EP0676792A3 - Ion technology device. - Google Patents

Ion technology device. Download PDF

Info

Publication number: EP0676792A3
Authority: EP; European Patent Office
Prior art keywords: technology device; ion technology; ion; technology
Prior art date: 1994-04-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP95104594A

Other languages

German (de)

French (fr)

Other versions

EP0676792A2 (en

Inventor

Waldemar Rauch

Davide Bassi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Atomika Instruments GmbH

Original Assignee

Atomika Instruments GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-04-05

Filing date

1995-03-29

Publication date

1996-01-10

1995-03-29 Application filed by Atomika Instruments GmbH filed Critical Atomika Instruments GmbH

1995-10-11 Publication of EP0676792A2 publication Critical patent/EP0676792A2/en

1996-01-10 Publication of EP0676792A3 publication Critical patent/EP0676792A3/en

Status Withdrawn legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
- H01J49/067—Ion lenses, apertures, skimmers
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/08—Ion sources
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/10—Lenses
- H01J2237/12—Lenses electrostatic
- H01J2237/1207—Einzel lenses

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
Electron Tubes For Measurement (AREA)

EP95104594A 1994-04-05 1995-03-29 Ion technology device. Withdrawn EP0676792A3 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
AT700/94		1994-04-05
AT70094		1994-04-05

Publications (2)

Publication Number	Publication Date
EP0676792A2 EP0676792A2 (en)	1995-10-11
EP0676792A3 true EP0676792A3 (en)	1996-01-10

Family

ID=3497513

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP95104594A Withdrawn EP0676792A3 (en)	1994-04-05	1995-03-29	Ion technology device.

Country Status (1)

Country	Link
EP (1)	EP0676792A3 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE102016110495B4 (en) *	2016-06-07	2018-03-29	Vacom Vakuum Komponenten & Messtechnik Gmbh	Apparatus and method for generating, storing and releasing ions from a surrounding residual gas atmosphere

Citations (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS59230246A (en) *	1983-06-14	1984-12-24	Shimadzu Corp	Tetrode-type mass spectrograph
EP0324247A2 (en) *	1988-01-11	1989-07-19	Eaton Corporation	Ion implantation surface charge control method and apparatus
US4916311A (en) *	1987-03-12	1990-04-10	Mitsubishi Denki Kabushiki Kaisha	Ion beaming irradiating apparatus including ion neutralizer
US5101105A (en) *	1990-11-02	1992-03-31	Univeristy Of Maryland, Baltimore County	Neutralization/chemical reionization tandem mass spectrometry method and apparatus therefor

1995
- 1995-03-29 EP EP95104594A patent/EP0676792A3/en not_active Withdrawn

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS59230246A (en) *	1983-06-14	1984-12-24	Shimadzu Corp	Tetrode-type mass spectrograph
US4916311A (en) *	1987-03-12	1990-04-10	Mitsubishi Denki Kabushiki Kaisha	Ion beaming irradiating apparatus including ion neutralizer
EP0324247A2 (en) *	1988-01-11	1989-07-19	Eaton Corporation	Ion implantation surface charge control method and apparatus
US5101105A (en) *	1990-11-02	1992-03-31	Univeristy Of Maryland, Baltimore County	Neutralization/chemical reionization tandem mass spectrometry method and apparatus therefor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 009, no. 106 (E - 313) 10 May 1985 (1985-05-10) *

Also Published As

Publication number	Publication date
EP0676792A2 (en)	1995-10-11

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EP0672577A3 (en)	1996-04-24	Shielding device.
EP0671133A3 (en)	1996-06-26	Skiboot.
EP0673859A3 (en)	1997-02-12	Metering device.

Legal Events

Date	Code	Title	Description
1995-08-25	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
1995-10-11	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): AT CH DE FR GB LI
1995-11-17	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
1996-01-10	AK	Designated contracting states	Kind code of ref document: A3 Designated state(s): AT CH DE FR GB LI
1996-01-31	17P	Request for examination filed	Effective date: 19951204
1996-11-27	17Q	First examination report despatched	Effective date: 19961011
1999-03-05	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
1999-04-21	18D	Application deemed to be withdrawn	Effective date: 19981110