EP0707175B1 - Burning device with a nozzle - Google Patents
Burning device with a nozzle Download PDFInfo
- Publication number
- EP0707175B1 EP0707175B1 EP95202720A EP95202720A EP0707175B1 EP 0707175 B1 EP0707175 B1 EP 0707175B1 EP 95202720 A EP95202720 A EP 95202720A EP 95202720 A EP95202720 A EP 95202720A EP 0707175 B1 EP0707175 B1 EP 0707175B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- nozzle
- tube
- burning device
- combustion chamber
- tubes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/46—Details, e.g. noise reduction means
- F23D14/48—Nozzles
- F23D14/58—Nozzles characterised by the shape or arrangement of the outlet or outlets from the nozzle, e.g. of annular configuration
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D2900/00—Special features of, or arrangements for burners using fluid fuels or solid fuels suspended in a carrier gas
- F23D2900/14—Special features of gas burners
- F23D2900/14642—Special features of gas burners with jet mixers with more than one gas injection nozzles or orifices for a single mixing tube
Definitions
- the invention relates to a combustion device with a nozzle according to the Preamble of claim 1, for example a quartz burner of a diffusion furnace with an injector nozzle.
- Such a nozzle is known from US Pat. No. 4,680,008.
- an injector nozzle which consists of a quartz tube with an expanding end piece. Hydrogen (H 2 ) is introduced into the combustion chamber through this injector nozzle.
- Another quartz tube which partially surrounds the injector nozzle, simultaneously introduces oxygen (O 2 ) into the combustion chamber.
- oxygen O 2
- water vapor H 2 O
- semiconductor manufacturing such an arrangement is used to form oxide layers in various semiconductor processes.
- DE-A1-42 31 866 describes a burner and a method for burning Low calorific gas known. That in a mixing chamber with combustion air mixed gas of low calorific value is there through several tubular Throttle installation nozzles injected into the combustion chamber.
- the present invention has for its object a combustion device with a nozzle with improved flame shape.
- the flame While in the known arrangement the flame is one compared to the diameter very large length and very large close to the outlet opening of the nozzle Has heat, the flame is essential in the arrangement according to the invention shorter with a larger diameter.
- a slight leads Misalignment of the injector nozzle for example, in that the outlet area of the Nozzle continues to burn over time, causing the flame hits the inner wall of the combustion chamber and leads to recrystallization there.
- Both the recrystallizations on the nozzle opening as well as on the inner wall of the Combustion chamber significantly increase the number of particles in the combustion chamber, which is particularly important in semiconductor manufacturing must be avoided.
- the tubes and tube are made of quartz. This ensures that as little foreign particles as possible in the Combustion temperatures prevailing from the nozzle itself get into the combustion chamber and that the quality of the Products, especially in semiconductor manufacturing, if possible is high.
- Tubes in a further embodiment of the invention fused together and melted into the tube.
- a further simplification of the production results in a further configuration, in which the tubes and the tube is in the form of straight circular cylinders.
- Fig. 1 denotes a quartz combustion chamber, the at one end to an outlet opening 2 for the in the combustion chamber 1 tapered water vapor generated.
- the injector 3 At the other end of the combustion chamber 1 is the injector 3 with the Injector nozzle 4 attached.
- Hydrogen through the injector nozzle 4 into the combustion chamber 1 conducts and mixes with the oxygen there through a further feed line 6 through the injector 3 and the annular gap 13 around the nozzle 4 in the combustion chamber 1 flows.
- a heating element, not shown, outside the combustion chamber 1 heats the combustion chamber 1, thereby Hydrogen-oxygen mixture with formation of water vapor burns in the combustion chamber 1.
- the flame 7 has about the shape shown.
- Fig. 2 shows a sectional drawing through part of the Injector 3 with the nozzle 4.
- the nozzle 4 consists of a Tube 8 in which a bundle 9 consisting of a number of tubes with a much smaller diameter than that outer tube 8, fixed - melted, for example - is.
- the tubes are parallel to each other arranged, fused together to form the bundle 9 and have, like the tube 8, the shape of straight circular cylinders on.
- On the pipe 8 is a conical pipe section 10 attached - for example welded - for connection the nozzle 4 with the hydrogen supply line 5.
- the injector 3 consists of two tubes 11 and 12 attached to each other, between the tube 11 and the tube 8 of the nozzle 4 remains narrow annular gap 13 through which the Oxygen flows into the combustion chamber 1.
- the Flame 7 has a ratio of length to diameter at the thickest point of about 4: 1, while at the known arrangement the flame has a ratio of about 60: 1. Since also in the inventive Arrange the flame 7 not directly at the outlet opening the nozzle 4 burns, is the number in the combustion chamber 1 passing particles lower, which are characterized by Remove recrystallization from nozzle 4. This prevents further misalignment of the nozzle 4 after a short time Operating time, whereby the flame 7 as in the known Then hit the inner wall of the combustion chamber 1 and can generate particles there by recrystallization. Since the erosion of the nozzle 4 in front of it much more slowly goes, the nozzle 4 can be about a factor of three longer be used. Ultimately, the quality of the Products improved due to the lower number of particles.
- the injector nozzle 4 is manufactured in such a way that the Tubes are pushed lengthwise into the tube 8, so that the tube 8 is filled as well as possible.
- the tubes are then in a heating process in the tube 8th welded in, fused together, and at the same time the bundle 9 and the tube 8 are pulled until the desired one Outside diameter of the tube 8 is reached.
- the example shown was about 50 tubes in diameter 1.5 mm inserted into a tube 8 with a diameter of 20 mm, and then the tube 8 was made to an outside diameter drawn by 16.5 mm.
- 4 was from the nozzle Part of the length about 8 mm separated and with the conical pipe section 10 welded.
- Such a nozzle is used in diffusion furnaces semiconductor manufacturing, but also other possible uses like a combustion device for hazardous gases are due to the very high achievable with this nozzle Combustion temperatures possible.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Gas Burners (AREA)
- Pre-Mixing And Non-Premixing Gas Burner (AREA)
Description
Die Erfindung betrifft eine Verbrennungsvorrichtung mit einer Düse gemäß dem Oberbegriff des Anspruchs 1, beispielsweise einen Quarzbrenner eines Diffusionsofens mit einer Injektordüse.The invention relates to a combustion device with a nozzle according to the Preamble of claim 1, for example a quartz burner of a diffusion furnace with an injector nozzle.
Eine solche Düse ist aus der US-PS 4 680 008 bekannt. In einer Brennkammer befindet sich eine Injektordüse, die aus einem Quarzrohr mit einem sich aufweitenden Endstück besteht. Durch diese Injektordüse wird Wasserstoff (H2) in die Brennkammer eingeleitet. Durch ein weiteres Quarzrohr, das die Injektordüse teilweise umgibt, wird gleichzeitig Sauerstoff (O2) in die Brennkammer eingeleitet. In einem Verbrennungsprozeß bildet sich Wasserdampf (H2O) in der Brennkammer. Bei der Halbleiterherstellung wird eine derartige Anordnung zur Bildung von Oxidschichten bei verschiedenen Halbleiterprozessen benutzt.Such a nozzle is known from US Pat. No. 4,680,008. In a combustion chamber there is an injector nozzle, which consists of a quartz tube with an expanding end piece. Hydrogen (H 2 ) is introduced into the combustion chamber through this injector nozzle. Another quartz tube, which partially surrounds the injector nozzle, simultaneously introduces oxygen (O 2 ) into the combustion chamber. In a combustion process, water vapor (H 2 O) forms in the combustion chamber. In semiconductor manufacturing, such an arrangement is used to form oxide layers in various semiconductor processes.
Aus der DE-A1-42 31 866 ist ein Brenner und ein Verfahren zum Verbrennen von Gas mit niedrigem Brennwert bekannt. Das in einer Mischkammer mit Verbrennungsluft gemischte Gas niedrigen Brennwertes wird dort durch mehrere rohrförmige Düsen eines Drosseleinbaus in die Brennkammer injiziert.DE-A1-42 31 866 describes a burner and a method for burning Low calorific gas known. That in a mixing chamber with combustion air mixed gas of low calorific value is there through several tubular Throttle installation nozzles injected into the combustion chamber.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Verbrennungsvorrichtung mit einer Düse mit verbesserter Flammform zu schaffen.The present invention has for its object a combustion device with a nozzle with improved flame shape.
Diese Aufgabe wird erfindungsgemäß durch die in Anspruch 1 angegebene Verbrennungsvorrichtung gelöst.This object is achieved by the combustion device specified in claim 1 solved.
Während bei der bekannten Anordnung die Flamme eine im Vergleich zum Durchmesser sehr große Länge und nahe an der Austrittsöffnung der Düse sehr große Hitze aufweist, ist die Flamme bei der erfindungsgemäßen Anordnung wesentlich kürzer bei größerem Durchmesser. Bei der bekannten Anordnung führt eine geringfügige Dejustierung der Injektordüse beispielsweise dadurch, daß der Austrittsbereich der Düse im Laufe der Zeit immer weiter abbrennt, dazu, daß die Flamme auf die Innenwand der Brennkammer trifft und dort zu Rekristallisationen führt. Sowohl die Rekristallisationen an der Düsenöffnung als auch an der Innenwand der Brennkammer erhöhen erheblich die Anzahl der Partikel in der Brennkammer, was gerade bei der Halbleiterherstellung vermieden werden muß. Bei der erfindungsgemäßen Anordnung entfällt die äußerst kritische Justierung der Injektordüse, und außerdem ist die Partikelbildung durch Rekristallisationen deutlich geringer. Aufgrund höherer Austrittsgeschwindigkeit des Wasserstoffs aus der Düse weist die Flamme bei gleichem Gasdurchsatz wie bei einer Düse der bekannten Art erst in einem Abstand von der Düsenaustrittsöffnung eine große Hitze auf, so daß die Düse in wesentlich geringerem Maße abbrennt und deshalb deutlich länger einsetzbar ist.While in the known arrangement the flame is one compared to the diameter very large length and very large close to the outlet opening of the nozzle Has heat, the flame is essential in the arrangement according to the invention shorter with a larger diameter. In the known arrangement, a slight leads Misalignment of the injector nozzle, for example, in that the outlet area of the Nozzle continues to burn over time, causing the flame hits the inner wall of the combustion chamber and leads to recrystallization there. Both the recrystallizations on the nozzle opening as well as on the inner wall of the Combustion chamber significantly increase the number of particles in the combustion chamber, which is particularly important in semiconductor manufacturing must be avoided. In the arrangement according to the invention there is no extremely critical adjustment of the injector nozzle, and also the particle formation by recrystallization much lower. Because of the higher exit speed of the hydrogen from the nozzle has the Flame with the same gas flow rate as with a nozzle known type only at a distance from the nozzle outlet opening a high heat so that the nozzle in burns to a much lesser extent and therefore clearly is longer usable.
In einer Ausgestaltung der Erfindung ist vorgesehen, daß die Röhrchen und das Rohr aus Quarz bestehen. Dies gewährleistet, daß möglichst wenig Fremdpartikel bei den bei der Verbrennung herrschenden Temperaturen aus der Düse selbst in die Brennkammer gelangen und daß die Qualität der Produkte vor allem bei der Halbleiterherstellung möglichst hoch ist.In one embodiment of the invention it is provided that the tubes and tube are made of quartz. This ensures that as little foreign particles as possible in the Combustion temperatures prevailing from the nozzle itself get into the combustion chamber and that the quality of the Products, especially in semiconductor manufacturing, if possible is high.
Zur festen Verbindung der Röhrchen und des Rohres sind die Röhrchen in einer weiteren Ausgestaltung der Erfindung miteinander verschmolzen und in das Rohr eingeschmolzen.For the firm connection of the tubes and the tube are the Tubes in a further embodiment of the invention fused together and melted into the tube.
In einer Weiterbildung der Erfindung ist vorgesehen, daß die Längsachsen der Röhrchen parallel zueinander und parallel zur Längsachse des Rohres angeordnet sind. Diese Ausgestaltung hat den Vorteil, daß die schwierige Herstellung des Rohrbündels vereinfacht wird. Außerdem wird dadurch die Richtung, in der der Wasserstoff aus der Düse austritt, und die Form der Flamme in vorteilhafter Weise bestimmt.In a development of the invention it is provided that the longitudinal axes of the tubes parallel to each other and are arranged parallel to the longitudinal axis of the tube. This configuration has the advantage that the difficult Production of the tube bundle is simplified. Furthermore this will change the direction in which the hydrogen leaves the Nozzle emerges, and the shape of the flame in advantageous Determined way.
Eine weitere Vereinfachung der Herstellung ergibt sich bei einer weitergehenden Ausgestaltung, bei der die Röhrchen und das Rohr die Form von geraden Kreiszylindern aufweisen.A further simplification of the production results in a further configuration, in which the tubes and the tube is in the form of straight circular cylinders.
Die Erfindung wird nachstehend anhand der Zeichnung näher erläutert. Es zeigen:
- Fig. 1
- eine schematische Darstellung eines Brenners für einen Diffusionsofen,
- Fig. 2
- eine Injektordüse in einer Schnittzeichnung und
- Fig. 3
- die Injektordüse in Vorderansicht.
- Fig. 1
- 1 shows a schematic representation of a burner for a diffusion furnace,
- Fig. 2
- an injector nozzle in a sectional drawing and
- Fig. 3
- the injector nozzle in front view.
Mit 1 ist in Fig. 1 eine Quarzbrennkammer bezeichnet, die
sich an einem Ende zu einer Austrittsöffnung 2 für den in
der Brennkammer 1 erzeugten Wasserdampf verjüngt. Am
anderen Ende der Brennkammer 1 ist der Injektor 3 mit der
Injektordüse 4 angebracht. Durch die Zuleitung 5 wird
Wasserstoff durch die Injektordüse 4 in die Brennkammer 1
geleitet und vermischt sich dort mit dem Sauerstoff, der
durch eine weitere Zuleitung 6 durch den Injektor 3 und
den ringförmigen Spalt 13 um die Düse 4 in die Brennkammer
1 strömt. Ein nicht dargestelltes Heizelement außerhalb
der Brennkammer 1 beheizt die Brennkammer 1, wodurch das
Wasserstoff-Sauerstoff-Gemisch unter Bildung von Wasserdampf
in der Brennkammer 1 verbrennt. Die Flamme 7 hat
dabei etwa die dargestellte Form.1 in Fig. 1 denotes a quartz combustion chamber, the
at one end to an outlet opening 2 for the in
the combustion chamber 1 tapered water vapor generated. At the
the other end of the combustion chamber 1 is the
Fig. 2 zeigt eine Schnittzeichnung durch einen Teil des
Injektors 3 mit der Düse 4. Die Düse 4 besteht aus einem
Rohr 8, in dem ein Bündel 9, bestehend aus einer Anzahl
von Röhrchen mit wesentlich geringerem Durchmesser als das
äußere Rohr 8, fest angeordnet - beispielsweise eingeschmolzen
- ist. Die Röhrchen sind parallel zueinander
angeordnet, miteinander zu dem Bündel 9 verschmolzen und
weisen ebenso wie das Rohr 8 die Form von geraden Kreiszylindern
auf. An dem Rohr 8 ist ein konisches Rohrstück 10
angebracht - beispielsweise angeschweißt - zur Verbindung
der Düse 4 mit der Wasserstoffzuleitung 5. Der Injektor 3
besteht aus zwei aneinander angebrachten Rohren 11 und 12,
wobei zwischen dem Rohr 11 und dem Rohr 8 der Düse 4 ein
schmaler ringförmiger Spalt 13 bleibt, durch den der
Sauerstoff in die Brennkammer 1 einströmt.Fig. 2 shows a sectional drawing through part of the
In der Vorderansicht der Injektordüse 4 in Fig. 3 ist
deutlich das aus einer Mehrzahl von Röhrchen bestehende
Bündel 9 erkennbar. Die genannten Vorteile werden in
besonderem Maße erreicht, wenn das Bündel 9 aus mindestens
25 Röhrchen besteht.In the front view of the
Bei der gezeigten Ausgestaltung der Erfindung weist die
Flamme 7 ein Verhältnis von Länge zu Durchmesser an der
dicksten Stelle von etwa 4 : 1 auf, während bei der
bekannten Anordnung die Flamme ein Verhältnis von etwa
60 : 1 aufweist. Da außerdem bei der erfindungsgemäßen
Anordnung die Flamme 7 nicht direkt an der Austrittsöffnung
der Düse 4 brennt, ist die Anzahl der in die Brennkammer
1 gelangenden Partikel geringer, die sich durch
Rekristallisation an der Düse 4 ablösen. Dies verhindert
weiterhin eine Dejustierung der Düse 4 bereits nach kurzer
Betriebsdauer, wodurch die Flamme 7 wie bei der bekannten
Anordnung dann auf die Innenwand der Brennkammer 1 treffen
und dort Partikel durch Rekristallisation erzeugen kann.
Da der Abbrand der Düse 4 wesentlich langsamer vor sich
geht, kann die Düse 4 etwa um den Faktor drei länger
eingesetzt werden. Letzlich wird auch die Qualität der
Produkte aufgrund der geringeren Partikelzahl verbessert. In the embodiment of the invention shown, the
Flame 7 has a ratio of length to diameter at the
thickest point of about 4: 1, while at the
known arrangement the flame has a ratio of about
60: 1. Since also in the inventive
Arrange the
Hergestellt wird die Injektordüse 4 in der Weise, daß die
Röhrchen längs in das Rohr 8 hineingeschoben werden, so
daß das Rohr 8 möglichst gut ausgefüllt ist. Die Röhrchen
werden dann in einem Erwärmungsprozeß in das Rohr 8
eingeschweißt, miteinander verschmolzen, und gleichzeitig
wird das Bündel 9 und das Rohr 8 gezogen, bis der gewünschte
Außendurchmesser des Rohres 8 erreicht ist. Im
gezeigten Beispiel wurden etwa 50 Röhrchen vom Durchmesser
1,5 mm in ein Rohr 8 vom Durchmesser 20 mm gesteckt, und
anschließend wurde das Rohr 8 auf einen Außendurchmesser
von 16,5 mm gezogen. Schließlich wurde von der Düse 4 ein
Teilstück etwa der Länge 8 mm abgetrennt und mit dem
konischen Rohrstück 10 verschweißt.The
Eingesetzt wird eine derartige Düse in Diffusionsöfen bei der Halbleiterherstellung, aber auch andere Einsatzmöglichkeiten wie eine Verbrennungsvorrichtung für Gefahrgase sind aufgrund der mit dieser Düse erreichbaren sehr hohen Verbrennungstemperaturen denkbar.Such a nozzle is used in diffusion furnaces semiconductor manufacturing, but also other possible uses like a combustion device for hazardous gases are due to the very high achievable with this nozzle Combustion temperatures possible.
Claims (6)
- A burning device with a nozzle (4) formed by a bundle of small tubes (9) arranged in one tube (8), characterized in that there is a gap between the tube (8) and a further tube (11) surrounding the nozzle (4).
- A burning device as claimed in Claim 1, characterized in that the small tubes (9) and the tube (8) are made of quartz.
- A burning device as claimed in Claim 1 or 2, characterized in that the small tubes (9) are fused together and are fused into the tube (8).
- A burning device as claimed in any one of the preceding Claims, characterized in that the longitudinal axes of the small tubes (9) are mutually parallel and parallel to the longitudinal axis of the tube (8).
- A burning device as claimed in any one of the preceding Claims, characterized in that the small tubes (9) and the tube (8) have the shape of straight circular cylinders.
- A method of manufacturing a nozzle (4) for a burning device as claimed in any one of the preceding Claims, characterized in that the tube (8) is filled with the plurality of small tubes (9), and in that the small tubes (9) and the tube (8) are heated and are drawn down to the desired diameter of the tube (8) and are welded together.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4436908A DE4436908A1 (en) | 1994-10-15 | 1994-10-15 | Nozzle for a combustion device |
| DE4436908 | 1994-10-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP0707175A1 EP0707175A1 (en) | 1996-04-17 |
| EP0707175B1 true EP0707175B1 (en) | 1999-01-20 |
Family
ID=6530867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP95202720A Expired - Lifetime EP0707175B1 (en) | 1994-10-15 | 1995-10-10 | Burning device with a nozzle |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5692891A (en) |
| EP (1) | EP0707175B1 (en) |
| JP (1) | JPH08178225A (en) |
| KR (1) | KR960014754A (en) |
| DE (2) | DE4436908A1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3853781B2 (en) * | 2003-11-25 | 2006-12-06 | 株式会社国際電気セミコンダクターサービス | Combustion heater and exhaust gas combustion apparatus |
| CN100520176C (en) * | 2006-03-31 | 2009-07-29 | 裕富宝厨具设备（深圳）有限公司 | Pre-mixing burner |
| US8920159B2 (en) * | 2011-11-23 | 2014-12-30 | Honeywell International Inc. | Burner with oxygen and fuel mixing apparatus |
| CN106287718A (en) * | 2016-08-25 | 2017-01-04 | 郭玉 | A kind of diffusion type gas spray gun |
| JP6551375B2 (en) * | 2016-12-07 | 2019-07-31 | トヨタ自動車株式会社 | Hydrogen gas burner structure and hydrogen gas burner apparatus equipped with the same |
| JP6940338B2 (en) * | 2017-09-04 | 2021-09-29 | トヨタ自動車株式会社 | Nozzle structure for hydrogen gas burner equipment |
| JP6863189B2 (en) * | 2017-09-05 | 2021-04-21 | トヨタ自動車株式会社 | Nozzle structure for hydrogen gas burner equipment |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3291189A (en) * | 1965-03-09 | 1966-12-13 | Rca Corp | Gas burner |
| US4202660A (en) * | 1970-04-22 | 1980-05-13 | Owens-Illinois, Inc. | Glass-ceramic article and method of making same |
| DD283452A5 (en) * | 1984-12-07 | 1990-10-10 | Veb Jenaer Glaswerk,Dd | METHOD FOR PRODUCING BURNER ELEMENTS OF PEBBLE GLASS |
| US4680008A (en) * | 1986-12-08 | 1987-07-14 | Northern Telecom Limited | High temperature furnace for integrated circuit manufacture |
| US5022853A (en) * | 1990-04-24 | 1991-06-11 | Micron Technology, Inc. | Semiconductor processing furnace tube and alignment jig |
| JP2524025B2 (en) * | 1991-09-24 | 1996-08-14 | 株式会社神戸製鋼所 | Low calorie gas combustion burner structure and its combustion method |
-
1994
- 1994-10-15 DE DE4436908A patent/DE4436908A1/en not_active Withdrawn
-
1995
- 1995-10-10 EP EP95202720A patent/EP0707175B1/en not_active Expired - Lifetime
- 1995-10-10 DE DE59504891T patent/DE59504891D1/en not_active Expired - Fee Related
- 1995-10-11 US US08/540,808 patent/US5692891A/en not_active Expired - Fee Related
- 1995-10-12 KR KR1019950035019A patent/KR960014754A/en not_active Application Discontinuation
- 1995-10-13 JP JP7265626A patent/JPH08178225A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP0707175A1 (en) | 1996-04-17 |
| KR960014754A (en) | 1996-05-22 |
| DE4436908A1 (en) | 1996-04-18 |
| DE59504891D1 (en) | 1999-03-04 |
| JPH08178225A (en) | 1996-07-12 |
| US5692891A (en) | 1997-12-02 |
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