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EP1066899B1 - Verfahren zur Herstellung eines Sputtertargets - Google Patents

Verfahren zur Herstellung eines Sputtertargets Download PDF

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Publication number
EP1066899B1
EP1066899B1 EP00114459A EP00114459A EP1066899B1 EP 1066899 B1 EP1066899 B1 EP 1066899B1 EP 00114459 A EP00114459 A EP 00114459A EP 00114459 A EP00114459 A EP 00114459A EP 1066899 B1 EP1066899 B1 EP 1066899B1
Authority
EP
European Patent Office
Prior art keywords
powder
thermal plasma
target
sintering
purity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00114459A
Other languages
English (en)
French (fr)
Other versions
EP1066899A3 (de
EP1066899A2 (de
Inventor
Gang Han
Hideo Murata
Hideki Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Publication of EP1066899A2 publication Critical patent/EP1066899A2/de
Publication of EP1066899A3 publication Critical patent/EP1066899A3/de
Application granted granted Critical
Publication of EP1066899B1 publication Critical patent/EP1066899B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/045—Alloys based on refractory metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/14—Treatment of metallic powder
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy

Definitions

  • the present invention relates to a method of making a sputtering target comprising a refractory metal material, such as Ta and Ru, particularly for use in the manufacture of semiconductor LSIs.
  • a refractory metal material such as Ta and Ru
  • a TaN film formed by performing reactive sputtering in an atmosphere of argon and nitrogen through the use of a Ta sputtering target and a Ta-X-N film formed by performing reactive sputtering through the use of a Ta-X alloy target are considered good.
  • Ta and Ta-X alloy sputtering targets for barrier metal application for semiconductor LSIs have been developed.
  • any one of a melting-plastic working process and a powder sintering process can be selected, while the powder sintering process is most suited. Reasons for this are described below.
  • Ta powders that can be industrially supplied are conventionally obtained by an ingot crushing process after performing the EB melting of a low-purity Ta raw material, and their purity is only a level of 4N at the most.
  • the following method for example, is adopted as a process for industrially making Ru.
  • Caustic potash and potassium nitrate are added to crude Ru, thereby converting Ru into soluble potassium ruthenate.
  • This salt is extracted in water and is heated during chlorine gas injection under the formation of RuO 4 , which is then collected in dilute hydrochloric acid containing methyl alcohol. This liquid is evaporated and dried, and is then calcined in an oxygen atmosphere to form RuO 2 , with the result that Ru metal is finally obtained by reduction under heating in hydrogen.
  • Ru powders made by this method contained low-melting metal impurities, alkali metals, and residues of halogen elements such as Cl and hence could not meet the purity required of capacitor electrode films. Moreover, powders made by this method were coral-like porous agglomerates and had very low packing densities in the case of sintering.
  • JP-A-3-197940 discloses a method of plastically working an Ta ingot obtained by EB-melting.
  • JP-A-6-264232 discloses a method of performing plastic working and heat treatment of Ta after the EB melting thereof.
  • JP-A-11-61392 discloses a method of machining an ingot obtained by the EB melting of an Ru raw material and using it in a casting condition thereof.
  • High purity may be realized by using the methods disclosed in the above literature.
  • the presence of a large number of pores and casting defects cannot be neglected.
  • the melting methods it is impossible to perform near-net-shape forming and the yield of noble metals is low.
  • the melting methods proposed in the above literature are an unavoidable choice because high purity and low oxygen concentrations could not be realized in the powder sintering method.
  • JP-A-3-173704 discloses a method for making a target for sputtering.
  • a spherical Ta powder is produced by a Plasma Rotating Electrode Process (PREP) treatment, i.e., by bringing a thermal plasma into contact with a rotating electrode and thereby causing an electrode material to melt and splash.
  • PREP Plasma Rotating Electrode Process
  • the thermal plasma is given with the purpose of only spheroidizing performed by heating and melting, and the effect of purification of powder cannot be expected.
  • It is an object of the invention is to provide a method of making a target made of high-melting metals or its alloy, which is producted by sintering a high-melting high-purity metal powder under pressure and which has high purity and low oxygen concentrations and besides shows high density and a fine and uniform micro-structure.
  • the present inventors have conducted research energetically and found out that by applying thermal plasma treatment to a raw material powder, it is possible to spheroidize a high-melting metal powder and, at the same time, to obtain high purity and low oxygen concentrations. Further, the inventors have found out that by performing sintering under pressure through the use of this powder which is spherical and has high purity and a low oxygen concentration, it is possible to increase packing density, with the result that it is possible to obtain a sintered powder compact for sputtering targets, which has high purity and a low oxygen concentration and besides shows a high density and a uniform and fine micro-structure.
  • the sintering under pressure is hot isostatic pressing.
  • the sputtering target which shows high density and a uniform and fine micro-structure.
  • the sputtering target produced according to the invention comprises a sintered powder compact with a relative density of not less than 99%, a purity of not less than 99.999% and an oxygen concentration of not more than 100 ppm.
  • a thin film obtained by sputtering through the use of this target has high purity and is uniform so as to improve the reliability of products.
  • the sputtering target according to the invention is obtained by introducing a powder into a thermal plasma into which hydrogen gas has been introduced. As a result of this, a thin film obtained by performing sputtering through the use of this target has high purity and is uniform so as to improve the reliability of products.
  • the shape of particles of the powder introduced for sintering under pressure is spherical or analogous to a sphere.
  • the target shows high density and a uniform and fine micro-structure, and the uniformity of a thin film obtained by performing sputtering through the use of this target increases.
  • the above high-melting metal material is Ta.
  • the above high-melting metal material is Ta.
  • the above high-melting metal is Ru.
  • the sputtering targed produced according to the invention has a purity of not less than 99.999% and an oxygen concentration of not more than 100 ppm and the shape of particles of the high-melting metal powder is spherical or analogous to a sphere.
  • the packing density of the powder increases and it is possible to obtain a formed powder compact which shows high density and a uniform and fine micro-structure.
  • the sputtering targed produced according to the invention is obtained by introducing a powder into a thermal plasma into which hydrogen gas has been introduced.
  • the obtained high-melting metal powder material becomes a powder of spherical particles which has high purity and a low oxygen concentration, and by performing pressure forming through the use of this powder, it is possible to obtain a formed powder compact which has high purity and a low oxygen concentration and besides shows high density and a uniform and fine micro-structure.
  • the greatest feature of the invention resides in the fact that a powder composed of a metallic material with a higher melting point than iron, particularly Ta or Ru, is introduced into a thermal plasma into which a hydrogen gas has been introduced, thereby to obtain a high-melting metal powder material which has high purity and a low oxygen concentration and the shape of whose particles is spherical or analogous to a sphere.
  • RF radio-frequency
  • the raw material powder (110) is melted and becomes spherical due to the action of the surface tension of the metal, and as a result of this process, the shape of the powder particles after the treatment becomes spherical.
  • oxides and low-melting impurities contained in the raw material powder (110) evaporate in the thermal plasma high-temperature zone (105) because their vapor pressures are higher than those of Ta and Ru.
  • the purity of the raw material powder (110) increases and, at the same time, its oxygen concentration decreases.
  • the pressure of the plasma gas used here is almost atmospheric pressure and hence the effect of the evaporation of impurities is not great with an argon thermal plasma treatment alone.
  • hydrogen is introduced thereinto, it is possible to further lower the oxygen concentration by the reduction reaction of hydrogen ions, excited atoms, etc.
  • the introduction of hydrogen gas enables the effect of the evaporation of impurities to be remarkably improved.
  • Hot pressing or hot isostatic pressing is performed through the use of a high-melting metal powder obtained in the manner shown above.
  • HIP hot pressing or hot isostatic pressing
  • a powder is packed in a capsule made of carbon steel on the bottom of which a piece of Mo foil is laid, and HIP is performed after deaeration and sealing in a vacuum. It is desirable that this powder be sintered under pressure at a temperature of not less than 1100°C and at a pressure of not less than 50 MPa.
  • the above sintered powder compact is subjected to machining or surface grinding and is bonded to a packing plate, thereby to complete a target.
  • Fig. 1 The treatment of Ta powders was actually carried out through the use of an apparatus of the structure shown in Fig. 1.
  • the Ta raw material powders used in the treatment and thermal plasma treatment conditions are shown in Table 1.
  • micrographs of Specimen 3, as an example, obtained by a scanning electron microscope are shown in Figs. 2A and 2B.
  • Fig. 2A is a photograph of a raw material powder (before the thermal plasma treatment)
  • Fig. 2B is a photograph of Specimen 3 (after thermal plasma treatment).
  • the purity of Ta is increased from a level of 3N to levels of 4N and 5N by the thermal plasma treatment. From the foregoing it has become apparent that a Ta target obtained from a Ta powder subjected to the thermal plasma treatment by pressure sintering is most suited to the formation of a TaN film by reactive sputtering.
  • the thermal plasma treatment through the use of a thermal plasma into which hydrogen is introduced, an increase in purity, a decrease in oxygen concentration, and the spheroidizing of high-melting metal powder materials of Ta, Ru, etc. can be simultaneously realized. Furthermore, by performing the sintering under pressure of an obtained powder, it is possible to realize a Ta or Ru target which shows high density and a fine and uniform micro-structure and which has high purity and a low oxygen concentration and to obtain an optimum sputtered thin film.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Powder Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)

Claims (4)

  1. Verfahren zur Herstellung eines Sputtertargets, wobei ein aus einem feuerfesten Metall und Verunreinigungen bestehendes Pulvermaterial in ein thermisches Plasma, in das Sauerstoffgas eingeleitet wurde, eingebracht wird, so dass eine Raffination auf eine Sauerstoffkonzentration von nicht mehr als 100 ppm und Kugelformung erfolgen, und das erhaltenen Pulver unter Druck gesintert wird.
  2. Verfahren nach Anspruch 1, wobei das Drucksintern ein isostatisches Pressen ist.
  3. Verfahren nach Anspruch 1 oder 2, wobei das Metallpulvermaterial auf eine Reinheit von nicht weniger als 99.999% raffiniert wird.
  4. Verfahren nach einem der vorhergehenden Ansprüche, wobei das Metall Ta und/oder Ru ist.
EP00114459A 1999-07-07 2000-07-05 Verfahren zur Herstellung eines Sputtertargets Expired - Lifetime EP1066899B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19299499 1999-07-07
JP11192994A JP2001020065A (ja) 1999-07-07 1999-07-07 スパッタリング用ターゲット及びその製造方法ならびに高融点金属粉末材料

Publications (3)

Publication Number Publication Date
EP1066899A2 EP1066899A2 (de) 2001-01-10
EP1066899A3 EP1066899A3 (de) 2004-03-17
EP1066899B1 true EP1066899B1 (de) 2007-04-25

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EP00114459A Expired - Lifetime EP1066899B1 (de) 1999-07-07 2000-07-05 Verfahren zur Herstellung eines Sputtertargets

Country Status (4)

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US (2) US6589311B1 (de)
EP (1) EP1066899B1 (de)
JP (1) JP2001020065A (de)
DE (1) DE60034513T2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
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US8113413B2 (en) 2006-12-13 2012-02-14 H.C. Starck, Inc. Protective metal-clad structures
US8491959B2 (en) 2007-05-04 2013-07-23 H.C. Starck Inc. Methods of rejuvenating sputtering targets

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