray painting with an electrically insulating paint or using a powder coating process or in any other manner known to those of ordinary skill in the art. A powder coating process provides for better control over the insulating properties of the material. For example, a powder coating of approximately 0,0508 mm (0.002 inch) can provide as much as 2000 V insulation resistance. - The powder coating may be selected to accommodate different environmental conditions of concern. For example, if the
piezoelectric device 10 is to be used in a high moisture environment, a highly moisture resistant coating may be employed. Polyester-based coatings allow for a flexible and protective construction. A packaging of this type not only provides the durability and connectivity that is lacking in unpackaged piezoelectric devices but also does not significantly diminish the actuation performance due to the flexibility of the packaging. Tests performed demonstrate a very minimal degradation in actuation performance utilizing such aprotective coating 26. - If a spray painting operation is used for applying the
protective coating 26, multiple coats may be required to achieve the desired electrical insulation resistance. Typical spray paints that may be employed include Krylon 1302 which has a dielectric strength of 1,350 Volts per 25.4 µm (mil). or a Sprayon SB-6-665 red epoxy insulating enamel which has a dielectric strength of 1,100 Volts per 25.4 µm (mil). - If impact resistance of the
piezoelectric device 10 is of concern, theprotective coating 26 may include multiple layers of different coating materials that may include rubber based tapes or epoxies or the like. Such materials will produce a thicker coating but will also provide added protection if the piezoelectric device is exposed to impact and/or harsh environmental agents. It will be appreciated by those of ordinary skill in the art that theprotective coating 26 could be formed of other materials and could be applied in some other manner. - As best shown in fig. 2 the
protective coating 26 while covering thepiezoelectric material layer 18 does not extend over the entire surface of the supportingsubstrate 12. Instead, at least the distal portions of each of the conductive traces 14, 16 remain exposed so that they can be used as connection points for thepiezoelectric device 10. An electrical connector (not shown) may be connected directly to the distal ends of the conductive traces 14, 16 or, conductive leads (not shown) may be soldered to the conductive traces 14, 16. - Once the piezoelectric
electric device 10 has been completed it may be bonded to a structure individually or used in pairs as actuators. - In the embodiment shown in fig. 3, the
piezoelectric device 10 includes abonding substrate 28 which is applied to thesecond surface 12b of the supportingsubstrate 12. Thebonding substrate 28 could comprise double sided tape, a heat activated epoxy or any other suitable connecting material known to those or ordinary skill in the art. Thebonding substrate 28 may be secured to thepiezoelectric device 10 as part of the manufacturing process or could be added at a later time, for example, when thepiezoelectric device 10 is about to be applied to some other supporting structure for use. - Piezoelectric devices of the type disclosed are often used as an actuator to open or close a valve or in ways that does not require attachment to an existing structure. In such applications, there are typically at least two layers of piezoelectric materials that comprise the overall actuated device which is typically referred to as a "bender".
- Fig. 4 illustrates a bender formed in accordance with the present invention. The bender is essentially the same as the single
layer piezoelectric device 10 described above but with the addition of a second piezoelectric device applied to thesecond surface 12b of the supportingsubstrate 12 effectively as a mirror image. For the sake of clarity, the various components of the second piezoelectric device have been given the same reference numerals as with the piezoelectricelectric device 10 but with the addition of a 1 before each reference numeral. For example, the second piezoelectric material layer has been givenreference numeral 118 and the third and fourth conductive traces have been givenreference numerals - From the foregoing it can be seen that the present invention comprises a package for a piezoelectric device and a method of making the package. It will be appreciated by those skilled in the art that changes could be made to the embodiments described above without departing from the broad inventive concepts thereof.
Claims (13)
- A piezoelectric device comprising:a supporting substrate (12);a first conductive trace (14) on a first surface (12a) of the supporting substrate;a second conductive trace (16) on the first surface (12a) of said supporting substrate (12) and spaced from said first conductive trace (14);a piezoelectric material layer (18) having first (18a) and second (18b) surfaces, said first surface (18a) of the piezoelectric material layer (18) being secured to the first surface (12a) of said supporting substrate (12) and electrically connected to said second conductive trace (16), anda protective coating (26) extending over at least the second surface (18b) of said piezoelectric material layer (18) so that at least a portion of said first (14) and second (16) conductive traces are exposed, characterised in that the second surface (18b) of said piezoelectric material layer (18) is electrically connected to said first conductive trace (14) by a conductive strip (24), said conductive strip (24) consisting of one of a conductive paint and a coated conductive epoxy.
- The piezoelectric device as in claim 1, wherein said supporting substrate (12) is formed of a flexible insulating material.
- The piezoelectric device as in claim 2, wherein said flexible insulating material is a polyester material.
- The piezoelectric device as in claim 2, wherein said flexible insulating material is a polyamide material.
- The piezoelectric device as in claim 1, wherein said first (14) and second (16) conductive traces are formed of one of a metallic conductive material and a conductive epoxy material.
- The piezoelectric device as in claim 1, wherein the first surface (18a) of said piezoelectric material layer (18) is secured to said supporting substrate (12) by a conductive bonding film (20).
- The piezoelectric device as in claim 6, wherein said conductive bonding film (20) is an epoxy film.
- The piezoelectric device as in claim 1, wherein said protective coating (26) is comprised of a spray painted layer.
- The piezoelectric device as in claim 1, wherein said protective coating (26) is comprised of a powder coating.
- The piezoelectric device as in claim 1, further comprising a bonding substrate (28) secured to a second surface (12b) of said supporting substrate (12).
- The piezoelectric device as recited in claim 10, wherein said bonding substrate (28) consists of one of double sided tape and a heat activated epoxy.
- The piezoelectric device as in claim 1 further including:a third conductive trace (114) on a second surface (12b) of said supporting substrate (12);a fourth conductive trace (116) on the second surface of said supporting substrate (12) and spaced from said third conductive trace (114);a second piezoelectric material layer (118) having first (118a) and second (118b) surfaces, the first surface (118a) of said second piezoelectric material layer (118) being secured to the second surface (12b) of said supporting substrate (12) and electrically connected to said fourth conductive trace (116), the second surface (118b) of said second piezoelectric material layer (118) being electrically connected to said third conductive trace (114); anda protective coating (126) extending over at least the second surface (118b) of said second piezoelectric electric material layer (118) so that at least a portion of the third (114) and fourth (116) conductive traces are exposed.
- A method to manufacture a piezoelectric device comprising the steps of:providing a supporting substrate (12) having a first conductive trace (14) on a first surface (12a) and a second conductive trace (16) on said first surface (12a) and spaced from said first conductive trace (14);securing a first surface (18a) of a piezoelectric material layer (18) to the first surface (12a) of said supporting substrate (12) so that the first surface (18a) of said piezoelectric material layer (18) is electrically connected to said second conductive trace (16);electrically connecting a second surface (18b) of said piezoelectric material layer (18) to said first conductive trace (14) by a conductive strip (24), in which said conductive strip (24) consists of one of a conductive paint and a coated conductive epoxy; andapplying a protective coating (26) over at least the second surface (18b) of said piezoelectric material layer (18) so that at least a portion of the first (14) and second (16) conductive traces are exposed.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US46666403P | 2003-04-30 | 2003-04-30 | |
US466664P | 2003-04-30 |
Publications (3)
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EP1473782A2 EP1473782A2 (en) | 2004-11-03 |
EP1473782A3 EP1473782A3 (en) | 2005-10-12 |
EP1473782B1 true EP1473782B1 (en) | 2007-11-14 |
Family
ID=32990985
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP04101828A Expired - Lifetime EP1473782B1 (en) | 2003-04-30 | 2004-04-29 | Piezoelectric device and method to manufacture a piezoelectric device |
Country Status (4)
Country | Link |
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US (1) | US7105988B2 (en) |
EP (1) | EP1473782B1 (en) |
AT (1) | ATE378695T1 (en) |
DE (1) | DE602004009987T2 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100599083B1 (en) * | 2003-04-22 | 2006-07-12 | 삼성전자주식회사 | Cantilevered piezoelectric thin film resonant element and method of manufacturing same |
US7819870B2 (en) * | 2005-10-13 | 2010-10-26 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Tissue contact and thermal assessment for brush electrodes |
JP2006214898A (en) * | 2005-02-04 | 2006-08-17 | Seiko Epson Corp | Piezoelectric device and electronic equipment |
DE102005020527A1 (en) * | 2005-05-03 | 2006-11-09 | Festo Ag & Co. | Piezoelectric unit for use as e.g. print head for ink jet printer, has supporting body electrically contacted by piezoelectric inactive material, which is glass fiber reinforced plastic overlying in contacting region of body |
US8672936B2 (en) | 2005-10-13 | 2014-03-18 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Systems and methods for assessing tissue contact |
EP1948057B1 (en) * | 2005-10-27 | 2012-03-14 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Systems for electrode contact assessment |
US8226648B2 (en) | 2007-12-31 | 2012-07-24 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Pressure-sensitive flexible polymer bipolar electrode |
US10085798B2 (en) | 2006-12-29 | 2018-10-02 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Ablation electrode with tactile sensor |
DE102007000552A1 (en) * | 2007-10-08 | 2009-04-09 | Huf Hülsbeck & Fürst Gmbh & Co. Kg | Actuatable switching device for a motor vehicle |
US11121647B2 (en) * | 2018-12-13 | 2021-09-14 | Magnecomp Corporation | Contact pad features |
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IT1162336B (en) * | 1979-06-22 | 1987-03-25 | Consiglio Nazionale Ricerche | PROCEDURE FOR THE CREATION OF ULTRA ACOUSTIC TRANSDUCERS WITH CURTAIN OF LINES OR WITH A MATRIX OF POINTS AND TRANSDUCERS OBTAINED |
JPS60189307A (en) * | 1984-03-09 | 1985-09-26 | Toshiba Corp | Piezoelectric thin film resonator and its manufacture |
JPS6140071A (en) | 1984-07-31 | 1986-02-26 | Mitsubishi Petrochem Co Ltd | Flexible piezoelectric element |
JPS61182286A (en) * | 1985-02-07 | 1986-08-14 | Mitsubishi Petrochem Co Ltd | flexible piezoelectric element |
US4904894A (en) * | 1989-01-24 | 1990-02-27 | Pennwalt Corporation | Hail sensor |
JP2665106B2 (en) * | 1992-03-17 | 1997-10-22 | 日本碍子株式会社 | Piezoelectric / electrostrictive film element |
DE4217351C1 (en) | 1992-05-26 | 1993-10-21 | Wolfgang Schaefer Gmbh Elektro | Piezoelectric button |
US6420819B1 (en) | 1994-01-27 | 2002-07-16 | Active Control Experts, Inc. | Packaged strain actuator |
US6778090B2 (en) * | 1996-09-04 | 2004-08-17 | Paul Newham | Modular system for monitoring the presence of a person using a variety of sensing devices |
JP3705559B2 (en) * | 1996-12-16 | 2005-10-12 | Necトーキン株式会社 | Piezoelectric transformer power supply |
JPH114137A (en) * | 1997-06-12 | 1999-01-06 | Murata Mfg Co Ltd | Piezoelectric parts |
DE10023556A1 (en) | 2000-05-15 | 2001-11-29 | Festo Ag & Co | Piezo bending transducer and use of the same |
US20030001696A1 (en) * | 2000-11-29 | 2003-01-02 | Kenji Yoshida | Acoustic wave device |
JP4248777B2 (en) * | 2000-12-28 | 2009-04-02 | 株式会社デンソー | Piezoelectric element for injector, method for manufacturing the same, and injector |
US20020140321A1 (en) | 2001-03-27 | 2002-10-03 | Waterfield Larry G. | Coated electroactive bender actuator |
US6392332B1 (en) * | 2001-12-04 | 2002-05-21 | Kuan Kuan Sung | Laminated piezo ceramic transformer device |
-
2004
- 2004-04-28 US US10/834,683 patent/US7105988B2/en not_active Expired - Fee Related
- 2004-04-29 EP EP04101828A patent/EP1473782B1/en not_active Expired - Lifetime
- 2004-04-29 DE DE602004009987T patent/DE602004009987T2/en not_active Expired - Fee Related
- 2004-04-29 AT AT04101828T patent/ATE378695T1/en not_active IP Right Cessation
Non-Patent Citations (1)
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None * |
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DE602004009987D1 (en) | 2007-12-27 |
ATE378695T1 (en) | 2007-11-15 |
US7105988B2 (en) | 2006-09-12 |
EP1473782A2 (en) | 2004-11-03 |
EP1473782A3 (en) | 2005-10-12 |
DE602004009987T2 (en) | 2008-09-18 |
US20040217674A1 (en) | 2004-11-04 |
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