EP1064105A1 - Dispositif et procede de nettoyage de pieces de travail - Google Patents
Dispositif et procede de nettoyage de pieces de travailInfo
- Publication number
- EP1064105A1 EP1064105A1 EP99909047A EP99909047A EP1064105A1 EP 1064105 A1 EP1064105 A1 EP 1064105A1 EP 99909047 A EP99909047 A EP 99909047A EP 99909047 A EP99909047 A EP 99909047A EP 1064105 A1 EP1064105 A1 EP 1064105A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- basket
- cleaning fluid
- enclosure
- cleaning
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 77
- 238000000034 method Methods 0.000 title claims abstract description 13
- 239000012530 fluid Substances 0.000 claims abstract description 61
- 238000010438 heat treatment Methods 0.000 claims abstract description 10
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 36
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 18
- 239000001569 carbon dioxide Substances 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 11
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims description 10
- 238000000605 extraction Methods 0.000 claims description 8
- GRWFGVWFFZKLTI-IUCAKERBSA-N (-)-α-pinene Chemical compound CC1=CC[C@@H]2C(C)(C)[C@H]1C2 GRWFGVWFFZKLTI-IUCAKERBSA-N 0.000 claims description 6
- 229930195733 hydrocarbon Natural products 0.000 claims description 6
- 150000002430 hydrocarbons Chemical class 0.000 claims description 6
- 239000001272 nitrous oxide Substances 0.000 claims description 5
- 238000003756 stirring Methods 0.000 claims description 5
- 150000002148 esters Chemical class 0.000 claims description 4
- 150000002576 ketones Chemical class 0.000 claims description 4
- 239000003960 organic solvent Substances 0.000 claims description 4
- 239000004094 surface-active agent Substances 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- MVNCAPSFBDBCGF-UHFFFAOYSA-N alpha-pinene Natural products CC1=CCC23C1CC2C3(C)C MVNCAPSFBDBCGF-UHFFFAOYSA-N 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 3
- 150000008282 halocarbons Chemical class 0.000 claims description 3
- GRWFGVWFFZKLTI-UHFFFAOYSA-N rac-alpha-Pinene Natural products CC1=CCC2C(C)(C)C1C2 GRWFGVWFFZKLTI-UHFFFAOYSA-N 0.000 claims description 3
- 229930195735 unsaturated hydrocarbon Natural products 0.000 claims description 3
- 238000009835 boiling Methods 0.000 claims description 2
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 15
- 239000002904 solvent Substances 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 238000005238 degreasing Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 6
- 239000003344 environmental pollutant Substances 0.000 description 5
- 239000003925 fat Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 230000004580 weight loss Effects 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 231100000719 pollutant Toxicity 0.000 description 4
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- 239000004753 textile Substances 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical group ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 230000000711 cancerogenic effect Effects 0.000 description 1
- 231100000315 carcinogenic Toxicity 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
- 239000010730 cutting oil Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005108 dry cleaning Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 101150023663 flu gene Proteins 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 239000013529 heat transfer fluid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000003760 magnetic stirring Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229950011008 tetrachloroethylene Drugs 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/045—Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
Definitions
- the present invention relates to a device intended for cleaning and degreasing working parts, in particular metal parts, and a method of implementing the latter.
- chlorine solvents such as trichloroethane, carbon tetrachloride, chloroform, trichlorethylene, dichloromethane, perchlorethylene, etc. have been used to carry out such a cleaning operation.
- chlorofluorocarbon type solvents such as that designated under the reference R113 (flugene), which are reputed to be less aggressive than chlorinated solvents, in particular with respect to metalloplastic assemblies.
- chlorinated solvents such as for example trichloroethane as well as most chlorofluorocarbons
- chlorinated solvents not prohibited by the said convention their use has been drastically regulated due to certain studies tending to demonstrate their carcinogenic and toxic characteristics.
- hydrocarbons the use of which can only be envisaged in the context of very specific and very controlled techniques, because of their high flammability character.
- fluorocarbon substitutes known as HCFCs or HFCs which are, in certain cases, directly substituted products of CFCs previously used, but which have the disadvantage of being of a much higher cost for a result often very inferior.
- a device using a supercritical fluid which consists of an enclosure provided with a drum containing the pieces to be cleaned which is driven by a movement of rotation around a vertical axis, the carbon dioxide arriving by the periphery of the base of the enclosure and emerging from the latter by an axial pipe.
- a supercritical fluid which consists of an enclosure provided with a drum containing the pieces to be cleaned which is driven by a movement of rotation around a vertical axis, the carbon dioxide arriving by the periphery of the base of the enclosure and emerging from the latter by an axial pipe.
- the object of the present invention is to propose a device for cleaning work pieces which is particularly robust and which, moreover, is of a relatively low cost price and a reduced maintenance cost. compared to those of the prior art allowing the use of different cleaning fluids, and in particular liquefied gases such as carbon dioxide, nitrous oxide, halogenated hydrocarbons, light hydrocarbons, optionally added with surfactants , conventional organic solvents such as alcohols, ketones, esters.
- gases such as carbon dioxide, nitrous oxide, halogenated hydrocarbons, light hydrocarbons, optionally added with surfactants , conventional organic solvents such as alcohols, ketones, esters.
- the present invention thus relates to a device for cleaning work pieces, by means of a cleaning fluid, of the type comprising an enclosure in which is placed a basket containing the parts to be cleaned, the external wall of this basket being separated of the internal wall of the enclosure so as to provide between them a passage for the cleaning fluid, the device further comprising means for admitting the cleaning fluid and means for extracting the fluid from the latter, characterized in that the base of the enclosure forms an annular trough situated under said passage, which is connected to the means for extracting the cleaning fluid, and within which are arranged means for heating this fluid, and the intake means are located at the top of the enclosure.
- the cleaning fluid can consist of a liquefied gas in the vicinity of its boiling point.
- This cleaning fluid may be chosen from carbon dioxide, nitrous oxide, light hydrocarbons, light halogenated hydrocarbons.
- the cleaning fluid may be supplemented with surfactants. It may also be added with an organic solvent such as in particular an alcohol, a ester, a ketone, or an unsaturated hydrocarbon such as in particular ⁇ -pinene.
- an organic solvent such as in particular an alcohol, a ester, a ketone, or an unsaturated hydrocarbon such as in particular ⁇ -pinene.
- the enclosure and the basket are cylindrical in shape and the basket is mounted for rotation about a central and vertical axis.
- stirring means are provided at the base of the enclosure under the basket.
- the latter may be means for driving the basket in rotation or stirring means such as a propeller.
- the present invention also relates to a method of cleaning work pieces by means of a cleaning fluid, in an enclosure provided with a basket in which said pieces are arranged, and with means making it possible to ensure circulation by convection of the cleaning liquid in an annular passage created between the internal face of the enclosure and the external wall of the basket, characterized in that the enclosure is filled with the cleaning fluid so that the level of the latter is slightly below the upper area of the basket from which it is in communication with the annular passage, and that this level is maintained throughout the cleaning.
- FIG. 1 is a schematic vertical sectional view of a cleaning device according to the invention.
- FIG. 2 is a view in vertical section of an alternative embodiment of the cleaning device of FIG. 1.
- Figure 3 is a partial vertical sectional view of another alternative embodiment of the device according to the invention.
- Figure 4 is a schematic elevational view of an embodiment of the invention.
- Figures 5a, 5b and 5c are schematic views in partial section of three means for distributing the cleaning fluid on the cross section of the basket containing the parts to be cleaned.
- I consists of an autoclave 1 formed by a cylindrical enclosure 3 which is closed at its upper part by a cover 5 and which contains a cylindrical basket 7 whose vertical axis coincides with the vertical axis yy 'of the autoclave 1.
- the external diameter of the basket 7 is less than the internal diameter of the enclosure 3, so as to provide between these two elements an annular passage 9 of spacing d.
- the base of the enclosure 3 includes a central core
- the chute 13 receives heating means 17 consisting of an electrical resistance.
- These heating means 17 may however be constituted by any other means capable of providing heat to the fluid, and in particular by a tubular exchanger 18 (FIG. 3) in which a heat transfer fluid circulates.
- the basket 7, which is open at its upper part, consists of deformed sheet metal elements and is closed at its base by a metal cloth 19 or by a perforated metal disc. Its upper part is spaced from the cover 21 by a distance e . a few centimeters, sufficient to allow the passage of the treatment fluid during the operation of the autoclave as explained below.
- the cover 5 is provided with means 21 making it possible to secure it in leaktight manner to the upper part of the enclosure 3.
- This cover 5 comprises, in its center, a pipe 25 for supplying fresh liquid carbon dioxide. Under these conditions, the implementation of the cleaning autoclave according to the invention is done as described below.
- the parts 27 to be cleaned are placed inside the basket 7 and the latter is introduced inside the autoclave 1, then the cover 5 is closed using the sealing means 21
- the cleaning fluid for example carbon dioxide in the liquid state, at a temperature T 0 lower than the ambient temperature, namely approximately 10 ° C., is introduced into the upper part of the autoclave 1 by driving 25. He then flows onto the parts 27 to be cleaned, rids them of the various pollutants which adhere to their surface and drives them into the chute 13.
- the autoclave 1 is partially filled with cleaning fluid at liquid state, at a temperature slightly higher than T 0 . As shown in FIG. 1, it is arranged that the upper level N of the treatment fluid admitted into the enclosure is situated slightly below the upper opening of the basket 7.
- the heating device 17 disposed at the inside the chute 13 is activated and causes local vaporization of the cleaning fluid which is in contact with it.
- the cleaning fluid which, at this point, is in a two-phase state, gives rise to a phenomenon of natural convection such that the cleaning fluid rises in the annular passage 9 comprised between the internal wall of the enclosure. 3 and the outer wall of the basket 7, as shown by the arrows F in FIG. 1.
- this two-phase fluid arrives at the upper part of the autoclave, it meets the .fluid 9 arriving via line 25 which is located at the temperature T 0 , so that it cools on contact with the latter causing at least partial recondensation of the gaseous fraction which then descends and comes into contact with the parts to be treated.
- a part of the cleaning fluid, equal to the quantity of fluid admitted by the pipe 25 is extracted by the withdrawal pipe 15.
- the present device makes it possible to naturally create a movement of the cleaning liquid relative to the parts, a movement which gives it great efficiency.
- the cleaning fluid which is heated and which is partially vaporized in contact with the heating means 17 has a lower solvent power than that of the fluid which circulates in the basket 7, so that the dissolved pollutants are not entrained by the movement. convection and are collected in the chute 13, from where they are drawn off through the pipe 15.
- Such a drive is favored by the extraction of a cleaning fluid flow identical to that admitted at the top of the autoclave .
- dust which is more easily entrained by pollutants and the fluid leaving the autoclave than by the heated fluid which rises by convection through the annular passage 9.
- the arrival of cleaning in the autoclave is stopped and the racking continues, causing the pressure to drop.
- gas preferably air or nitrogen
- a reservoir 40 maintained at this pressure; quickly the cleaning fluid is replaced by this gas which can then be easily discharged, after having interrupted its supply until the pressure prevailing in the autoclave 1 is equal to that of the atmosphere, without, however, causing a sharp lowering of the temperature within the autoclave 1, as would be the case if one decompressed directly to the atmospheric pressure the cleaning fluid.
- the said given value ⁇ e P m is chosen between 106 and 25.105Pa.
- Example 1 As a first example, the implementation of a cleaning operation relating to one hundred and twenty machined parts made of stainless steel, with an average unit mass of the order of 200 g and which are polluted by cutting oil, metal particles and dust remaining from their machining operation.
- an autoclave 1 was used, the enclosure 3 of which is cylindrical in shape, the height of which is 80 cm and the base diameter is 28 cm, inside which is placed a basket 7, also cylindrical, of vertical axis yy 'whose diameter is 25 cm, so that the annular passage 9 formed between its external surface and the internal surface of the enclosure 3 is 1.5 cm.
- This basket 7 is open at its upper part, and the latter is located at a distance d, equal to 10 cm, from the cover 5.
- the bottom of the basket 7 is formed by a wire mesh 19.
- the base of the enclosure 3 forms an annular chute 13, the height of which is of the order of 7.5 cm and the width of 5 cm, which is located just below the annular passage 9.
- an electrical resistance is arranged 17 whose power is approximately 3 kilowatts and which consists of a tube wound in spiral.
- the bottom of this same chute 13 comprises an extraction pipe 15 as shown in FIG. 1.
- the pieces 27 to be treated are placed in bulk in the basket 7, then, after closing the cover 5, 35 kg of carbon dioxide are introduced into the autoclave. in the liquid state, at a temperature of 10 ° C, at a flow rate of 250 kg / h.
- the autoclave was filled so that the level N of admitted liquid carbon dioxide was approximately 5 cm below the upper part of the basket 7.
- the intake of fresh carbon dioxide was then adjusted to a flow rate of 100 kg / h and its extraction via line 15 has an identical flow rate, so as to keep the level N of carbon dioxide substantially constant.
- the heating resistor 17 was then supplied for a period of 25 minutes during which the cleaning operation took place.
- the pollutants linked to identical parts were extracted using dichloromethane in a tank agitated by ultrasound according to a well-established technique, and noted an average weight loss of 2.7g per piece, which corresponds to the total quantity extracted previously.
- the pipe 25 for supplying fresh liquid carbon dioxide is provided with means intended to promote good distribution of this fluid over the entire upper section of the basket 7.
- These means are constituted for example by an injector 16a, a distributor 16b formed by a perforated disc or a sintered metal of the sprinkler type, or by a concentric bundle of perforated tubes 16c, for example 6 tubes arranged in a star.
- the relative movement of the cleaning fluid is improved with respect to the parts 27 to clean by rotating the cleaning tank 7 around its vertical axis yy '.
- the base of the basket 7 is provided with a hub 30 which is extended downwards by an axial shaft 32 which is set in rotational movement by means of a motor 34.
- the basket 7 is provided, at its upper part, with a perforated zone 31 from the base of which the cleaning fluid which rises by convection through the annular passage 9 can penetrate in the basket 7. This is why during the admission of the cleaning fluid, we will make sure to bring the level N thereof, slightly below the base of the zone 31 and we will then maintain it there. during treatment.
- Example 2
- the treatment operation was repeated, in the same autoclave, using machined parts, of the same type as the previous ones, but by rotating the basket 7 around its vertical axis yy 'at a speed of 30 revolutions / minute, all the other operating parameters being kept constant.
- the device according to the invention makes it possible to use a wide variety of cleaning fluids, such as nitrous oxide, light hydrocarbons, pure halogenated light hydrocarbons or in mixtures optionally supplemented with surfactants, conventional organic solvents such as 'an alcohol, an ester or a ketone.
- cleaning fluids such as nitrous oxide, light hydrocarbons, pure halogenated light hydrocarbons or in mixtures optionally supplemented with surfactants, conventional organic solvents such as 'an alcohol, an ester or a ketone.
- the device according to the invention has thus been used using, as cleaning fluid, nitrous oxide.
- the implementation of the treatment process was carried out as described in the first example, and a completely satisfactory degreasing of parts was obtained since the weighing of these showed an average weight loss of 2.66g.
- the cleaning device was applied to the degreasing of electronic printed circuits, partially covered with solder flux residues. These circuits were treated in a device according to the invention implemented as well as in the first example, and a satisfactory degreasing was obtained since the amount of fat extracted from the circuits was 3.6 g, while for a degreasing of reference to dichloromethane the quantity of fat extracted from these same parts was 3.7 g. It is noted however, in this embodiment that, if the degreasing has proved satisfactory, there were visible traces of whitish dust on the surface of the circuits.
- the device according to the invention thus makes it possible to use different liquefied gases, and in particular carbon dioxide, to replace the solvents currently prohibited or in the process of being prohibited, with an efficiency equal to that provided by the latter, and this by means of a simple and reliable device to be implemented.
- this convection system with forced convection means, obtained for example by the use of a circulation turbine, makes it possible to further improve the efficiency of this device.
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9803451A FR2776213B1 (fr) | 1998-03-20 | 1998-03-20 | Dispositif et procede de nettoyage de pieces de travail |
FR9803451 | 1998-03-20 | ||
PCT/FR1999/000639 WO1999048624A1 (fr) | 1998-03-20 | 1999-03-19 | Dispositif et procede de nettoyage de pieces de travail |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1064105A1 true EP1064105A1 (fr) | 2001-01-03 |
EP1064105B1 EP1064105B1 (fr) | 2003-01-29 |
Family
ID=9524286
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99909047A Expired - Lifetime EP1064105B1 (fr) | 1998-03-20 | 1999-03-19 | Dispositif et procede de nettoyage de pieces de travail |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1064105B1 (fr) |
AT (1) | ATE231749T1 (fr) |
DE (1) | DE69905140T2 (fr) |
ES (1) | ES2190645T3 (fr) |
FR (1) | FR2776213B1 (fr) |
WO (1) | WO1999048624A1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6880560B2 (en) | 2002-11-18 | 2005-04-19 | Techsonic | Substrate processing apparatus for processing substrates using dense phase gas and sonic waves |
CN105618419A (zh) * | 2014-11-08 | 2016-06-01 | 雍自威 | 一种化工生产漂洗装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB103288A (en) * | 1916-01-12 | 1917-07-12 | Wyman Clark Parker | Tanks for Rust Proofing Metals. |
US5355901A (en) * | 1992-10-27 | 1994-10-18 | Autoclave Engineers, Ltd. | Apparatus for supercritical cleaning |
US5417768A (en) * | 1993-12-14 | 1995-05-23 | Autoclave Engineers, Inc. | Method of cleaning workpiece with solvent and then with liquid carbon dioxide |
-
1998
- 1998-03-20 FR FR9803451A patent/FR2776213B1/fr not_active Expired - Fee Related
-
1999
- 1999-03-19 ES ES99909047T patent/ES2190645T3/es not_active Expired - Lifetime
- 1999-03-19 DE DE69905140T patent/DE69905140T2/de not_active Expired - Fee Related
- 1999-03-19 WO PCT/FR1999/000639 patent/WO1999048624A1/fr active IP Right Grant
- 1999-03-19 AT AT99909047T patent/ATE231749T1/de not_active IP Right Cessation
- 1999-03-19 EP EP99909047A patent/EP1064105B1/fr not_active Expired - Lifetime
Non-Patent Citations (1)
Title |
---|
See references of WO9948624A1 * |
Also Published As
Publication number | Publication date |
---|---|
ATE231749T1 (de) | 2003-02-15 |
FR2776213B1 (fr) | 2000-05-26 |
DE69905140D1 (de) | 2003-03-06 |
EP1064105B1 (fr) | 2003-01-29 |
FR2776213A1 (fr) | 1999-09-24 |
ES2190645T3 (es) | 2003-08-01 |
DE69905140T2 (de) | 2003-11-20 |
WO1999048624A1 (fr) | 1999-09-30 |
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Legal Events
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