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EP1315993A4 - Micromirror elements, package for the micromirror elements, and protection system therefor - Google Patents

Micromirror elements, package for the micromirror elements, and protection system therefor

Info

Publication number
EP1315993A4
EP1315993A4 EP01959466A EP01959466A EP1315993A4 EP 1315993 A4 EP1315993 A4 EP 1315993A4 EP 01959466 A EP01959466 A EP 01959466A EP 01959466 A EP01959466 A EP 01959466A EP 1315993 A4 EP1315993 A4 EP 1315993A4
Authority
EP
European Patent Office
Prior art keywords
micro
mirror
micromirror elements
mirrors
package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP01959466A
Other languages
German (de)
French (fr)
Other versions
EP1315993A2 (en
Inventor
Andrew G Huibers
Fedor Ilkov
Satyadev Patel
Peter W Richards
John Stockton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Reflectivity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/631,536 external-priority patent/US6529310B1/en
Priority claimed from US09/732,445 external-priority patent/US6523961B2/en
Priority to EP05000598A priority Critical patent/EP1555562A3/en
Priority to EP05000603A priority patent/EP1555563A3/en
Priority to DE20122615U priority patent/DE20122615U1/en
Priority to DE20122616U priority patent/DE20122616U1/en
Application filed by Reflectivity Inc filed Critical Reflectivity Inc
Priority to DE20122617U priority patent/DE20122617U1/en
Priority to DE20122614U priority patent/DE20122614U1/en
Priority to DE20122618U priority patent/DE20122618U1/en
Priority to EP05000604A priority patent/EP1555564A3/en
Priority to EP05000599A priority patent/EP1553437B1/en
Publication of EP1315993A2 publication Critical patent/EP1315993A2/en
Publication of EP1315993A4 publication Critical patent/EP1315993A4/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0067—Packages or encapsulation for controlling the passage of optical signals through the package
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/28—Reflectors in projection beam
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0369—Static structures characterized by their profile
    • B81B2203/0384—Static structures characterized by their profile sloped profile

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Projection Apparatus (AREA)
  • Micromachines (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Led Device Packages (AREA)
  • Prostheses (AREA)
  • Hybrid Cells (AREA)

Abstract

A micro-mirror (24) is connected to a substrate (10) via a post (21), a hinge (18c), a post (16c) and metal areas (12a) and an array of the micro-mirrors is disposed in a rectangular shape with a capability of rotation around a switching axis between on and off states corresponding to pixels in a viewed image. Light is directed from a source to the mirrors non-perpendicularly to at least two sides of each mirror, while reflected light is received from collection optics. Independent claims are included for an array of movable micro-mirrors, for a method of positioning an image on a target, for a method of spatially modulating light beams, for an optical micro-mirror element, for a packaged micro-electromechanical device and for a method of making a micro-mirror.
EP01959466A 2000-08-03 2001-08-03 Micromirror elements, package for the micromirror elements, and protection system therefor Ceased EP1315993A4 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
EP05000599A EP1553437B1 (en) 2000-08-03 2001-08-03 Singulated wafer die having micromirrors
EP05000604A EP1555564A3 (en) 2000-08-03 2001-08-03 Packaged micromirror array for a projection display
EP05000603A EP1555563A3 (en) 2000-08-03 2001-08-03 Color projection system
DE20122615U DE20122615U1 (en) 2000-08-03 2001-08-03 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system
DE20122616U DE20122616U1 (en) 2000-08-03 2001-08-03 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system
EP05000598A EP1555562A3 (en) 2000-08-03 2001-08-03 Projection display
DE20122617U DE20122617U1 (en) 2000-08-03 2001-08-03 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system
DE20122614U DE20122614U1 (en) 2000-08-03 2001-08-03 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system
DE20122618U DE20122618U1 (en) 2000-08-03 2001-08-03 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US732445 1985-05-09
US631536 2000-08-03
US09/631,536 US6529310B1 (en) 1998-09-24 2000-08-03 Deflectable spatial light modulator having superimposed hinge and deflectable element
US22924600P 2000-08-30 2000-08-30
US229246P 2000-08-30
US09/732,445 US6523961B2 (en) 2000-08-30 2000-12-07 Projection system and mirror elements for improved contrast ratio in spatial light modulators
PCT/US2001/024332 WO2002012925A2 (en) 2000-08-03 2001-08-03 Micromirror elements, package for the micromirror elements, and protection system therefor

Related Child Applications (4)

Application Number Title Priority Date Filing Date
EP05000599A Division EP1553437B1 (en) 2000-08-03 2001-08-03 Singulated wafer die having micromirrors
EP05000598A Division EP1555562A3 (en) 2000-08-03 2001-08-03 Projection display
EP05000604A Division EP1555564A3 (en) 2000-08-03 2001-08-03 Packaged micromirror array for a projection display
EP05000603A Division EP1555563A3 (en) 2000-08-03 2001-08-03 Color projection system

Publications (2)

Publication Number Publication Date
EP1315993A2 EP1315993A2 (en) 2003-06-04
EP1315993A4 true EP1315993A4 (en) 2005-07-13

Family

ID=27397927

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01959466A Ceased EP1315993A4 (en) 2000-08-03 2001-08-03 Micromirror elements, package for the micromirror elements, and protection system therefor

Country Status (8)

Country Link
EP (1) EP1315993A4 (en)
JP (5) JP3889705B2 (en)
KR (1) KR100724081B1 (en)
CN (5) CN100371763C (en)
AT (1) ATE354814T1 (en)
AU (1) AU2001281019A1 (en)
DE (10) DE20122370U1 (en)
WO (1) WO2002012925A2 (en)

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US7300162B2 (en) 2000-08-30 2007-11-27 Texas Instruments Incorporated Projection display
US7307775B2 (en) * 2000-12-07 2007-12-11 Texas Instruments Incorporated Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US7023606B2 (en) 2001-08-03 2006-04-04 Reflectivity, Inc Micromirror array for projection TV
SG111972A1 (en) * 2002-10-17 2005-06-29 Agency Science Tech & Res Wafer-level package for micro-electro-mechanical systems
US7042622B2 (en) 2003-10-30 2006-05-09 Reflectivity, Inc Micromirror and post arrangements on substrates
US7397517B2 (en) * 2003-05-30 2008-07-08 Kazuhiro Ohara Display system and signal processing using diamond-shaped DMDs
US6871958B2 (en) 2003-08-18 2005-03-29 Evans & Sutherland Computer Corporation Wide angle scanner for panoramic display
US7012669B2 (en) 2003-08-18 2006-03-14 Evans & Sutherland Computer Corporation Reflection barrier for panoramic display
US7334902B2 (en) 2003-08-18 2008-02-26 Evans & Sutherland Computer Corporation Wide angle scanner for panoramic display
US6861277B1 (en) * 2003-10-02 2005-03-01 Hewlett-Packard Development Company, L.P. Method of forming MEMS device
US6995830B2 (en) * 2003-12-22 2006-02-07 Asml Netherlands B.V. Lithographic projection apparatus and device manufacturing method
US7057794B2 (en) * 2004-05-19 2006-06-06 Taiwan Semiconductor Manufacturing Company, Ltd. Micromirror for MEMS device
US7273693B2 (en) * 2004-07-30 2007-09-25 Hewlett-Packard Development Company, L.P. Method for forming a planar mirror using a sacrificial oxide
US7038831B2 (en) * 2004-09-30 2006-05-02 Lucent Technologies, Inc. Micromirror apparatus with improved in-plane rotation tolerance
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JP2009233836A (en) * 2008-03-28 2009-10-15 Yamaha Corp Mems and method for manufacturing mems
EP2266199A4 (en) * 2008-04-08 2017-01-11 Cornell University Multi-axis, large tilt angle, wafer level micromirror array for large scale beam steering applications
DE102008001038B4 (en) * 2008-04-08 2016-08-11 Robert Bosch Gmbh Micromechanical component with a slanted structure and corresponding manufacturing method
US8096182B2 (en) * 2008-05-29 2012-01-17 Freescale Semiconductor, Inc. Capacitive sensor with stress relief that compensates for package stress
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CN102087414B (en) * 2010-11-03 2012-12-26 凝辉(天津)科技有限责任公司 Array-type partition projection method
CN102683474B (en) * 2011-03-18 2014-11-05 浙江大立科技股份有限公司 Infrared detector manufacturing method based on compound sacrificial layers
US9641826B1 (en) 2011-10-06 2017-05-02 Evans & Sutherland Computer Corporation System and method for displaying distant 3-D stereo on a dome surface
US10969743B2 (en) 2011-12-29 2021-04-06 Zazzle Inc. System and method for the efficient recording of large aperture wave fronts of visible and near visible light
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US9110354B2 (en) * 2012-09-20 2015-08-18 Palo Alto Research Center Incorporated Steerable illumination source for a compact camera
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CN103777445B (en) * 2014-01-06 2018-12-25 杨毅 Projection display equipment
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Also Published As

Publication number Publication date
DE20122615U1 (en) 2006-09-14
CN1567018A (en) 2005-01-19
DE20122370U1 (en) 2005-05-19
CN1567021A (en) 2005-01-19
CN100371763C (en) 2008-02-27
JP2005122146A (en) 2005-05-12
DE20122617U1 (en) 2006-09-14
CN1567020A (en) 2005-01-19
ATE354814T1 (en) 2007-03-15
CN1567019A (en) 2005-01-19
DE20122618U1 (en) 2006-11-23
JP3889705B2 (en) 2007-03-07
DE60126849D1 (en) 2007-04-05
JP2005099793A (en) 2005-04-14
WO2002012925A2 (en) 2002-02-14
JP3889757B2 (en) 2007-03-07
DE60126849T2 (en) 2007-11-08
EP1315993A2 (en) 2003-06-04
DE20122373U1 (en) 2005-05-19
KR20030036665A (en) 2003-05-09
DE20122372U1 (en) 2005-05-19
CN100412602C (en) 2008-08-20
JP2006178447A (en) 2006-07-06
JP2004506230A (en) 2004-02-26
JP3768514B2 (en) 2006-04-19
CN100392467C (en) 2008-06-04
CN1444738A (en) 2003-09-24
CN100412604C (en) 2008-08-20
WO2002012925A3 (en) 2002-09-06
DE20122614U1 (en) 2006-09-14
JP2005122145A (en) 2005-05-12
JP3889759B2 (en) 2007-03-07
KR100724081B1 (en) 2007-06-04
DE20122616U1 (en) 2006-09-14
DE20122371U1 (en) 2005-05-19
CN100412603C (en) 2008-08-20
AU2001281019A1 (en) 2002-02-18

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Inventor name: STOCKTON, JOHN

Inventor name: RICHARDS, PETER, W.

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Inventor name: HUIBERS, ANDREW, G.

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