EP1240696A2 - Wide ridge pump laser - Google Patents

Abstract

A laser pump module has a ridge waveguide chip with a ridge width that is greater than 4 micrometers ( mu m). This is a relatively wide ridge for this class of laser chips. Specifically, especially for signal lasers, narrow ridge widths are used in order to control lateral and transverse mode shape and size. In the present invention, however, where a chhip is used for pump applications, a wider ridge is used to increase the laser effective gain volume and decrease the loss associated with the lowest order transverse mode to thus maximize the useful power and light that is coupled into the fiber.

Description

WIDE RIDGE PUMP LASER

RELATED APPLICATION

This application is a Continuation of Application No. 09/477,695, filed January 6, 2000, which is a Continuation-in-Part of Application No. 09/466,973, filed December 20, 1999, the entire teachings of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

Semiconductor laser devices such as ridge waveguide lasers and laser amplifiers are used in many communications systems. Incremental refinements in their fabrication and packaging have resulted in a class of devices that have acceptable performance characteristics and a well-understood long-term behavior. Moreover, weakly guiding ridge waveguide structures are less complex to fabricate and provide excellent yields as compared to more complex architectures based on buried heterostructures, for example.

In most applications, maximizing the laser's or amplifier's useful operating power is a primary design criteria. In signal laser applications, the power output from the device dictates the distance to the next repeater stage, and the number of stages in a given link is a major cost factor in the link's initial cost and subsequent maintenance. In pump laser applications, where typically multiple pump laser devices are used to optically pump a gain or amplifying fiber, such as a rare-earth doped fiber amplifier or regular fiber in a Raman pumping scheme, useful power output dictates the number of pumps required to reach a required pumping level and/or the distance between pump/fiber amplification stages.

Under current technology, the typical application for pump lasers is fiber amplification systems that utilize rare-earth doped fiber as the gain fiber. These gain fibers are located at attenuation-dictated distances along the fiber link. They typically are comprised of erbium-doped fiber amplifiers (EDFA). The laser pumps typically operate at 980 nanometers (nm) or 1480 nm, which correspond to the location of absorption peaks for the EDFA's in the optical spectrum.

More recently, Raman pumping schemes have been proposed. The advantage is that special, periodic, EDFA amplifier gain fiber is not required to be spliced into the fiber link. Instead, regular fiber can be used. The result is a gain spectrum that is even wider than systems relying on EDFA's. The bandwidth typically extends over the entire transmission bandwidth for fiber, stretching from 1250 to 1650 nm for some fiber compositions. The pump lasers are designed to operate in the wavelength range of 1060 to 1500 nm in the typical implementation.

Advantages associated with Raman amplification systems surrounds the fact that there is no longer a 3dB noise penalty associated with each amplifier, as occurs with EDFA's. Raman amplification, however, is a non-linear process. As a result, relatively high pump powers are required.

In any case, high power pumps are required, regardless of whether EDFA's or regular Raman systems are used. Currently, pumps yielding 180 to 200 milliwatts (mW) of power are available. Newer system designs are requiring even higher power pumps, however.

SUMMARY OF THE INVENTION

As higher pump powers are required, additional optimizations are required in the pump laser module. One subject for these optimizations concerns the laser pump chip within the module and how light generated in this module is coupled through a fiber pigtail to the gain fiber. Specifically, in the present invention, the ridge width of the laser chip is optimized and this optimization is propagated through the module design to provide higher useful power outputs from the laser module. Specifically, the present invention concerns a ridge waveguide laser module in which the ridge width is greater than 4 micrometers (μm). This is a relatively wide ridge for this class of laser chips. Specifically, especially for signal lasers, narrow ridge widths of 1 -3 μm are used in order to control lateral and transverse modes and obtain a relatively round beam for easy coupling into fiber. In the present invention, however, where a chip is used for high power pump applications, a wider ridge is used to decrease the loss associated with the laser mode as well as maximize the effective pump gain volume to thus maximize the useful power and light that is coupled into the fiber pigtail, which is typically single mode fiber.

The wider ridge results in higher power density at the laser exit facet. This is not a problem, however, because facet failure is typically not the failure mode at this wavelength. Thus, wider ridge can be used, which maximizes the power in the lowest order modes.

In general, according to one aspect, the invention concerns a ridge waveguide pump laser module that is adapted to generate light in the 1,200 to 1,600 nm (1.2-1.6 μm) wavelength range. The module comprises a ridge waveguide laser chip having a ridge width greater than 4 μm. An optical fiber pigtail is also provided. An end of this pigtail is positioned to receive the light generated by the laser chip and transmit that generated light, typically to a fiber amplification system.

h specific embodiments, the ridge width is less than 11 μm at a narrowest region of the ridge. This specification applies regardless of the overall ridge profile. Specifically, the wide ridge can be used where the ridge further widens in the direction of the rear facet or in the direction of the front facet of the chip. Additionally, the invention also applies where the ridge is tapered in the direction of the rear and/or front facets of the laser chip.

In the preferred embodiment, the ridge width is between 6 and 9 μm. Presently, 7 μm is believed to be optimum. In other aspects of the implementation, because a relatively wide ridge is used, the cross section of the laser light emission from the chip is very elliptical, rather than circular as is found in narrow ridge designs. Special coupling techniques are thus preferably used. Specifically, if discrete lenses are used, a cylindrical or cross-cylindrical lens are preferred between the laser chip and the fiber pigtail to focus the emission from the chip onto the end of the pigtail. Alternatively, or in combination with a discrete lens system, fiber lenses are also useful. Specifically, in one embodiment, a flat-top wedge shaped fiber lens is used to capture the elliptical emission. Wedge shaped lenses, however, can also be implemented, along with double-wedge shaped fiber lenses.

In still other implementations, special-core fiber pigtails improve coupling efficiency of the elliptical beam. Specifically, a fiber pigtail with an elliptical cross- section core is useful. Further, the core is preferably flared in the direction of the end that is positioned to receive the light from the laser chip, such that the core has a larger cross-section in that direction. Further, elliptical cone shaped fiber lenses can also be used.

h general, according to another aspect, the invention also features a ridge waveguide pump laser chip. Specifically, the laser chip is adapted to generate light in the 1.2 to 1.6 μm wavelength range. Further, this chip has a ridge width that is greater than 4 μm.

The above and other features of the invention including various novel details of construction and combinations of parts, and other advantages, will now be more particularly described with reference to the accompanying drawings and pointed out in the claims. It will be understood that the particular method and device embodying the invention are shown byway of illustration and not as a limitation of the invention. The principles and features of this invention may be employed in various and numerous embodiments without departing from the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS

In the accompanying drawings, reference characters refer to the same parts throughout the different views. The drawings are not necessarily to scale; emphasis has instead been placed upon illustrating the principles of the invention. Of the drawings:

Fig. 1 is a perspective view of a pump laser module according to the present invention;

Fig. 2 is a schematic, perspective view of the inventive laser chip and coupling techniques for the light generated by the chip into the fiber pigtail;

Figs. 3 A-3D are cross-sectional views illustrating the process by which the inventive wide-ridge pump laser chip is manufactured;

Figs. 4A and 4B are a cross-sectional views showing alternative ridge designs; and

Figs. 5A-5C are top plan views illustrating different ridge profiles for the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Figs. 1 shows a pump laser module, which has been constructed according to the principles of the present invention and which contains a ridge waveguide laser chip according to the present invention.

Specifically, the ridge waveguide laser chip 110 is installed on a submount 112 in the typical implementation. The submount 112 provides mechanical and electrical connections between the laser chip 110 and the module housing 1 14. A fiber pigtail 118 extends through a side wall 120 of the module housing 114. It is typically rigidly secured to the submount 112 such that the fiber endface 122 is held in proximity to an output facet 116 of the laser diode 110.

Depending on the implementation and application requirements, fiber pigtail 118 is constructed from regular or, alternatively, polarization-maintaining fiber. If used, different types of polarization-maintaining fiber are applicable. For example, panda, elliptical stress bar, and bow tie are viable substitutes. In one implementation, a grating 128 is written into the regular fiber 124 to create an external cavity to stabilize the operation of the chip 110. These gratings are typically manufactured by UV beam interference. The gratings are usually written to the depth of the core in the fiber. In pump applications, they have the effect of stabilizing the module against temporal power output fluctuations.

In the preferred implementation, the fiber grating provides reflectivity at about 1450 nm. which is within the gain band of the diode laser 110. Further, the fiber grating has a bandwidth of 0.5-5 nm, preferably; although a bandwidth in the broader range of 0.2-7 nm is acceptable for some applications.

The polarization control maximizes and stabilizes the effect of the fiber grating. Light exiting from the typical diode laser is polarized. As a result, any light that is coupled into the other, non-favored fiber axis, i.e., the axis of the fiber that is not aligned with the polarization of the laser diode, is reflected by the grating, but has no effect on the laser diode since the diode is nonresponsive to light of this polarization.

If fiber pigtail 118 comprises PM fiber, it is preferably is optically coupled to a strand of regular fiber 124 via splice 126. Regular fiber preferably has a standard circular cross section core, i.e., has no stress bar, or no fast or slow axes.

Although the coupling between the polarization-maintaining fiber pigtail 118 and regular, non-polarization-maintaining fiber 24 is shown as a direct fusion splice. The critical feature is the optical coupling between the two fibers. Thus, other techniques for obtaining this coupling can be used such as intervening fiber lengths of a third fiber.

In a similar vein, the PM fiber need not directly receive the light from the diode. Instead, the light can be first coupled into a relatively short length of regular fiber for example, and then into PM fiber, which transmits the light over most of the distance to the grating. This is not preferred, however, because of the need for additional splicing.

In any event, light coupled into the pigtail 118 is transmitted toward the fiber amplification system. This system comprises an EDFA, in which the fiber is erbium- doped. Alternatively, as discussed previously, Raman amplification principles can be used. In this case, the fiber amplification system 130 comprises regular fiber, or fiber which is optimized for Raman amplification, and has the associated wide gain spectrum.

This module further comprises a thermo-electric cooler to provide for heat dissipation. However, for undersea applications, a coolerless module is typically acceptable.

Fig. 2 is a schematic view showing the laser chip 110 and techniques for coupling the light generated by the chip into the fiber pigtail 118.

Specifically, light is generated in the active layer 210 and confined by a lower cladding layer 212 and an upper cladding layer 214. It is guided longitudinally by the ridge structure 216, which has been etched into the top cladding layer 214. As a result, the light is confined to oscillate between a partially or antireflecting front facet 116 and a highly reflecting rear facet 217. Most of the generated light exits from the laser chip 110 at a emission region 218, which generally is elliptically shaped.

Cladding layers of AlGalnAs or InGaNsP on an InP substrate are compatible with the 1060-, 1200-1600nm light generation. Quantum wells of InGaAsP, AlGalnAs, or InGaAs are used, typically.

The emitted light forms a cone with an elliptical cross-section. The end of the fiber pigtail 118 is located such that coupling efficiency is maximized. Most of the emitted light is captured to be transmitted by the fiber pigtail 118. One approach for maximizing coupling efficiency is to form a lens on the end of the fiber pigtail 118. Various fiber lens systems can be used, such as wedge- shaped fiber lenses, double-wedge-shaped fiber lenses, elliptical-cone-shaped fiber lenses, and lens systems including elliptically-shaped lenses or cylindrical lenses, generally.

Presently, double-angle flat top microlenses are used as described in the application entitled "Flat Top, Double- ngled, Wedge-Shaped Fiber Endface", U.S. Serial No. 08/965,798, by Jeffrey Korn, Steven D. Conover, Wayne F. Sharfin and Thomas C. Yang, which is incorporated herein by this reference.

The advantage of double-angle flat top microlenses is the fact that they are not circularly symmetric with respect to the fiber's axis, to thereby match the elliptical spatial distribution of light from the output facet of the laser diode.

When non-circularly symmetric coupling techniques are used with polarization-maintaining fiber, it is important to align the formed microlense, for example, with one of either the fast or slow axes of the polarization-maintaining fiber.

Alternatively, a discrete lens or discrete lense system can also be used as illustrated in Fig. 2. Specifically, a cylindrical lens 220 is located between the end of the fiber pigtail and the emission region 218 of the laser chip 110. Such a lens are typically used in combination with a simple cleaved-end surface of the fiber pigtail 118. Additionally, a fiber lens is used in combination with discrete lens 122 in some embodiments, as illustrated.

Preferably, because of the elliptical emission of this wide ridge laser, a cylindrical lens as illustrated is preferably used. Alternatively, a cross-cylindrical discrete lens can also be implemented. Alternately, the core 119 of the pigtail 118 has an elliptical cross-section at least at an end which is positioned to receive light generated by the laser chip 110. This configuration provides good matching to the elliptical emission from the chip. Additionally, a width of the core is tapered in a direction of light propagation away from the laser chip, or flared in the direction of the chip, to maximize coupling efficiency, in some embodiments.

A P-metal contact layer 222 is typically located above the upper cladding layer 214 but separated by at least one insulation layer, not shown. This insulation layer is typically not present, however, between the P-metal layer 222 and the upper cladding layer 214 in the region of the ridge 216. This allows a ridge injection current to be transmitted down through the ridge 216 into the active layer 210. The ridge injection current is usually provided to the chip via a wire 224 which is bonded to a bond pad 226 which is usually comprised of gold. The P-metal contact layer 222 is typically a gold alloy.

Figs. 3 A-3D illustrate the process by which the inventive wide-ridge pump laser chip is manufactured.

Specifically, as illustrated in Fig. 3A, the process starts with a semiconductor wafer substrate 310. This substrate has the epitaxially grown lower cladding layer 214, active layer 210, and upper cladding layer 212.

An etchstop layer 312 is preferably provided in the upper cladding layer to control the etch depth of the subsequent ridge etch steps. In the preferred embodiment, the distance between the active layer 210 and the etchstop layer 312 is relatively large, between 0.3 and 0.9 micrometers, although it maybe as large as 1.1 micrometers in some applications. This distance is consistent with the relatively wide ridge approach. Specifically, it yields a more weakly guided chip, which guarantees single laser mode operation to very high output power and also minimizes the power loss by the lowest order mode. Specifically, in the preferred embodiment, the distance between the active layer 210 and the etchstop layer 312 is between 0.5 and 0.7 μm, to as large as 0.9 μm.

On top of the upper cladding layer, insulation layers 314 are grown. These provide the insulation between the upper cladding layer 214 and the subsequent P- metal contact layers.

Fig. 3B shows the next step in which trenches 316, 318 are etched into the upper cladding layer 214, to the depth of the etchstop layer 312 to thereby define the ridge 216. Subsequently, an additional insulation layer 320 is formed over the substrate.

Next, photoresist layers 322 are deposited over the substrate using hard and soft bake techniques. The photoresist layer is then partially etched back to expose the top of the ridge 216.

Fig. 3C shows the next step in which the insulation layers are etched away from the top of the ridge 216. This leaves the upper cladding layer exposed only in the region of the ridge.

As shown in Fig. 3D, the P-metal contact layer 222 is deposited. Typically, this contact layer is made from a gold alloy. Thereafter, the gold bond pads 226 are formed.

According to the present invention, the ridge width is controlled to be larger than 4 μm, w = 4-11 μm. Further, the ridge width, is preferably less than 1 1 μm at the narrowest region. A tighter, preferred range, has the ridge width w = 6-9 μm. Presently, 7 μm is the prefened width.

Figs. 4A and 4B show an alternative ridge designs, to which the present invention is also applicable, in which similar reference numerals being used to illustrate similarities in construction. Here, the ridge is not defined by trenches as illustrated in Figs. 3 A-3D, but the surrounding upper cladding layer is completely etched away.

Specifically, a lower cladding layer 212 and an upper cladding layer 214 sandwich an active layer 210. On top of the upper cladding layer is an insulation layer 314, which isolates the upper cladding layer 214 from the P-metal contact layer 222. The contact layer, however, is in electrical contact with the upper cladding layer 314 in the region of the ridge 216. On one or both sides of the ridge 216, bond pads 226 are formed, which also provide for ridge protection.

In the alternative embodiment illustrated in Fig. 4A, the ridge width is as defined earlier, i.e., is 6-9 μm, preferably 7 μm. Width is defined slightly differently, since the sides of the ridge are sloped, rather than vertical as shown in Fig. 3A-3D. Here, the ridge width is defined as the width of the ridge, three-quarters of the way down the sloping side wall 410 of the upper cladding layer 214.

In the reverse ridge embodiment illustrated in Fig. 4B, the ridge width is also as defined earlier, i.e., is 6-9 μm, preferably 7 μm. Width here is the width at the base of the ridge, w.

In still other implementation, the ridge is buried/planarized by depositing photoresist, polyimide, semiconductor material, or other material on either side of the ridge.

As is known in the art, many tens of ridges are typically formed side-by-side and parallel to each other along a single substrate/wafer. After the fabrication steps have been completed, the wafer is typically scribed and cleaved along the planes that run perpendicular to the ridges along the length of the wafer. This yields what are termed bars. Typically, the facet coatings for the reflective rear facet 216 and partially or antireflecting front facet 116 are then applied to these bars. Thereafter, the bars are scribed and cleaved between successive ridges to form individual semiconductor laser devices as shown in Fig. 2.

As illustrated in Fig. 2, in one embodiment, the ridge 216 has a constant profile along the entire longitudinal length of the chip 110. Alternative, ridge profiles are possible, and contemplated by the present invention. Specifically, Figs. 5A-5D illustrate a number of different ridge profiles. In each case, the size of the ridge is magnified relative to the size of the chip to illustrate the principles of the invention.

Specifically, as shown in Fig. 5 A, in one embodiment, the ridge 216 is tapered in the direction of the front facet 116 and rear facet 217. The minimum ridge width W along the entire ridge profile, however, is greater than 4.0 μm, but preferably less than 11 μm. Specifically, this minimum ridge width is preferably between 6 and 9 μm.

Fig. 5B shows another ridge profile in which the ridge 216 is flared in the direction of the rear facet 217. This ridge profile has the advantage of providing a constant single mode seed into most of the length of the ridge 216. Further, it avoids excessive heating at the back facet. According to the invention, however, the width W of the narrowest portion of the ridge is between 4 and 11 μm, specifically between 6 and 9 μm.

Finally, Fig. 5C shows a final embodiment in which the ridge is flared in the direction of the front facet 116. Here again, the narrowest portion of the ridge W is between 4 and 11 μm wide, preferably between 6 and 9 μm.

While this invention has been particularly shown and described with references to preferred embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the scope of the invention encompassed by the appended claims.

Claims

CLA1MSWhat is claimed is:

1. A ridge waveguide pump laser module comprising: ridge waveguide laser chip having a ridge width greater than 4 μm; and an optical fiber, an end of which is positioned to receive and transmit light generated by the ridge waveguide laser chip.

2. A ridge waveguide pump laser module as claimed in Claim 1, wherein the ridge width is less than 11 μm at a nanowest region.

3. A ridge waveguide pump laser module as claimed in Claim 1, wherein the ridge width is between 6 and 9 μm.

4. A ridge waveguide pump laser module as claimed in Claim 1, wherein the ridge width is about 7 μm.

5. A ridge waveguide pump laser module as claimed in Claim 1 , wherein the ridge width is greater than 4 μm for an entire length of the chip.

6. A ridge waveguide pump laser module as claimed in Claim 1 , wherein the ridge is a tapered in the direction of a rear facet of the laser chip.

7. A ridge waveguide pump laser module as claimed in Claim 1 , wherein the ridge is tapered in the direction of a front facet of the laser chip.

8. A ridge waveguide pump laser module as claimed in Claim 1, wherein the ridge is a tapered in the direction of a rear facet and a front facet of the laser chip.

9. A ridge waveguide pump laser module as claimed in Claim 1, wherein the ridge widens in the direction of rear facet of the chip.

10. A ridge waveguide pump laser module as claimed in Claim 1, wherein the ridge widens in the direction of front facet of the chip.

11. A ridge waveguide pump laser module as claimed in Claim 1 , wherein the end of the optical fiber, which is positioned to receive light generated by the ridge waveguide laser chip, comprises a flat-top wedge shaped fiber lens.

12. A ridge waveguide pump laser module as claimed in Claim 1 , wherein the end of the optical fiber, which is positioned to receive light generated by the ridge waveguide laser chip, comprises a wedge shaped fiber lens.

13. A ridge waveguide pump laser module as claimed in Claim 1, wherein the end of the optical fiber, which is positioned to receive light generated by the ridge waveguide laser chip, comprises a double wedge shaped fiber lens

14. A ridge waveguide pump laser module as claimed in Claim 1, wherein the end of the optical fiber, which is positioned to receive light generated by the ridge waveguide laser chip, comprises an elliptically, cone shaped fiber lens

15. A ridge waveguide pump laser module as claimed in Claim 1, wherein the end of the optical fiber, which is positioned to receive light generated by the ridge waveguide laser chip, comprises an elliptically-shaped fiber lens.

16. A ridge waveguide pump laser module as claimed in Claim 1, wherein a core of the optical fiber is elliptical at least at an end which is positioned to receive light generated by the laser chip.

17. A ridge waveguide pump laser module as claimed in Claim 16, wherein a width of the core is tapered in a direction of light propagation away from the laser chip.

18. A ridge waveguide pump laser module as claimed in Claim 1, wherein the core has an elliptical cross-section and a width of the core of the optical fiber is tapered in a direction of light propagation away from the laser chip.

19. A ridge waveguide pump laser module as claimed in Claim 1, wherein a distance between an active layer and a base of the ridge of the laser chip is 0.3-1. lμm.

20. A ridge waveguide pump laser module as claimed in Claim 1, wherein a distance between an active layer and a base of the ridge of the laser chip is 0.6-0.9 μm.

21. A ridge waveguide pump laser module as claimed in Claim 1 , wherein the module is used to pump a gain fiber which is an EDFA amplifier.

22. A ridge waveguide pump laser module as claimed in Claim 1 , wherein the module is used to pump a Raman amplifier.

23. A ridge waveguide pump laser module as claimed in Claim 1, wherein the module is used to pump a dispersion compensated fiber.

24. A ridge waveguide pump laser module as claimed in Claim 1, wherein the module is used to pump a gain fiber in dispersion shifted fiber.

25. A ridge waveguide pump laser module as claimed in Claim 1, wherein the optical fiber comprises polarization maintaining fiber.

26. A ridge waveguide pump laser module as claimed in Claim 1, wherein the optical fiber comprises a fiber grating.

27. A ridge waveguide pump laser module as claimed in Claim 1, further comprising a cylindrical lens for facilitating the coupling of light generated by the laser chip into the optical fiber.

28. A ridge waveguide pump laser module as claimed in Claim 1, further comprising a cross-cylindrical lens for facilitating the coupling of light generated by the laser chip into the optical fiber .

29. A ridge waveguide pump laser module as claimed in Claim 1, further comprising a thermoelectric cooler for removing heat generated by the laser chip.

30. A ridge waveguide pump laser module as claimed in Claim 1, wherein the module is coolerless.

31. A ridge waveguide pump laser module as claimed in Claim 1 , wherein the module is used to pump a gain fiber.

32. A ridge waveguide pump laser chip that is adapted to generate light in the 1.2-1.6μm wavelength range, the chip having a ridge width greater than 4 μm.

33. A ridge waveguide pump laser chip as claimed in Claim 32, wherein the ridge width is less than 11 μm at a narrowest region.

34. A ridge waveguide pump laser chip as claimed in Claim 32, wherein the ridge width is between 6 and 9 μm.

35. A ridge waveguide pump laser chip as claimed in Claim 32, wherein the ridge width is about 7 μm.

36. A ridge waveguide pump laser chip as claimed in Claim 32, wherein the ridge width is greater than 4 μm for an entire length of the chip.

37. A ridge waveguide pump laser chip as claimed in Claim 32, wherein the ridge is a tapered in the direction of a rear facet of the laser chip.

38. A ridge waveguide pump laser chip as claimed in Claim 32, wherein the ridge is tapered in the direction of a front facet of the laser chip.

39. A ridge waveguide pump laser chip as claimed in Claim 32, wherein the ridge is a tapered in the direction of a rear facet and a front facet of the laser chip.

40. A ridge waveguide pump laser chip as claimed in Claim 32, wherein the ridge widens in the direction of rear facet of the chip.

41. A ridge waveguide pump laser chip as claimed in Claim 32, wherein the ridge widens in the direction of front facet of the chip.

42 A ridge waveguide pump laser chip as claimed in Claim 32, wherein a distance between an active layer and a base of the ridge of the laser chip is 0.3-1. lμm.

43. A ridge waveguide pump laser chip as claimed in Claim 32, wherein a distance between an active layer and a base of the ridge of the laser chip is 0.5-1.1 μm.

44. A method for making a semiconductor laser device from a lower cladding layer, an upper cladding layer, and an active layer between the upper and lower cladding layers, the method comprising: forming a ridge in the upper cladding layer, the ridge having a width greater than 4 μm; growing an insulation layer over the ridge and the upper cladding layer; etching the insulation layer overlaying the ridge; and depositing a metal contact layer over the ridge.

45. A method as claimed in Claim 44, wherein the ridge is formed by etching an epitaxial upper cladding layer.

46. A method as claimed in Claim 44, wherein the ridge is formed by etching two trenches greater than 4 μm apart into an epitaxial upper cladding layer.

47. A method as claimed in Claim 46, wherein etching two trenches includes etching the upper cladding layer to an etchstop layer therein.

48. A method as claimed in Claim 44, wherein the ridge width is less than 11 μm at a narcowest region.

49. A method as claimed in Claim 44, wherein the ridge width is between 6 and 9 μm.

50. A method as claimed in Claim 44, wherein the ridge width is about 7 μm.

51. A method as claimed in Claim 44, wherein the ridge width is greater than 4 μm for an entire length of the laser device.

52. A method as claimed in Claim 44, wherein forming the ridge includes tapering the ridge in the direction of a rear facet of the laser device.

53. A method as claimed in Claim 44, wherein forming the ridge includes tapering the ridge in the direction of a front facet of the laser device.

54. A method as claimed in Claim 44, wherein forming the ridge includes widening the ridge in the direction of a rear facet of the laser device.

55. A method as claimed in Claim 44, wherein forming the ridge includes widening the ridge in the direction of a front facet of the laser device.