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EP1100092A3 - X-ray guiding device - Google Patents

X-ray guiding device Download PDF

Info

Publication number
EP1100092A3
EP1100092A3 EP00123501A EP00123501A EP1100092A3 EP 1100092 A3 EP1100092 A3 EP 1100092A3 EP 00123501 A EP00123501 A EP 00123501A EP 00123501 A EP00123501 A EP 00123501A EP 1100092 A3 EP1100092 A3 EP 1100092A3
Authority
EP
European Patent Office
Prior art keywords
guiding device
ray guiding
ray
slit
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00123501A
Other languages
German (de)
French (fr)
Other versions
EP1100092B1 (en
EP1100092A2 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Helmut Fischer GmbH and Co
Original Assignee
Helmut Fischer GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helmut Fischer GmbH and Co filed Critical Helmut Fischer GmbH and Co
Publication of EP1100092A2 publication Critical patent/EP1100092A2/en
Publication of EP1100092A3 publication Critical patent/EP1100092A3/en
Application granted granted Critical
Publication of EP1100092B1 publication Critical patent/EP1100092B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Radiation-Therapy Devices (AREA)
  • X-Ray Techniques (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

Apparatus for guiding X-rays from a radiation source to a measurement object (16) having at least two reflecting areas (18) forming a slit.
EP00123501A 1999-11-12 2000-10-27 X-ray guiding device Expired - Lifetime EP1100092B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19954520 1999-11-12
DE19954520A DE19954520A1 (en) 1999-11-12 1999-11-12 Device for guiding X-rays

Publications (3)

Publication Number Publication Date
EP1100092A2 EP1100092A2 (en) 2001-05-16
EP1100092A3 true EP1100092A3 (en) 2003-03-26
EP1100092B1 EP1100092B1 (en) 2006-07-19

Family

ID=7928847

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00123501A Expired - Lifetime EP1100092B1 (en) 1999-11-12 2000-10-27 X-ray guiding device

Country Status (7)

Country Link
US (1) US6438209B1 (en)
EP (1) EP1100092B1 (en)
JP (1) JP2001201599A (en)
CN (1) CN1202416C (en)
AT (1) ATE333702T1 (en)
DE (2) DE19954520A1 (en)
HK (1) HK1035400A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2291162T3 (en) * 2000-09-27 2008-03-01 Euratom MICROHAZ COLIMADOR FOR RESEARCH OF DRX OF ALATA RESOLUTION WITH CONVENTIONAL DIFRACTOMETERS.
JP2007304063A (en) * 2006-05-15 2007-11-22 Shimadzu Corp Solar slit
EP2572368A2 (en) * 2010-05-19 2013-03-27 Eric H. Silver Hybrid x-ray optic apparatus and methods
EP3115809B1 (en) * 2015-07-06 2021-04-28 Exruptive A/S A method of security scanning of carry-on items, and a security scanning system of carry-on items
EP3322340B1 (en) * 2015-07-14 2019-06-19 Koninklijke Philips N.V. Imaging with enhanced x-ray radiation
DE102022105838B3 (en) 2022-03-14 2023-08-17 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Adjusting unit for X-ray optics in an X-ray fluorescence device and X-ray fluorescence device

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2217036A (en) * 1988-03-11 1989-10-18 Rosser Roy J Saddle-toriod mirrors.
US5101422A (en) * 1990-10-31 1992-03-31 Cornell Research Foundation, Inc. Mounting for X-ray capillary
JPH06283583A (en) * 1993-03-25 1994-10-07 Towa Kagaku Kk Wafer for analyzing surface foreign matter and estimation method of metal impurities on wafer surface
EP0724150A1 (en) * 1994-07-08 1996-07-31 Muradin Abubekirovich Kumakhov Device for obtaining an image of an object using a stream of neutral or charged particles and a lens for converting the said stream of neutral or charged particles
JPH10221500A (en) * 1997-02-03 1998-08-21 Olympus Optical Co Ltd Soft x-ray tester
EP0873565A2 (en) * 1996-01-10 1998-10-28 Bastian Niemann Condenser-monochromator arrangement for x-radiation
JPH11132970A (en) * 1997-11-01 1999-05-21 Horiba Ltd Fluorescent x-ray-analyzing device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5016267A (en) * 1986-08-15 1991-05-14 Commonwealth Scientific And Industrial Research Instrumentation for conditioning X-ray or neutron beams
US4958363A (en) * 1986-08-15 1990-09-18 Nelson Robert S Apparatus for narrow bandwidth and multiple energy x-ray imaging
US5001737A (en) * 1988-10-24 1991-03-19 Aaron Lewis Focusing and guiding X-rays with tapered capillaries

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2217036A (en) * 1988-03-11 1989-10-18 Rosser Roy J Saddle-toriod mirrors.
US5101422A (en) * 1990-10-31 1992-03-31 Cornell Research Foundation, Inc. Mounting for X-ray capillary
JPH06283583A (en) * 1993-03-25 1994-10-07 Towa Kagaku Kk Wafer for analyzing surface foreign matter and estimation method of metal impurities on wafer surface
EP0724150A1 (en) * 1994-07-08 1996-07-31 Muradin Abubekirovich Kumakhov Device for obtaining an image of an object using a stream of neutral or charged particles and a lens for converting the said stream of neutral or charged particles
EP0873565A2 (en) * 1996-01-10 1998-10-28 Bastian Niemann Condenser-monochromator arrangement for x-radiation
JPH10221500A (en) * 1997-02-03 1998-08-21 Olympus Optical Co Ltd Soft x-ray tester
JPH11132970A (en) * 1997-11-01 1999-05-21 Horiba Ltd Fluorescent x-ray-analyzing device

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1995, no. 01 28 February 1995 (1995-02-28) *
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 13 30 November 1998 (1998-11-30) *
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 10 31 August 1999 (1999-08-31) *

Also Published As

Publication number Publication date
US6438209B1 (en) 2002-08-20
EP1100092B1 (en) 2006-07-19
JP2001201599A (en) 2001-07-27
DE50013184D1 (en) 2006-08-31
DE19954520A1 (en) 2001-05-17
ATE333702T1 (en) 2006-08-15
HK1035400A1 (en) 2001-11-23
CN1202416C (en) 2005-05-18
CN1296178A (en) 2001-05-23
EP1100092A2 (en) 2001-05-16

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