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EP1080504A1 - Piezoelectric actuator - Google Patents

Piezoelectric actuator

Info

Publication number
EP1080504A1
EP1080504A1 EP00914040A EP00914040A EP1080504A1 EP 1080504 A1 EP1080504 A1 EP 1080504A1 EP 00914040 A EP00914040 A EP 00914040A EP 00914040 A EP00914040 A EP 00914040A EP 1080504 A1 EP1080504 A1 EP 1080504A1
Authority
EP
European Patent Office
Prior art keywords
electrode
actuator body
piezoelectric actuator
layers
electrode connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00914040A
Other languages
German (de)
French (fr)
Inventor
Rudolf Heinz
Friedrich Boecking
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP1080504A1 publication Critical patent/EP1080504A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02MSUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M51/00Fuel-injection apparatus characterised by being operated electrically
    • F02M51/06Injectors peculiar thereto with means directly operating the valve needle
    • F02M51/0603Injectors peculiar thereto with means directly operating the valve needle using piezoelectric or magnetostrictive operating means
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H10N30/505Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/87Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02MSUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M51/00Fuel-injection apparatus characterised by being operated electrically
    • F02M51/005Arrangement of electrical wires and connections, e.g. wire harness, sockets, plugs; Arrangement of electronic control circuits in or on fuel injection apparatus
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02MSUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M63/00Other fuel-injection apparatus having pertinent characteristics not provided for in groups F02M39/00 - F02M57/00 or F02M67/00; Details, component parts, or accessories of fuel-injection apparatus, not provided for in, or of interest apart from, the apparatus of groups F02M39/00 - F02M61/00 or F02M67/00; Combination of fuel pump with other devices, e.g. lubricating oil pump
    • F02M63/0012Valves
    • F02M63/0014Valves characterised by the valve actuating means
    • F02M63/0015Valves characterised by the valve actuating means electrical, e.g. using solenoid
    • F02M63/0026Valves characterised by the valve actuating means electrical, e.g. using solenoid using piezoelectric or magnetostrictive actuators

Definitions

  • the invention relates to a piezoelectric actuator particularly suitable for actuating control or injection valves on internal combustion engines in motor vehicles with a circular cylindrical piezoelectric actuator body in the form of a multilayered laminate of layers of piezoelectric material which are stacked on top of one another and metallic or electrically conductive, alternating first and second electrodes serving as electrodes Electrode layers, these first and second electrode layers being alternately contacted by a first and a second electrically conductive common electrode connection.
  • piezoelectric high-voltage actuators in a cylindrical design which are stacked one on top of the other as ceramic individual disks with fixed electrodes to form a cylinder (see, for example, US Pat. No. 4,460,842).
  • electrode sheets are guided to the outer surface of the cylinder stack and bent there at a right angle so that strip-shaped electrode connections are produced which are offset from one another and can contact electrodes which are assigned to one another.
  • a cylindrical actuator is advantageous since it has the available installation space in an injector body and in a circular bore in the cylinder head of the
  • a high-pressure bore can also be drilled in the injector body or housing.
  • the circular contour of the actuator body requires a special electrode structure in order to be able to make an electrically and mechanically favorable contacting of the electrodes with assigned electrode connections.
  • Combustion engines in motor vehicles which has a circular cylindrical piezoelectric actuator body in the form of a multi-layer laminate of layers of piezoelectric material stacked on top of one another and metallic or electrically conductive, alternatingly provided first and second electrode layers serving as electrodes, so that a mechanically stable, space-saving and electrically safe contacting of the electrode layers with the associated electrode connections is made possible.
  • the circular cylindrical actuator body on an inner bore, the first electrode connection inside and the second electrode connection outside or both
  • Electrode connections are made in the inner bore.
  • the actuator body is also circular cylindrical, but has no inner bore.
  • the electrode connections are located on the lateral surface of the cylindrical actuator body and are offset at an angle to one another, for this purpose the first and second electrode layers have respective recesses which isolate the electrode connection that is not in contact with this electrode layer.
  • Bore of an injector body can be fitted, leaving space for a high-pressure bore in the wall of the injector body.
  • FIGS. 1A and IB each show in perspective and in the form of a longitudinal section a piezoelectric actuator designed according to the first aspect of the invention.
  • FIGS. 2A and 2B each show, in perspective and as a longitudinal section, a variant of a piezoelectric actuator according to the invention designed according to the first aspect.
  • FIGS. 3A and 3B each show a perspective and longitudinal section of a piezoelectric actuator designed according to the second aspect of the invention.
  • FIGS. 4 to 8 each show in cross section variants of the exemplary embodiment of a piezoelectric actuator shown in FIGS. 3A and 3B.
  • FIG. 1A shows a circular-cylindrical actuator body 1, which is provided with a central inner longitudinal bore 2.
  • first electrode layers 10, which alternate with second electrode layers 11 in the piezoelectric actuator body 1, are exposed on the inner wall 3 of the actuator body 1 formed by the central inner longitudinal bore 2 and are in contact with a first common electrode connection 12, while the second conductive ones Electrode layers 11 on the
  • the outer cylinder wall 4 of the actuator body 1 is exposed and there is in contact with a second common electrode connection 13.
  • the first common electrode connection 12 on the inside and the second common electrode connection 13 on the outside of the actuator body 1 are led away.
  • the first electrode layers 10 which are in contact with the first common electrode connection 12 do not extend as far as the cylinder outer wall 4 and that the second are in contact with the second common electrode connection 13 standing electrode layers 11 do not extend to the inner wall 3 of the actuator body 1 formed by the bore 2.
  • both can be the first common
  • first and second electrode connections 12 and 13 can also be guided only in a strip shape parallel to the longitudinal axis of the actuator body 1.
  • FIGS. 2A and 2B of the piezoelectric actuator designed according to the first aspect of the invention differs from the first embodiment shown in FIGS. 1A and IB in that none of the first and second electrode layers 10 and 11 on the cylinder outer wall 4 of the actuator body 1 are exposed, but instead are only in contact with the first and second common electrode connections 12 and 13 only on the inner wall 3 formed by the inner longitudinal bore 2.
  • the first and second common electrode terminals 12 and 12 are connected to The first and second common electrode terminals 12 and
  • the advantage of the exemplary embodiment of the piezoelectric actuator according to the invention shown in FIGS. 2A and 2B lies in the large utilization of the active piezo areas.
  • the advantage of the exemplary embodiment of a piezoelectric actuator according to the invention shown in FIGS. 1A and IB lies in the fact that a bias voltage element through the inner bore 2 z. B. in the form of a metallic pin to apply a mechanical bias to the two end faces of the actuator body 1.
  • tensioning brackets guided on the outer sides of the actuator body 1 can be omitted.
  • a piezoelectric actuator designed according to the second aspect of the invention has no inner bore.
  • the alternating first and second electrode layers 10 and 11 are each exposed on 'mutually opposite jacket sides of the circular cylindrical actuator body 1 and are there in each case in contact with the first and second electrode connections 12, 13.
  • the contact surface available for the first and second electrode connection 12, 13 can in principle reach up to almost 180 ° C. on the cylinder jacket surface.
  • the first and second electrode connections 12, 13 then each form a half-shell on the surface of the cylinder. So that the first and second electrode connections 12, 13 are insulated from one another, two diametrically opposite strips remain free of electrode connections.
  • each first electrode layer 10 is recessed around the half-shelled second electrode connection 13, this recess 17 being made of ceramic without electrode material.
  • every second electrode layer 11 is recessed around the first common electrode connection 12 so that it is insulated from the second electrode layer 11. This recess 18 is also made of ceramic without
  • the shape of the Recesses 17 and 18 each have the shape of a circular arc, the arc of the first and second recesses taking up a somewhat larger angular range than the half-shells of the second and first electrode connections.
  • FIGS. 5A, 5B, 6 and 7 A solution for this is shown in FIGS. 5A, 5B, 6 and 7.
  • the first and second electrode connections 12 and 13 form narrow, diametrically opposite contact strips which lie in the longitudinal direction on the outer surface 4 of the piezoelectric actuator body 1.
  • the respective recesses 17 and 18 can therefore become so small that they only remove small surface sections from the respective electrode surface of the first and second electrode layers 10 and 11.
  • FIGS. 6 to 8 show, in deviation from FIGS. 4 and 5, only a sectional view, only one of the electrode layers, e.g. B. one of the first electrode layers 10 and the recess 17 lying around the contact strip of the second electrode connection 13 can be seen. According to FIGS. 6 and 7, the cutouts 17 are limited to small surface sections of the first electrode layers 10. In the same way, the recesses 18 (not to be recognized) are shaped around the contact strip forming the first common electrode connection 12.
  • the cutouts 17 and 18 have the shape of a circular section. According to FIG. 7, the cutouts 17 and 18 each have the shape of an arcuate cutout from the first and second electrode layers.
  • the first and second common electrode connections 12 and 13 in FIG. 8 are designed in the form of wider half-shells, similar to FIG. 4, and each recess 17 in the first electrode layer is approximately crescent-shaped around the second electrode connection 13.
  • the second recess (not shown in FIG. 8) of the second electrode layers 11 around the first electrode connection 12 then has the same shape.
  • All of the exemplary embodiments shown in FIGS. 3 to 8 have a staggered arrangement of the first and second electrode layers 10 and 11 according to FIG. 3B, each of the first and second electrode layers 10 and 11 being exposed on diametrically opposite sides of the cylinder jacket surface and there with narrow contact strips of the first and second common electrode connections 12, 13 (see FIGS. 5, 6 and 7) or with wider contact shells of the first and second common electrode connections 12 and 13 (FIGS. 4 and 8).
  • the outer contours of the exemplary embodiments of a piezoelectric actuator according to the invention shown in the figures do not, or hardly differ, from the circular cylindrical shape that is optimal for the intended use.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Fuel-Injection Apparatus (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The invention relates to a piezoelectric actuator, notably for actuating control valves or injectors of internal combustion engines of motor vehicles. Said actuator comprises a cylindrical piezoelectric actuator body (1) in the shape of a multilayer laminate made of superimposed layers of a piezoelectric material between which metallic or electrically conductive alternating first and second electrode layers (10, 11) are inserted which serve as electrodes. Said first and second electrode layers (10, 11) are alternately contacted by a first and second electrically conductive shared electrode terminal (12, 13). The piezoelectric actuator body (1) either has an internal longitudinal hole (2) and at least the first shared electrode terminal (12) is mounted on the inner wall (3) of the actuator body (1) embodied by the internal longitudinal hole (2) and there contacts the first electrode layer (10) or, alternatively, the actuator body (1) does not have an internal longitudinal hole and the first and second electrode layers (10, 11) are bare on the outer cylinder wall (4) of the actuator body (1) in angle-displaced points where they contact the first and second electrode terminals (12, 13).

Description

Piezoelektrischer AktorPiezoelectric actuator
Stand der TechnikState of the art
Die Erfindung betrifft einen insbesondere zur Betätigung von Steuer- oder Einspritzventilen an Verbrennungsmotoren in Kraftfahrzeugen geeigneten piezoelektrischen Aktor mit einem kreiszylindrischen piezoelektrischen Aktorkörper in Form eines vielschichtigen Laminats aus aufeinandergeschichteten Lagen piezoelektrischen Materials und dazwischenliegenden metallischen bzw. elektrisch leitenden, als Elektroden dienenden einander abwechselnden ersten und zweiten Elektrodenschichten, wobei diese ersten und zweiten Elektrodenschichten jeweils abwechselnd durch einen ersten und zweiten elektrisch leitenden gemeinsamen Elektrodenanschluß kontaktiert sind.The invention relates to a piezoelectric actuator particularly suitable for actuating control or injection valves on internal combustion engines in motor vehicles with a circular cylindrical piezoelectric actuator body in the form of a multilayered laminate of layers of piezoelectric material which are stacked on top of one another and metallic or electrically conductive, alternating first and second electrodes serving as electrodes Electrode layers, these first and second electrode layers being alternately contacted by a first and a second electrically conductive common electrode connection.
Allgemein sind piezoelektrische Hochvoltaktoren in zylindrischer Bauform bekannt, die als Keramik- Einzelscheiben mit festen Elektroden zu einem Zylinder übereinandergestapelt werden (siehe z. B. US-Patent 4 460 842) . Für die äußeren Elektrodenanschlüsse sind Elektrodenbleche zur Mantelfläche des Zylinderstapels geführt und dort im rechten Winkel so abgebogen, daß gegeneinander winkelversetzte streifenförmige Elektrodenanschlüsse entstehen, die jeweils einander zugeordnete Elektroden kontaktieren können. Für den Einsatz eines piezolektrischen Aktors zur Betätigung von Einspritzventilen an Verbrennungsmotoren von Kraftfahrzeugen ist ein zylindrischer Aktor von Vorteil, da er den vorhandenen Bauraum in einem Injektorkörper und in einer kreisrunden Bohrung im Zylinderkopf desIn general, piezoelectric high-voltage actuators in a cylindrical design are known which are stacked one on top of the other as ceramic individual disks with fixed electrodes to form a cylinder (see, for example, US Pat. No. 4,460,842). For the outer electrode connections, electrode sheets are guided to the outer surface of the cylinder stack and bent there at a right angle so that strip-shaped electrode connections are produced which are offset from one another and can contact electrodes which are assigned to one another. For the use of a piezoelectric actuator for actuating injection valves on internal combustion engines of motor vehicles, a cylindrical actuator is advantageous since it has the available installation space in an injector body and in a circular bore in the cylinder head of the
Verbrennungsmotors optimal ausnutzt. Dann kann in dem Injektorkörper oder -gehäuse neben dem Aktor auch eine Hochdruckbohrung geführt werden.Internal combustion engine optimally used. Then, in addition to the actuator, a high-pressure bore can also be drilled in the injector body or housing.
Die kreisrunde Kontur des Aktorkörpers erfordert eine spezielle Elektrodenstruktur , um eine elektrisch und mechanisch günstige Kontaktierung der Elektroden mit zugeordneten Elektrodenanschlüssen ausführen zu können.The circular contour of the actuator body requires a special electrode structure in order to be able to make an electrically and mechanically favorable contacting of the electrodes with assigned electrode connections.
Aufgabe und Vorteile der ErfindungObject and advantages of the invention
Nach dem oben gesagten ist es Aufgabe der Erfindung einen piezoelektrischen Aktor, der sich insbesondere zur Betätigung von Steuer- oder Einspritzventilen anAccording to what has been said above, it is an object of the invention to provide a piezoelectric actuator which is particularly suitable for actuating control or injection valves
Verbrennungsmotoren in Kraftfahrzeugen eignet und der einen kreiszylindrischεn piezoelektrischen Aktorkörper in Form eines vielschichtigen Laminats aus aufeinandergeschichteten Lagen piezoelektrischen Materials und dazwischenliegenden metallischen bzw. elektrisch leitenden, als Elektroden dienenden, einander abwechselnd vorgesehenen ersten und zweiten Elektrodenschichten hat, so zu ermöglichen, daß eine mechanisch stabile, platzsparende und elektrisch sichere Kontaktierung der Elektrodenschichten mit den zugeordneten Elektrodenanschlüssen ermöglicht wird.Combustion engines in motor vehicles and which has a circular cylindrical piezoelectric actuator body in the form of a multi-layer laminate of layers of piezoelectric material stacked on top of one another and metallic or electrically conductive, alternatingly provided first and second electrode layers serving as electrodes, so that a mechanically stable, space-saving and electrically safe contacting of the electrode layers with the associated electrode connections is made possible.
Diese Aufgabe wird anspruchsgemäß gelöst.This task is solved according to the requirements.
Die Lösung läßt sich in zwei erfindungsgemäße Aspekte gliedern:The solution can be divided into two aspects according to the invention:
- Bei dem ersten erfindungsgemäßen Aspekt weist der kreiszylindrische Aktorkörper eine Innenbohrung auf, wobei der erste Elektrodenanschluß innen und der zweite Elektrodenanschluß außen oder auch beide- In the first aspect of the invention, the circular cylindrical actuator body on an inner bore, the first electrode connection inside and the second electrode connection outside or both
Elektrodenanschlüsse in der Innenbohrung angebracht sind.Electrode connections are made in the inner bore.
- Gemäß dem zweiten erfindungsgemäßen Aspekt ist der Aktorkörper ebenfalls kreiszylindrisch, hat aber keine Innenbohrung. Die Elektrodenanschlüsse befinden sich auf der Mantelfläche des zylindrischen Aktorkörpers und sind im Winkel gegeneinander versetzt, wobei dazu die ersten und zweiten Elektrodenschichten jeweilige Aussparungen aufweisen, die denjenigen Elektrodenanschluß isolierend umgeben, der mit dieser Elektrodenschicht nicht in Kontakt steht .- According to the second aspect of the invention, the actuator body is also circular cylindrical, but has no inner bore. The electrode connections are located on the lateral surface of the cylindrical actuator body and are offset at an angle to one another, for this purpose the first and second electrode layers have respective recesses which isolate the electrode connection that is not in contact with this electrode layer.
Auf diese Weise läßt sich ein vorteilhafter piezoelektrischer Aktor verwirklichen, dessen Außenkontur trotz der Elektrodenanschlüsse nicht oder kaum von der Kreiszylinderform abweicht, so daß ein solcher piezoelektrischer Aktor eng in eine kreiszylindrischeIn this way, an advantageous piezoelectric actuator can be realized, the outer contour of which, despite the electrode connections, does not or hardly deviates from the circular cylindrical shape, so that such a piezoelectric actuator fits closely into a circular cylindrical one
Bohrung eines Injektorkörpers eingepaßt werden kann, wobei in der Wand des Injektorkörpers noch Platz für eine Hochdruckbohrung bleibt .Bore of an injector body can be fitted, leaving space for a high-pressure bore in the wall of the injector body.
Die obigen und weitere Merkmale der Erfindung werden in der nachfolgenden verschiedene erfindungsgemäße Ausführungsbeispiele beschreibenden Beschreibung noch deutlicher, wenn diese anhand der Zeichnung gelesen wird.The above and further features of the invention will become even clearer in the following description describing various exemplary embodiments according to the invention when it is read with reference to the drawing.
Zeichnungdrawing
Die Figuren 1A und IB zeigen jeweils perspektivisch und in Form eines Längsschnitts einen gemäß dem ersten Aspekt der Erfindung gestalteten piezoelektrischen Aktor. Die Figuren 2A und 2B zeigen jeweils perspektivisch und als Längsschnitt eine Variante eines gemäß dem ersten Aspekt gestalteten erfindungsgemäßen piezoelektrischen Aktors .FIGS. 1A and IB each show in perspective and in the form of a longitudinal section a piezoelectric actuator designed according to the first aspect of the invention. FIGS. 2A and 2B each show, in perspective and as a longitudinal section, a variant of a piezoelectric actuator according to the invention designed according to the first aspect.
Die Figuren 3A und 3B zeigen jeweils perspektivisch und als Längsschnitt einen gemäß dem zweiten erfindungsgemäßen Aspekt gestalteten piezoelektrischen Aktor.FIGS. 3A and 3B each show a perspective and longitudinal section of a piezoelectric actuator designed according to the second aspect of the invention.
Die Figuren 4 bis 8 zeigen jeweils im Querschnitt Varianten des in den Figuren 3A und 3B gezeigten Ausführungsbeispiels eines piezoelektrischen Aktors.FIGS. 4 to 8 each show in cross section variants of the exemplary embodiment of a piezoelectric actuator shown in FIGS. 3A and 3B.
Ausführungsbeispieleembodiments
Die Figur 1A zeigt einen kreiszylindrischen Aktorkörper 1, der mit einer zentrischen Innenlängsbohrung 2 versehen ist.FIG. 1A shows a circular-cylindrical actuator body 1, which is provided with a central inner longitudinal bore 2.
Gemäß Figur IB liegen erste Elektrodenschichten 10, die sich mit zweiten Elektrodenschichten 11 im piezoelektrischen Aktorkörper 1 abwechseln, an der durch die zentrische Innenlängsbohrung 2 gebildeten Innenwand 3 des Aktorkörpers 1 frei und stehen dort mit einem ersten gemeinsamen Elektrodenanschluß 12 in Kontakt, während die zweiten leitenden Elektrodenschichten 11 an derAccording to FIG. 1B, first electrode layers 10, which alternate with second electrode layers 11 in the piezoelectric actuator body 1, are exposed on the inner wall 3 of the actuator body 1 formed by the central inner longitudinal bore 2 and are in contact with a first common electrode connection 12, while the second conductive ones Electrode layers 11 on the
Zylinderaußenwand 4 des Aktorkörpers 1 frei liegen und dort mit einem zweiten gemeinsamen Elektrodenanschluß 13 in Kontakt stehen. Auf diese Weise ist der erste gemeinsame Elektrodenanschluß 12 innen und der zweite gemeinsame Elektrodenanschluß 13 auf der Außenseite des Aktorkörpers 1 weggeführt. In dem in Figur IB gezeigten Querschnitt durch den Aktorkörper 1 ist auch zu erkennen, daß die mit dem ersten gemeinsamen Elektrodenanschluß 12 in Kontakt stehenden ersten Elektrodenschichten 10 nicht bis zur Zylinderaußenwand 4 gehen und daß die zweiten mit dem zweiten gemeinsamen Elektrodenanschluß 13 in Kontakt stehenden Elektrodenschichten 11 nicht bis zu der durch die Bohrung 2 gebildeten Innenwand 3 des Aktorkörpers 1 reichen.The outer cylinder wall 4 of the actuator body 1 is exposed and there is in contact with a second common electrode connection 13. In this way, the first common electrode connection 12 on the inside and the second common electrode connection 13 on the outside of the actuator body 1 are led away. In the cross section through the actuator body 1 shown in FIG. 1B, it can also be seen that the first electrode layers 10 which are in contact with the first common electrode connection 12 do not extend as far as the cylinder outer wall 4 and that the second are in contact with the second common electrode connection 13 standing electrode layers 11 do not extend to the inner wall 3 of the actuator body 1 formed by the bore 2.
Prinzipiell können sowohl der erste gemeinsameIn principle, both can be the first common
Elektrodenanschluß 12 kreisrund die ganze Innenwand 3 als auch der zweite gemeinsame Elektrodenanschluß 13 kreisrund die gesamte Außenwand 4 des Aktorkörpers 1 bedecken. Alternativ können der erste und zweite Elektrodenanschluß 12 und 13 aber auch nur streifenförmig parallel zur Längsachse des Aktorkörpers 1 geführt sein.Cover the electrode connection 12 in a circular manner over the entire inner wall 3 and the second common electrode connection 13 in a circular manner over the entire outer wall 4 of the actuator body 1. Alternatively, the first and second electrode connections 12 and 13 can also be guided only in a strip shape parallel to the longitudinal axis of the actuator body 1.
Die in den Figuren 2A und 2B gezeigte Variante des gemäß dem ersten erfindungsgemäßen Aspekt ausgeführten piezoelektrischen Aktors unterscheidet sich von der in den Figuren 1A und IB dargestellten ersten Ausführungsform dadurch, daß keine der ersten und zweiten Elektrodenschichten 10 und 11 an der Zylinderaußenwand 4 des Aktorkörpers 1 freiliegen, sondern statt dessen ausschließlich an der durch die Innenlängsbohrung 2 gebildeten Innenwand 3 jeweils in Kontakt mit dem ersten und zweiten gemeinsamen Elektrodenanschluß 12 und 13 stehen.The variant shown in FIGS. 2A and 2B of the piezoelectric actuator designed according to the first aspect of the invention differs from the first embodiment shown in FIGS. 1A and IB in that none of the first and second electrode layers 10 and 11 on the cylinder outer wall 4 of the actuator body 1 are exposed, but instead are only in contact with the first and second common electrode connections 12 and 13 only on the inner wall 3 formed by the inner longitudinal bore 2.
Der erste und zweite gemeinsame Elektrodenanschluß 12 undThe first and second common electrode terminals 12 and
13 bilden schmale Kontaktstreifen, die in Längsrichtung des Aktorkörpers 1 an dessen Innenwand 3 liegen.13 form narrow contact strips which lie in the longitudinal direction of the actuator body 1 on its inner wall 3.
Der Vorteil des in den Figuren 2A und 2B gezeigten Ausführungsbeispiels des erfindungsgemäßen piezoelektrischen Aktors liegt in der großen Ausnutzung der aktiven Piezoflachen.The advantage of the exemplary embodiment of the piezoelectric actuator according to the invention shown in FIGS. 2A and 2B lies in the large utilization of the active piezo areas.
Dagegen liegt der Vorteil des in den Figuren 1A und IB gezeigten erfindungsgemäßεn Ausführungsbeispiels eines piezoelektrischen Aktors darin, daß ein Vorspannungselernent durch die Innenbohrung 2 z. B. in Form eines metallischen Stifts geführt sein kann, um eine mechanische Vorspannung auf die beiden Stirnflächen des Aktorkörpers 1 aufzubringen. Dadurch können an den Außenseiten des Aktorkörpers 1 geführte Spannbügel entfallen.In contrast, the advantage of the exemplary embodiment of a piezoelectric actuator according to the invention shown in FIGS. 1A and IB lies in the fact that a bias voltage element through the inner bore 2 z. B. in the form of a metallic pin to apply a mechanical bias to the two end faces of the actuator body 1. As a result, tensioning brackets guided on the outer sides of the actuator body 1 can be omitted.
Ein gemäß dem zweiten erfindungsgemäßen Aspekt gestalteter piezoelektrischer Aktor hat, wie die Figuren 3A und 3B zeigen, keine Innenbohrung. Die sich abwechselnden ersten und zweiten Elektrodenschichten 10 und 11 liegen jeweils an' einander gegenüberliegenden Mantelseiten des kreiszylindrischen Aktorkörpers 1 frei und stehen dort jeweils in Kontakt mit dem ersten und zweiten Elektrodenanschluß 12, 13. In der perspektivischen Darstellung in Figur 3A ist zu erkennen, daß die für den ersten und zweiten Elektrodenanschluß 12, 13 jeweils zur Verfügung stehende Kontaktfläche prinzipiell bis nahe 180°C auf der Zylindermantelfläche reichen kann. Der erste und zweite Elektrodenanschluß 12,13 bilden dann jeweils eine Halbschale auf der Zylindermantelfläche. Damit der erste und zweite Elektrodenanschluß 12, 13 voneinander isoliert sind, bleiben zwei einander diametral gegenüberliegende Streifen frei von Elektrodenanschlüssen.As shown in FIGS. 3A and 3B, a piezoelectric actuator designed according to the second aspect of the invention has no inner bore. The alternating first and second electrode layers 10 and 11 are each exposed on 'mutually opposite jacket sides of the circular cylindrical actuator body 1 and are there in each case in contact with the first and second electrode connections 12, 13. In the perspective illustration in FIG. 3A it can be seen that the contact surface available for the first and second electrode connection 12, 13 can in principle reach up to almost 180 ° C. on the cylinder jacket surface. The first and second electrode connections 12, 13 then each form a half-shell on the surface of the cylinder. So that the first and second electrode connections 12, 13 are insulated from one another, two diametrically opposite strips remain free of electrode connections.
Die in den Figuren 4A und 4B gezeigte Schnittansicht zeigt eine solche Variante mit breiten Kontaktflächen für den ersten und zweiten gemeinsamen Elektrodenanschluß 12 und 13. Gemäß Figur 4B ist jede erste Elektrodenschicht 10 um den halbschaligen zweiten Elektrodenanschluß 13 herum ausgespart, wobei diese Aussparung 17 aus Keramik ohne Elektrodenmaterial besteht. Genauso ist jede zweite Elektrodenschicht 11 um den ersten gemeinsamen Elektrodenanschluß 12 herum ausgespart, damit dieser gegenüber der zweiten Elektrodenschicht 11 isoliert ist . Auch diese Aussparung 18 besteht aus Keramik ohneThe sectional view shown in FIGS. 4A and 4B shows such a variant with wide contact areas for the first and second common electrode connection 12 and 13. According to FIG. 4B, each first electrode layer 10 is recessed around the half-shelled second electrode connection 13, this recess 17 being made of ceramic without electrode material. Likewise, every second electrode layer 11 is recessed around the first common electrode connection 12 so that it is insulated from the second electrode layer 11. This recess 18 is also made of ceramic without
Elektrodenmaterial. Gemäß Figur 4A und 4B ist die Form der Aussparungen 17 und 18 jeweils kreisbogenförmig, wobei der Bogen der ersten und zweiten Aussparung einen etwas größeren Winkelbereich einnimmt als die Halbschalen der zweiten und ersten Elektrodenanschlüsse .Electrode material. According to Figures 4A and 4B, the shape of the Recesses 17 and 18 each have the shape of a circular arc, the arc of the first and second recesses taking up a somewhat larger angular range than the half-shells of the second and first electrode connections.
Prinzipiell gilt, daß die Elektrodenfläche eines piezoelektrischen Aktors um so besser ausgenutzt ist, je kleiner die Kontaktflächen des ersten und zweiten gemeinsamen Elektrodenanschlusses werden. Eine Lösung dafür ist in den Figuren 5A, 5B, 6 und 7 gezeigt. Dabei bilden der erste und zweite Elektrodenanschluß 12 und 13 schmale, einander diametral gegenüberliegende Kontaktstreifen, die in Längsrichtung auf der Mantelaußenfläche 4 des piezoelektrischen Aktorkörpers 1 liegen. Die jeweiligen Aussparungen 17 und 18 können deshalb so klein werden, daß sie nur kleine Flächenabschnitte von der jeweiligen Elektrodenfläche der ersten und zweiten Elektrodenschichten 10 und 11 wegnehmen.In principle, the smaller the contact areas of the first and second common electrode connection, the better the electrode area of a piezoelectric actuator is used. A solution for this is shown in FIGS. 5A, 5B, 6 and 7. The first and second electrode connections 12 and 13 form narrow, diametrically opposite contact strips which lie in the longitudinal direction on the outer surface 4 of the piezoelectric actuator body 1. The respective recesses 17 and 18 can therefore become so small that they only remove small surface sections from the respective electrode surface of the first and second electrode layers 10 and 11.
Die Varianten gemäß den Figuren 6 bis 8 zeigen, abweichend von den Figuren 4 und 5, lediglich eine Schnittansicht, wobei nur eine der Elektrodenschichten, z. B. eine der ersten Elektrodenschichten 10 und die um den Kontaktstreifen des zweiten Elektrodenanschlusses 13 herumliegende Aussparung 17 zu erkennen sind. Gemäß den Figuren 6 und 7 sind die Aussparungen 17 auf kleine Flächenabschnitte der ersten Elektrodenschichten 10 beschränkt. Genauso sind dann die (nicht zu erkennenden) Aussparungen 18 um den den ersten gemeinsamen Elektrodenanschluß 12 bildenden Kontaktstreifen herum geform .6 to 8 show, in deviation from FIGS. 4 and 5, only a sectional view, only one of the electrode layers, e.g. B. one of the first electrode layers 10 and the recess 17 lying around the contact strip of the second electrode connection 13 can be seen. According to FIGS. 6 and 7, the cutouts 17 are limited to small surface sections of the first electrode layers 10. In the same way, the recesses 18 (not to be recognized) are shaped around the contact strip forming the first common electrode connection 12.
Gemäß Figur 6 haben die Aussparungen 17 und 18 die Form eines Kreisabschnitts. Gemäß Figur 7 haben die Aussparungen 17 und 18 jeweils die Form eines bogenförmigen Ausschnitts jeweils aus der ersten und zweiten Elektrodenschicht. Anders als bei den Figuren 5 bis 7 sind in Fig. 8 die ersten und zweiten gemeinsamen Elektrodenanschlüsse 12 und 13 ähnlich wie in Figur 4 in Form breiterer Halbschalen ausgeführt und jede Aussparung 17 der ersten Elektrodenschicht ist um den zweiten Elektrodenanschluß 13 herum etwa sichelmondförmig. Die gleiche Form hat dann die (in Figur 8 nicht zu erkennende) zweite Aussparung 18 der zweiten Elektrodenschichten 11 um den ersten Elektrodenanschluß 12 herum.According to FIG. 6, the cutouts 17 and 18 have the shape of a circular section. According to FIG. 7, the cutouts 17 and 18 each have the shape of an arcuate cutout from the first and second electrode layers. In contrast to FIGS. 5 to 7, the first and second common electrode connections 12 and 13 in FIG. 8 are designed in the form of wider half-shells, similar to FIG. 4, and each recess 17 in the first electrode layer is approximately crescent-shaped around the second electrode connection 13. The second recess (not shown in FIG. 8) of the second electrode layers 11 around the first electrode connection 12 then has the same shape.
Allen in den Figuren 3 bis 8 gezeigten Ausführungsbeispielen ist eine versetzte Anordnung der ersten und zweiten Elektrodenschichten 10 und 11 gemäß Figur 3B eigen, wobei jede die erste und zweite Elektrodenschicht 10 und 11 an diametral einander gegenüberliegenden Seiten der Zylindermantelfläche frei liegen und dort mit schmalen Kontaktstreifen des ersten und zweiten gemeinsamen Elektrodenanschlusses 12, 13 (siehe die Figuren 5, 6 und 7) oder mit breiteren Kontaktschalen des ersten und zweiten gemeinsamen Elektrodenanschlusses 12 und 13 (Fig. 4 und 8) in Kontakt stehen. Die Außenkonturen der in den Figuren dargestellten Ausführungsbeispiele eines erfindungsgemäßen piezoelektrischen Aktors weichen nicht oder kaum von der für den vorgesehen Einsatzzweck optimalen kreiszylindrischen Form ab. All of the exemplary embodiments shown in FIGS. 3 to 8 have a staggered arrangement of the first and second electrode layers 10 and 11 according to FIG. 3B, each of the first and second electrode layers 10 and 11 being exposed on diametrically opposite sides of the cylinder jacket surface and there with narrow contact strips of the first and second common electrode connections 12, 13 (see FIGS. 5, 6 and 7) or with wider contact shells of the first and second common electrode connections 12 and 13 (FIGS. 4 and 8). The outer contours of the exemplary embodiments of a piezoelectric actuator according to the invention shown in the figures do not, or hardly differ, from the circular cylindrical shape that is optimal for the intended use.

Claims

Ansprüche Expectations
1. Piezoelektrischer Aktor, insbesondere zur Betätigung von Steuer- oder Einspritzventilen an Verbrennungsmotoren in Kraftfahrzeugen, mit einem kreiszylindrischen piezoelektrischen Aktorkörper (1) in Form eines vielschichtigen Laminats aus aufeinandergeschichteten Lagen piezoelektrischen Materials und dazwischenliegenden metallischen bzw. elektrisch leitenden, als Elektroden dienenden einander abwechselnden ersten und zweiten Elektrodenschichten (10, 11), wobei diese ersten und zweiten Elektrodenschichten (10, 11) jeweils abwechselnd durch einen ersten und zweiten elektrisch leitenden gemeinsamen Elektrodenanschluß (12, 13) kontaktiert sind, dadurch gekennzeichnet, daß der Aktorkörper (1) eine Innenlängsbohrung (2) aufweist und daß wenigstens der erste gemeinsame Elektrodenanschluß (12) an der durch die Innenlängsbohrung (2) gebildeten Innenwand (3) des1. Piezoelectric actuator, in particular for actuating control or injection valves on internal combustion engines in motor vehicles, with a circular cylindrical piezoelectric actuator body (1) in the form of a multilayered laminate of layers of piezoelectric material stacked on top of one another and interposed metallic or electrically conductive, alternating first serving as electrodes and second electrode layers (10, 11), these first and second electrode layers (10, 11) being alternately contacted by a first and second electrically conductive common electrode connection (12, 13), characterized in that the actuator body (1) has an inner longitudinal bore (2) and that at least the first common electrode connection (12) on the inner wall (3) formed by the inner longitudinal bore (2) of the
Aktorkörpers (1) vorgesehen ist und dort mit jeder ersten Elektrodenschicht (10) in Kontakt steht.Actuator body (1) is provided and there is in contact with each first electrode layer (10).
2. Piezoelektrischer Aktor nach Anspruch 1, dadurch gekennzeichnet, daß der zweite gemeinsame2. Piezoelectric actuator according to claim 1, characterized in that the second common
Elektrodenanschluß (13) an der Außenwand (4) des Aktorkörpers (1) vorgesehen ist und dort mit jeder zweicen Elektrodenschicht (11) in Kontakt steht.Electrode connection (13) is provided on the outer wall (4) of the actuator body (1) and is in contact with each two electrode layer (11) there.
3. Piezoelektrischer Aktor nach Anspruch 1, dadurch gekennzeichnet, daß auch der zweite gemeinsame Elektrodenanschluß (13) an der Innenwand (3) des Aktorkörpers (1) vorgesehen ist und dort mit jeder zweiten Elektrodenschicht (11) in Kontakt steht.3. Piezoelectric actuator according to claim 1, characterized in that the second common Electrode connection (13) is provided on the inner wall (3) of the actuator body (1) and is in contact with every second electrode layer (11) there.
4. Piezoelektrischer Aktor nach Anspruch 3, dadurch gekennzeichnet, daß der erste und zweite Elektrodenanschluß (12, 13) an der Innenwand des Aktorkörpers schmale, einander diametral gegenüberliegende in Längsrichtung des Aktorkörpers (1) laufende Elektrodenstreifen bilden.4. Piezoelectric actuator according to claim 3, characterized in that the first and second electrode connection (12, 13) on the inner wall of the actuator body form narrow, diametrically opposite electrode strips running in the longitudinal direction of the actuator body (1).
5. Piezoelektrischer Aktor insbesondere zur Betätigung von Steuer- oder Einspritzventilen an Verbrennungsmotoren in Kraftfahrzeugen, mit einem kreiszylindrischen piezoelektrischen Aktorkörper (1) in Form eines vielschichtigen Laminats aus aufeinandergeschichteten Lagen piezoelektrischen Materials und dazwischenliegenden metallischen bzw. elektrisch leitenden, als Elektroden dienenden einander abwechselnden ersten und zweiten Elektrodenschichten (10, 11), wobei diese ersten und zweiten Elektrodenschichten (10, 11) jeweils abwechselnd durch einen ersten und zweiten elektrisch leitenden gemeinsamen Elektrodenanschluß (12, 13) kontaktiert sind, dadurch gekennzeichnet, daß die ersten und zweiten Elektrodenschichten (10, 11) jeweils an zueinander winkelversetzten Stellen bis an die Zylinderaußenwand (4) des Aktorkörpers (1) führen und dort jeweils mit dem ersten und zweiten Elektrodenanschluß (12, 13) in Kontakt stehen.5. Piezoelectric actuator, in particular for actuating control or injection valves on internal combustion engines in motor vehicles, with a circular cylindrical piezoelectric actuator body (1) in the form of a multilayered laminate of layers of piezoelectric material stacked on top of one another and interposed metallic or electrically conductive, alternating first and serving as electrodes second electrode layers (10, 11), these first and second electrode layers (10, 11) being alternately contacted by a first and second electrically conductive common electrode connection (12, 13), characterized in that the first and second electrode layers (10, 11) 11) in each case at points offset from one another up to the cylinder outer wall (4) of the actuator body (1) and there in each case in contact with the first and second electrode connections (12, 13).
6. Piezoelektrischer Aktor nach Anspruch 5, dadurch gekennzeichnet, daß die an der Zylinderaußenwand (4) des Aktorkörpers (1) freiliegenden Stellen der ersten und zweiten Elektrodenschichten und der erste und zweite mit ihnen in Kontakt stehende Elektrodenanschluß (12, 13) einander diametral gegenüberliegen.6. Piezoelectric actuator according to claim 5, characterized in that on the cylinder outer wall (4) of the actuator body (1) exposed locations of the first and second electrode layers and the first and second electrode terminals (12, 13) in contact with them are diametrically opposed to each other .
Piezoelektrischer Aktor nach Anspruch 5 oder 6, dadurch gekennzeichnet, daß jede erste Elektrodenschicht (10) um den zweiten Elektrodenanschluß (13) eine denselben isolierende Aussparung (17) aufweist.Piezoelectric actuator according to claim 5 or 6, characterized in that each first electrode layer (10) has a recess (17) insulating the same around the second electrode connection (13).
8. Piezoelektrischer Aktor nach einem der Ansprüche 5 bis8. Piezoelectric actuator according to one of claims 5 to
7, dadurch gekennzeichnet, daß jede zweite Elektrodenschicht (11) um den ersten Elektrodenanschluß (12) eine denselben isolierende Aussparung (18) aufweist.7, characterized in that every second electrode layer (11) around the first electrode connection (12) has the same insulating recess (18).
9. Piezoelektricher Aktor nach einem der Ansprüche 5 bis9. Piezoelectric actuator according to one of claims 5 to
8, dadurch gekennzeichnet, daß der erste und/oder zweite Elektrodenanschluß (12, 13) schmale, in Längsrichtung des Aktorkörpers verlaufende Streifen bildet.8, characterized in that the first and / or second electrode connection (12, 13) forms narrow strips running in the longitudinal direction of the actuator body.
10. Piezoelektrischer Aktor nach einem der Ansprüche 5 bis 8, dadurch gekennzeichnet, daß der erste und/oder zweite Elektrodenanschluß (12, 13) eine breitere Kontaktfläche in Form eines in Längsrichtung des Aktorkörpers (1) laufenden Zylindermantelabschnitts bildet . 10. Piezoelectric actuator according to one of claims 5 to 8, characterized in that the first and / or second electrode connection (12, 13) forms a wider contact surface in the form of a cylinder jacket section running in the longitudinal direction of the actuator body (1).
EP00914040A 1999-03-04 2000-02-24 Piezoelectric actuator Withdrawn EP1080504A1 (en)

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Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19946837A1 (en) * 1999-09-30 2001-05-03 Bosch Gmbh Robert Piezo actuator
DE10048928A1 (en) * 2000-10-04 2002-04-25 Bosch Gmbh Robert piezo element
JP4761415B2 (en) * 2001-02-23 2011-08-31 Necトーキン株式会社 Multilayer piezoelectric actuator element
US7304414B2 (en) 2002-05-06 2007-12-04 Epcos Ag Piezoactuator and method for the production thereof
JP4723199B2 (en) * 2003-06-19 2011-07-13 日本碍子株式会社 Cylindrical piezoelectric actuator, cylindrical piezoelectric actuator array, and manufacturing method
DE10335019A1 (en) * 2003-07-31 2005-02-17 Robert Bosch Gmbh piezo actuator
DE10345730A1 (en) * 2003-10-01 2005-04-21 Bosch Gmbh Robert Piezoelectric actuator, e.g. for operating mechanical component, has actuator part piezo layers, sensor piezo layers integrated into one component so individual sensor piezo layers are at defined intervals between actuator piezo layers
JP2005117313A (en) * 2003-10-07 2005-04-28 Fujitsu Ltd Piezoelectric element and touch panel device
DE102004005227A1 (en) * 2004-02-03 2005-08-18 Robert Bosch Gmbh Piezo actuator with at least one pair of internal electrodes
US7554251B2 (en) * 2004-03-09 2009-06-30 Kyocera Corporation Multi-layer piezoelectric element and method for manufacturing the same
EP1740318A2 (en) * 2004-04-21 2007-01-10 Symyx Technologies, Inc. Flexural resonator sensing device and method
DE102004020329A1 (en) * 2004-04-26 2005-11-10 Epcos Ag Electrical functional unit and method for its production
FR2874663B1 (en) * 2004-08-31 2006-11-24 Renault Sas DEVICE FOR CYCLIC VIBRATION OF AN INJECTOR NOZZLE
JP2006165193A (en) * 2004-12-06 2006-06-22 Denso Corp Hollow laminated piezoelectric element and manufacturing method thereof
WO2007052599A1 (en) * 2005-11-02 2007-05-10 Murata Manufacturing Co., Ltd. Piezoelectric element
EP1798782B1 (en) * 2005-12-13 2008-11-26 Continental Automotive GmbH Piezoelectric actuator and manufacturing method of a piezostack
DE102006026644A1 (en) * 2006-06-08 2007-12-13 Robert Bosch Gmbh Piezoelectric actuator
US7679273B2 (en) * 2006-07-31 2010-03-16 Delphi Technologies, Inc. Strain tolerant metal electrode design
US7732998B2 (en) * 2006-08-03 2010-06-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Telescoping cylindrical piezoelectric fiber composite actuator assemblies
US8413634B2 (en) 2008-01-07 2013-04-09 Mcalister Technologies, Llc Integrated fuel injector igniters with conductive cable assemblies
US8365700B2 (en) 2008-01-07 2013-02-05 Mcalister Technologies, Llc Shaping a fuel charge in a combustion chamber with multiple drivers and/or ionization control
US8387599B2 (en) 2008-01-07 2013-03-05 Mcalister Technologies, Llc Methods and systems for reducing the formation of oxides of nitrogen during combustion in engines
WO2011025512A1 (en) 2009-08-27 2011-03-03 Mcallister Technologies, Llc Integrated fuel injectors and igniters and associated methods of use and manufacture
US8561598B2 (en) 2008-01-07 2013-10-22 Mcalister Technologies, Llc Method and system of thermochemical regeneration to provide oxygenated fuel, for example, with fuel-cooled fuel injectors
US7628137B1 (en) 2008-01-07 2009-12-08 Mcalister Roy E Multifuel storage, metering and ignition system
US8225768B2 (en) 2008-01-07 2012-07-24 Mcalister Technologies, Llc Integrated fuel injector igniters suitable for large engine applications and associated methods of use and manufacture
US8074625B2 (en) 2008-01-07 2011-12-13 Mcalister Technologies, Llc Fuel injector actuator assemblies and associated methods of use and manufacture
CN102292908A (en) 2008-12-17 2011-12-21 发现技术国际股份有限公司 Piezoelectric motor with high torque
JP2012513188A (en) 2008-12-19 2012-06-07 ディスカバリー テクノロジー インターナショナル,インク. Piezoelectric motor
CN102308132A (en) * 2009-02-06 2012-01-04 发现技术国际股份有限公司 Valves based on reversible piezoelectric rotary motor
JP5718921B2 (en) 2009-08-27 2015-05-13 マクアリスター テクノロジーズ エルエルシー Configuration of fuel charge in a combustion chamber with multiple drivers and / or ionization control
CN102712540B (en) 2009-08-27 2014-12-17 麦卡利斯特技术有限责任公司 Ceramic insulator and methods of use and manufacture thereof
WO2011028780A2 (en) 2009-09-01 2011-03-10 Discovery Technology International, Lllp Piezoelectric rotary motor with high rotation speed and bi- directional operation
MX2012006565A (en) 2009-12-07 2012-08-23 Mcalister Technologies Llc Adaptive control system for fuel injectors and igniters.
KR101364416B1 (en) 2009-12-07 2014-02-17 맥알리스터 테크놀로지즈 엘엘씨 Integrated fuel injector igniters suitable for large engine applications and associated methods of use and manufacture
US8297265B2 (en) 2010-02-13 2012-10-30 Mcalister Technologies, Llc Methods and systems for adaptively cooling combustion chambers in engines
CA2788577C (en) 2010-02-13 2014-04-01 Mcalister Technologies, Llc Fuel injector assemblies having acoustical force modifiers and associated methods of use and manufacture
US20110297753A1 (en) 2010-12-06 2011-12-08 Mcalister Roy E Integrated fuel injector igniters configured to inject multiple fuels and/or coolants and associated methods of use and manufacture
US8528519B2 (en) 2010-10-27 2013-09-10 Mcalister Technologies, Llc Integrated fuel injector igniters suitable for large engine applications and associated methods of use and manufacture
US8091528B2 (en) 2010-12-06 2012-01-10 Mcalister Technologies, Llc Integrated fuel injector igniters having force generating assemblies for injecting and igniting fuel and associated methods of use and manufacture
WO2012112615A1 (en) 2011-02-14 2012-08-23 Mcalister Technologies, Llc Torque multiplier engines
WO2013025657A2 (en) 2011-08-12 2013-02-21 Mcalister Technologies, Llc Systems and methods for improved engine cooling and energy generation
US8919377B2 (en) 2011-08-12 2014-12-30 Mcalister Technologies, Llc Acoustically actuated flow valve assembly including a plurality of reed valves
CH706635A1 (en) * 2012-06-20 2013-12-31 Kistler Holding Ag Measuring element, measuring element and measuring device for measuring a force and use of such a measuring body.
US8851047B2 (en) 2012-08-13 2014-10-07 Mcallister Technologies, Llc Injector-igniters with variable gap electrode
US9169814B2 (en) 2012-11-02 2015-10-27 Mcalister Technologies, Llc Systems, methods, and devices with enhanced lorentz thrust
US9169821B2 (en) 2012-11-02 2015-10-27 Mcalister Technologies, Llc Fuel injection systems with enhanced corona burst
US8752524B2 (en) 2012-11-02 2014-06-17 Mcalister Technologies, Llc Fuel injection systems with enhanced thrust
US20140131466A1 (en) 2012-11-12 2014-05-15 Advanced Green Innovations, LLC Hydraulic displacement amplifiers for fuel injectors
US9115325B2 (en) 2012-11-12 2015-08-25 Mcalister Technologies, Llc Systems and methods for utilizing alcohol fuels
US9309846B2 (en) 2012-11-12 2016-04-12 Mcalister Technologies, Llc Motion modifiers for fuel injection systems
US9200561B2 (en) 2012-11-12 2015-12-01 Mcalister Technologies, Llc Chemical fuel conditioning and activation
US8800527B2 (en) 2012-11-19 2014-08-12 Mcalister Technologies, Llc Method and apparatus for providing adaptive swirl injection and ignition
US9194337B2 (en) 2013-03-14 2015-11-24 Advanced Green Innovations, LLC High pressure direct injected gaseous fuel system and retrofit kit incorporating the same
US9562500B2 (en) 2013-03-15 2017-02-07 Mcalister Technologies, Llc Injector-igniter with fuel characterization
US8820293B1 (en) 2013-03-15 2014-09-02 Mcalister Technologies, Llc Injector-igniter with thermochemical regeneration
DE102016108553A1 (en) * 2016-05-09 2017-11-09 Vega Grieshaber Kg Piezoelectrically driven vibration limit switch with optimized effective area

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0479094A1 (en) * 1990-10-04 1992-04-08 TRIDELTA GmbH Stacked piezoelectric device

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1051256A (en) * 1962-08-30
CH429228A (en) * 1964-12-10 1967-01-31 Kistler Instrumente Ag Piezoelectric installation body for installation in a piezoelectric transducer
US3521090A (en) * 1968-03-15 1970-07-21 Us Navy Piezoelectric transducer with electrically conductive mounting rods
GB1453978A (en) * 1973-03-15 1976-10-27 Secr Defence Linear stepper motor
DE3378393D1 (en) * 1982-05-11 1988-12-08 Nec Corp Multilayer electrostrictive element which withstands repeated application of pulses
US4471256A (en) * 1982-06-14 1984-09-11 Nippon Soken, Inc. Piezoelectric actuator, and valve apparatus having actuator
JPS6064212A (en) * 1983-09-19 1985-04-12 Matsushita Electric Ind Co Ltd Piezoelectric type actuator device
AT382968B (en) * 1983-12-28 1987-05-11 Avl Verbrennungskraft Messtech PIEZOELECTRIC MEASURING ELEMENT
DE3412014C1 (en) * 1984-03-31 1985-10-17 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Piezoceramic actuator for generating translation movements
JPS61139112A (en) * 1984-12-10 1986-06-26 Murata Mfg Co Ltd Layer-built piezoelectric element capable of frequency adjustment
JP2965602B2 (en) * 1990-02-26 1999-10-18 日立金属株式会社 Stacked displacement element
US5055734A (en) * 1990-09-28 1991-10-08 Caterpillar Inc. Single-piece multiple electrode conductor
US5225731A (en) * 1991-06-13 1993-07-06 Southwest Research Institute Solid body piezoelectric bender transducer
JP2878038B2 (en) 1992-08-20 1999-04-05 日本電気株式会社 Thermal head drive
EP0584775B1 (en) * 1992-08-25 1997-12-17 Canon Kabushiki Kaisha Production method of laminated piezoelectric device and polarization method thereof and vibration wave driven motor
FR2702895B1 (en) * 1993-03-19 1995-04-21 Renault Linear drive system using piezoelectric actuators.
JP2830724B2 (en) * 1993-12-20 1998-12-02 日本電気株式会社 Manufacturing method of piezoelectric actuator
JPH0843651A (en) 1994-08-04 1996-02-16 Hoechst Japan Ltd Optical waveguide element
JP3432321B2 (en) * 1995-01-31 2003-08-04 太平洋セメント株式会社 Multilayer ceramic piezoelectric element
JPH08306979A (en) * 1995-05-11 1996-11-22 Tdk Corp Multilayer piezoelectric device
JPH09261978A (en) * 1996-03-25 1997-10-03 Nippon Cement Co Ltd Laminated element and vibration drive device
DE19626671C1 (en) * 1996-07-03 1997-10-16 Fraunhofer Ges Forschung High-frequency piezoelectric power actuator apparatus with heat dissipation
DE19712923A1 (en) * 1997-03-27 1998-10-01 Bosch Gmbh Robert Piezoelectric actuator
DE19753930A1 (en) * 1997-12-05 1999-06-10 Ceramtec Ag Process for attaching external electrodes to solid state actuators
JPH11317552A (en) 1998-05-07 1999-11-16 Tokin Corp Multilayer piezoelectric transformer
JP2000236120A (en) * 1998-12-18 2000-08-29 Nippon Soken Inc Piezoelectric laminate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0479094A1 (en) * 1990-10-04 1992-04-08 TRIDELTA GmbH Stacked piezoelectric device

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CN1183609C (en) 2005-01-05
JP2002538629A (en) 2002-11-12
KR20010043272A (en) 2001-05-25
US6940213B1 (en) 2005-09-06
CN1296644A (en) 2001-05-23
WO2000052770A1 (en) 2000-09-08
DE19909482A1 (en) 2000-09-07
KR100728510B1 (en) 2007-06-15

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