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EP0799909B1 - Electroforming cell with workpiece holder - Google Patents

Electroforming cell with workpiece holder Download PDF

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Publication number
EP0799909B1
EP0799909B1 EP96105229A EP96105229A EP0799909B1 EP 0799909 B1 EP0799909 B1 EP 0799909B1 EP 96105229 A EP96105229 A EP 96105229A EP 96105229 A EP96105229 A EP 96105229A EP 0799909 B1 EP0799909 B1 EP 0799909B1
Authority
EP
European Patent Office
Prior art keywords
substrate
contact plate
shaft
ring
base member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96105229A
Other languages
German (de)
French (fr)
Other versions
EP0799909A1 (en
Inventor
Michael Bock
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sonopress GmbH
Original Assignee
Sono Press Produktionsgesellschaft fur Ton- und Informationstrager Mbh
Sonopress GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to AT96105229T priority Critical patent/ATE184923T1/en
Application filed by Sono Press Produktionsgesellschaft fur Ton- und Informationstrager Mbh, Sonopress GmbH filed Critical Sono Press Produktionsgesellschaft fur Ton- und Informationstrager Mbh
Priority to EP96105229A priority patent/EP0799909B1/en
Priority to DE59603152T priority patent/DE59603152D1/en
Priority to PCT/EP1997/001633 priority patent/WO1997037060A1/en
Priority to JP09534940A priority patent/JP3135127B2/en
Priority to CN971902968A priority patent/CN1094157C/en
Priority to KR1019970708674A priority patent/KR100297458B1/en
Priority to TW086107881A priority patent/TW394941B/en
Publication of EP0799909A1 publication Critical patent/EP0799909A1/en
Priority to US08/973,108 priority patent/US5997701A/en
Priority to HK98112058A priority patent/HK1017026A1/en
Application granted granted Critical
Publication of EP0799909B1 publication Critical patent/EP0799909B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/10—Moulds; Masks; Masterforms

Definitions

  • the invention relates to a device for galvanic deposition a metal layer on a support, with a container for receiving the electrolyte, with one with anode material filled anode container, its essentially flat Exit surface for metal ions of the anode material permeable which is on the support surface facing the anode container of the carrier serving as the cathode be, with a beam holder, one towards the normal driven shaft running on the carrier surface contains, the cathode current over that with an outer Insulated layer provided shaft is supplied to the carrier that on a carrier plate on the outer edge by a Retaining ring is held in contact with a contact plate, wherein the contact plate on a base body of the carrier plate rests and has a socket in the middle that can be connected to the shaft is.
  • Such a device is used, for example, for galvanoplastic Manufacture of pressing tools or molds, especially made of nickel.
  • These press tools will be in compression molding or injection molding of plates, for example of compact discs (so-called CD's), laser vision discs and other information-bearing plates.
  • CD's compact discs
  • the aforementioned forms, to which archetypes like the so-called "glass masters" as well as impressions from the glass master belong, are intermediate forms for the production of the pressing tools.
  • the shapes carry information in relief on their surfaces.
  • the surface structure is made by galvanoplastic Transfer the impression to the press tool.
  • the one in this Information contained in surface structure is provided by the use of the press tool in injection molding or compression molding embossed on the surface of a plastic material.
  • the optical disc which also includes the compact disc heard, the relief structure modulates the light of a laser beam, so that on the surface of the plastic body existing information can be read out.
  • a metal layer generally a nickel layer a carrier, either an insulating carrier with a thin electrically conductive layer, for example Glass, or a metallic support, for example made of Nikkel, deposited
  • the respective carrier surface has a relief-like structure that contains the information to be read contains.
  • the smallest unit of information, the so-called "Pit" has a local wavelength in the micrometer range, where the track spacing between adjacent information tracks is also in the micrometer range. Because the support surface contain several billion pieces of information can and the associated fine structures in the micrometer range are to be transferred to the metal layer, to the Metal deposition process made the highest demands.
  • the deposited metal layer should be very fine-grained and be stress-free; it is said to be a relatively large thickness of the deposited Layer can be reached, e.g. for making Compact discs are said to be those made by metal deposition Press tool have a thickness of 295 ⁇ m ⁇ 5 ⁇ m; Moreover the deposition process should run at high speed. Furthermore, the device for galvanic deposition have a small size and are easy to use. An important requirement in the manufacture of galvanoplastic Metal layers on a support is uniformity the layer thickness. It may cover the entire area of the Fluctuate only within small limits. Become if these limits are exceeded, the product quality suffers of the optical disks made with this metal layer.
  • the layer thickness variation of the deposited metal layer depends on the distribution of the electrical current lines between the anode and the cathodically connected carrier.
  • the Power is usually supplied on the cathode side via the Shaft of the carrier holder, the carrier on a carrier plate holds.
  • the shaft is provided with an outer insulating layer, to them compared to the electrically conductive electrolyte isolate. This is to ensure that the metal ions only be deposited on the carrier surface.
  • the Carrier plates can be detached from the shaft. With conventional With frequent use, the support bracket becomes the seal between Leaking shaft and support bracket. In such a case can get electrolyte fluid in places that are electrical are conductively connected to cathode potential.
  • the structure according to the invention precludes that electrolyte fluid at the critical point between Bush and shaft arrives.
  • the training of wild growth at Operation of the facility is almost impossible.
  • As there are sufficient insulation gaps in the chosen construction between the wave carrying the negative potential and the positive potential of the electrolyte are a current flow and thus a precipitation of metal avoided at unwanted points on the carrier holder.
  • the Retaining ring half shells by a connecting device are releasably connected.
  • one of the Half-shells firmly connected to the base plate of the carrier plate.
  • the half shells are from one operator with rubber gloves and can grip safely hardly ever get lost.
  • the connecting device comprises two tensioning hooks, which with the Base body are firmly connected, the tensioning hooks in pins or engage recesses on the detachable half-shell, falling of tensioning elements is completely impossible.
  • the Glass master with the pit structure embossed on its surface is to produce metallic prints, so-called "fathers".
  • the invention are in a Carrier made of insulating material, preferably glass, on the Contact plate insulating elements, preferably three, in Form of circular sectors arranged by screws, preferably by one screw per segment, with the base body are connected. These segments can be easily Loosen again so that the surrounding contact ring frees can be. In this way, inexpensive maintenance of the carrier holder can be reached.
  • a support bracket for a glass master the contact plate on its peripheral surface electrically and mechanically detachable with a contact ring connected, with an annular on the contact ring Contact disc rests, which is the electrical contact between the contact ring and the thin metal layer on the insulating carrier.
  • Figure 1 shows schematically the production of a compact disc for audio applications. Molds are used in the manufacturing process whose metal layer by galvanic deposition in a device according to the invention are generated. The quality this metal layer is crucial for quality of the finished product, i.e. for the playback quality of the on audio signals stored on the compact disc.
  • the manufacturing steps can be roughly divided into four groups A, Classify B, C, D, of which A is the production of the glass master, B the production of the pressing tool, C the pressing and D concern finishing.
  • Starting point for the Production of the glass master is the production of a master magnetic tape (Step 10) with audio information on a magnetic tape stored digitally with the highest precision.
  • production steps group A is a thin photoresist on a polished glass applied (steps 12 and 14).
  • step 16 the photoresist is exposed by a bundled laser beam, taking the laser beam through the digital information is modulated on the master magnetic tape.
  • Step 18 becomes the exposed areas of the photoresist removed - a relief-like photoresist structure remains back on the glass pane.
  • This structure contains the pits taken from the master magnetic tape digital information.
  • step 20 the relief-like surface structure with a thin electrically conductive layer, e.g. a nickel layer overdrawn.
  • the so-called intermediate is obtained Glass master for the compact disc.
  • step 22 a galvanic Device according to the invention as a metal mold so-called "father" made, being thin on the electrical conductive layer of the glass master a thick nickel layer, e.g. with a thickness of 500 ⁇ m, in a galvano process is deposited.
  • the father now carries one to the glass master complementary relief structure. The father can directly used as the tool for making compact discs become. Usually in another galvanoplastic Process from the father a form called “mother” Nickel creates.
  • the actual pressing tool is then subsequently in a further galvano process (step 26) as negative image derived from the mother.
  • the resulting one Form becomes "son” or matrix (English “stamper") called and serves as a press tool for mass production.
  • son or matrix (English “stamper”
  • the compact disc is included a transparent protective layer covering the reflective layer protects against damage and corrosion.
  • the relief-like pit structure on the reflection layer of the Compactdisc has extremely small dimensions, e.g. is the The width of a pit is about 0.5 ⁇ m, the depth is about 0.1 ⁇ m and the Length varies from 1 to 3 ⁇ m, with the track spacing about 1.6 ⁇ m is.
  • the width of a pit is about 0.5 ⁇ m
  • the depth is about 0.1 ⁇ m
  • the Length varies from 1 to 3 ⁇ m
  • the track spacing about 1.6 ⁇ m is.
  • FIG. 2 shows a view of an electroplating system 40, in which a deposition cell 42 is included.
  • this separation cell 42 the different forms, like fathers, Mothers and matrices (sons), by depositing nickel metal manufactured.
  • a cleaning system 44 for cleaning and filtering the Electrolytes.
  • the rectifiers to generate the required high DC are computer controlled.
  • Components in contact stand with the electrolyte are preferably off Polypropylene plastic or titanium.
  • a clean room filter 48 is arranged above the separation cell 42 .
  • the deposition cell 42 has one Container 50 with two outer walls, essentially are inclined at an angle to the vertical.
  • a drive device 54 is arranged, which will be described in more detail below.
  • a removable cover plate 51 is arranged inside the container 50.
  • an anode container 56 made of titanium, which when open Cover plate 51 accessible to an operator is.
  • Figure 3 shows a schematic view of the deposition cell 42 according to the invention.
  • the two outer walls 60, 62 under 45 ° to the vertical is parallel to the outer wall 62 the anode container 56 is arranged, the nickel material in the form of pieces, also called pellets or flats is.
  • the anode container 56 carries on its upper side a female connector 66 which is in electrical contact with a Anode line 68 has a circular cross section Has.
  • the female connector 66 can be easily removed from the anode lead 68 can be solved so that the anode container 56 of an operator can be removed from the container 50 can.
  • the lid 52 is connected to the by a swivel device 70 Base of the electroplating system 40 of an edge part of the container 50 connected.
  • the lid 52 can thus in the direction of the arrow 72 are raised to make the interior of the container 50 accessible close.
  • On the cover 52 there is an adjustment device 74 mounted, an angle plate 76 and one with it has a plate 78 connected by screws.
  • the shelf 78 carries the drive device 54, which with a Carrier holder 83 is connected.
  • the drive device contains a motor 82 which drives a drive shaft via a transmission 84 drives, at the end of a support plate 86 is attached.
  • the carrier 87 is clamped onto this carrier plate 86 the nickel is deposited.
  • the adjusting device 74 can the carrier plate 86 and thus the carrier 87 parallel to the flat exit surface opposite it 89 aligned for nickel ions of the anode container 56 or the distance between the carrier 87 and the anode container 56 can be finely regulated.
  • Figure 4 shows a part of the carrier holder 83 in cross section.
  • the carrier holder 83 is used to manufacture pressing tools made of nickel.
  • This carrier holder 83 essentially has one circular carrier plate 86 and a connecting device 100 for connecting the carrier plate 86 to the drive shaft 84, which carries the current on the cathode side.
  • This drive shaft 84 cannot be seen in FIG. 4; she sticks out with her End in room 84a.
  • the carrier plate 86 has a basic body 102 with a cylindrical recess 104 in the middle has an internal thread 106.
  • a contact plate 108 is located in the base body 102 embedded, which has a recess 110.
  • the Contact plate 108 is made of solid titanium and has an interchangeable ring 107, the edge of which 107a on one in a Groove 107b arranged sealing ring 107c rests.
  • the structure of the Contact plate 108 and the change ring 107 is below explained in connection with Figures 5 and 6.
  • the Contact plate 108 is by means of several connection devices 112 (only one can be seen in FIG. 4) on her Edge connected to the base body 102.
  • Any connection device 112 contains a threaded bush 114, which on the Contact plate 108 is welded.
  • this threaded bush 114 is a screw 116 made of polypropylene, which is supported on the base body 102 via an O-ring 118.
  • the contact plate 108 is with their change ring 107 completely in the base body 102 embedded and through an annular seal 120 sealed. By letting it into the body as well the seals 107c, 120 and 118 do not get any Electrolyte liquid in the interface between Base body 102 and contact plate 108, so that in this Area no metallic wild growth can form.
  • Concentric to contact plate 108 is outside and close to its circumference furthermore an annular lip seal 122 is arranged.
  • This lip seal 122 is sealing during operation the underside of the carrier 87 (not shown in FIG. 4) and largely prevents the entry of Electrolyte fluid.
  • the lip seal is 122 embedded in a self-locking manner in an annular groove 124.
  • the carrier 87 is on its anode side facing surface held by a retaining ring 126 and is under slight pressure against the lip seal 122 as well the contact plate 108 pressed.
  • the retaining ring 126 contains two half shells, one of which Half shell 128 is shown in Figure 4.
  • the half-shell 128 has an edge 130 protruding from the central axis M, which at the Shoulder of an annular recess 132 in the base body 102 is present.
  • the upper edge 134 is chamfered.
  • At his inclined surface lies the circumference of the carrier 87 (in FIG. 4 not shown).
  • the half shell 128 is with the Base body 102 firmly connected.
  • the other (not shown) Half-shell is 128 with the fixed half-shell connected.
  • the two half-shells are attached using a hook 136 (only one Clamping hook 136 is shown in FIG. 4).
  • Each tensioning hook 136 is on the stationary half shell 128 fastened and engages in corresponding pins or Recesses on the opposite half-shell.
  • Each Half-shell has a lip seal 138, this Lip seals 138 of both half shells in the closed Collide condition. This way an intrusion of electrolyte liquid into the interior of the carrier plate 86 reduced.
  • a threaded bushing 142 is welded to the contact plate 108.
  • the threaded bushing 142 has an internal thread 144, in that the external thread of a shaft 84 (not shown) engages and thus a firm mechanical and electrical contact with the contact plate 108.
  • the cylindrical Recess 104 and the internal thread 106 form a fastening section around the threaded bushing 142.
  • a tube part 146 with an external thread 147 engages in the internal thread 106 and is supported on the base body 102 via an O-ring 148.
  • the Pipe part 146 has on the opposite of the contact plate 108 End an external thread 150, which with the internal thread a coupling ring 152 is connected.
  • the throwing ring 152 is displaceable along the axis M on the shaft 84.
  • a O-ring 154 is between the end face 156 of the tubular part 146 and an inclined surface 158 of the coupling ring 152 arranged.
  • the shaft 84 with a Insulating layer is coated to function as insulated electrical conductor in the electrolyte bath to meet can.
  • FIGS. 5 and 6 show the structure of the contact plate 108 and the change ring 107.
  • the threaded bushings 142 and 114 are welded to the contact plate 108.
  • the contact plate 108 has an annular recess 108a for flush reception of the change ring 107.
  • For fastening this change ring 107 serve four elongated holes 108b.
  • FIG. 6 shows views of the interchangeable ring 107. It contains four Connecting elements 107d, each on the underside have a head 107e on a neck piece 107f. Further the change ring 107 contains two recesses 107g.
  • the connecting elements 107d with their Heads 107e inserted through the elongated holes 108b. Subsequently the change ring 107 becomes relative to the contact plate 108 twisted, with inclined ramps (not shown) or by other clamping means in the elongated holes 108b a frictional connection is established, through which the Change ring 107 firmly connected to the contact plate 108 becomes.
  • the Change ring 107 rotated relative to the contact plate 108 and then taken off.
  • Figure 7 shows a cross section through a further embodiment the support holder 83 for the galvanic deposition of nickel on a glass master, the surface of which carries the pit structure. As mentioned, is on this surface a thin layer of metal is deposited by sputtering to an electrode area required for the electroplating process create.
  • the in the embodiment of Figure 7 with the Example according to Figure 4 matching elements are the same referred to and will not be explained again below.
  • FIG Form of circular sectors 160a, 160b, 160c There are three insulating elements in FIG Form of circular sectors 160a, 160b, 160c arranged as from the schematic plan view shown on the left in FIG. 5 results (only the elements 160a are in cross section and 160b).
  • the segments 160a to 160c are through one screw 162 each connected to the base body 102, whereby also the contact plate 108 is fixed to the base body 102 is connected.
  • the contact plate is on its peripheral surface 108 with a vertically standing contact ring 164 several screws 166 electrically and mechanically releasable connected.
  • On this contact ring 164 is a flat one annular contact disc 168 is placed, which the electrical contact between contact ring 164 and the edge the thin metal layer on the insulating support 87, i.e. the glass master.
  • the retaining ring 126 which the Carrier 87 holds on the carrier plate 86 is present Embodiment a closed ring, which by a connecting device 170 releasably to the base body 102 is connected.
  • the connector 170 includes a bayonet ring 172, the cams 171 in corresponding Engage recesses 174 in the retaining ring 126 and out of this Recesses 174 by loosening several knurled screws 173 and Twisting the bayonet ring 172 can be solved again.
  • the retaining ring 126 has an inner annular seal 176, which rests on the top of the contact disk 168.
  • the retaining ring 126 also has an outer annular seal 178, the one on the front side of the base body 102 the projecting edge 180 rests, which is the top of the Glass masters tower over.
  • the arrangement of the seals 176 and 178 no electrolyte liquid gets in when it is inserted Glass master into the interior of the carrier plate 86.
  • the carrier plate 86 also contains at least one push-out arrangement 182. Through segment 160b, contact plate 108 and the base body 102 runs an aligned through hole 184, which receives a bushing 186 made of polypropylene. A push-out pin 188 is guided in the socket 186. This Extraction bolt 188 can be used to eject the with a galvanic Coated glass master can be pressed upwards. O-rings 190 and 192 seal the sleeve 186 against the Main body 102 or sealing against the push-out pin 188 from. It should also be noted that the Embodiment according to Figure 4 also for electrically conductive Carrier can be used.
  • the respective carrier holder is constructed so that in no electrolyte liquid enters its interior during operation can. Wild growth is thus avoided or to a high degree decreased.
  • the connection to the shaft for the drive and the Power supply can be quickly disconnected to new carriers open or replace the carrier plate.
  • the Carrier plate is in its critical parts against entry protected by electrolyte fluid and can be completely disassembled to replace or clean parts.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Physical Vapour Deposition (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Coating Apparatus (AREA)

Abstract

The apparatus includes a container for electrolyte and a container for anode material with a plane outlet surface which is passable for metal ions of the anode material. This surface faces the surface of the carrier element (which takes the role of a cathode) to be coated. The apparatus also includes a carrier element holder with a shaft (84) which is oriented normally to the surface of the carrier element. This shaft also serves for delivery of cathode current to the carrier element via a contact plate (108) with a bush (142) resting on the main body (102) of the carrier element tray (86). The main body (102) around the bush (142) is provided with a fixing section (104, 106) accommodating a pipe section (146) which is provided with a seal and can be dismantled. The shaft (84) carries an axially movable sleeve (152) which is releasably joined to the pipe section (146), and serves for protecting the latter and the shaft against entry of electrolyte.

Description

Die Erfindung betrifft eine Einrichtung zur galvanischen Abscheidung einer Metallschicht auf einem Träger, mit einem Behälter zur Aufnahme des Elektrolyten, mit einem mit Anodenmaterial gefüllten Anodenbehälter, dessen im wesentlichen plane Austrittsfläche für Metallionen des Anodenmaterials durchlässig ist, welche auf der dem Anodenbehälter zugewandten Trägeroberfläche des als Kathode dienenden Trägers abgeschieden werden, mit einem Trägerhalter, der eine in Richtung der Normalen der Trägeroberfläche verlaufende angetriebene Welle enthält, wobei der Kathodenstrom über die mit einer äußeren Isolierschicht versehene Welle dem Träger zugeführt ist, der auf einem Trägerteller an dessen äußeren Rand durch einen Haltering in Kontakt mit einer Kontaktplatte gehalten ist, wobei die Kontaktplatte auf einem Grundkörper des Trägertellers ruht und mittig eine Buchse hat, die mit der Welle verbindbar ist. The invention relates to a device for galvanic deposition a metal layer on a support, with a container for receiving the electrolyte, with one with anode material filled anode container, its essentially flat Exit surface for metal ions of the anode material permeable which is on the support surface facing the anode container of the carrier serving as the cathode be, with a beam holder, one towards the normal driven shaft running on the carrier surface contains, the cathode current over that with an outer Insulated layer provided shaft is supplied to the carrier that on a carrier plate on the outer edge by a Retaining ring is held in contact with a contact plate, wherein the contact plate on a base body of the carrier plate rests and has a socket in the middle that can be connected to the shaft is.

Eine derartige Einrichtung wird beispielsweise zum galvanoplastischen Herstellen von Preßwerkzeugen oder von Formen, insbesondere aus Nickel, verwendet. Diese Preßwerkzeuge werden beim Formpressen oder Spritzgießen von Platten, beispielsweise von Compactdiscplatten (sogenannten CD's), Laser-Vision-Platten und anderen informationstragenden Platten verwendet. Die vorgenannten Formen, zu denen Urformen wie der sogenannte "Glasmaster" sowie Abformungen vom Glasmaster gehören, sind Zwischenformen zum Herstellen der Preßwerkzeuge. Die Formen tragen auf ihren Oberflächen Informationen in Reliefform. Die Oberflächenstruktur wird durch galvanoplastische Abformung auf das Preßwerkzeug übertragen. Die in dieser Oberflächenstruktur enthaltenen Informationen werden durch den Einsatz des Preßwerkzeugs beim Spritzgießen oder Formpressen auf der Oberfläche eines Plastikwerkstoffs eingeprägt. Bei der optischen Platte, zu der auch die Compactdisc gehört, moduliert die Reliefstruktur das Licht eines Laserstrahls, so daß die auf der Oberfläche des Plastikkörpers vorhandenen Informationen ausgelesen werden können.Such a device is used, for example, for galvanoplastic Manufacture of pressing tools or molds, especially made of nickel. These press tools will be in compression molding or injection molding of plates, for example of compact discs (so-called CD's), laser vision discs and other information-bearing plates. The aforementioned forms, to which archetypes like the so-called "glass masters" as well as impressions from the glass master belong, are intermediate forms for the production of the pressing tools. The shapes carry information in relief on their surfaces. The surface structure is made by galvanoplastic Transfer the impression to the press tool. The one in this Information contained in surface structure is provided by the use of the press tool in injection molding or compression molding embossed on the surface of a plastic material. The optical disc, which also includes the compact disc heard, the relief structure modulates the light of a laser beam, so that on the surface of the plastic body existing information can be read out.

Bei der Herstellung der Preßwerkzeuge bzw. der Formen wird eine Metallschicht, im allgemeinen eine Nickelschicht, auf einem Träger, entweder einem isolierenden Träger mit einer dünnen elektrisch leitfähigen Schicht, beispielsweise aus Glas, oder einem metallischen Träger, beispielsweise aus Nikkel, abgeschieden, wobei die jeweilige Trägeroberfläche die reliefartige Struktur hat, welche die auszulesenden Informationen enthält. Die kleinste Informationseinheit, das sogenannte "Pit" hat eine Ortswellenlänge im Mikrometerbereich, wobei der Spurabstand zwischen benachbarten Informationsspuren ebenfalls im Mikrometerbereich liegt. Da die Trägeroberfläche mehrere Milliarden von Informationseinheiten enthalten kann und die zugehörigen feinen Strukturen im Mikrometerbereich auf die Metallschicht zu übertragen sind, werden an den Metallabscheidungsprozeß höchste Anforderungen gestellt. So soll die abgeschiedene Metallschicht sehr feinkörnig und spannungsfrei sein; es soll eine relativ große Dicke der abgeschiedenen Schicht erreicht werden, z.B. zum Herstellen von Compactdiscs soll das durch Metallabscheidung hergestellte Preßwerkzeug eine Dicke von 295 µm ± 5 µm haben; außerdem soll der Abscheidungsvorgang mit hoher Geschwindigkeit ablaufen. Weiterhin soll die Einrichtung zur galvanischen Abscheidung eine.kleine Baugröße haben und leicht bedienbar sein. Ein wichtiges Erfordernis bei der Herstellung galvanoplastischer Metallschichten auf einem Träger ist die Gleichmäßigkeit der Schichtdicke. Sie darf über die gesamte Fläche des Trägers nur innerhalb geringer Grenzen schwanken. Werden diese Grenzen überschritten, so leidet die Produktqualität der mit dieser Metallschicht hergestellten optischen Platten.In the manufacture of the pressing tools or the molds a metal layer, generally a nickel layer a carrier, either an insulating carrier with a thin electrically conductive layer, for example Glass, or a metallic support, for example made of Nikkel, deposited, the respective carrier surface has a relief-like structure that contains the information to be read contains. The smallest unit of information, the so-called "Pit" has a local wavelength in the micrometer range, where the track spacing between adjacent information tracks is also in the micrometer range. Because the support surface contain several billion pieces of information can and the associated fine structures in the micrometer range are to be transferred to the metal layer, to the Metal deposition process made the highest demands. So the deposited metal layer should be very fine-grained and be stress-free; it is said to be a relatively large thickness of the deposited Layer can be reached, e.g. for making Compact discs are said to be those made by metal deposition Press tool have a thickness of 295 µm ± 5 µm; Moreover the deposition process should run at high speed. Furthermore, the device for galvanic deposition have a small size and are easy to use. An important requirement in the manufacture of galvanoplastic Metal layers on a support is uniformity the layer thickness. It may cover the entire area of the Fluctuate only within small limits. Become if these limits are exceeded, the product quality suffers of the optical disks made with this metal layer.

Die Schichtdickenschwankung der abgeschiedenen Metallschicht ist abhängig von der Verteilung der elektrischen Stromlinien zwischen Anode und dem kathodisch geschalteten Träger. Die Stromzuführung erfolgt kathodenseitig üblicherweise über die Welle des Trägerhalters, der den Träger auf einem Trägerteller hält. Die Welle ist mit einer äußeren Isolierschicht versehen, um sie gegenüber dem elektrisch leitenden Elektrolyten zu isolieren. Dadurch soll erreicht werden, daß die Metallionen ausschließlich auf der Trägeroberfläche abgeschieden werden. Um verschiedene Träger beschichten zu können, muß der Trägerteller von der Welle gelöst werden. Bei herkömmlichen Trägerhaltern wird bei häufigem Gebrauch die Abdichtung zwischen Welle und Trägerhalter undicht. In einem solchen Fall kann Elektrolytflüssigkeit an Stellen gelangen, die elektrisch leitend mit Kathodenpotential verbunden sind. An solchen Stellen bildet sich infolge des Galvanoprozesses ein Metallniederschlag, der als Wildwuchs bezeichnet wird. Dieser Wildwuchs stört einerseits die Stromlinienverteilung zwischen Anode und Kathode. Andererseits behindert dieser Wildwuchs das Lösen des Trägertellers von der Welle und reduziert auch die Schichtdicke auf der Trägeroberfläche.The layer thickness variation of the deposited metal layer depends on the distribution of the electrical current lines between the anode and the cathodically connected carrier. The Power is usually supplied on the cathode side via the Shaft of the carrier holder, the carrier on a carrier plate holds. The shaft is provided with an outer insulating layer, to them compared to the electrically conductive electrolyte isolate. This is to ensure that the metal ions only be deposited on the carrier surface. In order to be able to coat different substrates, the Carrier plates can be detached from the shaft. With conventional With frequent use, the support bracket becomes the seal between Leaking shaft and support bracket. In such a case can get electrolyte fluid in places that are electrical are conductively connected to cathode potential. On such Spots form as a result of the galvanic process, which is called wild growth. This Wild growth interferes with the streamline distribution between Anode and cathode. On the other hand, this wild growth hinders loosening the carrier plate from the shaft and also reduces the layer thickness on the carrier surface.

Es ist Aufgabe der Erfindung, eine Einrichtung zur galvanischen Abscheidung einer Metallschicht anzugeben, deren Dickenschwankung über die Fläche des Trägers gering ist und deren Trägerhalter weitgehend frei von Wildwuchs gehalten wird und leicht demontierbar ist.It is an object of the invention to provide a device for galvanic Specify deposition of a metal layer whose Thickness fluctuation over the area of the carrier is small and the carrier holder kept largely free from wild growth and is easy to disassemble.

Diese Aufgabe wird für eine Einrichtung eingangs genannter Art dadurch gelöst, daß im Grundkörper um die Buchse ein Befestigungsabschnitt vorgesehen ist, in welchem ein Rohrabschnitt dichtend und lösbar eingesetzt ist, und daß auf der Welle ein längs ihrer Achse verschiebbarer Überwurfring angeordnet ist, der mit dem Rohrabschnitt lösbar verbindbar ist und diesen sowie die Welle gegen den Eintritt des Elektrolyten abdichtet.This task is mentioned for a facility at the beginning Art solved in that a fastening section in the base body around the socket is provided in which a pipe section is used sealingly and releasably, and that on the Shaft arranged a union ring which is displaceable along its axis is that is releasably connectable to the pipe section and this as well as the wave against the entry of the electrolyte seals.

Durch den Aufbau gemäß der Erfindung ist es ausgeschlossen, daß Elektrolytflüssigkeit an der kritischen Stelle zwischen Buchse und Welle gelangt. Die Ausbildung von Wildwuchs beim Betrieb der Einrichtung ist dadurch nahezu ausgeschlossen. Ein Lösen der Verbindung zwischen Trägerteller und Welle, um z.B. einen neuen Träger aufzuspannen, ist jedoch problemlos möglich. Da beim gewählten Aufbau ausreichende Isolierstrecken zwischen der negatives Potential tragenden Welle und dem positives Potential aufweisenden Elektrolyten vorhanden sind, wird ein Stromfluß und damit ein Niederschlag von Metall an unerwünschten Stellen des Trägerhalters vermieden.The structure according to the invention precludes that electrolyte fluid at the critical point between Bush and shaft arrives. The training of wild growth at Operation of the facility is almost impossible. A loosening of the connection between the carrier plate and shaft in order e.g. However, it is no problem to mount a new beam possible. As there are sufficient insulation gaps in the chosen construction between the wave carrying the negative potential and the positive potential of the electrolyte are a current flow and thus a precipitation of metal avoided at unwanted points on the carrier holder.

Gemäß einem Ausführungsbeispiel der Erfindung enthält der Haltering Halbschalen, die durch eine Verbindungsvorrichtung lösbar miteinander verbunden sind. Vorzugsweise ist eine der Halbschalen mit dem Grundkörper des Trägertellers fest verbunden. Auf diese Weise sind die Halbschalen von einer Bedienperson mit Gummihandschuhen sicher zu greifen und können kaum verloren gehen.According to an embodiment of the invention, the Retaining ring half shells by a connecting device are releasably connected. Preferably one of the Half-shells firmly connected to the base plate of the carrier plate. In this way, the half shells are from one operator with rubber gloves and can grip safely hardly ever get lost.

Insbesondere, wenn gemäß einem Ausführungsbeispiel die Verbindungsvorrichtung zwei Spannhaken umfaßt, die mit dem Grundkörper fest verbunden sind, wobei die Spannhaken in Zapfen oder Ausnehmungen an der lösbaren Halbschale eingreifen, ist ein Herunterfallen von Spannelementen völlig ausgeschlossen.In particular if, according to one embodiment, the connecting device comprises two tensioning hooks, which with the Base body are firmly connected, the tensioning hooks in pins or engage recesses on the detachable half-shell, falling of tensioning elements is completely impossible.

Wie weiter vorne erwähnt, ist es erforderlich, von einem Glasmaster, auf dessen Oberfläche die Pit-Struktur eingeprägt ist, metallische Abzüge, sogenannte "Väter" zu erzeugen. Gemäß einem Ausführungsbeispiel der Erfindung sind bei einem Träger aus Isoliermaterial, vorzugsweise aus Glas, auf der Kontaktplatte isolierende Elemente, vorzugsweise drei, in Form von Kreissektoren angeordnet, die durch Schrauben, vorzugsweise durch eine Schraube je Segment, mit dem Grundkörper verbunden sind. Diese Segmente lassen sich auf einfache Weise wieder lösen, so daß der umlaufende Kontaktring befreit werden kann. Auf diese Weise kann eine kostengünstige Wartung des Trägerhalters erreicht werden.As mentioned earlier, it is required by one Glass master with the pit structure embossed on its surface is to produce metallic prints, so-called "fathers". According to an embodiment of the invention are in a Carrier made of insulating material, preferably glass, on the Contact plate insulating elements, preferably three, in Form of circular sectors arranged by screws, preferably by one screw per segment, with the base body are connected. These segments can be easily Loosen again so that the surrounding contact ring frees can be. In this way, inexpensive maintenance of the carrier holder can be reached.

Weiterhin ist bei einem Ausführungsbeispiel einer Trägerhalterung für einen Glasmaster die Kontaktplatte an ihrer Umfangsfläche mit einem Kontaktring lösbar elektrisch und mechanisch verbunden, wobei auf dem Kontaktring eine ringförmige Kontaktscheibe aufliegt, welche den elektrischen Kontakt zwischen Kontaktring und der dünnen Metallschicht auf dem isolierenden Träger herstellt. Bei dieser Art der elektrischen Kontaktführung ist ein sicherer Stromfluß zur Oberfläche des kathodisch geschalteten Trägers auch bei hohen Stromstärken sichergestellt.Furthermore, in one embodiment is a support bracket for a glass master, the contact plate on its peripheral surface electrically and mechanically detachable with a contact ring connected, with an annular on the contact ring Contact disc rests, which is the electrical contact between the contact ring and the thin metal layer on the insulating carrier. With this type of electrical Contact guidance is a safe current flow to the surface of the cathodically connected carrier even at high currents ensured.

Im folgenden werden Ausführungsbeispiele der Erfindung unter Bezugnahme auf die Zeichnungen näher erläutert. Darin zeigen:

Fig. 1
schematisch ein wichtiges Anwendungsgebiet der Erfindung, bei dem Formen und Preßwerkzeuge für die Compactdisc-Herstellung durch Metallabscheidung erzeugt werden,
Fig. 2
eine Ansicht einer Galvanikanlage, in welche eine Abscheidungszelle einbezogen ist,
Fig. 3
eine schematische Ansicht der Abscheidungszelle,
Fig. 4
einen Querschnitt durch den Trägerteller und der Verbindung der Kathodenwelle mit dem Trägerteller einer Trägerhalterung zum Herstellen von Preßwerkzeugen,
Fig. 5
Ansichten der Kontaktplatte bei abgenommenem Wechselring,
Fig. 6
Ansichten des Wechselrings, und
Fig. 7
einen Querschnitt durch den Trägerteller für die Aufnahme eines Trägers aus Glas.
Exemplary embodiments of the invention are explained in more detail below with reference to the drawings. In it show:
Fig. 1
schematically an important field of application of the invention, in which molds and pressing tools for compact disc production are produced by metal deposition,
Fig. 2
1 shows a view of a galvanic plant, in which a deposition cell is included,
Fig. 3
a schematic view of the deposition cell,
Fig. 4
2 shows a cross section through the carrier plate and the connection of the cathode shaft to the carrier plate of a carrier holder for producing pressing tools,
Fig. 5
Views of the contact plate with the interchangeable ring removed,
Fig. 6
Views of the change ring, and
Fig. 7
a cross section through the support plate for receiving a support made of glass.

Figur 1 zeigt schematisch die Herstellung einer Compactdisc für Audioanwendungen. Beim Herstellprozeß werden Formen verwendet, deren Metallschicht durch galvanische Abscheidung in einer Einrichtung nach der Erfindung erzeugt werden. Die Qualität dieser Metallschicht ist entscheidend für die Qualität des Fertigproduktes, d.h. für die Wiedergabequalität der auf der Compactdisc gespeicherten Audiosignale.Figure 1 shows schematically the production of a compact disc for audio applications. Molds are used in the manufacturing process whose metal layer by galvanic deposition in a device according to the invention are generated. The quality this metal layer is crucial for quality of the finished product, i.e. for the playback quality of the on audio signals stored on the compact disc.

Die Herstellungsschritte lassen sich grob in vier Gruppen A, B, C, D einteilen, von denen A die Herstellung des Glasmasters, B die Herstellung des Preßwerkzeuges, C das Pressen und D die Endbearbeitung betreffen. Ausgangspunkt für die Herstellung des Glasmasters ist das Erzeugen eines Master-Magnetbandes (Schritt 10), wobei auf einem Magnetband Audioinformationen mit höchster Präzision digital gespeichert werden. Zur Herstellung des Glasmasters (Herstellschritte Gruppe A) wird auf einer polierten Glasscheibe ein dünner Fotoresist aufgetragen (Schritte 12 und 14). Im nachfolgenden Schritt 16 wird der Fotoresist durch einen gebündelten Laserstrahl belichtet, wobei der Laserstrahl durch die digitalen Informationen auf dem Master-Magnetband moduliert wird. Im nachfolgenden Entwicklungsschritt 18 werden die belichteten Stellen des Fotoresists entfernt - es verbleibt eine reliefartige Fotoresiststruktur auf der Glasscheibe zurück. Diese Struktur enthält in Form von Pits die vom Master-Magnetband übernommenen digitalen Informationen. Im anschließenden Schritt 20 wird die reliefartige Oberflächenstruktur mit einer dünnen elektrisch leitfähigen Schicht, z.B. einer Nickelschicht überzogen. Als Zwischenprodukt erhält man den sogenannten Glasmaster für die Compactdisc.The manufacturing steps can be roughly divided into four groups A, Classify B, C, D, of which A is the production of the glass master, B the production of the pressing tool, C the pressing and D concern finishing. Starting point for the Production of the glass master is the production of a master magnetic tape (Step 10) with audio information on a magnetic tape stored digitally with the highest precision. For the production of the glass master (production steps group A) is a thin photoresist on a polished glass applied (steps 12 and 14). In the following step 16 the photoresist is exposed by a bundled laser beam, taking the laser beam through the digital information is modulated on the master magnetic tape. In the following Development step 18 becomes the exposed areas of the photoresist removed - a relief-like photoresist structure remains back on the glass pane. This structure contains the pits taken from the master magnetic tape digital information. In the subsequent step 20 the relief-like surface structure with a thin electrically conductive layer, e.g. a nickel layer overdrawn. The so-called intermediate is obtained Glass master for the compact disc.

Die nächste Gruppe B von Herstellschritten betrifft die Erzeugung des Preßwerkzeuges. In Schritt 22 wird in einer galvanischen Einrichtung nach der Erfindung als Metallform der sogenannte "Vater" hergestellt, wobei auf die dünne elektrisch leitende Schicht des Glasmasters eine dicke Nickelschicht, z.B. mit einer Dicke von 500 µm, in einem Galvanoprozeß abgeschieden wird. Der Vater trägt nun eine zum Glasmaster komplementäre Reliefstruktur. Der Vater kann direkt als das Werkzeug zum Herstellen von Compactdiscs verwendet werden. Normalerweise wird in einem weiteren galvanoplastischen Prozeß vom Vater eine als "Mutter" bezeichnete Form aus Nickel erzeugt. Das eigentliche Preßwerkzeug wird dann anschließend in einem weiteren Galvanoprozeß (Schritt 26) als negatives Abbild von der Mutter abgeleitet. Die hierbei entstehende Form wird "Sohn" oder Matrize (englisch "stamper") genannt und dient als Preßwerkzeug für die Massenproduktion. Zu erwähnen ist, daß selbstverständlich mehrere Mütter oder Söhne erzeugt werden können, um in verschiedenen Fabrikationsanlagen zur Compactdiscproduktion eingesetzt zu werden.The next group B of manufacturing steps concerns production of the pressing tool. In step 22, a galvanic Device according to the invention as a metal mold so-called "father" made, being thin on the electrical conductive layer of the glass master a thick nickel layer, e.g. with a thickness of 500 µm, in a galvano process is deposited. The father now carries one to the glass master complementary relief structure. The father can directly used as the tool for making compact discs become. Usually in another galvanoplastic Process from the father a form called "mother" Nickel creates. The actual pressing tool is then subsequently in a further galvano process (step 26) as negative image derived from the mother. The resulting one Form becomes "son" or matrix (English "stamper") called and serves as a press tool for mass production. It should be mentioned that of course several mothers or Sons can be produced to work in various manufacturing plants to be used for compact disc production.

Beim nachfolgenden Pressen (Herstellschritte Gruppe C) wird in einem Spritzgießprozeß oder in einem Formpreßvorgang die auf dem Preßwerkzeug vorhandene Reliefstruktur auf Plastikmaterial übertragen (Schritt 28). Die ursprünglich auf dem Master-Magnetband (Schritt 10) enthaltenen digitalen Informationen sind nun auf dem scheibenförmigen Plastikmaterial als Reliefstruktur oder als sogenannte Pitstruktur enthalten, wobei ein Pit die kleinste Informationseinheit in Form einer Vertiefung in der Oberfläche des Plastikmaterials darstellt.In the subsequent pressing (manufacturing steps group C) in an injection molding process or in a compression molding process Relief structure on plastic material on the pressing tool transferred (step 28). The originally on the master magnetic tape (Step 10) digital information contained are now on the disc-shaped plastic material as Relief structure or included as a so-called pit structure, where a pit is the smallest unit of information in the form of a Represents depression in the surface of the plastic material.

Bei der nachfolgenden Endbearbeitung (Herstellschritte Gruppe D) wird auf die Oberfläche des Plastikmaterials eine dünne Reflexionsschicht aus Aluminium in einem Sputterprozeß aufgetragen. Diese Reflexionsschicht ermöglicht, daß beim Auslesen der Informationen ein Laserabtaststrahl moduliert wird, aus dem die ursprünglichen Audio-Informationen gewonnen werden. Im abschließenden Herstellschritt 32 wird die Compactdisc mit einer transparenten Schutzschicht überzogen, die die Reflexionsschicht vor Beschädigung und Korrosion schützt.In the subsequent finishing (manufacturing steps group D) is a thin on the surface of the plastic material Reflection layer made of aluminum applied in a sputtering process. This reflective layer enables that when reading the information is modulated by a laser scanning beam from which the original audio information is obtained. In the final manufacturing step 32, the compact disc is included a transparent protective layer covering the reflective layer protects against damage and corrosion.

Beim vorliegenden Beispiel wurden die Schritte zum Herstellen einer Audio-Compactdisc (Audio CD) beschrieben. Auf gleiche bzw. ähnliche Weise erfolgt auch die Herstellung von DatenCompactdiscs, Laser-Vision-Platten sowie anderer optischer Platten mit in Pitstruktur aufgezeichneten Informationen.In the present example, the steps to make it an audio compact disc (audio CD). Same thing or similar way, data compact discs are also produced, Laser vision plates as well as other optical ones Disks with information recorded in pit structure.

Die reliefartige Pitstruktur auf der Reflexionsschicht der Compactdisc hat extrem kleine Dimensionen, z.B. beträgt die Breite eines Pits etwa 0,5 µm, die Tiefe etwa 0,1 µm und die Länge variiert von 1 bis 3 µm, wobei der Spurabstand etwa 1,6 µm beträgt. Bei diesen kleinen Strukturen ist es verständlich, daß höchste Anforderungen an die verschiedenen galvanotechnischen Schritte zum Herstellen der verschiedenen Formen gestellt werden, insbesondere auch an die Gleichmäßigkeit der Dicke der Metallschicht über die gesamte Fläche. Eine zu große Dickenschwankung in Verbindung mit dem Spritzprozeß bei der Herstellung der Compactdisc bewirkt eine verschlechterte Entformung und führt zu Problemen beim späteren Aufbringen des Schutzlackes. Außerdem führt eine große Dickenschwankung dazu, daß der optische Abtastsensor bei der schnellen Rotation der Compactdisc die sich auf der Compactdisc ergebenden Höhenschwankungen nicht mehr in einem ausreichenden Maße ausregelt und so ein Informationsverlust auftreten kann. The relief-like pit structure on the reflection layer of the Compactdisc has extremely small dimensions, e.g. is the The width of a pit is about 0.5 µm, the depth is about 0.1 µm and the Length varies from 1 to 3 µm, with the track spacing about 1.6 µm is. With these small structures, it is understandable that the highest demands on the various galvanotechnical Steps to make the different shapes be placed, in particular also on the uniformity of the Thickness of the metal layer over the entire surface. One too large fluctuation in thickness in connection with the spraying process the manufacture of the compact disc causes a deterioration De-molding and leads to problems during later application of the protective lacquer. In addition, there is a large fluctuation in thickness cause the optical pickup sensor to rotate rapidly the compact disc the resulting on the compact disc Height fluctuations are no longer sufficiently regulated and so a loss of information can occur.

Figur 2 zeigt eine Ansicht einer Galvanikanlage 40, in welche eine Abscheidungszelle 42 einbezogen ist. In dieser Abscheidungszelle 42 werden die verschiedenen Formen, wie Väter, Mütter und Matrizen (Söhne), durch Abscheidung von Nickelmetall hergestellt. Im Fußteil der Galvanikanlage 40 befindet sich eine Reinigungsanlage 44 zum Reinigen und Filtern des Elektrolyten. Im Kopfteil 46 sind elektrische Steuer- und Leistungseinheiten zum Steuern des Galvanikprozesses untergebracht. Die Gleichrichter zum Erzeugen des erforderlichen hohen Gleichstroms sind rechnergesteuert. Bauteile, die in Berührung mit dem Elektrolyten stehen, sind vorzugsweise aus Polypropylen-Kunststoff oder Titan. Oberhalb der Abscheidungszelle 42 ist ein Reinraumfilter 48 angeordnet. Wie in der Figur 2 zu erkennen ist, hat die Abscheidungszelle 42 einen Behälter 50 mit zwei Außenwänden, die im wesentlichen schräg gegen die Vertikale geneigt sind. Die weiteren, nicht dargestellten Außenwände verlaufen vertikal. Auf einem Deckel 52 des Behälters 50 ist eine Antriebsvorrichtung 54 angeordnet, die weiter unten noch näher beschrieben wird. An den Deckel 52 schließt sich, getrennt durch eine Trennfuge 53, eine abnehmbare Abdeckplatte 51 an. Innerhalb des Behälters 50 befindet sich ein Anodenbehälter 56 aus Titan, der bei geöffneter Abdeckplatte 51 für eine Bedienperson zugänglich ist.FIG. 2 shows a view of an electroplating system 40, in which a deposition cell 42 is included. In this separation cell 42 the different forms, like fathers, Mothers and matrices (sons), by depositing nickel metal manufactured. Located in the foot part of the electroplating system 40 a cleaning system 44 for cleaning and filtering the Electrolytes. In the head part 46 are electrical control and Power units for controlling the electroplating process housed. The rectifiers to generate the required high DC are computer controlled. Components in contact stand with the electrolyte are preferably off Polypropylene plastic or titanium. Above the separation cell 42 a clean room filter 48 is arranged. As in 2, the deposition cell 42 has one Container 50 with two outer walls, essentially are inclined at an angle to the vertical. The others, not outer walls shown are vertical. On a lid 52 of the container 50, a drive device 54 is arranged, which will be described in more detail below. To the Lid 52 closes, separated by a parting line 53, a removable cover plate 51. Inside the container 50 is an anode container 56 made of titanium, which when open Cover plate 51 accessible to an operator is.

Figur 3 zeigt eine schematische Ansicht der Abscheidungszelle 42 nach der Erfindung. Innerhalb des mit Elektrolyten 58 gefüllten Behälters 50, dessen beide Außenwände 60, 62 unter 45° zur Vertikalen geneigt sind, ist parallel zur Außenwand 62 der Anodenbehälter 56 angeordnet, der mit Nickelmaterial in Form von Stückchen, auch Pellets oder Flats genannt, gefüllt ist. An seiner Oberseite trägt der Anodenbehälter 56 eine Federleiste 66, die in elektrischem Kontakt mit einer Anodenleitung 68 steht, welche einen kreisförmigen Querschnitt hat. Die Federleiste 66 kann leicht von der Anodenleitung 68 gelöst werden, so daß der Anodenbehälter 56 von einer Bedienperson aus dem Behälter 50 herausgenommen werden kann.Figure 3 shows a schematic view of the deposition cell 42 according to the invention. Inside the one filled with electrolyte 58 Container 50, the two outer walls 60, 62 under 45 ° to the vertical is parallel to the outer wall 62 the anode container 56 is arranged, the nickel material in the form of pieces, also called pellets or flats is. The anode container 56 carries on its upper side a female connector 66 which is in electrical contact with a Anode line 68 has a circular cross section Has. The female connector 66 can be easily removed from the anode lead 68 can be solved so that the anode container 56 of an operator can be removed from the container 50 can.

Der Deckel 52 ist durch eine Schwenkvorrichtung 70 mit der Basis der Galvanoanlage 40 der einem Randteil des Behälters 50 verbunden. Der Deckel 52 kann somit in Richtung des Pfeils 72 angehoben werden, um das Innere des Behälters 50 zugänglich zu machen. Auf dem Deckel 52 ist eine Verstellvorrichtung 74 montiert, die eine Winkelplatte 76 und eine mit ihr durch Schrauben verbundene Stellplatte 78 hat. Die Stellplatte 78 trägt die Antriebsvorrichtung 54, die mit einem Trägerhalter 83 verbunden ist. Die Antriebsvorrichtung enthält einen Motor 82, der über ein Getriebe eine Antriebswelle 84 antreibt, an deren Ende ein Trägerteller 86 befestigt ist. Auf diesem Trägerteller 86 ist der Träger 87 aufgespannt, auf dem Nickel abgeschieden wird. Durch Verstellen der Schrauben der Verstellvorrichtung 74 kann der Trägerteller 86 und damit der Träger 87 parallel zur ihm gegenüberliegenden planen Austrittsfläche 89 für Nickelionen des Anodenbehälters 56 ausgerichtet bzw. der Abstand zwischen Träger 87 und Anodenbehälter 56 kann fein reguliert werden.The lid 52 is connected to the by a swivel device 70 Base of the electroplating system 40 of an edge part of the container 50 connected. The lid 52 can thus in the direction of the arrow 72 are raised to make the interior of the container 50 accessible close. On the cover 52 there is an adjustment device 74 mounted, an angle plate 76 and one with it has a plate 78 connected by screws. The shelf 78 carries the drive device 54, which with a Carrier holder 83 is connected. The drive device contains a motor 82 which drives a drive shaft via a transmission 84 drives, at the end of a support plate 86 is attached. The carrier 87 is clamped onto this carrier plate 86 the nickel is deposited. By adjusting the screws the adjusting device 74 can the carrier plate 86 and thus the carrier 87 parallel to the flat exit surface opposite it 89 aligned for nickel ions of the anode container 56 or the distance between the carrier 87 and the anode container 56 can be finely regulated.

Zwischen dem Trägerteller 86 und dem Anodenbehälter 56 ist eine ortsfest mit der Außenwand 60 des Behälters 50 verbundene Trennwand 88 mit einem Filterelement 85 angeordnet. Dieses Filterelement 85 verhindert den Eintritt von Teilchen oder Schlamm aus Anodenmaterial in die Öffnung einer ihr gegenüberliegenden Leitblende 90. Unterhalb der Öffnung dieser Leitblende 90 ist eine Einspritzdüse 92 angeordnet, die den gereinigten Elektrolyten 58 in den Raum zwischen Leitblende 90 und dem auf Spannteller 86 aufgespannten Träger 87 in Richtung auf dessen Zentrum einspritzt. Die Zuführung des Elektrolyten 58 erfolgt durch ein angedeutetes Zuführrohr 94. Die erforderliche Abführung des Elektrolyten 58 ist in Figur 3 aus Übersichtsgründen nicht dargestellt. Is between the carrier plate 86 and the anode container 56 a fixedly connected to the outer wall 60 of the container 50 Partition 88 arranged with a filter element 85. This Filter element 85 prevents the entry of particles or mud of anode material into the opening of an opposite one Baffle 90. Below the opening of this Baffle 90, an injection nozzle 92 is arranged, the cleaned electrolyte 58 in the space between the baffle 90 and the carrier 87 clamped on clamping plate 86 Injected towards the center. The feeding of the Electrolyte 58 takes place through an indicated feed pipe 94. The required removal of the electrolyte 58 is shown in FIG 3 not shown for reasons of clarity.

Figur 4 zeigt ein Teil des Trägerhalters 83 im Querschnitt. Der Trägerhalter 83 dient zum Herstellen von Preßwerkzeugen aus Nickel. Dieser Trägerhalter 83 hat einen im wesentlichen kreisförmigen Trägerteller 86 und eine Anschlußvorrichtung 100 zum Verbinden des Trägertellers 86 mit der Antriebswelle 84, welche kathodenseitig den Strom führt. Diese Antriebswelle 84 ist in Figur 4 nicht zu sehen; sie ragt mit ihrem Ende in den Raum 84a. Der Trägerteller 86 hat einen Grundkörper 102, der mittig eine zylinderförmige Aussparung 104 mit einem Innengewinde 106 hat.Figure 4 shows a part of the carrier holder 83 in cross section. The carrier holder 83 is used to manufacture pressing tools made of nickel. This carrier holder 83 essentially has one circular carrier plate 86 and a connecting device 100 for connecting the carrier plate 86 to the drive shaft 84, which carries the current on the cathode side. This drive shaft 84 cannot be seen in FIG. 4; she sticks out with her End in room 84a. The carrier plate 86 has a basic body 102 with a cylindrical recess 104 in the middle has an internal thread 106.

In dem Grundkörper 102 ist eine Kontaktplatte 108 eingelassen, welche eine Vertiefung 110 hat. Die Kontaktplatte 108 ist aus massivem Titan gefertigt und hat einen Wechselring 107, dessen Rand 107a auf einem in einer Nut 107b angeordneten Dichtungsring 107c ruht. Der Aufbau der Kontaktplatte 108 und des Wechselrings 107 wird weiter unten in Verbindung mit den Figuren 5 und 6 weiter erläutert. Die Kontaktplatte 108 ist mittels mehrerer Verbindungsvorrichtungen 112 (nur eine ist in Figur 4 zu sehen) an ihrem Rand mit dem Grundkörper 102 verbunden. Jede Verbindungsvorrichtung 112 enthält eine Gewindebuchse 114, welche an der Kontaktplatte 108 festgeschweißt ist. In dieser Gewindebuchse 114 ist eine Schraube 116 aus Polypropylen geschraubt, welche sich am Grundkörper 102 über einen O-Ring 118 abstützt.A contact plate 108 is located in the base body 102 embedded, which has a recess 110. The Contact plate 108 is made of solid titanium and has an interchangeable ring 107, the edge of which 107a on one in a Groove 107b arranged sealing ring 107c rests. The structure of the Contact plate 108 and the change ring 107 is below explained in connection with Figures 5 and 6. The Contact plate 108 is by means of several connection devices 112 (only one can be seen in FIG. 4) on her Edge connected to the base body 102. Any connection device 112 contains a threaded bush 114, which on the Contact plate 108 is welded. In this threaded bush 114 is a screw 116 made of polypropylene, which is supported on the base body 102 via an O-ring 118.

Wie in Figur 4 zu erkennen ist, ist die Kontaktplatte 108 mit ihrem Wechselring 107 völlig in den Grundkörper 102 eingelassen und durch eine ringförmige Dichtung 120 abgedichtet. Durch dieses Einlassen in den Grundkörper sowie die Dichtungen 107c, 120 und 118 gelangt keine Elektrolytflüssigkeit in die Grenzschicht zwischen Grundkörper 102 und Kontaktplatte 108, so daß sich in diesem Bereich kein metallischer Wildwuchs ausbilden kann. Konzentrisch zur Kontaktplatte 108 ist außerhalb und nahe ihres Umfangs weiterhin eine ringförmige Lippendichtung 122 angeordnet. Diese Lippendichtung 122 liegt beim Betrieb dichtend an der Unterseite des Trägers 87 (in Figur 4 nicht dargestellt) an und verhindert weitgehend den Eintritt von Elektrolytflüssigkeit. Die Lippendichtung 122 ist selbstfixierend in einer ringförmigen Nut 124 eingelassen. Der Träger 87 ist an seiner zur anodenseitigen Seite weisenden Oberfläche durch einen Haltering 126 gehalten und wird unter leichtem Druck gegen die Lippendichtung 122 sowie die Kontaktplatte 108 gedrückt. Im vorliegenden Beispiel enthält der Haltering 126 zwei Halbschalen, von denen eine Halbschale 128 in Figur 4 dargestellt ist. Die Halbschale 128 hat einen zur Mittelachse M vorstehenden Rand 130, der an der Schulter einer ringförmigen Ausnehmung 132 im Grundkörper 102 anliegt. Der obere Rand 134 ist abgeschrägt. An seiner schrägen Fläche liegt der Umfang des Trägers 87 (in Figur 4 nicht dargestellt) an. Die Halbschale 128 ist mit dem Grundkörper 102 fest verbunden. Die andere (nicht dargestellte) Halbschale ist mit der ortsfesten Halbschale 128 verbunden.As can be seen in Figure 4, the contact plate 108 is with their change ring 107 completely in the base body 102 embedded and through an annular seal 120 sealed. By letting it into the body as well the seals 107c, 120 and 118 do not get any Electrolyte liquid in the interface between Base body 102 and contact plate 108, so that in this Area no metallic wild growth can form. Concentric to contact plate 108 is outside and close to its circumference furthermore an annular lip seal 122 is arranged. This lip seal 122 is sealing during operation the underside of the carrier 87 (not shown in FIG. 4) and largely prevents the entry of Electrolyte fluid. The lip seal is 122 embedded in a self-locking manner in an annular groove 124. The carrier 87 is on its anode side facing surface held by a retaining ring 126 and is under slight pressure against the lip seal 122 as well the contact plate 108 pressed. In the present example the retaining ring 126 contains two half shells, one of which Half shell 128 is shown in Figure 4. The half-shell 128 has an edge 130 protruding from the central axis M, which at the Shoulder of an annular recess 132 in the base body 102 is present. The upper edge 134 is chamfered. At his inclined surface lies the circumference of the carrier 87 (in FIG. 4 not shown). The half shell 128 is with the Base body 102 firmly connected. The other (not shown) Half-shell is 128 with the fixed half-shell connected.

Die beiden Halbschalen werden mittels Spannhaken 136 (nur ein Spannhaken 136 ist in Figur 4 dargestellt) miteinander verbunden. Jeder Spannhaken 136 ist an der ortsfesten Halbschale 128 befestigt und greift in entsprechende Zapfen oder Ausnehmungen auf der gegenüberliegenden Halbschale ein. Jede Halbschale hat eine Lippendichtung 138, wobei diese Lippendichtungen 138 beider Halbschalen im geschlossenen Zustand aneinanderstoßen. Auf diese Weise wird ein Eindringen von Elektrolytflüssigkeit in das Innere des Trägertellers 86 reduziert.The two half-shells are attached using a hook 136 (only one Clamping hook 136 is shown in FIG. 4). Each tensioning hook 136 is on the stationary half shell 128 fastened and engages in corresponding pins or Recesses on the opposite half-shell. Each Half-shell has a lip seal 138, this Lip seals 138 of both half shells in the closed Collide condition. This way an intrusion of electrolyte liquid into the interior of the carrier plate 86 reduced.

Im folgenden wird die Anschlußvorrichtung 100 näher erläutert. An die Kontaktplatte 108 ist eine Gewindebuchse 142 geschweißt. Die Gewindebuchse 142 hat ein Innengewinde 144, in das das Außengewinde einer Welle 84 (nicht dargestellt) greift und so einen festen mechanischen und elektrischen Kontakt mit der Kontaktplatte 108 herstellt. Die zylindrische Aussparung 104 und das Innengewinde 106 bilden einen Befestigungsabschnitt um die Gewindebuchse 142. Ein Rohrteil 146 mit einem Außengewinde 147 greift in das Innengewinde 106 ein und stützt sich über einen O-Ring 148 am Grundkörper 102 ab. Das Rohrteil 146 hat an dem der Kontaktplatte 108 gegenüberliegenden Ende ein Außengewinde 150, welches mit dem Innengewinde eines Überwurfrings 152 verbunden ist. Der Überwurfring 152 ist längs der Achse M auf der Welle 84 verschiebbar. Ein O-Ring 154 ist zwischen der Stirnfläche 156 des Rohrteils 146 und einer schrägen Fläche 158 des Überwurfrings 152 angeordnet. Beim Verschrauben des Rohrteils 146 mit dem Überwurfring 152 wird der O-Ring 154 gegen die Oberfläche der Welle 84 gedrückt, so daß keine Elektrolytflüssigkeit in den Innenraum zwischen Rohrteil 146 und Welle 84 gelangen kann. Zu bemerken ist noch, daß die Welle 84 mit einer Isolierschicht beschichtet ist, um ihre Funktion als isolierter elektrischer Leiter im Elektrolytbad erfüllen zu können.The connection device 100 is explained in more detail below. A threaded bushing 142 is welded to the contact plate 108. The threaded bushing 142 has an internal thread 144, in that the external thread of a shaft 84 (not shown) engages and thus a firm mechanical and electrical contact with the contact plate 108. The cylindrical Recess 104 and the internal thread 106 form a fastening section around the threaded bushing 142. A tube part 146 with an external thread 147 engages in the internal thread 106 and is supported on the base body 102 via an O-ring 148. The Pipe part 146 has on the opposite of the contact plate 108 End an external thread 150, which with the internal thread a coupling ring 152 is connected. The throwing ring 152 is displaceable along the axis M on the shaft 84. A O-ring 154 is between the end face 156 of the tubular part 146 and an inclined surface 158 of the coupling ring 152 arranged. When screwing the pipe part 146 with the Ring 152 is the O-ring 154 against the surface of the Shaft 84 pressed so that no electrolyte liquid in the Interior space can reach between pipe part 146 and shaft 84. It should also be noted that the shaft 84 with a Insulating layer is coated to function as insulated electrical conductor in the electrolyte bath to meet can.

Die Figuren 5 und 6 zeigen den Aufbau der Kontaktplatte 108 und des Wechselrings 107. Die Gewindebuchsen 142 und 114 sind mit der Kontaktplatte 108 verschweißt. Die Kontaktplatte 108 hat eine ringförmige Ausnehmung 108a zur bündigen Aufnahme des Wechselringes 107. Zur Befestigung dieses Wechselringes 107 dienen vier Langlöcher 108b.FIGS. 5 and 6 show the structure of the contact plate 108 and the change ring 107. The threaded bushings 142 and 114 are welded to the contact plate 108. The contact plate 108 has an annular recess 108a for flush reception of the change ring 107. For fastening this change ring 107 serve four elongated holes 108b.

Figur 6 zeigt Ansichten des Wechselrings 107. Er enthält vier Verbindungselemente 107d, die jeweils auf der Unterseite einen Kopf 107e auf einem Halsstück 107f haben. Ferner enthält der Wechselring 107 zwei Ausnehmungen 107g. Zum Befestigen des Wechselrings 107 auf der Kontaktplatte 108 (vgl. Figur 5) werden die Verbindungselemente 107d mit ihren Köpfen 107e durch die Langlöcher 108b gesteckt. Anschließend wird der Wechselring 107 relativ zur Kontaktplatte 108 verdreht, wobei durch schräg verlaufende Rampen (nicht dargestellt) oder durch andere Klemmittel in den Langlöchern 108b ein Reibungsschluß hergestellt wird, durch den der Wechselring 107 mit der Kontaktplatte 108 fest verbunden wird. Zum Lösen des Wechselrings 107 wird mittels eines Werkzeugs, das in die Ausnehmungen 107g greift, der Wechselring 107 relativ zur Kontaktplatte 108 gedreht und dann abgenommen.FIG. 6 shows views of the interchangeable ring 107. It contains four Connecting elements 107d, each on the underside have a head 107e on a neck piece 107f. Further the change ring 107 contains two recesses 107g. To the Fasten the change ring 107 on the contact plate 108 (cf. FIG. 5), the connecting elements 107d with their Heads 107e inserted through the elongated holes 108b. Subsequently the change ring 107 becomes relative to the contact plate 108 twisted, with inclined ramps (not shown) or by other clamping means in the elongated holes 108b a frictional connection is established, through which the Change ring 107 firmly connected to the contact plate 108 becomes. To release the change ring 107 by means of a Tool that engages in the recesses 107g, the Change ring 107 rotated relative to the contact plate 108 and then taken off.

Durch die Verwendung des Wechselrings 107 in Verbindung mit der Kontaktplatte 108 wird insgesamt die Lebensdauer der Kontaktplatte 108 verlängert, da sich Wildwuchs bevorzugt am Wechselring 107 ausbildet, der bei hohem Verschleiß gegen einen neuen Wechselring ausgetauscht wird.By using the change ring 107 in conjunction with the contact plate 108 is the total life of the Contact plate 108 extended because wild growth prefers on Exchangeable ring 107, which against high wear a new change ring is exchanged.

Figur 7 zeigt einen Querschnitt durch ein weiteres Ausführungsbeispiel des Trägerhalters 83 für die galvanische Abscheidung von Nickel auf einem Glasmaster, dessen Oberfläche die Pit-Struktur trägt. Wie erwähnt, ist auf dieser Oberfläche eine dünne Metallschicht durch Sputtern abgeschieden, um eine für den Galvanoprozeß erforderliche Elektrodenfläche zu schaffen. Die beim Ausführungsbeispiel nach Figur 7 mit dem Beispiel nach Figur 4 übereinstimmenden Elemente sind gleich bezeichnet und werden im folgenden nicht nochmals erläutert.Figure 7 shows a cross section through a further embodiment the support holder 83 for the galvanic deposition of nickel on a glass master, the surface of which carries the pit structure. As mentioned, is on this surface a thin layer of metal is deposited by sputtering to an electrode area required for the electroplating process create. The in the embodiment of Figure 7 with the Example according to Figure 4 matching elements are the same referred to and will not be explained again below.

Auf der Kontaktplatte 108 sind drei isolierende Elemente in Form von Kreissektoren 160a, 160b, 160c angeordnet, wie sich aus der links in Figur 5 dargestellten schematischen Draufsicht ergibt (im Querschnitt sind lediglich die Elemente 160a und 160b zu sehen). Die Segmente 160a bis 160c werden durch je eine Schraube 162 mit dem Grundkörper 102 verbunden, wodurch auch die Kontaktplatte 108 fest mit dem Grundkörper 102 verbunden wird. An ihrer Umfangsfläche ist die Kontaktplatte 108 mit einem vertikal stehenden Kontaktring 164 durch mehrere Schrauben 166 elektrisch und mechanisch lösbar verbunden. Auf diesem Kontaktring 164 ist eine flache ringförmige Kontaktscheibe 168 aufgelegt, welche den elektrischen Kontakt zwischen Kontaktring 164 und dem Rand der dünnen Metallschicht auf dem isolierenden Träger 87, d.h. dem Glasmaster herstellt. Der Haltering 126, welcher den Träger 87 auf dem Trägerteller 86 hält, ist beim vorliegenden Ausführungsbeispiel ein geschlossener Ring, welcher durch eine Verbindungsvorrichtung 170 lösbar mit dem Grundkörper 102 verbunden wird. Die Verbindungsvorrichtung 170 enthält einen Bajonettring 172, dessen Nocken 171 in entsprechende Ausnehmungen 174 im Haltering 126 eingreifen und aus diesen Ausnehmungen 174 durch Lösen mehrerer Rändelschrauben 173 und Verdrehen des Bajonettrings 172 wieder gelöst werden kann. Der Haltering 126 hat eine innere ringförmige Dichtung 176, welche auf der Oberseite der Kontaktscheibe 168 aufliegt. Ferner hat der Haltering 126 eine äußere ringförmige Dichtung 178, die auf der Stirnseite eines vom Grundkörper 102 nach oben ragenden Randes 180 aufliegt, der die Oberseite des Glasmasters überragt. Durch die Anordnung der Dichtungen 176 und 178 gelangt keine Elektrolytflüssigkeit bei eingelegtem Glasmaster in das Innere des Trägertellers 86.There are three insulating elements in FIG Form of circular sectors 160a, 160b, 160c arranged as from the schematic plan view shown on the left in FIG. 5 results (only the elements 160a are in cross section and 160b). The segments 160a to 160c are through one screw 162 each connected to the base body 102, whereby also the contact plate 108 is fixed to the base body 102 is connected. The contact plate is on its peripheral surface 108 with a vertically standing contact ring 164 several screws 166 electrically and mechanically releasable connected. On this contact ring 164 is a flat one annular contact disc 168 is placed, which the electrical contact between contact ring 164 and the edge the thin metal layer on the insulating support 87, i.e. the glass master. The retaining ring 126, which the Carrier 87 holds on the carrier plate 86 is present Embodiment a closed ring, which by a connecting device 170 releasably to the base body 102 is connected. The connector 170 includes a bayonet ring 172, the cams 171 in corresponding Engage recesses 174 in the retaining ring 126 and out of this Recesses 174 by loosening several knurled screws 173 and Twisting the bayonet ring 172 can be solved again. The retaining ring 126 has an inner annular seal 176, which rests on the top of the contact disk 168. The retaining ring 126 also has an outer annular seal 178, the one on the front side of the base body 102 the projecting edge 180 rests, which is the top of the Glass masters tower over. The arrangement of the seals 176 and 178 no electrolyte liquid gets in when it is inserted Glass master into the interior of the carrier plate 86.

Der Trägerteller 86 enthält ferner mindestens eine Ausdrückanordnung 182. Durch das Segment 160b, die Kontaktplatte 108 und den Grundkörper 102 verläuft eine fluchtende Durchgangsbohrung 184, die eine Buchse 186 aus Polypropylen aufnimmt. In der Buchse 186 ist ein Ausdrückbolzen 188 geführt. Dieser Ausdrückbolzen 188 kann zum Auswerfen des mit einem galvanischen Überzug versehenen Glasmasters nach oben gedrückt werden. O-Ringe 190 und 192 dichten die Buchse 186 gegen den Grundkörper 102 bzw. gegen den Ausdrückbolzen 188 dichtend ab. Es ist noch darauf hinzuweisen, daß das Ausführungsbeispiel nach Figur 4 auch für elektrisch leitende Träger eingesetzt werden kann.The carrier plate 86 also contains at least one push-out arrangement 182. Through segment 160b, contact plate 108 and the base body 102 runs an aligned through hole 184, which receives a bushing 186 made of polypropylene. A push-out pin 188 is guided in the socket 186. This Extraction bolt 188 can be used to eject the with a galvanic Coated glass master can be pressed upwards. O-rings 190 and 192 seal the sleeve 186 against the Main body 102 or sealing against the push-out pin 188 from. It should also be noted that the Embodiment according to Figure 4 also for electrically conductive Carrier can be used.

Wie sich aus den Ausführungsbeispielen nach den Figuren 4 und 7 ergibt, ist der jeweilige Trägerhalter so aufgebaut, daß in sein Inneres im Betrieb keine Elektrolytflüssigkeit eintreten kann. Wildwuchs wird somit vermieden bzw. in einem hohen Maße verringert. Die Verbindung zur Welle für den Antrieb und die Stromzuführung kann schnell gelöst werden, um neue Träger aufzuspannen oder den Trägerteller auszuwechseln. Auch der Trägerteller ist in seinen kritischen Teilen gegen den Eintritt von Elektrolytflüssigkeit geschützt und kann vollkommen zerlegt werden, um Teile auszutauschen oder zu reinigen.As can be seen from the exemplary embodiments according to FIGS. 4 and 7 results, the respective carrier holder is constructed so that in no electrolyte liquid enters its interior during operation can. Wild growth is thus avoided or to a high degree decreased. The connection to the shaft for the drive and the Power supply can be quickly disconnected to new carriers open or replace the carrier plate. Also the Carrier plate is in its critical parts against entry protected by electrolyte fluid and can be completely disassembled to replace or clean parts.

Claims (21)

  1. Apparatus for electrodeposition of a metal layer on a substrate (87),
    comprising a container (50) for holding the electrolyte (58),
    comprising an anode container (56) filled with anode material and having a substantially flat outlet surface (89) permeable to metal ions from the anode material, which are deposited on the surface of the substrate (87) facing the anode container (56), said substrate (87) serving as cathode.
    comprising a substrate holder (83) containing a driven shaft (84) extending at right angles to the substrate surface,
    wherein the cathode current is supplied via the shaft (84), coated with an external insulating layer, to the substrate (87), which is held on the outer edge of a disc (86) by a retaining ring (126) in contact with a contact plate (108),
    wherein the contact plate (108) rests on a base member (102) of the substrate-holding disc (86) and has a central socket (142) for connecting to the shaft (84),
    characterised in that
    a fastening portion (104, 106) in which a tube portion (146) is inserted in sealing-tight and releasable manner is provided around the socket (142) in the base member (102), and
    in that a screw collar ring (152) is disposed on the shaft (84) and is movable along its axis and is releasably connectable to the tube portion (146) and seals it and the shaft (84) against ingress of the electrolyte.
  2. Apparatus according to claim 1, characterised in that the screw collar ring (152) on its inside bears an O-ring (154) which, when the screw collar ring (152) is connected to the tube portion (146), abuts in sealing-tight manner against the end face thereof and against the outer insulating layer of the shaft (84).
  3. Apparatus according to claim 1 or 2, characterised in that the fastening portion (104, 106) in the base member (102) has an inner thread (106) which can be brought into engagement with an outer thread on the tube portion (146).
  4. Apparatus according to any of the preceding claims, characterised in that the tube portion (146) has an outer thread (150) which can be brought into engagement with an inner thread in the screw collar ring (152).
  5. Apparatus according to any of the preceding claims, characterised in that in the case of a metal, preferably nickel, substrate the solid contact plate (108) is made of titanium.
  6. Apparatus according to claim 5, characterised in that the retaining ring (126) contains half-shells (128) which are releasably connected by a connecting device (136).
  7. Apparatus according to claim 6, characterised in that one half shell (128) is permanently connected to the base member (102) of the substrate-holding disc (86).
  8. Apparatus according to claim 6 or 7, characterised in that the connecting device comprises two clamping hooks (136) which are permanently connected to the half-shells, and in that the hooks (136) engage in lugs or recesses in the releasable half-shell.
  9. Apparatus according to one of claims 5 to 8 characterised in that the titanium contact plate (108) is inserted into the base member (102).
  10. Apparatus according to any of the preceding claims, characterised in that a number of threaded sleeves (114), preferably three, are welded to the titanium contact plate (108) and project into passage holes in the base member (102), in that screws (116) connected to the threaded sleeves (114) permanently connect the titanium contact plate (108) to the base member (102), and in that each screw (116) is sealed by an O-ring (118) against the ingress of electrolyte into the associated threaded sleeve (114).
  11. Apparatus according to claim 10, characterised in that the screws (116) are of polypropylene.
  12. Apparatus according to any of the preceding claims, characterised in that each half-shell (128) has a lip seal (138) which abuts in sealing-tight manner the facing end face (140) of the base member (102), and in that the lip seals (138) on the two half-shells (128) abut one another in the closed state.
  13. Apparatus according to any of the preceding claims, characterised in that an annular seal (122) is disposed concentrically with the contact plate (108), preferably outside and near its periphery, and abuts in sealing-tight manner against the underside of the substrate (87).
  14. Apparatus according to claim 13, characterised in that the seal (122) is a lip seal, which is inserted into an annular groove (124) in the base member (102) and projects slightly beyond the contact plate (108).
  15. Apparatus according to any of claims 1 to 4, characterised in that in the case of a substrate (87) made of insulating material, preferably glass, insulating elements (160a, 160b, 160c), preferably three, in the form of circular sectors are disposed on the contact plate (108) and are connected to the base member (102) by screws (162), preferably by one screw per segment.
  16. Apparatus according to claim 15, characterised in that the peripheral surface of the contact plate (108) is releasably connected electrically and mechanically to a contact ring (164), preferably by screwing, and in that an annular contact disc (168) rests on the contact ring (164) and makes electric contact between the contact ring (164) and a thin metal layer deposited on the insulating substrate (87), preferably by sputtering.
  17. Apparatus according to claim 15 or 16, characterised in that the retaining ring (126) has an inner annular seal (176) which externally abuts the substrate (87) and an external annular seal (178) which rests on an edge formed on the base member (102) and projecting beyond the upper surface of the substrate (87).
  18. Apparatus according to any of claims 15 to 17, characterised in that at least one aligned passage bore (184) extends through at least one segment (160b), the contact plate (108) and the base member (102) and sealingly receives a socket (186), and the socket (186) guides an ejection pin (188) in sealing-tight manner.
  19. Apparatus according to claim 18, characterised in that the socket (186) is screwed in sealing-tight manner in the passage bore (184) and in that O-rings (190, 192) are provided for sealing.
  20. Apparatus according to any of the preceding claims, characterised in that a changing ring (107) is releasably connected to the contact plate (108) and its edge (107a) preferably rests on an annular seal (107c).
  21. A substrate holder for an apparatus for electrodeposition of a metal layer on to a substrate (87) according to any of the preceding claims, wherein the substrate holder is connectable to a driven shaft (84) extending at right angles to the substrate surface, the cathode current is supplied via the shaft (84), coated with an external insulating layer, to the substrate (87), which is held on the outer edge of a disc (86) by a retaining ring (126) in contact with a contact plate (108), and
    wherein the contact plate (108) rests on a base member (102) of the substrate-holding disc (86) and has a central socket (142) for connecting to the shaft (84),
    characterised in that
    a fastening portion (104, 106) in which a tube portion (146) is inserted in sealing-tight and releasable manner is provided around the socket (142) in the base member (102), and
    in that a screw collar ring (152) is disposed on the shaft (84) and is movable along its axis and is releasably connectable to the tube portion (146) and seals it and the shaft (84) against ingress of the electrolyte.
EP96105229A 1996-04-01 1996-04-01 Electroforming cell with workpiece holder Expired - Lifetime EP0799909B1 (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
EP96105229A EP0799909B1 (en) 1996-04-01 1996-04-01 Electroforming cell with workpiece holder
DE59603152T DE59603152D1 (en) 1996-04-01 1996-04-01 Galvanic deposition cell with a carrier holder
AT96105229T ATE184923T1 (en) 1996-04-01 1996-04-01 GALVANIC DEPOSITION CELL WITH A SUPPORT HOLDER
JP09534940A JP3135127B2 (en) 1996-04-01 1997-04-01 DC current extraction tank with substrate support
CN971902968A CN1094157C (en) 1996-04-01 1997-04-01 Galvanic deposition cell with substrate holder
KR1019970708674A KR100297458B1 (en) 1996-04-01 1997-04-01 Apparatus for depositing a metal layer on a substrate
PCT/EP1997/001633 WO1997037060A1 (en) 1996-04-01 1997-04-01 Galvanic deposition cell with a substrate holder
TW086107881A TW394941B (en) 1996-04-01 1997-06-07 Galvanic deposition cell having a substrate holder
US08/973,108 US5997701A (en) 1996-04-01 1997-10-09 Galvanic deposition cell with a substrate holder
HK98112058A HK1017026A1 (en) 1996-04-01 1998-11-17 Galvanic deposition cell with a substrate holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP96105229A EP0799909B1 (en) 1996-04-01 1996-04-01 Electroforming cell with workpiece holder

Publications (2)

Publication Number Publication Date
EP0799909A1 EP0799909A1 (en) 1997-10-08
EP0799909B1 true EP0799909B1 (en) 1999-09-22

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EP96105229A Expired - Lifetime EP0799909B1 (en) 1996-04-01 1996-04-01 Electroforming cell with workpiece holder

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US (1) US5997701A (en)
EP (1) EP0799909B1 (en)
JP (1) JP3135127B2 (en)
KR (1) KR100297458B1 (en)
CN (1) CN1094157C (en)
AT (1) ATE184923T1 (en)
DE (1) DE59603152D1 (en)
HK (1) HK1017026A1 (en)
TW (1) TW394941B (en)
WO (1) WO1997037060A1 (en)

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US6251236B1 (en) * 1998-11-30 2001-06-26 Applied Materials, Inc. Cathode contact ring for electrochemical deposition
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US6802947B2 (en) * 2001-10-16 2004-10-12 Applied Materials, Inc. Apparatus and method for electro chemical plating using backside electrical contacts
DE102006015460A1 (en) * 2006-03-31 2007-10-04 Büttner, Dieter Glass master fixing device for use during manufacturing of datacarrier-stencil, has sealing area of retaining device corresponding with sealing units of another retaining device, where sealing area is different from flat supporting plane
CN102787332B (en) * 2012-08-17 2014-12-24 湖北联合天诚防伪技术股份有限公司 Method for electroforming pasting board of silver spraying board
US10190232B2 (en) * 2013-08-06 2019-01-29 Lam Research Corporation Apparatuses and methods for maintaining pH in nickel electroplating baths
US9732434B2 (en) 2014-04-18 2017-08-15 Lam Research Corporation Methods and apparatuses for electroplating nickel using sulfur-free nickel anodes
KR20200093390A (en) 2019-01-28 2020-08-05 (주)피엔티 Metal foil electrodeposition device using slot die

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Also Published As

Publication number Publication date
ATE184923T1 (en) 1999-10-15
EP0799909A1 (en) 1997-10-08
US5997701A (en) 1999-12-07
JPH10506683A (en) 1998-06-30
CN1188519A (en) 1998-07-22
CN1094157C (en) 2002-11-13
TW394941B (en) 2000-06-21
KR100297458B1 (en) 2001-10-25
WO1997037060A1 (en) 1997-10-09
KR19990022195A (en) 1999-03-25
DE59603152D1 (en) 1999-10-28
HK1017026A1 (en) 1999-11-12
JP3135127B2 (en) 2001-02-13

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