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EP1174683A3 - Angular velocity sensor - Google Patents

Angular velocity sensor Download PDF

Info

Publication number
EP1174683A3
EP1174683A3 EP01121470A EP01121470A EP1174683A3 EP 1174683 A3 EP1174683 A3 EP 1174683A3 EP 01121470 A EP01121470 A EP 01121470A EP 01121470 A EP01121470 A EP 01121470A EP 1174683 A3 EP1174683 A3 EP 1174683A3
Authority
EP
European Patent Office
Prior art keywords
angular velocity
velocity sensor
detecting
present
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01121470A
Other languages
German (de)
French (fr)
Other versions
EP1174683A2 (en
EP1174683B1 (en
Inventor
Toshiyuki Nozoe
Masami Tamura
Takeshi Uemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP13135195A external-priority patent/JP3430711B2/en
Priority claimed from JP08618996A external-priority patent/JP3399221B2/en
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of EP1174683A2 publication Critical patent/EP1174683A2/en
Publication of EP1174683A3 publication Critical patent/EP1174683A3/en
Application granted granted Critical
Publication of EP1174683B1 publication Critical patent/EP1174683B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
    • G01C21/26—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 specially adapted for navigation in a road network
    • G01C21/28—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 specially adapted for navigation in a road network with correlation of data from several navigational instruments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G01P21/02—Testing or calibrating of apparatus or devices covered by the preceding groups of speedometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S19/00—Satellite radio beacon positioning systems; Determining position, velocity or attitude using signals transmitted by such systems
    • G01S19/38—Determining a navigation solution using signals transmitted by a satellite radio beacon positioning system
    • G01S19/39—Determining a navigation solution using signals transmitted by a satellite radio beacon positioning system the satellite radio beacon positioning system transmitting time-stamped messages, e.g. GPS [Global Positioning System], GLONASS [Global Orbiting Navigation Satellite System] or GALILEO
    • G01S19/52—Determining velocity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S19/00—Satellite radio beacon positioning systems; Determining position, velocity or attitude using signals transmitted by such systems
    • G01S19/38—Determining a navigation solution using signals transmitted by a satellite radio beacon positioning system
    • G01S19/39—Determining a navigation solution using signals transmitted by a satellite radio beacon positioning system the satellite radio beacon positioning system transmitting time-stamped messages, e.g. GPS [Global Positioning System], GLONASS [Global Orbiting Navigation Satellite System] or GALILEO
    • G01S19/53—Determining attitude

Landscapes

  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Automation & Control Theory (AREA)
  • Gyroscopes (AREA)

Abstract

The present invention aims to present an angular velocity sensor having a self diagnosis function.
An angular velocity sensor of the present invention includes a driving part for stably vibrating a driving part of a sensor element having a driver part and a detector part for detecting an angular velocity and detection means for detecting the angular velocity of the sensor element and obtains a self diagnosis signal for a malfunction by detecting a mechanical coupling signal obtained at the detection means.
EP01121470A 1995-05-30 1996-05-29 Angular velocity sensor Expired - Lifetime EP1174683B1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP13135195 1995-05-30
JP13135195A JP3430711B2 (en) 1995-05-30 1995-05-30 Angular velocity sensor
JP8618996 1996-04-09
JP08618996A JP3399221B2 (en) 1996-04-09 1996-04-09 Angular velocity sensor
EP96919991A EP0773430B1 (en) 1995-05-30 1996-05-29 Angular velocity sensor

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP96919991A Division EP0773430B1 (en) 1995-05-30 1996-05-29 Angular velocity sensor

Publications (3)

Publication Number Publication Date
EP1174683A2 EP1174683A2 (en) 2002-01-23
EP1174683A3 true EP1174683A3 (en) 2002-02-06
EP1174683B1 EP1174683B1 (en) 2007-10-10

Family

ID=26427350

Family Applications (2)

Application Number Title Priority Date Filing Date
EP01121470A Expired - Lifetime EP1174683B1 (en) 1995-05-30 1996-05-29 Angular velocity sensor
EP96919991A Expired - Lifetime EP0773430B1 (en) 1995-05-30 1996-05-29 Angular velocity sensor

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP96919991A Expired - Lifetime EP0773430B1 (en) 1995-05-30 1996-05-29 Angular velocity sensor

Country Status (5)

Country Link
US (3) US5939630A (en)
EP (2) EP1174683B1 (en)
CN (3) CN1142436C (en)
DE (2) DE69637287T2 (en)
WO (1) WO1996038712A1 (en)

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US6732586B2 (en) 1995-05-30 2004-05-11 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
US6705151B2 (en) 1995-05-30 2004-03-16 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
US6912901B1 (en) 1995-05-30 2005-07-05 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
JPH1073437A (en) 1996-08-30 1998-03-17 Fujitsu Ltd Vibration gyroscope detection circuit and vibration gyroscope device using the same
EP0926470A4 (en) * 1997-07-14 2005-06-15 Matsushita Electric Ind Co Ltd SENSOR WITH ADJUSTMENT FUNCTION
JP3932661B2 (en) * 1998-03-31 2007-06-20 松下電器産業株式会社 Angular velocity sensor drive circuit
JP4019504B2 (en) * 1998-06-15 2007-12-12 松下電器産業株式会社 Angular velocity sensor
JP2000088578A (en) * 1998-09-10 2000-03-31 Matsushita Electric Ind Co Ltd Angular speed sensor
US6924359B1 (en) * 1999-07-01 2005-08-02 Yale University Neovascular-targeted immunoconjugates
JP4449110B2 (en) * 1999-08-18 2010-04-14 パナソニック株式会社 Angular velocity sensor
JP3520821B2 (en) * 1999-10-29 2004-04-19 株式会社村田製作所 Self-diagnosis circuit for vibration gyro
DE10023306C2 (en) * 2000-05-15 2002-07-11 Grieshaber Vega Kg Process for controlling piezoelectric drives in level measuring devices
JP3674467B2 (en) * 2000-06-27 2005-07-20 株式会社村田製作所 Vibrating gyro and electronic device using the same
US6553835B1 (en) * 2000-09-15 2003-04-29 Bei Technologies, Inc. Inertial rate sensor and method with improved clocking
US6497146B1 (en) * 2000-09-15 2002-12-24 Bei Technologies, Inc. Inertial rate sensor and method with built-in testing
US6510737B1 (en) * 2000-09-15 2003-01-28 Bei Technologies, Inc. Inertial rate sensor and method with improved tuning fork drive
JP4843855B2 (en) * 2001-03-09 2011-12-21 パナソニック株式会社 Angular velocity sensor
US6792792B2 (en) * 2001-06-04 2004-09-21 Kelsey-Hayes Company Diagnostic test for a resonant micro electro mechanical system
JP4434537B2 (en) * 2001-08-27 2010-03-17 パナソニック株式会社 Piezoelectric functional parts
EP1467897B1 (en) * 2002-01-23 2005-08-10 Siemens VDO Automotive Corporation Method and apparatus for determining deployment of a safety restraint device in an occupant restraining system
DE10240087C5 (en) * 2002-08-30 2011-12-01 Austriamicrosystems Ag vibration gyro
US6972619B2 (en) * 2002-12-17 2005-12-06 Matsushita Electric Industrial Co., Ltd. Amplifier with a gain proportional to power source voltage
JP4066916B2 (en) * 2003-09-08 2008-03-26 株式会社村田製作所 Mechanical quantity sensor
US7134336B2 (en) * 2004-03-19 2006-11-14 Denso Corporation Vibration type angular velocity sensor
JP4543869B2 (en) * 2004-10-15 2010-09-15 株式会社デンソー Sensor circuit in vibration type angular velocity sensor
DE102004058183A1 (en) * 2004-12-02 2006-06-08 Robert Bosch Gmbh Sensor with self-test
JP4658625B2 (en) * 2005-01-25 2011-03-23 日本電波工業株式会社 Angular velocity sensor and manufacturing method thereof
JP2006308498A (en) * 2005-04-28 2006-11-09 Fujitsu Media Device Kk Angular velocity sensor
JP5458462B2 (en) * 2005-10-11 2014-04-02 パナソニック株式会社 Vibration type inertial force detection sensor
JP4935069B2 (en) * 2005-12-28 2012-05-23 パナソニック株式会社 Angular velocity sensor
CN101384882B (en) * 2006-02-17 2011-11-09 西铁城控股株式会社 Physical quantity sensor
US7669475B2 (en) * 2006-09-28 2010-03-02 Rosemount Aerospace Inc. System and method for measuring rotational movement about an axis
CN100439864C (en) * 2007-06-01 2008-12-03 北京沃尔康科技有限责任公司 Novel silicon micromechanical peg-top
JP2009162645A (en) * 2008-01-08 2009-07-23 Panasonic Corp Inertial speed sensor signal processing circuit and inertial speed sensor device including the same
KR100972078B1 (en) * 2008-04-04 2010-07-22 파나소닉 주식회사 Sensor apparatus
US8322214B2 (en) 2008-04-04 2012-12-04 Panasonic Corporation Sensor device
US7730782B2 (en) 2008-04-04 2010-06-08 Panasonic Corporation Sensor device
US8397569B2 (en) * 2008-04-10 2013-03-19 Panasonic Corporation Inertial force sensor
JP4245081B1 (en) * 2008-10-16 2009-03-25 パナソニック株式会社 Sensor device
JP2010145274A (en) 2008-12-19 2010-07-01 Panasonic Corp Inertial sensor
JP5368181B2 (en) * 2009-06-12 2013-12-18 セイコーエプソン株式会社 Physical quantity detection device, control method for physical quantity detection device, abnormality diagnosis system, and abnormality diagnosis method
EP2413098B1 (en) * 2009-07-22 2018-09-26 Panasonic Intellectual Property Management Co., Ltd. Angular speed sensor
WO2011030541A1 (en) 2009-09-14 2011-03-17 パナソニック株式会社 Angular velocity sensor
US8746034B2 (en) * 2009-10-01 2014-06-10 Panasonic Corporation Inertial sensor
CN102753937B (en) * 2010-02-17 2016-03-02 株式会社村田制作所 Oscillation type inertial force sensor
JP5638419B2 (en) * 2011-02-25 2014-12-10 セイコーエプソン株式会社 Signal processing circuit, physical quantity detection device, angular velocity detection device, integrated circuit device, and electronic apparatus
CN103698793B (en) * 2013-12-12 2015-08-19 北京航空航天大学 Based on the GNSS signal simulator emulation angular velocity range measuring method of software receiver
DE102015211258A1 (en) * 2015-06-18 2016-12-22 Robert Bosch Gmbh Apparatus and method for evaluating a signal from a rotary encoder
JP7287048B2 (en) * 2019-03-27 2023-06-06 セイコーエプソン株式会社 robot
JP7293839B2 (en) * 2019-04-23 2023-06-20 セイコーエプソン株式会社 Physical quantity detection circuit, physical quantity sensor, electronic device, moving object, and failure diagnosis method for physical quantity sensor
CN112565313B (en) * 2019-09-10 2022-05-06 中国移动通信有限公司研究院 A method for triggering a sensor of an Internet of Things device and the Internet of Things device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0406891A1 (en) * 1989-07-07 1991-01-09 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
EP0638782A1 (en) * 1993-08-02 1995-02-15 New Sd, Inc. Rotation rate sensor with built in test circuit

Family Cites Families (10)

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Publication number Priority date Publication date Assignee Title
CA1234705A (en) * 1984-03-22 1988-04-05 Suzushi Kimura Angular velocity sensor
JP2666505B2 (en) * 1990-01-31 1997-10-22 松下電器産業株式会社 Angular velocity sensor drive
JP2541375B2 (en) * 1990-12-11 1996-10-09 株式会社村田製作所 Detection circuit
US5272922A (en) * 1991-03-06 1993-12-28 Watson Industries, Inc. Vibrating element angular rate sensor system and north seeking gyroscope embodiment thereof
JPH0618267A (en) * 1991-10-09 1994-01-25 Akai Electric Co Ltd Oscillatory gyroscope having diagnosis function
US5388458A (en) * 1992-11-24 1995-02-14 The Charles Stark Draper Laboratory, Inc. Quartz resonant gyroscope or quartz resonant tuning fork gyroscope
US5447066A (en) * 1993-09-01 1995-09-05 Matsushita Electric Industrial Co. Ltd. Angular velocity sensor having a tuning fork construction and its method of manufacture
JPH07181042A (en) * 1993-12-22 1995-07-18 Nissan Motor Co Ltd Diagnostic unit for angular speed sensor
US5531115A (en) * 1995-06-29 1996-07-02 Erdley; Harold F. Self-calibrating three axis angular rate sensor
US5698784A (en) * 1996-01-24 1997-12-16 Gyration, Inc. Vibratory rate gyroscope and methods of assembly and operation

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0406891A1 (en) * 1989-07-07 1991-01-09 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
EP0638782A1 (en) * 1993-08-02 1995-02-15 New Sd, Inc. Rotation rate sensor with built in test circuit

Also Published As

Publication number Publication date
US6244095B1 (en) 2001-06-12
EP0773430A4 (en) 1999-11-03
DE69622815D1 (en) 2002-09-12
US5939630A (en) 1999-08-17
CN1352395A (en) 2002-06-05
CN1352394A (en) 2002-06-05
EP1174683A2 (en) 2002-01-23
DE69637287D1 (en) 2007-11-22
CN1142436C (en) 2004-03-17
US6089091A (en) 2000-07-18
WO1996038712A1 (en) 1996-12-05
EP0773430B1 (en) 2002-08-07
CN1154741A (en) 1997-07-16
DE69637287T2 (en) 2008-01-31
CN1160574C (en) 2004-08-04
CN1090313C (en) 2002-09-04
EP0773430A1 (en) 1997-05-14
DE69622815T2 (en) 2002-11-28
EP1174683B1 (en) 2007-10-10

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