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EP0710971B1 - Micromechanical relay - Google Patents

Micromechanical relay Download PDF

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Publication number
EP0710971B1
EP0710971B1 EP95115648A EP95115648A EP0710971B1 EP 0710971 B1 EP0710971 B1 EP 0710971B1 EP 95115648 A EP95115648 A EP 95115648A EP 95115648 A EP95115648 A EP 95115648A EP 0710971 B1 EP0710971 B1 EP 0710971B1
Authority
EP
European Patent Office
Prior art keywords
spring
contact
slots
anchor
spokes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95115648A
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German (de)
French (fr)
Other versions
EP0710971A1 (en
Inventor
Helmut Dr. Schlaak
Joachim Schimkat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Publication of EP0710971A1 publication Critical patent/EP0710971A1/en
Application granted granted Critical
Publication of EP0710971B1 publication Critical patent/EP0710971B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes

Definitions

  • the invention relates to a micromechanical electrostatic Relay with a base substrate that has a base electrode layer and carries a base contact piece, and with one anchor substrate lying on the base substrate with a freely worked, one-sided anchor spring tongue, which an anchor electrode layer and near its free end on a partially cut contact spring section carries an anchor contact piece, the spring tongue in At rest with its anchor electrode layer a wedge-shaped Air gap forms against the base electrode layer and in working condition due to one between the two Electrodes applied control voltage to the base substrate hugs so that the two contact pieces under elastic deformation of the contact spring section lie on one another.
  • Such a micromechanical relay is already from the DE 42 05 029 C1 known.
  • a micromechanical relay can be such a relay structure, for example, from a crystalline Manufacture semiconductor substrate, preferably silicon, the spring tongue serving as anchor by corresponding Doping and etching processes from the semiconductor substrate is worked out.
  • the curved spring tongue rolls on the counter electrode and forms a so-called hiking wedge. During this rolling the spring tongue is stretched until the free spring end with the anchor contact piece the base contact piece touched on the base substrate.
  • a spring tongue shown in which the armature contact piece load-bearing contact spring section through longitudinal slots Partially cut free parallel to the long sides of the spring tongue is. This ensures that the remaining sections the spring tongue behind and to the side of the contact spring section can lay flat on the base electrode while the contact spring section itself due to the height the contact pieces bends slightly upwards and onto them Generated a desired contact force.
  • the aim of the present invention is therefore in a micromechanical Relay of the type mentioned the contact spring section to be designed so that it has as little as possible Area required by the spring tongue, but at the same time by its rigidity generates the highest possible contact force and the rest of the spring tongue resting as completely as possible on the base electrode.
  • this goal is achieved in that the Contact spring section enclosed on all sides by the spring tongue and with this in an axially symmetrical shape via spring bars a sun gear is connected, the spokes of which are ring-shaped slots arranged with mutual overlap limited are whose angular ranges add up to more than 360 °.
  • This contact spring section can have a very high sun gear small area that is only slightly larger than that actual contact piece.
  • the connection is made via the sun gear spokes in the form of torsion bars due to of the overlapping limiting slots are approximately circular sections with which the desired Movement of the contact spring section opposite the spring tongue on the one hand and the required spring stiffness to achieve the contact force on the other hand on the narrowest Space by appropriate dimensioning of the length and width of this Spokes can be adjusted.
  • This rotationally symmetrical Connection via torsion elements is therefore essential less space than a one-sided connection via a long tongue-shaped leaf spring.
  • the slots have delimitation the sun spokes have the shape of concentrically interlocking Spiral sections, being by length these sections and the resulting length of their overlap also the length of the intermediate sun wheel spokes can be set.
  • the radial distances of the On the other hand, slots determine the width of the sun wheel spokes. So can the stiffness of the spring suspension in a simple manner be set for the contact spring section.
  • an overlap of the slots is necessary in any case, which is characterized by the total of their Angle ranges of more than 360 ° results.
  • the sun gear used here not to a number of four To set spokes.
  • sun gears used with two, three or even more than four spokes will.
  • Multi-spoke sun gears lead to very narrow webs, which are unfavorable for the conductor tracks Switch contact would be. Because it doesn't need to be specifically designed here to be that the power supply to the armature contact piece must be done via these sun spokes. Vice versa would end up with a two-spoke sun gear very high mechanical stresses occur in the slots.
  • interlocking slots or sun wheel spokes is in the switching process, that is, in the axial deflection and Torsion of the spokes and a wobbling contact or the contact spring section and also as a drive serving tongue in the areas to the side of the contact spring section causes.
  • This can lead to a frictional contact closure process lead who in terms of contacting and the contact resistance can be advantageous, on the other hand however, the life of the contact may be shortened.
  • the contact spring section by spring bars in the form of two concentrically arranged sun gears, the spokes of the two sun gears running in opposite directions Form spiral arrangements.
  • the spokes of a single sun gear in itself bend so that each spoke has two opposing spiral web sections has, which twists opposite to each other will. In this way, two opposite turning processes occur, which are mutually in effect on the contact movement cancel.
  • FIG. 1 shows schematically the basic structure of a micromechanical electrostatic relay, in which the invention is used.
  • an armature spring tongue 2 is machined on an armature substrate 1, preferably a silicon wafer, within a correspondingly doped silicon layer by selective etching processes.
  • a double layer 4 is produced on the underside of the spring tongue, which in the example consists of an SiO 2 layer, which generates compressive stresses, and an Si 3 N 4 layer, which generates tensile stresses.
  • the spring tongue can be given a desired curvature by appropriate selection of the layer thicknesses.
  • the spring tongue has a metallic layer as an anchor electrode 5 on its underside. This armature electrode 5 is subdivided, for example, in order to enable a metallic lead to an armature contact piece 7 in the same plane.
  • the armature substrate 1 is fastened on a base substrate 10, which in the present example consists of Pyrex glass, the but could also be formed from silicon, for example.
  • the base substrate 10 carries a on its flat surface Base electrode 11 and an insulating layer 12 around the base electrode 11 to isolate from the armature electrode 5.
  • a Base contact piece 13 is in a manner not shown provided with a lead and of course opposite the base electrode 11 arranged in isolation.
  • a wedge-shaped air gap 14 trained between the curved Spring tongue 2 with the armature electrode 5 on the one hand and the base electrode 11, on the other hand.
  • the contact piece 7 is on one Contact spring section arranged opposite the actual Spring tongue 2 is partially cut out so that it bend elastically and in this way the contact force can generate.
  • Figure 2 is an example of a Contact spring section 9 shown, as already suggested has been. This contact spring section 9 is through slots 8 cut free parallel to the side edges of the spring tongue, so that the contact spring section itself is in the form of a leaf spring tongue owns.
  • this contact spring section 9 requires a relatively large amount of space the spring tongue 2 is again lost as an electrode surface and that when choosing a short wide contact spring section 9 to achieve a high contact force through the stiff one-sided coupling to the spring tongue in the area of the end of the slots 8 and on the electrode tabs on both sides of the contact spring section the switching behavior under certain circumstances is not stable.
  • Figure 3 shows a top view of the design of a spring tongue 20, in which the contact piece 7 of a rotationally symmetrical and enclosed on all sides by the spring tongue 20
  • Contact spring area 21 is worn.
  • This contact spring area 21 is via spring bars 22 in the form of sun wheel spokes worn, formed by slots 23 and from each other are separated, these slots 23 as spiral sections arranged in a ring with mutual overlap are.
  • the sun gear has four spring bars or spokes 22, the ones used for limitation Spiral slots 23 cover approximately an angular range of 200 °. This results in a sufficient overlap to the torsion of the spring bars 22 upon axial movement of the contact piece 7 to ensure.
  • the spring bars softer or stiffer to adjust the contact force.
  • the spring bars must be made so soft that the spring tongue 20 in the entire area around the contact spring section 21 can lie flat on the base electrode 11.
  • Figure 4a shows depending on the control voltage the course of the distance A of different points of the Spring tongue 20 from the base electrode 11 during the switching process.
  • curve a7 shows the course of the distance for the contact piece 7, the curve a24 the movement for one Point 24 next to the sun gear and curve a25 the movement a point 25 at the tip of the spring tongue 20.
  • Das Diagram of Figure 4a shows both distinct tilting states when closing as well as when opening.
  • the course of the Contact force according to Figure 4b shows clear tilting states.
  • the response voltage is approximately 11 V, with the Points 24 and 25 abruptly touch the base electrode and the contact piece 7 pressed onto the mating contact piece 13 becomes.
  • the distance of the contact piece 7 to the base electrode is in the tightened state not to zero, but reaches the Height of the base contact piece 13 of about 2.5 microns.
  • FIG. 5 shows a somewhat modified embodiment of a Spring tongue 30.
  • a contact spring section 31 is through suspended two concentric sun gear assemblies, namely an inner sun gear structure with three spring spokes each 32 and correspondingly three slots 33 and an outer sun gear structure with three spring spokes 34 and three Slits 35.
  • the two sun gear structures have one Spiral arrangement with opposite directions of rotation.
  • the one-sided torsion of the spring bars in the spring according to Figure 3 caused wobble be eliminated during the switching process because the two sun gear structures opposite, mutually canceling Cause rotary movements.
  • spoke sections 42a like a right rotating spiral into each other, are the outer Spoke sections 42b like a left-turning spiral arranged while the intermediate slots 43 these Achieve structure by branching accordingly.
  • spoke sections 42a opposite the spoke sections 42b twisted so that an axial deflection of the Contact piece 7 is carried out without substantial rotation.

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  • Springs (AREA)

Description

Die Erfindung betrifft ein mikromechanisches elektrostatisches Relais mit einem Basissubstrat, das eine Basis-Elektrodenschicht und ein Basis-Kontaktstück trägt, und mit einem auf dem Basissubstrat liegenden Ankersubstrat mit einer freigearbeiteten, einseitig angebundenen Anker-Federzunge, welche eine Anker-Elektrodenschicht und in der Nähe ihres freien Endes auf einem teilweise freigeschnittenen Kontaktfederabschnitt ein Anker-Kontaktstück trägt, wobei die Federzunge im Ruhezustand mit ihrer Anker-Elektrodenschicht einen keilförmigen Luftspalt gegenüber der Basis-Elektrodenschicht bildet und im Arbeitszustand aufgrund einer zwischen den beiden Elektroden anliegenden Steuerspannung sich an das Basissubstrat anschmiegt, so daß die beiden Kontaktstücke unter elastischer Deformation des Kontaktfederabschnittes aufeinanderliegen.The invention relates to a micromechanical electrostatic Relay with a base substrate that has a base electrode layer and carries a base contact piece, and with one anchor substrate lying on the base substrate with a freely worked, one-sided anchor spring tongue, which an anchor electrode layer and near its free end on a partially cut contact spring section carries an anchor contact piece, the spring tongue in At rest with its anchor electrode layer a wedge-shaped Air gap forms against the base electrode layer and in working condition due to one between the two Electrodes applied control voltage to the base substrate hugs so that the two contact pieces under elastic deformation of the contact spring section lie on one another.

Ein derartiges mikromechanisches Relais ist bereits aus der DE 42 05 029 C1 bekannt. Wie dort ausgeführt ist, läßt sich ein derartiger Relaisaufbau beispielsweise aus einem kristallinen Halbleitersubstrat, vorzugsweise Silizium, herstellen, wobei die als Anker dienende Federzunge durch entsprechende Dotierungs- und Ätzvorgänge aus dem Halbleitersubstrat herausgearbeitet wird. Durch Anlegen einer Steuerspannung zwischen der Ankerelektrode der Federzunge und der ebenen Basiselektrode rollt die gekrümmte Federzunge auf der Gegenelektrode ab und bildet damit einen sogenannten Wanderkeil. Während dieses Abrollens wird die Federzunge gestreckt, bis das freie Federende mit dem Ankerkontaktstück das Basiskontaktstück auf dem Basissubstrat berührt.Such a micromechanical relay is already from the DE 42 05 029 C1 known. As stated there, can be such a relay structure, for example, from a crystalline Manufacture semiconductor substrate, preferably silicon, the spring tongue serving as anchor by corresponding Doping and etching processes from the semiconductor substrate is worked out. By applying a control voltage between the armature electrode of the spring tongue and the flat base electrode the curved spring tongue rolls on the counter electrode and forms a so-called hiking wedge. During this rolling the spring tongue is stretched until the free spring end with the anchor contact piece the base contact piece touched on the base substrate.

In der oben genannten Schrift ist auch in einem Ausführungsbeispiel eine Federzunge gezeigt, bei der der das Ankerkontaktstück tragende Kontaktfederabschnitt durch Längsschlitze parallel zu den Längsseiten der Federzunge teilweise freigeschnitten ist. Dadurch erreicht man, daß sich die übrigen Abschnitte der Federzunge hinter und seitlich des Kontaktfederabschnittes flach auf die Basiselektrode legen können, während der Kontaktfederabschnitt selbst sich aufgrund der Höhe der Kontaktstücke leicht nach oben durchbiegt und auf diese Weise eine gewünschte Kontaktkraft erzeugt.In the above font is also in one embodiment a spring tongue shown, in which the armature contact piece load-bearing contact spring section through longitudinal slots Partially cut free parallel to the long sides of the spring tongue is. This ensures that the remaining sections the spring tongue behind and to the side of the contact spring section can lay flat on the base electrode while the contact spring section itself due to the height the contact pieces bends slightly upwards and onto them Generated a desired contact force.

Durch Variation der Länge und der Lage der Schlitze können die Federsteifigkeit des Kontaktfederabschnittes sowie der Verlauf der Schaltcharakteristik beeinflußt werden. Bei der durch zwei parallele Längsschlitze abgeteilten Kontaktzunge läßt sich allgemein sagen, daß eine möglichst kurze und breite Kontaktfeder eine hohe Steifigkeit erhält und damit auch eine gewünscht hohe Kontaktkraft erzeugen könnte. Allerdings ginge dies auf Kosten der Elektrodenfläche; die Anzugsspannung würde sich erhöhen und die gewünschte Kippcharakteristik beim Schließen und Öffnen des Kontaktes würde sich verschlechtern. Vereinfacht gesagt, bewirkt ein relativ harter Kontaktfederbereich, der über die Linie zwischen den beiden Längsschlitzen verhältnismäßig steif an die Anker-Federzunge angekoppelt ist, im Bereich der Ansprechspannung und der Abfallspannung jeweils ein unsicheres Schaltverhalten, wobei die seitlich des Kontaktfederabschnittes befindlichen Teile der Ankerelektrode sich zu spät an die Basiselektrode anlegen bzw. bei Verminderung der Haltespannung sich vorzeitig abheben.By varying the length and location of the slots you can the spring stiffness of the contact spring section and the The course of the switching characteristics can be influenced. In the separated by two parallel longitudinal slots can be generally said that a short and wide Contact spring receives a high level of rigidity and therefore also could generate a desired high contact force. Indeed would this be at the expense of the electrode area; the tightening voltage would increase and the desired tipping characteristics closing and opening the contact would deteriorate. Put simply, it causes a relatively hard one Contact spring area that crosses the line between the two Longitudinal slots relatively stiff on the anchor spring tongue is coupled in the range of the response voltage and the drop voltage each an unsafe switching behavior, whereby the parts located to the side of the contact spring section the anchor electrode is too late on the base electrode or stand out prematurely if the holding voltage is reduced.

Ziel der vorliegenden Erfindung ist es deshalb, bei einem mikromechanischen Relais der eingangs genannten Art den Kontaktfederabschnitt so zu gestalten, daß er möglichst wenig Fläche von der Anker-Federzunge benötigt, zugleich aber durch seine Steifigkeit eine möglichst hohe Kontaktkraft erzeugt und ein möglichst vollständiges Aufliegen der restlichen Federzunge auf der Basiselektrode ermöglicht. The aim of the present invention is therefore in a micromechanical Relay of the type mentioned the contact spring section to be designed so that it has as little as possible Area required by the spring tongue, but at the same time by its rigidity generates the highest possible contact force and the rest of the spring tongue resting as completely as possible on the base electrode.

Erfindungsgemäß wird dieses Ziel dadurch erreicht, daß der Kontaktfederabschnitt allseitig von der Federzunge umschlossen und mit dieser axialsymmetrisch über Federstege in Form eines Sonnenrades verbunden ist, dessen Speichen durch ringförmig mit gegenseitiger Überlappung angeordnete Schlitze begrenzt sind, deren Winkelbereiche zusammen mehr als 360° ergeben.According to the invention this goal is achieved in that the Contact spring section enclosed on all sides by the spring tongue and with this in an axially symmetrical shape via spring bars a sun gear is connected, the spokes of which are ring-shaped slots arranged with mutual overlap limited are whose angular ranges add up to more than 360 °.

Durch die erfindungsgemäße koaxiale Anbindung des Kontaktfederabschnittes an die eigentliche Federzunge in Form eines Sonnenrades kann dieser Kontaktfederabschnitt mit einer sehr kleinen Fläche auskommen, die nur wenig größer ist als das eigentliche Kontaktstück. Die Anbindung erfolgt nämlich über die Sonnenradspeichen in Form von Torsionsstegen, die aufgrund der ringförmig übereinandergreifenden Begrenzungsschlitze annähernd Kreisabschnitte sind, mit denen die gewünschte Beweglichkeit des Kontaktfederabschnittes gegenüber der Federzunge einerseits und die erforderliche Federsteifigkeit zur Erzielung der Kontaktkraft andererseits auf engstem Raum durch entsprechende Bemessung der Länge und Breite dieser Speichen eingestellt werden können. Diese rotationssymmetrische Anbindung über Torsionselemente erfordert also wesentlich weniger Platz als eine einseitige Anbindung über eine lange zungenförmige Blattfeder.Through the coaxial connection of the contact spring section according to the invention to the actual spring tongue in the form of a This contact spring section can have a very high sun gear small area that is only slightly larger than that actual contact piece. The connection is made via the sun gear spokes in the form of torsion bars due to of the overlapping limiting slots are approximately circular sections with which the desired Movement of the contact spring section opposite the spring tongue on the one hand and the required spring stiffness to achieve the contact force on the other hand on the narrowest Space by appropriate dimensioning of the length and width of this Spokes can be adjusted. This rotationally symmetrical Connection via torsion elements is therefore essential less space than a one-sided connection via a long tongue-shaped leaf spring.

In bevorzugter Ausgestaltung besitzen die Schlitze zur Abgrenzung der Sonnenradspeichen die Form von konzentrisch ineinandergreifenden Spiralabschnitten, wobei durch die Länge dieser Abschnitte und die dadurch bedingte Länge ihrer Überlappung auch die Länge der zwischenliegenden Sonnenradspeichen festgelegt werden kann. Die radialen Abstände der Schlitze bestimmen andererseits die Breite der Sonnenradspeichen. So kann also auf einfache Weise die Steifigkeit der Federaufhängung für den Kontaktfederabschnitt festgelegt werden. Um die erwähnte Torsion der Sonnenradspeichen zu ermöglichen, ist in jedem Fall eine Überlappung der Schlitze erforderlich, was sich durch die erwähnte Gesamtsumme ihrer Winkelbereiche von mehr als 360° ergibt. Das bedeutet für ein vierspeichiges Sonnenrad jeweils Winkelbereiche der Schlitze von mehr als 90°; vorzugsweise besitzen die Schlitze in diesem Fall einen Winkelbereich zwischen 135° und 270°, was allgemein bei einer beliebigen Anzahl von Speichen bedeutet, daß die Winkelbereiche der Schlitze zusammen das 1,5-fache bis zum 3-fachen eines Vollkreises ergeben. Denn natürlich ist das hier verwendete Sonnenrad nicht auf eine Zahl von vier Speichen festzulegen. Je nach den Erfordernissen können Sonnenräder mit zwei, drei oder auch mehr als vier Speichen verwendet werden. Vielspeichige Sonnenräder führen allerdings zu sehr schmalen Stegen, die ungünstig für die Leiterbahnen zum Schaltkontakt wären. Denn es braucht hier nicht eigens ausgeführt zu werden, daß auch die Stromzufuhr zum Ankerkontaktstück über diese Sonnenradspeichen erfolgen muß. Umgekehrt würden bei einem zweispeichigen Sonnenrad an den Enden der Schlitze sehr hohe mechanische Spannungen auftreten.In a preferred embodiment, the slots have delimitation the sun spokes have the shape of concentrically interlocking Spiral sections, being by length these sections and the resulting length of their overlap also the length of the intermediate sun wheel spokes can be set. The radial distances of the On the other hand, slots determine the width of the sun wheel spokes. So can the stiffness of the spring suspension in a simple manner be set for the contact spring section. In order to enable the mentioned torsion of the sun wheel spokes, an overlap of the slots is necessary in any case, which is characterized by the total of their Angle ranges of more than 360 ° results. That means for a four-spoke sun gear each angular ranges of the slots of more than 90 °; preferably have the slots in this Fall an angular range between 135 ° and 270 °, which is general with any number of spokes means that the angular ranges of the slots together 1.5 times to to 3 times a full circle. Because of course the sun gear used here not to a number of four To set spokes. Depending on the requirements, sun gears used with two, three or even more than four spokes will. Multi-spoke sun gears lead to very narrow webs, which are unfavorable for the conductor tracks Switch contact would be. Because it doesn't need to be specifically designed here to be that the power supply to the armature contact piece must be done via these sun spokes. Vice versa would end up with a two-spoke sun gear very high mechanical stresses occur in the slots.

Durch die nach Spiralfederart drehsymmetrisch in einer Richtung ineinandergreifenden Schlitze bzw. Sonnenradspeichen wird beim Schaltvorgang, also bei der axialen Auslenkung und Torsion der Speichen ein taumelndes Aufsetzen des Kontaktes bzw. des Kontaktfederabschnittes und auch der als Antrieb dienenden Federzunge in den Bereichen seitlich des Kontaktfederabschnittes bewirkt. Dies kann zu einem reibenden Kontaktschließvorgang führen, der hinsichtlich der Kontaktgabe und des Kontaktwiderstandes vorteilhaft sein kann, andererseits jedoch unter Umständen die Lebensdauer des Kontaktes verkürzt.Because of the spiral spring type in one direction interlocking slots or sun wheel spokes is in the switching process, that is, in the axial deflection and Torsion of the spokes and a wobbling contact or the contact spring section and also as a drive serving tongue in the areas to the side of the contact spring section causes. This can lead to a frictional contact closure process lead who in terms of contacting and the contact resistance can be advantageous, on the other hand however, the life of the contact may be shortened.

Um diesem zuletzt erwähnten Effekt entgegenzuwirken, kann es von Vorteil sein, den Kontaktfederabschnitt durch Federstege in Form zweier konzentrisch angeordneter Sonnenräder zu halten, wobei die Speichen der beiden Sonnenräder zueinander gegenläufige Spiralanordnungen bilden. Anstelle von zwei voll ausgebildeten konzentrischen Sonnenrädern ist es aber auch denkbar, die Speichen eines einzelnen Sonnenrades in sich zu krümmen, so daß jede Speiche zwei gegenläufig spiralige Stegabschnitte aufweist, die zueinander entgegengesetzt tordiert werden. Auf diese Weise entstehen zwei entgegengesetzte Drehvorgänge, die sich in der Wirkung auf die Kontaktbewegung gegenseitig aufheben.To counteract this last-mentioned effect, it can be advantageous, the contact spring section by spring bars in the form of two concentrically arranged sun gears, the spokes of the two sun gears running in opposite directions Form spiral arrangements. Instead of two full trained concentric sun gears it is also conceivable, the spokes of a single sun gear in itself bend so that each spoke has two opposing spiral web sections has, which twists opposite to each other will. In this way, two opposite turning processes occur, which are mutually in effect on the contact movement cancel.

Die Erfindung wird nachfolgend an Ausführungsbeispielen anhand der Zeichnung näher erläuert. Es zeigen

  • Figur 1 eine schematische Darstellung für den grundsätzlichen Aufbau eines mikromechanischen Relais mit einer gekrümmten Anker-Federzunge im Schnitt,
  • Figur 2 eine Ansicht von unten auf eine Federzunge mit einem in bekannter Weise durch Schlitze abgegrenzten Kontaktfederabschnitt,
  • Figur 3 eine erfindungsgemäß gestaltete Federzunge in Draufsicht mit spiralförmig abgegrenztem Kontaktfederabschnitt,
  • Figur 4a und 4b zwei Diagramme zur Darstellung des Bewegungsablaufes einzelner Punkte der Spiralfeder sowie des Verlauf der Kontaktkraft in Abhängigkeit von der Steuerspannung,
  • Figur 5 eine Federzunge in Draufsicht, bei der der Kontaktfederabschnitt durch zwei konzentrisch gegenläufig angeordnete Sonnenradstrukturen abgegrenzt ist, und
  • Figur 6 eine Federzunge in Draufsicht mit einem Kontaktfederabschnitt, der über eine Sonnenradstruktur mit in sich gegenläufig gekrümmten Speichen abgegrenzt ist.
    • The invention is explained in more detail below using exemplary embodiments with reference to the drawing. Show it
  • FIG. 1 shows a schematic representation of the basic structure of a micromechanical relay with a curved armature spring tongue in section,
  • FIG. 2 shows a view from below of a spring tongue with a contact spring section delimited by slots in a known manner,
  • FIG. 3 shows a spring tongue designed according to the invention in a top view with a spirally delimited contact spring section,
  • 4a and 4b show two diagrams to illustrate the movement sequence of individual points of the coil spring and the course of the contact force as a function of the control voltage,
  • Figure 5 shows a spring tongue in plan view, in which the contact spring section is delimited by two concentrically arranged sun gear structures, and
  • FIG. 6 shows a spring tongue in a top view with a contact spring section which is delimited via a sun wheel structure with spokes that are curved in opposite directions.

    • Figur 1 zeigt schematisch den grundsätzlichen Aufbau eines mikromechanischen elektrostatischen Relais, bei dem die Erfindung zur Anwendung kommt. Dabei ist an einem Ankersubstrat 1, vorzugsweise einem Silizium-Wafer, eine Anker-Federzunge 2 innerhalb einer entsprechend dotierten Silizium-Schicht durch selektive Ätzverfahren freigearbeitet. An der Unterseite der Federzunge ist eine Doppelschicht 4 erzeugt, die in dem Beispiel aus einer SiO2-Schicht, welche Druckspannungen erzeugt, und einer Si3N4-Schicht, welche Zugspannungen erzeugt, besteht. Durch entsprechende Wahl der Schichtdicken kann der Federzunge eine gewünschte Krümmung verliehen werden. Schließlich trägt die Federzunge eine metallische Schicht als Ankerelektrode 5 an ihrer Unterseite. Diese Ankerelektrode 5 ist beispielsweise unterteilt, um in gleicher Ebene eine metallische Zuleitung zu einem Anker-Kontaktstück 7 zu ermöglichen.Figure 1 shows schematically the basic structure of a micromechanical electrostatic relay, in which the invention is used. In this case, an armature spring tongue 2 is machined on an armature substrate 1, preferably a silicon wafer, within a correspondingly doped silicon layer by selective etching processes. A double layer 4 is produced on the underside of the spring tongue, which in the example consists of an SiO 2 layer, which generates compressive stresses, and an Si 3 N 4 layer, which generates tensile stresses. The spring tongue can be given a desired curvature by appropriate selection of the layer thicknesses. Finally, the spring tongue has a metallic layer as an anchor electrode 5 on its underside. This armature electrode 5 is subdivided, for example, in order to enable a metallic lead to an armature contact piece 7 in the same plane.

    Das Ankersubstrat 1 ist auf einem Basissubstrat 10 befestigt, welches im vorliegenden Beispiel aus Pyrex-Glas besteht, das aber beispielsweise auch aus Silizium gebildet sein könnte. Auf seiner ebenen Oberfläche trägt das Basissubstrat 10 eine Basiselektrode 11 und eine Isolierschicht 12, um die Basiselektrode 11 gegenüber der Ankerelektrode 5 zu isolieren. Ein Basis-Kontaktstück 13 ist in nicht weiter dargestellter Weise mit einer Zuleitung versehen und natürlich gegenüber der Basiselektrode 11 isoliert angeordnet. Zwischen der gekrümmten Federzunge 2 mit der Ankerelektrode 5 einerseits und der Basiselektrode 11 andererseits ist ein keilförmiger Luftspalt 14 ausgebildet. Bei Anliegen einer Spannung von einer Spannungsquelle 15 zwischen den beiden Elektroden 5 und 11 rollt die Federzunge auf der Basiselektrode 11 ab, wodurch sich die Federzunge streckt und das Ankerkontaktstück 7 mit dem Basis-kontaktstück 13 verbunden wird. Es sei noch erwähnt, daß die Größenverhältnisse und Schichtdicken in Figur 1 lediglich unter dem Gesichtspunkt der Anschaulichkeit dargestellt sind und nicht den tatsächlichen Verhältnissen entsprechen.The armature substrate 1 is fastened on a base substrate 10, which in the present example consists of Pyrex glass, the but could also be formed from silicon, for example. The base substrate 10 carries a on its flat surface Base electrode 11 and an insulating layer 12 around the base electrode 11 to isolate from the armature electrode 5. A Base contact piece 13 is in a manner not shown provided with a lead and of course opposite the base electrode 11 arranged in isolation. Between the curved Spring tongue 2 with the armature electrode 5 on the one hand and the base electrode 11, on the other hand, is a wedge-shaped air gap 14 trained. When a voltage is applied from a voltage source 15 rolls between the two electrodes 5 and 11 the spring tongue on the base electrode 11, whereby the Spring tongue stretches and the anchor contact piece 7 with the base contact piece 13 is connected. It should also be mentioned that the Size ratios and layer thicknesses in Figure 1 only below the aspect of clarity are shown and do not correspond to the actual situation.

    Um beim flachen Aufliegen der Ankerelektrode 5 auf der Basiselektrode 11 für die beiden Kontaktstücke eine geforderte Kontaktkraft zu erzeugen, ist das Kontaktstück 7 auf einem Kontaktfederabschnitt angeordnet, der gegenüber der eigentlichen Federzunge 2 teilweise freigeschnitten ist, so daß er sich elastisch durchbiegen und auf diese Weise die Kontaktkraft erzeugen kann. In Figur 2 ist ein Beispiel für einen Kontaktfederabschnitt 9 gezeigt, wie er bereits vorgeschlagen wurde. Dieser Kontaktfederabschnitt 9 ist durch Schlitze 8 parallel zu den Seitenkanten der Federzunge freigeschnitten, so daß der Kontaktfederabschnitt selbst die Form einer Blattfederzunge besitzt. Durch die einseitige Anbindung dieses Kontaktfederabschnittes 9 an der Federzunge 2 ergibt sich das eingangs bereits geschilderte Problem, daß dieser Kontaktfederabschnitt verhältnismäßig viel Fläche erfordert, die an der Federzunge 2 wiederum als Elektrodenfläche verlorengeht und daß bei Wahl eines kurzen breiten Kontaktfederabschnittes 9 zur Erzielung einer hohen Kontaktkraft durch die steife einseitige Ankopplung an die Federzunge im Bereich des Endes der Schlitze 8 und an den Elektrodenlappen zu beiden Seiten des Kontaktfederabschnittes das Schaltverhalten unter Umständen nicht stabil ist.In order for the armature electrode 5 to lie flat on the base electrode 11 required for the two contact pieces To generate contact force, the contact piece 7 is on one Contact spring section arranged opposite the actual Spring tongue 2 is partially cut out so that it bend elastically and in this way the contact force can generate. In Figure 2 is an example of a Contact spring section 9 shown, as already suggested has been. This contact spring section 9 is through slots 8 cut free parallel to the side edges of the spring tongue, so that the contact spring section itself is in the form of a leaf spring tongue owns. Through the one-sided connection of this Contact spring section 9 on the spring tongue 2, this results already mentioned problem that this contact spring section requires a relatively large amount of space the spring tongue 2 is again lost as an electrode surface and that when choosing a short wide contact spring section 9 to achieve a high contact force through the stiff one-sided coupling to the spring tongue in the area of the end of the slots 8 and on the electrode tabs on both sides of the contact spring section the switching behavior under certain circumstances is not stable.

    Figur 3 zeigt in Draufsicht die Gestaltung einer Federzunge 20, bei der das Kontaktstück 7 von einem rotationssymmetrischen und von allen Seiten durch die Federzunge 20 umschlossenen Kontaktfederbereich 21 getragen wird. Dieser Kontaktfederbereich 21 ist über Federstege 22 in Form von Sonnenradspeichen getragen, die durch Schlitze 23 gebildet und voneinander getrennt sind, wobei diese Schlitze 23 als Spiralabschnitte ringförmig mit gegenseitiger Überlappung angeordnet sind. Im vorliegenden Beispiel besitzt das Sonnenrad vier Federstege oder Speichen 22, wobei die zur Begrenzung dienenden Spiralschlitze 23 etwa einen Winkelbereich von 200° überdecken. Dadurch ergibt sich eine ausreichende Überlappung, um die Torsion der Federstege 22 bei Axialbewegung des Kontaktstücks 7 zu gewährleisten. Je nach Länge und Abstand der Schlitze 23 können die Federstege weicher oder steifer gemacht werden, um so die Kontaktkraft einzustellen. Die Federstege müssen jedenfalls so weich gemacht werden, daß die Federzunge 20 im gesamten Bereich rings um den Kontaktfederabschnitt 21 flach auf der Basiselektrode 11 aufliegen kann. Figure 3 shows a top view of the design of a spring tongue 20, in which the contact piece 7 of a rotationally symmetrical and enclosed on all sides by the spring tongue 20 Contact spring area 21 is worn. This contact spring area 21 is via spring bars 22 in the form of sun wheel spokes worn, formed by slots 23 and from each other are separated, these slots 23 as spiral sections arranged in a ring with mutual overlap are. In the present example, the sun gear has four spring bars or spokes 22, the ones used for limitation Spiral slots 23 cover approximately an angular range of 200 °. This results in a sufficient overlap to the torsion of the spring bars 22 upon axial movement of the contact piece 7 to ensure. Depending on the length and distance of the Slots 23 can make the spring bars softer or stiffer to adjust the contact force. The spring bars must be made so soft that the spring tongue 20 in the entire area around the contact spring section 21 can lie flat on the base electrode 11.

    Eine Untersuchung des Schaltverhaltens einer Feder gemäß Figur 3 wurde mit einer Computersimulation durchgeführt, wobei ein Aufbau gemäß Figur 3 mit folgenden Kennwerten gewählt wurde: Gesamtlänge der Federzunge 1750 µm Breite der Federzunge 1000 µm Abstand des Kontaktstücks zur Einspannstelle der Federzunge 1300 µm Länge der gekrümmten Zone der Federzunge 400 µm Breite der Schlitze des Sonnenrades 20 µm Winkelbereich der Schlitze 200° An examination of the switching behavior of a spring according to FIG. 3 was carried out using a computer simulation, a structure according to FIG. 3 having the following characteristic values being chosen: Total length of the spring tongue 1750 µm Width of the spring tongue 1000 µm Distance of the contact piece to the clamping point of the spring tongue 1300 µm Length of the curved zone of the spring tongue 400 µm Width of the slots of the sun gear 20 µm Angular range of the slots 200 °

    Die Ergebnisse der Computersimulation sind in Figur 4a und 4b dargestellt. Figur 4a zeigt in Abhängigkeit von der Steuerspannung den Verlauf des Abstandes A verschiedener Punkte der Federzunge 20 von der Basiselektrode 11 beim Schaltvorgang. Im einzelnen zeigt die Kurve a7 den Verlauf des Abstandes für das Kontaktstück 7, die Kurve a24 den Bewegungsablauf für einen Punkt 24 neben dem Sonnenrad und die Kurve a25 die Bewegung eines Punktes 25 an der Spitze der Federzunge 20. Das Diagramm von Figur 4a weist eindeutige Kippzustände sowohl beim Schließen als auch beim Öffnen auf. Auch der Verlauf der Kontaktkraft gemäß Figur 4b zeigt eindeutige Kippzustände. Die Ansprechspannung liegt etwa bei 11 V, wobei sich die Punkte 24 und 25 schlagartig an die Basiselektrode anliegen und das Kontaktstück 7 auf das Gegenkontaktstück 13 gedrückt wird. Der Abstand des Kontaktstücks 7 zur Basiselektrode wird im angezogenen Zustand nicht zu Null, sondern erreicht die Höhe des Basiskontaktstücks 13 von etwa 2,5 µm.The results of the computer simulation are shown in Figures 4a and 4b shown. Figure 4a shows depending on the control voltage the course of the distance A of different points of the Spring tongue 20 from the base electrode 11 during the switching process. In detail, curve a7 shows the course of the distance for the contact piece 7, the curve a24 the movement for one Point 24 next to the sun gear and curve a25 the movement a point 25 at the tip of the spring tongue 20. Das Diagram of Figure 4a shows both distinct tilting states when closing as well as when opening. The course of the Contact force according to Figure 4b shows clear tilting states. The response voltage is approximately 11 V, with the Points 24 and 25 abruptly touch the base electrode and the contact piece 7 pressed onto the mating contact piece 13 becomes. The distance of the contact piece 7 to the base electrode is in the tightened state not to zero, but reaches the Height of the base contact piece 13 of about 2.5 microns.

    Die Steifigkeit der Anbindung des Kontaktfederabschnittes über die Sonnenradspeichen muß so dimensioniert werden, daß bei der Ansprechspannung auch alle Punkte der Federzunge 20 gleichzeitig auf der Basiselektrode zur Anlage kommen. Wie das Diagramm von Figur 4b zeigt, erreicht man mit einer Federgestaltung gemäß Figur 3 eine Kontaktkraft von etwa 1,8 mN; diese ist somit etwa sechsmal so groß wie die Kontaktkraft, die man mit einem durch einfache Schlitze gemäß Figur 2 abgetrennten Kontaktfederabschnitt erreichen kann.The rigidity of the connection of the contact spring section over the sun spokes must be dimensioned so that at the response voltage also all points of the spring tongue 20 come into contact with the base electrode at the same time. How the diagram of Figure 4b shows can be achieved with a spring design 3 a contact force of about 1.8 mN; this is about six times the contact force, which can be achieved with simple slits Figure 2 can reach separated contact spring section.

    Figur 5 zeigt eine etwas abgewandelte Ausführungsform einer Federzunge 30. Hierbei ist ein Kontaktfederabschnitt 31 durch zwei konzentrische Sonnenradanordnungen aufgehängt, nämlich eine innere Sonnenradstruktur mit jeweils drei Federspeichen 32 und entsprechend drei Schlitzen 33 sowie eine äußere Sonnenradstruktur mit wiederum drei Federspeichen 34 und drei Schlitzen 35. Die beiden Sonnenradstrukturen besitzen eine Spiralanordnung mit jeweils entgegengesetztem Drehsinn. Auf diese Weise kann die durch die einseitige Torsion der Federstege bei der Feder gemäß Figur 3 bewirkte Taumelbewegung beim Schaltvorgang behoben werden, da die beiden Sonnenradstrukturen entgegengesetzte, sich gegenseitig aufhebende Drehbewegungen verursachen.FIG. 5 shows a somewhat modified embodiment of a Spring tongue 30. Here, a contact spring section 31 is through suspended two concentric sun gear assemblies, namely an inner sun gear structure with three spring spokes each 32 and correspondingly three slots 33 and an outer sun gear structure with three spring spokes 34 and three Slits 35. The two sun gear structures have one Spiral arrangement with opposite directions of rotation. On this way, the one-sided torsion of the spring bars in the spring according to Figure 3 caused wobble be eliminated during the switching process because the two sun gear structures opposite, mutually canceling Cause rotary movements.

    Während bei der Ausführungsform gemäß Figur 5 zwei ineinanderliegende Sonnenradstrukturen durch einen konzentrischen durchgehenden Kreisring 36 (gestrichelt angedeutet) voneinander getrennt sind, läßt sich die gleiche Wirkung auch durch eine Anordnung gemäß Figur 6 erzielen, wobei in einer einzigen Sonnenradstruktur die Federspeichen in sich einen gekrümmten Verlauf besitzen, so daß Torsionsbewegungen in zwei entgegengesetzten Richtungen erfolgen. Gemäß Figur 6 ist in einer Federzunge 40 ein Kontaktfederabschnitt 41 über eine Sonnenradstruktur mit vier Federspeichen 42 und dazwischenliegenden Schlitzen 43 aufgehängt. Jede der Federspeichen besitzt einen ersten Speichenabschnitt 42a und einen zweiten Speichenabschnitt 42b, die haarnadelförmig aneinanderschließen. Während die Speichenabschnitte 42a nach Art einer rechts drehenden Spirale ineinanderlaufen, sind die äußeren Speichenabschnitte 42b nach Art einer links drehenden Spirale angeordnet, während die zwischenliegenden Schlitze 43 diese Struktur durch entsprechende Verzweigungen erzielen. Auf diese Weise werden bei einer Axialbewegung des Kontaktstücks 7 die Speichenabschnitte 42a entgegengesetzt zu den Speichenabschnitten 42b tordiert, so daß eine Axialauslenkung des Kontaktstücks 7 ohne wesentliche Drehbewegung erfolgt.While in the embodiment according to Figure 5, two nested Sun gear structures by a concentric continuous circular ring 36 (indicated by dashed lines) from each other are separated, the same effect can also be achieved achieve an arrangement according to Figure 6, being in a single Sun gear structure the spring spokes have a curved shape Have course, so that torsional movements in two opposite directions are done. According to Figure 6 is in a spring tongue 40 a contact spring section 41 via a Sun gear structure with four spring spokes 42 and in between Slits 43 hung. Each of the spring spokes has a first spoke portion 42a and a second Spoke portion 42b that are hairpin-like together. While the spoke sections 42a like a right rotating spiral into each other, are the outer Spoke sections 42b like a left-turning spiral arranged while the intermediate slots 43 these Achieve structure by branching accordingly. On this way when the contact piece moves axially 7, spoke sections 42a opposite the spoke sections 42b twisted so that an axial deflection of the Contact piece 7 is carried out without substantial rotation.

    Durch die vergrößerten Radien an den Einspannstellen werden die mechanischen Spannungen an den Schlitzenden reduziert. Die Anordnung nach Figur 6 ermöglicht eine optimale Länge der Torsionsbereiche bei reduziertem Platzbedarf.Due to the enlarged radii at the clamping points the mechanical stresses at the slot ends are reduced. The arrangement according to FIG. 6 enables an optimal length of the Torsion areas with reduced space requirements.

    Claims (5)

    1. Micromechanical electrostatic relay having a base substrate (10) which is fitted with a base electrode layer (11) and a basic contact piece (13), and having an anchor substrate (1) which is located on the base substrate and has an anchor spring tongue (2; 20; 30; 40) which is cut free, is attached on one side and is fitted with an anchor electrode layer (5) and, in the vicinity of its free end on a partially cut-free contact spring section (21; 31; 41), with an anchor contact piece (7), the spring tongue (2; 20; 30; 40) in the rest state forming with its anchor electrode layer (5) a wedge-shaped air gap (14) with respect to the base electrode layer (11), and, in the operating state and because of a control voltage applied between the two electrodes, being closely joined to the base substrate (10) so that the two contact pieces (7, 13) rest on one another with the contact spring section (21; 31; 41) being elastically deformed, characterized in that the contact spring section (21; 31; 41) is surrounded on all sides by the spring tongue (20; 30; 40) and is connected to the latter axially symmetrically via spring webs (22; 32, 34; 42) in the form of a sun wheel whose spokes are bounded by slots (23; 33, 35; 43) which are arranged in an annular shape with a mutual overlap and whose angle ranges together add up to more than 360°.
    2. Relay according to Claim 1, characterized in that the slots (23; 33, 35) are in the form of spiral sections which engage in one another concentrically.
    3. Relay according to Claim 1 or 2, characterized in that the angle ranges of the slots (23; 33, 35; 43) together add up to 1.5 to 3 times a complete circle.
    4. Relay according to one of Claims 1 to 3, characterized in that the contact spring section (21; 31; 41) is kept by spring webs (32, 34) in the form of two concentrically arranged sun wheels whose spokes in each case engage in one another in the form of a spiral, running in opposite directions with respect to one another.
    5. Relay according to Claim 1, characterized in that the spring webs (42), as spokes of a sun wheel, each have two spoke sections (42a, 42b), running in opposite directions, in the form of spiral sections running in opposite directions.
    EP95115648A 1994-10-18 1995-10-04 Micromechanical relay Expired - Lifetime EP0710971B1 (en)

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    DE4437259A DE4437259C1 (en) 1994-10-18 1994-10-18 Micro-mechanical electrostatic relay with spiral contact spring bars
    DE4437259 1994-10-18

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    EP0710971B1 true EP0710971B1 (en) 1998-01-28

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    DE59501367D1 (en) 1998-03-05
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    JPH08227646A (en) 1996-09-03
    US5673785A (en) 1997-10-07

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