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EP1145298A3 - Verfahren zur herstellung von schottky-dioden - Google Patents

Verfahren zur herstellung von schottky-dioden

Info

Publication number
EP1145298A3
EP1145298A3 EP99934481A EP99934481A EP1145298A3 EP 1145298 A3 EP1145298 A3 EP 1145298A3 EP 99934481 A EP99934481 A EP 99934481A EP 99934481 A EP99934481 A EP 99934481A EP 1145298 A3 EP1145298 A3 EP 1145298A3
Authority
EP
European Patent Office
Prior art keywords
schottky diodes
producing schottky
producing
diodes
schottky
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99934481A
Other languages
English (en)
French (fr)
Other versions
EP1145298A2 (de
Inventor
Reinhard Losehand
Hubert Werthmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Publication of EP1145298A2 publication Critical patent/EP1145298A2/de
Publication of EP1145298A3 publication Critical patent/EP1145298A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/01Manufacture or treatment
    • H10D8/051Manufacture or treatment of Schottky diodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/60Schottky-barrier diodes 
EP99934481A 1998-05-26 1999-05-11 Verfahren zur herstellung von schottky-dioden Withdrawn EP1145298A3 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19823482 1998-05-26
DE19823482 1998-05-26
PCT/DE1999/001429 WO1999062113A2 (de) 1998-05-26 1999-05-11 Verfahren zur herstellung von schottky-dioden

Publications (2)

Publication Number Publication Date
EP1145298A2 EP1145298A2 (de) 2001-10-17
EP1145298A3 true EP1145298A3 (de) 2002-11-20

Family

ID=7868961

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99934481A Withdrawn EP1145298A3 (de) 1998-05-26 1999-05-11 Verfahren zur herstellung von schottky-dioden

Country Status (4)

Country Link
US (1) US6551911B1 (de)
EP (1) EP1145298A3 (de)
JP (1) JP2003514371A (de)
WO (1) WO1999062113A2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8338906B2 (en) * 2008-01-30 2012-12-25 Taiwan Semiconductor Manufacturing Co., Ltd. Schottky device

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4107719A (en) * 1975-02-19 1978-08-15 Siemens Aktiengesellschaft Inverse planar transistor
US4414737A (en) 1981-01-30 1983-11-15 Tokyo Shibaura Denki Kabushiki Kaisha Production of Schottky barrier diode
US4691435A (en) * 1981-05-13 1987-09-08 International Business Machines Corporation Method for making Schottky diode having limited area self-aligned guard ring
US4796069A (en) * 1981-05-13 1989-01-03 International Business Machines Corporation Schottky diode having limited area self-aligned guard ring and method for making same
JPS60157268A (ja) * 1984-01-26 1985-08-17 Rohm Co Ltd シヨツトキバリアダイオ−ド
US4835580A (en) * 1987-04-30 1989-05-30 Texas Instruments Incorporated Schottky barrier diode and method
JPH0618276B2 (ja) * 1988-11-11 1994-03-09 サンケン電気株式会社 半導体装置
CA2008176A1 (en) 1989-01-25 1990-07-25 John W. Palmour Silicon carbide schottky diode and method of making same
WO1991004581A1 (en) * 1989-09-21 1991-04-04 Unisearch Limited Guard barrier for schottky barrier devices
JP2809826B2 (ja) * 1990-06-29 1998-10-15 三菱電機株式会社 半導体装置の製造方法
EP1090418B1 (de) * 1998-05-26 2008-07-09 Infineon Technologies AG Verfahren zur herstellung von schottky-dioden
US6066884A (en) * 1999-03-19 2000-05-23 Lucent Technologies Inc. Schottky diode guard ring structures

Also Published As

Publication number Publication date
WO1999062113A3 (de) 2002-10-03
US6551911B1 (en) 2003-04-22
WO1999062113A2 (de) 1999-12-02
EP1145298A2 (de) 2001-10-17
JP2003514371A (ja) 2003-04-15

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Legal Events

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