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EP0695641A3 - Anordnung für plattenförmige Piezoaktoren und Verfahren zu deren Herstellung - Google Patents

Anordnung für plattenförmige Piezoaktoren und Verfahren zu deren Herstellung Download PDF

Info

Publication number
EP0695641A3
EP0695641A3 EP95250165A EP95250165A EP0695641A3 EP 0695641 A3 EP0695641 A3 EP 0695641A3 EP 95250165 A EP95250165 A EP 95250165A EP 95250165 A EP95250165 A EP 95250165A EP 0695641 A3 EP0695641 A3 EP 0695641A3
Authority
EP
European Patent Office
Prior art keywords
arrangement
manufacturing
plate
piezoelectric actuators
actuators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95250165A
Other languages
English (en)
French (fr)
Other versions
EP0695641A2 (de
EP0695641B1 (de
Inventor
Wolfgang Dr Thiel
Junming Dr Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Francotyp Postalia GmbH
Original Assignee
Francotyp Postalia GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Francotyp Postalia GmbH filed Critical Francotyp Postalia GmbH
Publication of EP0695641A2 publication Critical patent/EP0695641A2/de
Publication of EP0695641A3 publication Critical patent/EP0695641A3/de
Application granted granted Critical
Publication of EP0695641B1 publication Critical patent/EP0695641B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/161Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • B41J2/1634Manufacturing processes machining laser machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1643Manufacturing processes thin film formation thin film formation by plating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14379Edge shooter
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14491Electrical connection

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP95250165A 1994-08-03 1995-07-06 Anordnung für plattenförmige Piezoaktoren und Verfahren zu deren Herstellung Expired - Lifetime EP0695641B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4428847 1994-08-03
DE4428847 1994-08-03

Publications (3)

Publication Number Publication Date
EP0695641A2 EP0695641A2 (de) 1996-02-07
EP0695641A3 true EP0695641A3 (de) 1997-03-12
EP0695641B1 EP0695641B1 (de) 2001-04-04

Family

ID=6525703

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95250165A Expired - Lifetime EP0695641B1 (de) 1994-08-03 1995-07-06 Anordnung für plattenförmige Piezoaktoren und Verfahren zu deren Herstellung

Country Status (3)

Country Link
US (2) US5729263A (de)
EP (1) EP0695641B1 (de)
DE (1) DE59509149D1 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3697829B2 (ja) * 1997-04-09 2005-09-21 ブラザー工業株式会社 インクジェットヘッドの製造方法
JP3546430B2 (ja) 1997-06-27 2004-07-28 セイコーエプソン株式会社 圧電振動子ユニット、及びこれの製造方法、及びインクジェット式記録ヘッド
EP1046506A1 (de) * 1999-04-19 2000-10-25 Océ-Technologies B.V. Tintenstrahldruckkopf
GB2370153B (en) * 1999-04-20 2003-10-22 Seagate Technology Llc Electrode patterning for a differential pzt activator
US6755511B1 (en) * 1999-10-05 2004-06-29 Spectra, Inc. Piezoelectric ink jet module with seal
US20060222756A1 (en) * 2000-09-29 2006-10-05 Cordis Corporation Medical devices, drug coatings and methods of maintaining the drug coatings thereon
US7261735B2 (en) * 2001-05-07 2007-08-28 Cordis Corporation Local drug delivery devices and methods for maintaining the drug coatings thereon
US8182527B2 (en) 2001-05-07 2012-05-22 Cordis Corporation Heparin barrier coating for controlled drug release
US7195640B2 (en) * 2001-09-25 2007-03-27 Cordis Corporation Coated medical devices for the treatment of vulnerable plaque
WO2004043507A1 (en) * 2002-11-07 2004-05-27 Carbon Medical Technologies, Inc. Biocompatible medical device coatings
US6890067B2 (en) * 2003-07-03 2005-05-10 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US20050206679A1 (en) * 2003-07-03 2005-09-22 Rio Rivas Fluid ejection assembly
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
US7388319B2 (en) * 2004-10-15 2008-06-17 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
US7420317B2 (en) * 2004-10-15 2008-09-02 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
EP1836056B1 (de) 2004-12-30 2018-11-07 Fujifilm Dimatix, Inc. Tintenstrahldruck
US7380914B2 (en) * 2005-04-26 2008-06-03 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US7540593B2 (en) * 2005-04-26 2009-06-02 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
US8125120B2 (en) * 2008-02-15 2012-02-28 Nikon Corporation Vibration device, antidust device, camera, vibration device inspection method, method for manufacturing vibration device and vibration method
US9330698B1 (en) 2013-03-18 2016-05-03 Magnecomp Corporation DSA suspension having multi-layer PZT microactuator with active PZT constraining layers
US11205449B2 (en) 2013-03-18 2021-12-21 Magnecomp Corporation Multi-layer PZT microacuator with active PZT constraining layers for a DSA suspension
US9741376B1 (en) 2013-03-18 2017-08-22 Magnecomp Corporation Multi-layer PZT microactuator having a poled but inactive PZT constraining layer
US9070394B1 (en) 2013-03-18 2015-06-30 Magnecomp Corporation Suspension microactuator with wrap-around electrode on inactive constraining layer
US10607642B2 (en) 2013-03-18 2020-03-31 Magnecomp Corporation Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension
US9224410B1 (en) * 2013-09-04 2015-12-29 Magnecomp Corporation Suspension having microactuator grounded to opposite side of metal support layer
JP6451306B2 (ja) * 2014-12-23 2019-01-16 ブラザー工業株式会社 液体吐出装置及び液体吐出ヘッド
US10128431B1 (en) 2015-06-20 2018-11-13 Magnecomp Corporation Method of manufacturing a multi-layer PZT microactuator using wafer-level processing
JP7310133B2 (ja) * 2018-12-26 2023-07-19 セイコーエプソン株式会社 液体噴射ユニット

Citations (7)

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Publication number Priority date Publication date Assignee Title
DE3628346A1 (de) * 1986-08-21 1988-02-25 Siemens Ag Tintendruckkopf in dickschichttechnik
DE3805279A1 (de) * 1988-02-19 1989-08-31 Siemens Ag Piezoelektrischer tintendruckkopf und verfahren zu seiner herstellung
JPH0292644A (ja) * 1988-09-30 1990-04-03 Seiko Epson Corp インクジェットヘッド
EP0469916A1 (de) * 1990-08-03 1992-02-05 Canon Kabushiki Kaisha Farbstrahlaufzeichnungskopfherstellungsverfahren
EP0494401A1 (de) * 1991-01-07 1992-07-15 Sharp Kabushiki Kaisha Tintenstrahlkopf
EP0516284A2 (de) * 1991-05-28 1992-12-02 Brother Kogyo Kabushiki Kaisha Gerät mit Tröpfchenstrahl
WO1993025390A1 (en) * 1992-06-11 1993-12-23 Seiko Epson Corporation Ink jet head and method of manufacturing ink jet head

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US4551647A (en) * 1983-03-08 1985-11-05 General Electric Company Temperature compensated piezoelectric transducer and lens assembly and method of making the assembly
US4752788A (en) * 1985-09-06 1988-06-21 Fuji Electric Co., Ltd. Ink jet recording head
US4703333A (en) * 1986-01-30 1987-10-27 Pitney Bowes Inc. Impulse ink jet print head with inclined and stacked arrays
DE3710654A1 (de) 1987-03-31 1988-10-13 Siemens Ag Mehrschichtig aufgebauter tintenschreibkopf
DE3701470A1 (de) * 1987-01-20 1988-07-28 Siemens Ag Verfahren zur herstellung eines wandlerelementes fuer elektroakustische wandler
DE3725500A1 (de) * 1987-07-31 1989-02-09 Siemens Ag Piezoelektrischer tintendruckkopf und verfahren zu seiner herstellung
DE3725499A1 (de) * 1987-07-31 1989-02-09 Siemens Ag Piezoelektrischer tintendruckkopf und verfahren zu seiner herstellung
DE3733109A1 (de) 1987-09-30 1989-04-13 Siemens Ag Verfahren zur herstellung eines piezokeramik-elementes fuer einen tintenstrahlschreiber
DE3804165A1 (de) 1988-02-11 1989-08-24 Olympia Aeg Verfahren zum bestuecken eines tintenstrahldruckkopfes mit piezokristallen
EP0486256B1 (de) * 1990-11-13 1997-08-13 Citizen Watch Co., Ltd. Tintenstrahldruckkopf
JP3144949B2 (ja) * 1992-05-27 2001-03-12 日本碍子株式会社 圧電/電歪アクチュエータ
DE4225799A1 (de) 1992-07-31 1994-02-03 Francotyp Postalia Gmbh Tintenstrahldruckkopf und Verfahren zu seiner Herstellung
DE9404328U1 (de) * 1994-03-10 1994-05-19 Francotyp-Postalia Gmbh, 13409 Berlin Tintenstrahldruckkopf

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3628346A1 (de) * 1986-08-21 1988-02-25 Siemens Ag Tintendruckkopf in dickschichttechnik
DE3805279A1 (de) * 1988-02-19 1989-08-31 Siemens Ag Piezoelektrischer tintendruckkopf und verfahren zu seiner herstellung
JPH0292644A (ja) * 1988-09-30 1990-04-03 Seiko Epson Corp インクジェットヘッド
EP0469916A1 (de) * 1990-08-03 1992-02-05 Canon Kabushiki Kaisha Farbstrahlaufzeichnungskopfherstellungsverfahren
EP0494401A1 (de) * 1991-01-07 1992-07-15 Sharp Kabushiki Kaisha Tintenstrahlkopf
EP0516284A2 (de) * 1991-05-28 1992-12-02 Brother Kogyo Kabushiki Kaisha Gerät mit Tröpfchenstrahl
WO1993025390A1 (en) * 1992-06-11 1993-12-23 Seiko Epson Corporation Ink jet head and method of manufacturing ink jet head
EP0616890A1 (de) * 1992-06-11 1994-09-28 Seiko Epson Corporation Tintenstrahlkopf und verfahren zur herstellung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 014, no. 291 (M - 0989) 22 June 1990 (1990-06-22) *

Also Published As

Publication number Publication date
US5883651A (en) 1999-03-16
EP0695641A2 (de) 1996-02-07
US5729263A (en) 1998-03-17
EP0695641B1 (de) 2001-04-04
DE59509149D1 (de) 2001-05-10

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