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EP1426992A3 - Electrostatic mems switch - Google Patents

Electrostatic mems switch Download PDF

Info

Publication number
EP1426992A3
EP1426992A3 EP03104514A EP03104514A EP1426992A3 EP 1426992 A3 EP1426992 A3 EP 1426992A3 EP 03104514 A EP03104514 A EP 03104514A EP 03104514 A EP03104514 A EP 03104514A EP 1426992 A3 EP1426992 A3 EP 1426992A3
Authority
EP
European Patent Office
Prior art keywords
fixed contacts
mems switch
signal lines
fixed
movable contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03104514A
Other languages
German (de)
French (fr)
Other versions
EP1426992A2 (en
Inventor
Tomonori c/o OMRON Corp SEKI
Yutaka c/o OMRON Corp. UNO
Takahiro OMRON Corp. MASUDA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Publication of EP1426992A2 publication Critical patent/EP1426992A2/en
Publication of EP1426992A3 publication Critical patent/EP1426992A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0054—Rocking contacts or actuating members

Landscapes

  • Contacts (AREA)
  • Micromachines (AREA)

Abstract

A plurality of fixed contacts and signal lines are provided on a fixed substrate. A movable contact which is closed or opened with the fixed contacts is provided on a movable substrate opposed to the fixed substrate. A film thickness of the fixed contacts is made to be smaller than that of the signal lines so that the movable contact is set in a concave portion constituted by the fixed contacts when the fixed contacts, and the movable contact are closed and the signal lines are linearly connected.
EP03104514A 2002-12-05 2003-12-03 Electrostatic mems switch Withdrawn EP1426992A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002354041 2002-12-05
JP2002354041 2002-12-05

Publications (2)

Publication Number Publication Date
EP1426992A2 EP1426992A2 (en) 2004-06-09
EP1426992A3 true EP1426992A3 (en) 2005-11-30

Family

ID=32310743

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03104514A Withdrawn EP1426992A3 (en) 2002-12-05 2003-12-03 Electrostatic mems switch

Country Status (1)

Country Link
EP (1) EP1426992A3 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2374057T3 (en) 2005-03-18 2012-02-13 Réseaux Mems ACTUATORS AND SWITCHES MEMS.
JP4506529B2 (en) * 2005-03-18 2010-07-21 オムロン株式会社 Electrostatic microswitch and method for manufacturing the same, and apparatus provided with electrostatic microswitch
DE102006001321B3 (en) * 2006-01-09 2007-07-26 Protron Mikrotechnik Gmbh Switching device, has two signal lines and ground lines which are controlled by plated-through hole through laminar extending substrate, where signal lines surrounded by ground lines
DE102007035633B4 (en) 2007-07-28 2012-10-04 Protron Mikrotechnik Gmbh Process for producing micromechanical structures and micromechanical structure
US8610519B2 (en) * 2007-12-20 2013-12-17 General Electric Company MEMS microswitch having a dual actuator and shared gate
JP6781048B2 (en) * 2014-06-25 2020-11-04 ゼネラル・エレクトリック・カンパニイ Integrated microelectromechanical switches and related methods

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000044012A1 (en) * 1999-01-25 2000-07-27 GFD-Gesellschaft für Diamantprodukte mbH Microswitching contact
WO2002079076A1 (en) * 2001-03-30 2002-10-10 Jds Uniphase Corporation Mems device members having portions that contact a substrate and associated mehtods of operating
US20020163408A1 (en) * 2000-04-21 2002-11-07 Mitsuru Fujii Static relay and communication device using static relay

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000044012A1 (en) * 1999-01-25 2000-07-27 GFD-Gesellschaft für Diamantprodukte mbH Microswitching contact
US20020163408A1 (en) * 2000-04-21 2002-11-07 Mitsuru Fujii Static relay and communication device using static relay
WO2002079076A1 (en) * 2001-03-30 2002-10-10 Jds Uniphase Corporation Mems device members having portions that contact a substrate and associated mehtods of operating

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PARK J Y ET AL: "Fully integrated micromachined capacitive switches for RF applications", MICROWAVE SYMPOSIUM DIGEST. 2000 IEEE MTT-S INTERNATIONAL BOSTON, MA, USA 11-16 JUNE 2000, PISCATAWAY, NJ, USA,IEEE, US, vol. 1, 11 June 2000 (2000-06-11), pages 283 - 286, XP010505974, ISBN: 0-7803-5687-X *

Also Published As

Publication number Publication date
EP1426992A2 (en) 2004-06-09

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