EP1080504A1 - Piezoelectric actuator - Google Patents
Piezoelectric actuatorInfo
- Publication number
- EP1080504A1 EP1080504A1 EP00914040A EP00914040A EP1080504A1 EP 1080504 A1 EP1080504 A1 EP 1080504A1 EP 00914040 A EP00914040 A EP 00914040A EP 00914040 A EP00914040 A EP 00914040A EP 1080504 A1 EP1080504 A1 EP 1080504A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- electrode
- actuator body
- piezoelectric actuator
- layers
- electrode connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000002485 combustion reaction Methods 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims abstract description 5
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M51/00—Fuel-injection apparatus characterised by being operated electrically
- F02M51/06—Injectors peculiar thereto with means directly operating the valve needle
- F02M51/0603—Injectors peculiar thereto with means directly operating the valve needle using piezoelectric or magnetostrictive operating means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
- H10N30/505—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M51/00—Fuel-injection apparatus characterised by being operated electrically
- F02M51/005—Arrangement of electrical wires and connections, e.g. wire harness, sockets, plugs; Arrangement of electronic control circuits in or on fuel injection apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M63/00—Other fuel-injection apparatus having pertinent characteristics not provided for in groups F02M39/00 - F02M57/00 or F02M67/00; Details, component parts, or accessories of fuel-injection apparatus, not provided for in, or of interest apart from, the apparatus of groups F02M39/00 - F02M61/00 or F02M67/00; Combination of fuel pump with other devices, e.g. lubricating oil pump
- F02M63/0012—Valves
- F02M63/0014—Valves characterised by the valve actuating means
- F02M63/0015—Valves characterised by the valve actuating means electrical, e.g. using solenoid
- F02M63/0026—Valves characterised by the valve actuating means electrical, e.g. using solenoid using piezoelectric or magnetostrictive actuators
Definitions
- the invention relates to a piezoelectric actuator particularly suitable for actuating control or injection valves on internal combustion engines in motor vehicles with a circular cylindrical piezoelectric actuator body in the form of a multilayered laminate of layers of piezoelectric material which are stacked on top of one another and metallic or electrically conductive, alternating first and second electrodes serving as electrodes Electrode layers, these first and second electrode layers being alternately contacted by a first and a second electrically conductive common electrode connection.
- piezoelectric high-voltage actuators in a cylindrical design which are stacked one on top of the other as ceramic individual disks with fixed electrodes to form a cylinder (see, for example, US Pat. No. 4,460,842).
- electrode sheets are guided to the outer surface of the cylinder stack and bent there at a right angle so that strip-shaped electrode connections are produced which are offset from one another and can contact electrodes which are assigned to one another.
- a cylindrical actuator is advantageous since it has the available installation space in an injector body and in a circular bore in the cylinder head of the
- a high-pressure bore can also be drilled in the injector body or housing.
- the circular contour of the actuator body requires a special electrode structure in order to be able to make an electrically and mechanically favorable contacting of the electrodes with assigned electrode connections.
- Combustion engines in motor vehicles which has a circular cylindrical piezoelectric actuator body in the form of a multi-layer laminate of layers of piezoelectric material stacked on top of one another and metallic or electrically conductive, alternatingly provided first and second electrode layers serving as electrodes, so that a mechanically stable, space-saving and electrically safe contacting of the electrode layers with the associated electrode connections is made possible.
- the circular cylindrical actuator body on an inner bore, the first electrode connection inside and the second electrode connection outside or both
- Electrode connections are made in the inner bore.
- the actuator body is also circular cylindrical, but has no inner bore.
- the electrode connections are located on the lateral surface of the cylindrical actuator body and are offset at an angle to one another, for this purpose the first and second electrode layers have respective recesses which isolate the electrode connection that is not in contact with this electrode layer.
- Bore of an injector body can be fitted, leaving space for a high-pressure bore in the wall of the injector body.
- FIGS. 1A and IB each show in perspective and in the form of a longitudinal section a piezoelectric actuator designed according to the first aspect of the invention.
- FIGS. 2A and 2B each show, in perspective and as a longitudinal section, a variant of a piezoelectric actuator according to the invention designed according to the first aspect.
- FIGS. 3A and 3B each show a perspective and longitudinal section of a piezoelectric actuator designed according to the second aspect of the invention.
- FIGS. 4 to 8 each show in cross section variants of the exemplary embodiment of a piezoelectric actuator shown in FIGS. 3A and 3B.
- FIG. 1A shows a circular-cylindrical actuator body 1, which is provided with a central inner longitudinal bore 2.
- first electrode layers 10, which alternate with second electrode layers 11 in the piezoelectric actuator body 1, are exposed on the inner wall 3 of the actuator body 1 formed by the central inner longitudinal bore 2 and are in contact with a first common electrode connection 12, while the second conductive ones Electrode layers 11 on the
- the outer cylinder wall 4 of the actuator body 1 is exposed and there is in contact with a second common electrode connection 13.
- the first common electrode connection 12 on the inside and the second common electrode connection 13 on the outside of the actuator body 1 are led away.
- the first electrode layers 10 which are in contact with the first common electrode connection 12 do not extend as far as the cylinder outer wall 4 and that the second are in contact with the second common electrode connection 13 standing electrode layers 11 do not extend to the inner wall 3 of the actuator body 1 formed by the bore 2.
- both can be the first common
- first and second electrode connections 12 and 13 can also be guided only in a strip shape parallel to the longitudinal axis of the actuator body 1.
- FIGS. 2A and 2B of the piezoelectric actuator designed according to the first aspect of the invention differs from the first embodiment shown in FIGS. 1A and IB in that none of the first and second electrode layers 10 and 11 on the cylinder outer wall 4 of the actuator body 1 are exposed, but instead are only in contact with the first and second common electrode connections 12 and 13 only on the inner wall 3 formed by the inner longitudinal bore 2.
- the first and second common electrode terminals 12 and 12 are connected to The first and second common electrode terminals 12 and
- the advantage of the exemplary embodiment of the piezoelectric actuator according to the invention shown in FIGS. 2A and 2B lies in the large utilization of the active piezo areas.
- the advantage of the exemplary embodiment of a piezoelectric actuator according to the invention shown in FIGS. 1A and IB lies in the fact that a bias voltage element through the inner bore 2 z. B. in the form of a metallic pin to apply a mechanical bias to the two end faces of the actuator body 1.
- tensioning brackets guided on the outer sides of the actuator body 1 can be omitted.
- a piezoelectric actuator designed according to the second aspect of the invention has no inner bore.
- the alternating first and second electrode layers 10 and 11 are each exposed on 'mutually opposite jacket sides of the circular cylindrical actuator body 1 and are there in each case in contact with the first and second electrode connections 12, 13.
- the contact surface available for the first and second electrode connection 12, 13 can in principle reach up to almost 180 ° C. on the cylinder jacket surface.
- the first and second electrode connections 12, 13 then each form a half-shell on the surface of the cylinder. So that the first and second electrode connections 12, 13 are insulated from one another, two diametrically opposite strips remain free of electrode connections.
- each first electrode layer 10 is recessed around the half-shelled second electrode connection 13, this recess 17 being made of ceramic without electrode material.
- every second electrode layer 11 is recessed around the first common electrode connection 12 so that it is insulated from the second electrode layer 11. This recess 18 is also made of ceramic without
- the shape of the Recesses 17 and 18 each have the shape of a circular arc, the arc of the first and second recesses taking up a somewhat larger angular range than the half-shells of the second and first electrode connections.
- FIGS. 5A, 5B, 6 and 7 A solution for this is shown in FIGS. 5A, 5B, 6 and 7.
- the first and second electrode connections 12 and 13 form narrow, diametrically opposite contact strips which lie in the longitudinal direction on the outer surface 4 of the piezoelectric actuator body 1.
- the respective recesses 17 and 18 can therefore become so small that they only remove small surface sections from the respective electrode surface of the first and second electrode layers 10 and 11.
- FIGS. 6 to 8 show, in deviation from FIGS. 4 and 5, only a sectional view, only one of the electrode layers, e.g. B. one of the first electrode layers 10 and the recess 17 lying around the contact strip of the second electrode connection 13 can be seen. According to FIGS. 6 and 7, the cutouts 17 are limited to small surface sections of the first electrode layers 10. In the same way, the recesses 18 (not to be recognized) are shaped around the contact strip forming the first common electrode connection 12.
- the cutouts 17 and 18 have the shape of a circular section. According to FIG. 7, the cutouts 17 and 18 each have the shape of an arcuate cutout from the first and second electrode layers.
- the first and second common electrode connections 12 and 13 in FIG. 8 are designed in the form of wider half-shells, similar to FIG. 4, and each recess 17 in the first electrode layer is approximately crescent-shaped around the second electrode connection 13.
- the second recess (not shown in FIG. 8) of the second electrode layers 11 around the first electrode connection 12 then has the same shape.
- All of the exemplary embodiments shown in FIGS. 3 to 8 have a staggered arrangement of the first and second electrode layers 10 and 11 according to FIG. 3B, each of the first and second electrode layers 10 and 11 being exposed on diametrically opposite sides of the cylinder jacket surface and there with narrow contact strips of the first and second common electrode connections 12, 13 (see FIGS. 5, 6 and 7) or with wider contact shells of the first and second common electrode connections 12 and 13 (FIGS. 4 and 8).
- the outer contours of the exemplary embodiments of a piezoelectric actuator according to the invention shown in the figures do not, or hardly differ, from the circular cylindrical shape that is optimal for the intended use.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Fuel-Injection Apparatus (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19909482 | 1999-03-04 | ||
| DE19909482A DE19909482A1 (en) | 1999-03-04 | 1999-03-04 | Piezoelectric actuator |
| PCT/DE2000/000511 WO2000052770A1 (en) | 1999-03-04 | 2000-02-24 | Piezoelectric actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP1080504A1 true EP1080504A1 (en) | 2001-03-07 |
Family
ID=7899674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP00914040A Withdrawn EP1080504A1 (en) | 1999-03-04 | 2000-02-24 | Piezoelectric actuator |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6940213B1 (en) |
| EP (1) | EP1080504A1 (en) |
| JP (1) | JP2002538629A (en) |
| KR (1) | KR100728510B1 (en) |
| CN (1) | CN1183609C (en) |
| DE (1) | DE19909482A1 (en) |
| WO (1) | WO2000052770A1 (en) |
Families Citing this family (57)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19946837A1 (en) * | 1999-09-30 | 2001-05-03 | Bosch Gmbh Robert | Piezo actuator |
| DE10048928A1 (en) * | 2000-10-04 | 2002-04-25 | Bosch Gmbh Robert | piezo element |
| JP4761415B2 (en) * | 2001-02-23 | 2011-08-31 | Necトーキン株式会社 | Multilayer piezoelectric actuator element |
| US7304414B2 (en) | 2002-05-06 | 2007-12-04 | Epcos Ag | Piezoactuator and method for the production thereof |
| JP4723199B2 (en) * | 2003-06-19 | 2011-07-13 | 日本碍子株式会社 | Cylindrical piezoelectric actuator, cylindrical piezoelectric actuator array, and manufacturing method |
| DE10335019A1 (en) * | 2003-07-31 | 2005-02-17 | Robert Bosch Gmbh | piezo actuator |
| DE10345730A1 (en) * | 2003-10-01 | 2005-04-21 | Bosch Gmbh Robert | Piezoelectric actuator, e.g. for operating mechanical component, has actuator part piezo layers, sensor piezo layers integrated into one component so individual sensor piezo layers are at defined intervals between actuator piezo layers |
| JP2005117313A (en) * | 2003-10-07 | 2005-04-28 | Fujitsu Ltd | Piezoelectric element and touch panel device |
| DE102004005227A1 (en) * | 2004-02-03 | 2005-08-18 | Robert Bosch Gmbh | Piezo actuator with at least one pair of internal electrodes |
| US7554251B2 (en) * | 2004-03-09 | 2009-06-30 | Kyocera Corporation | Multi-layer piezoelectric element and method for manufacturing the same |
| EP1740318A2 (en) * | 2004-04-21 | 2007-01-10 | Symyx Technologies, Inc. | Flexural resonator sensing device and method |
| DE102004020329A1 (en) * | 2004-04-26 | 2005-11-10 | Epcos Ag | Electrical functional unit and method for its production |
| FR2874663B1 (en) * | 2004-08-31 | 2006-11-24 | Renault Sas | DEVICE FOR CYCLIC VIBRATION OF AN INJECTOR NOZZLE |
| JP2006165193A (en) * | 2004-12-06 | 2006-06-22 | Denso Corp | Hollow laminated piezoelectric element and manufacturing method thereof |
| WO2007052599A1 (en) * | 2005-11-02 | 2007-05-10 | Murata Manufacturing Co., Ltd. | Piezoelectric element |
| EP1798782B1 (en) * | 2005-12-13 | 2008-11-26 | Continental Automotive GmbH | Piezoelectric actuator and manufacturing method of a piezostack |
| DE102006026644A1 (en) * | 2006-06-08 | 2007-12-13 | Robert Bosch Gmbh | Piezoelectric actuator |
| US7679273B2 (en) * | 2006-07-31 | 2010-03-16 | Delphi Technologies, Inc. | Strain tolerant metal electrode design |
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| US8413634B2 (en) | 2008-01-07 | 2013-04-09 | Mcalister Technologies, Llc | Integrated fuel injector igniters with conductive cable assemblies |
| US8365700B2 (en) | 2008-01-07 | 2013-02-05 | Mcalister Technologies, Llc | Shaping a fuel charge in a combustion chamber with multiple drivers and/or ionization control |
| US8387599B2 (en) | 2008-01-07 | 2013-03-05 | Mcalister Technologies, Llc | Methods and systems for reducing the formation of oxides of nitrogen during combustion in engines |
| WO2011025512A1 (en) | 2009-08-27 | 2011-03-03 | Mcallister Technologies, Llc | Integrated fuel injectors and igniters and associated methods of use and manufacture |
| US8561598B2 (en) | 2008-01-07 | 2013-10-22 | Mcalister Technologies, Llc | Method and system of thermochemical regeneration to provide oxygenated fuel, for example, with fuel-cooled fuel injectors |
| US7628137B1 (en) | 2008-01-07 | 2009-12-08 | Mcalister Roy E | Multifuel storage, metering and ignition system |
| US8225768B2 (en) | 2008-01-07 | 2012-07-24 | Mcalister Technologies, Llc | Integrated fuel injector igniters suitable for large engine applications and associated methods of use and manufacture |
| US8074625B2 (en) | 2008-01-07 | 2011-12-13 | Mcalister Technologies, Llc | Fuel injector actuator assemblies and associated methods of use and manufacture |
| CN102292908A (en) | 2008-12-17 | 2011-12-21 | 发现技术国际股份有限公司 | Piezoelectric motor with high torque |
| JP2012513188A (en) | 2008-12-19 | 2012-06-07 | ディスカバリー テクノロジー インターナショナル,インク. | Piezoelectric motor |
| CN102308132A (en) * | 2009-02-06 | 2012-01-04 | 发现技术国际股份有限公司 | Valves based on reversible piezoelectric rotary motor |
| JP5718921B2 (en) | 2009-08-27 | 2015-05-13 | マクアリスター テクノロジーズ エルエルシー | Configuration of fuel charge in a combustion chamber with multiple drivers and / or ionization control |
| CN102712540B (en) | 2009-08-27 | 2014-12-17 | 麦卡利斯特技术有限责任公司 | Ceramic insulator and methods of use and manufacture thereof |
| WO2011028780A2 (en) | 2009-09-01 | 2011-03-10 | Discovery Technology International, Lllp | Piezoelectric rotary motor with high rotation speed and bi- directional operation |
| MX2012006565A (en) | 2009-12-07 | 2012-08-23 | Mcalister Technologies Llc | Adaptive control system for fuel injectors and igniters. |
| KR101364416B1 (en) | 2009-12-07 | 2014-02-17 | 맥알리스터 테크놀로지즈 엘엘씨 | Integrated fuel injector igniters suitable for large engine applications and associated methods of use and manufacture |
| US8297265B2 (en) | 2010-02-13 | 2012-10-30 | Mcalister Technologies, Llc | Methods and systems for adaptively cooling combustion chambers in engines |
| CA2788577C (en) | 2010-02-13 | 2014-04-01 | Mcalister Technologies, Llc | Fuel injector assemblies having acoustical force modifiers and associated methods of use and manufacture |
| US20110297753A1 (en) | 2010-12-06 | 2011-12-08 | Mcalister Roy E | Integrated fuel injector igniters configured to inject multiple fuels and/or coolants and associated methods of use and manufacture |
| US8528519B2 (en) | 2010-10-27 | 2013-09-10 | Mcalister Technologies, Llc | Integrated fuel injector igniters suitable for large engine applications and associated methods of use and manufacture |
| US8091528B2 (en) | 2010-12-06 | 2012-01-10 | Mcalister Technologies, Llc | Integrated fuel injector igniters having force generating assemblies for injecting and igniting fuel and associated methods of use and manufacture |
| WO2012112615A1 (en) | 2011-02-14 | 2012-08-23 | Mcalister Technologies, Llc | Torque multiplier engines |
| WO2013025657A2 (en) | 2011-08-12 | 2013-02-21 | Mcalister Technologies, Llc | Systems and methods for improved engine cooling and energy generation |
| US8919377B2 (en) | 2011-08-12 | 2014-12-30 | Mcalister Technologies, Llc | Acoustically actuated flow valve assembly including a plurality of reed valves |
| CH706635A1 (en) * | 2012-06-20 | 2013-12-31 | Kistler Holding Ag | Measuring element, measuring element and measuring device for measuring a force and use of such a measuring body. |
| US8851047B2 (en) | 2012-08-13 | 2014-10-07 | Mcallister Technologies, Llc | Injector-igniters with variable gap electrode |
| US9169814B2 (en) | 2012-11-02 | 2015-10-27 | Mcalister Technologies, Llc | Systems, methods, and devices with enhanced lorentz thrust |
| US9169821B2 (en) | 2012-11-02 | 2015-10-27 | Mcalister Technologies, Llc | Fuel injection systems with enhanced corona burst |
| US8752524B2 (en) | 2012-11-02 | 2014-06-17 | Mcalister Technologies, Llc | Fuel injection systems with enhanced thrust |
| US20140131466A1 (en) | 2012-11-12 | 2014-05-15 | Advanced Green Innovations, LLC | Hydraulic displacement amplifiers for fuel injectors |
| US9115325B2 (en) | 2012-11-12 | 2015-08-25 | Mcalister Technologies, Llc | Systems and methods for utilizing alcohol fuels |
| US9309846B2 (en) | 2012-11-12 | 2016-04-12 | Mcalister Technologies, Llc | Motion modifiers for fuel injection systems |
| US9200561B2 (en) | 2012-11-12 | 2015-12-01 | Mcalister Technologies, Llc | Chemical fuel conditioning and activation |
| US8800527B2 (en) | 2012-11-19 | 2014-08-12 | Mcalister Technologies, Llc | Method and apparatus for providing adaptive swirl injection and ignition |
| US9194337B2 (en) | 2013-03-14 | 2015-11-24 | Advanced Green Innovations, LLC | High pressure direct injected gaseous fuel system and retrofit kit incorporating the same |
| US9562500B2 (en) | 2013-03-15 | 2017-02-07 | Mcalister Technologies, Llc | Injector-igniter with fuel characterization |
| US8820293B1 (en) | 2013-03-15 | 2014-09-02 | Mcalister Technologies, Llc | Injector-igniter with thermochemical regeneration |
| DE102016108553A1 (en) * | 2016-05-09 | 2017-11-09 | Vega Grieshaber Kg | Piezoelectrically driven vibration limit switch with optimized effective area |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0479094A1 (en) * | 1990-10-04 | 1992-04-08 | TRIDELTA GmbH | Stacked piezoelectric device |
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| JP2000236120A (en) * | 1998-12-18 | 2000-08-29 | Nippon Soken Inc | Piezoelectric laminate |
-
1999
- 1999-03-04 DE DE19909482A patent/DE19909482A1/en not_active Ceased
-
2000
- 2000-02-24 JP JP2000603105A patent/JP2002538629A/en not_active Withdrawn
- 2000-02-24 WO PCT/DE2000/000511 patent/WO2000052770A1/en not_active Ceased
- 2000-02-24 US US09/674,771 patent/US6940213B1/en not_active Expired - Fee Related
- 2000-02-24 EP EP00914040A patent/EP1080504A1/en not_active Withdrawn
- 2000-02-24 CN CNB008002568A patent/CN1183609C/en not_active Expired - Fee Related
- 2000-02-24 KR KR1020007012231A patent/KR100728510B1/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0479094A1 (en) * | 1990-10-04 | 1992-04-08 | TRIDELTA GmbH | Stacked piezoelectric device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1183609C (en) | 2005-01-05 |
| JP2002538629A (en) | 2002-11-12 |
| KR20010043272A (en) | 2001-05-25 |
| US6940213B1 (en) | 2005-09-06 |
| CN1296644A (en) | 2001-05-23 |
| WO2000052770A1 (en) | 2000-09-08 |
| DE19909482A1 (en) | 2000-09-07 |
| KR100728510B1 (en) | 2007-06-15 |
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