EP1166844A3 - Separation of metal chlorides from gaseous reaction mixtures from chlorosilane synthesis - Google Patents
Separation of metal chlorides from gaseous reaction mixtures from chlorosilane synthesis Download PDFInfo
- Publication number
- EP1166844A3 EP1166844A3 EP01112041A EP01112041A EP1166844A3 EP 1166844 A3 EP1166844 A3 EP 1166844A3 EP 01112041 A EP01112041 A EP 01112041A EP 01112041 A EP01112041 A EP 01112041A EP 1166844 A3 EP1166844 A3 EP 1166844A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- metal chlorides
- chlorosilanes
- suspension
- raw gas
- gaseous reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 229910001510 metal chloride Inorganic materials 0.000 title abstract 9
- 239000005046 Chlorosilane Substances 0.000 title abstract 7
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 title abstract 7
- 239000011541 reaction mixture Substances 0.000 title abstract 2
- 230000015572 biosynthetic process Effects 0.000 title 1
- 238000000926 separation method Methods 0.000 title 1
- 238000003786 synthesis reaction Methods 0.000 title 1
- 239000007789 gas Substances 0.000 abstract 6
- 239000000725 suspension Substances 0.000 abstract 5
- 238000001816 cooling Methods 0.000 abstract 2
- 239000007788 liquid Substances 0.000 abstract 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 abstract 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 abstract 1
- 230000000977 initiatory effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000008247 solid mixture Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
- B01D5/0078—Condensation of vapours; Recovering volatile solvents by condensation characterised by auxiliary systems or arrangements
- B01D5/0081—Feeding the steam or the vapours
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/73—After-treatment of removed components
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B9/00—General methods of preparing halides
- C01B9/02—Chlorides
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Health & Medical Sciences (AREA)
- Organic Chemistry (AREA)
- Biomedical Technology (AREA)
- Environmental & Geological Engineering (AREA)
- General Health & Medical Sciences (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
Die Erfindung betrifft ein Verfahren zur Abtrennung von Metallchloriden aus dem bei der Umsetzung von technischem Silizium mit Chlorwasserstoff entstehenden heißen, gasförmigen Reaktionsgemisch (Rohgas), bei dem man das Rohgas in eine im Kreis geführte Suspension von Metallchloriden in Chlorsilanen einleitet, die Temperatur des Rohgases von dessen Einleitungstemperatur bis zur Temperatur des bei der Einleitung entstehenden dreiphasigen Gas/Flüssigkeits/Feststoff-Gemisches zum Teil durch direkte, durch Verdampfung von Chlorsilanen bewirkte Kühlung und zum Teil durch indirekte Kühlung absenkt, einen Teil der entstandenen Suspension von Metallchloriden in flüssigen Chlorsilanen zur Einleitungsstelle des Rohgases zurückführt und aus dem anderen Teil der Suspension die Metallchloride abtrennt. Die Erfindung betrifft weiterhin einen Apparat (oder Kondensator), in dem das Rohgas zur Abscheidung von Metallchloriden und Chlorsilanen in eine Suspension von Metallchloriden in Chlorsilanen eingeleitet wird, sowie eine Filter- und Lösevorrichtung zur Trennung der Suspension von Metallchloriden in Chlorsilanen und zur Weiterbehandlung der abgetrennten Metallchloride.The invention relates to a method for separating Metal chlorides from the implementation of technical Silicon with hydrogen chloride, hot, gaseous Reaction mixture (raw gas), in which the raw gas in a circular suspension of metal chlorides in Chlorosilanes initiates the temperature of the raw gas whose initiation temperature up to the temperature of the resulting three-phase gas / liquid / solid mixture partly through direct, through Evaporation of chlorosilanes caused cooling and partly lowered by indirect cooling, some of the resulting Suspension of metal chlorides in liquid chlorosilanes leads back to the point of introduction of the raw gas and out the other part of the suspension separates the metal chlorides. The invention further relates to an apparatus (or condenser) in which the raw gas to separate Metal chlorides and chlorosilanes in a suspension of Metal chlorides are introduced into chlorosilanes, as well a filter and dissolver for separating the suspension of metal chlorides in chlorosilanes and for further treatment the separated metal chlorides.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10030251A DE10030251A1 (en) | 2000-06-20 | 2000-06-20 | Separation of metal chlorides from gaseous reaction mixtures from chlorosilane synthesis |
DE10030251 | 2000-06-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1166844A2 EP1166844A2 (en) | 2002-01-02 |
EP1166844A3 true EP1166844A3 (en) | 2002-01-23 |
Family
ID=7646311
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01112041A Withdrawn EP1166844A3 (en) | 2000-06-20 | 2001-05-23 | Separation of metal chlorides from gaseous reaction mixtures from chlorosilane synthesis |
Country Status (4)
Country | Link |
---|---|
US (1) | US20010053339A1 (en) |
EP (1) | EP1166844A3 (en) |
JP (1) | JP2002060213A (en) |
DE (1) | DE10030251A1 (en) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10342828A1 (en) * | 2003-09-17 | 2005-04-14 | Degussa Ag | High purity pyrogenic silica |
EP1700828A1 (en) | 2005-03-09 | 2006-09-13 | Degussa AG | Method for producing ultra-high purity, optical quality, glass articles |
EP1700830A1 (en) | 2005-03-09 | 2006-09-13 | Novara Technology S.R.L. | Process for the production of monoliths by means of the invert sol-gel process |
EP1700832A1 (en) | 2005-03-09 | 2006-09-13 | Degussa AG | A method of producing glass of optical quality |
EP1700824A1 (en) | 2005-03-09 | 2006-09-13 | Degussa AG | Granules based on pyrogenically prepared silicon dioxide, method for their preparation and use thereof |
PL1700831T3 (en) | 2005-03-09 | 2008-03-31 | Degussa Novara Tech S P A | Process for the production of monoliths by means of the sol-gel process |
EP1700829A1 (en) * | 2005-03-09 | 2006-09-13 | Degussa AG | Process for the production of glass-monoliths by means of the sol-gel process |
US9315382B2 (en) | 2006-03-23 | 2016-04-19 | Keystone Metals Recovery Inc. | Metal chlorides and metals obtained from metal oxide containing materials |
US7736614B2 (en) * | 2008-04-07 | 2010-06-15 | Lord Ltd., Lp | Process for removing aluminum and other metal chlorides from chlorosilanes |
DE102009020143A1 (en) * | 2009-05-04 | 2010-11-11 | Pv Silicon Forschungs- Und Produktionsgesellschaft Mbh | Process for the treatment of saw waste for the recovery of silicon for the production of solar silicon |
US8298490B2 (en) * | 2009-11-06 | 2012-10-30 | Gtat Corporation | Systems and methods of producing trichlorosilane |
US20160008784A1 (en) * | 2013-03-13 | 2016-01-14 | Sitec Gmbh | Temperature management in chlorination processes and systems related thereto |
JP6897342B2 (en) * | 2017-06-07 | 2021-06-30 | 三菱マテリアル株式会社 | Chlorosilane recovery method and chlorosilane recovery device |
WO2019098343A1 (en) | 2017-11-20 | 2019-05-23 | 株式会社トクヤマ | Production method for trichlorosilane, and pipe |
CN108862284A (en) * | 2018-07-18 | 2018-11-23 | 兰州天大华瑞环境工程技术有限公司 | A kind of production of polysilicon link slurry processing unit and method |
CN109529545A (en) * | 2018-12-12 | 2019-03-29 | 安徽金禾实业股份有限公司 | A kind of methyl acetoacetate exhaust gas treating method and device |
CN111908475B (en) * | 2019-05-08 | 2023-02-07 | 河南尚宇新能源股份有限公司 | Recovery system and method for trichlorosilane wet dedusting circulating liquid |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3878291A (en) * | 1971-12-11 | 1975-04-15 | Degussa | Process for the production of metal free chlorosilane by the chlorination or hydrochlorination of ferrosilicon |
US4130632A (en) * | 1976-05-25 | 1978-12-19 | Wacker-Chemitronic Gesellschaft Fur Elecktronik-Grundstoffe Mbh | Process for the manufacture of trichlorosilane and silicon tetrachloride |
DE3045900A1 (en) * | 1980-12-05 | 1982-07-08 | Babcock-BSH AG vormals Büttner-Schilde-Haas AG, 4150 Krefeld | Washing waste gases and plant - using condensate from waste gas as cleaning liq. after reheating to dew-point |
DE3221148A1 (en) * | 1981-07-29 | 1983-02-10 | BHS-Bayerische Berg-, Hütten- und Salzwerke AG, 8000 München | Apparatus and process for separating and drying solids from liquids |
DE3509782A1 (en) * | 1985-03-19 | 1986-10-02 | SEP Gesellschaft für technische Studien, Entwicklung, Planung mbH, 8000 München | Process and apparatus for purifying and cooling exhaust gases resulting from combustion, heating or chemical processes |
US4828697A (en) * | 1985-09-17 | 1989-05-09 | Schenk Filterbau Gmbh | Suction filter |
US5362393A (en) * | 1992-02-10 | 1994-11-08 | Karl Brieden Bau-Und Beteiligungs-Kg | Pressure filter for liquids |
-
2000
- 2000-06-20 DE DE10030251A patent/DE10030251A1/en not_active Withdrawn
-
2001
- 2001-05-23 EP EP01112041A patent/EP1166844A3/en not_active Withdrawn
- 2001-06-19 JP JP2001185378A patent/JP2002060213A/en active Pending
- 2001-06-20 US US09/884,151 patent/US20010053339A1/en not_active Abandoned
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3878291A (en) * | 1971-12-11 | 1975-04-15 | Degussa | Process for the production of metal free chlorosilane by the chlorination or hydrochlorination of ferrosilicon |
US4130632A (en) * | 1976-05-25 | 1978-12-19 | Wacker-Chemitronic Gesellschaft Fur Elecktronik-Grundstoffe Mbh | Process for the manufacture of trichlorosilane and silicon tetrachloride |
DE3045900A1 (en) * | 1980-12-05 | 1982-07-08 | Babcock-BSH AG vormals Büttner-Schilde-Haas AG, 4150 Krefeld | Washing waste gases and plant - using condensate from waste gas as cleaning liq. after reheating to dew-point |
DE3221148A1 (en) * | 1981-07-29 | 1983-02-10 | BHS-Bayerische Berg-, Hütten- und Salzwerke AG, 8000 München | Apparatus and process for separating and drying solids from liquids |
DE3509782A1 (en) * | 1985-03-19 | 1986-10-02 | SEP Gesellschaft für technische Studien, Entwicklung, Planung mbH, 8000 München | Process and apparatus for purifying and cooling exhaust gases resulting from combustion, heating or chemical processes |
US4828697A (en) * | 1985-09-17 | 1989-05-09 | Schenk Filterbau Gmbh | Suction filter |
US5362393A (en) * | 1992-02-10 | 1994-11-08 | Karl Brieden Bau-Und Beteiligungs-Kg | Pressure filter for liquids |
Also Published As
Publication number | Publication date |
---|---|
DE10030251A1 (en) | 2002-01-03 |
JP2002060213A (en) | 2002-02-26 |
EP1166844A2 (en) | 2002-01-02 |
US20010053339A1 (en) | 2001-12-20 |
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Legal Events
Date | Code | Title | Description |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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18D | Application deemed to be withdrawn |
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