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EP0640817B1 - Drehmomentsensor mit Verwendung einer magnetostriktiven Legierung und Verfahren zu dessen Herstellung - Google Patents

Drehmomentsensor mit Verwendung einer magnetostriktiven Legierung und Verfahren zu dessen Herstellung Download PDF

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Publication number
EP0640817B1
EP0640817B1 EP94113303A EP94113303A EP0640817B1 EP 0640817 B1 EP0640817 B1 EP 0640817B1 EP 94113303 A EP94113303 A EP 94113303A EP 94113303 A EP94113303 A EP 94113303A EP 0640817 B1 EP0640817 B1 EP 0640817B1
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EP
European Patent Office
Prior art keywords
torque sensor
sensor according
ribbon
magnetostrictive alloy
magnetostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP94113303A
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English (en)
French (fr)
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EP0640817A3 (de
EP0640817A2 (de
Inventor
Hiroyuki 611-Gou Raionzu-Manshon Hase
Rihito Shoji
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Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
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Publication date
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Publication of EP0640817A3 publication Critical patent/EP0640817A3/de
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
    • G01L3/101—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means
    • G01L3/102—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means involving magnetostrictive means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147—Alloys characterised by their composition
    • H01F1/153—Amorphous metallic alloys, e.g. glassy metals
    • H01F1/15341—Preparation processes therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N35/00—Magnetostrictive devices
    • H10N35/101—Magnetostrictive devices with mechanical input and electrical output, e.g. generators, sensors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor

Definitions

  • This invention relates to a torque sensor which comprises magnetostrictive alloy ribbon and which can be used for noncontact detection.
  • This invention also relates to a torque sensor which can be used for the purposes of e.g. detecting rotary operation force of a vehicle's (especially electromobile's) steering wheel, detecting torque of a machine to take up synthetic fiber, or detecting viscosity of materials.
  • This invention also relates to a method of manufacturing the torque sensor.
  • Torque sensors made from amorphous magnetic alloy having magnetostriction, or Fe-based alloy having magnetostriction have been known.
  • JP-A-3-26339 discloses a torque sensor which has a metal shaft whereon an amorphous magnetostrictive alloy ribbon sensitive to stress is glued. Elongated slits are formed in the amorphous magnetostrictive alloy ribbon of the torque sensor. The angles of the slits are +45° and -45° to the shaft longitudinally, when the magnetostrictive alloy ribbon adheres to the shaft's surface.
  • Fig. 10 shows an amorphous magnetostrictive alloy ribbon 21 by the prior art.
  • the width of slit s is 0.3mm.
  • the repetition pitch (spacing between the two slits) t is 2.0mm.
  • the angle of the slits ( ⁇ ) is 45°.
  • Length a' is circumferential in use for the torque sensor.
  • the slits are used to detect the torque's direction.
  • Coil means are arranged outside of the amorphous magnetostrictive alloy ribbon in order to detect magnetic property.
  • a flat metal ribbon is formed cylindrically and glued.
  • plural rows of slits formed on the metal ribbon might be distorted when bent, which is one of the causes of unevenness or damage to the metal ribbon.
  • a metal ribbon is fixed to a metal cylindrical jig and annealed.
  • a problem with this method is distortions of the slits in the process of fixing the ribbon to the jig, which resulted in damage to the ribbon.
  • the encircled parts of a metal ribbon 22 in Fig. 11 show that certain parts of the slits are often damaged, which might lead to a low yield of the product.
  • inner distortions are often caused even if there is no damaged part. As a result, good linear output is not obtained over a wide range of torque.
  • An object of the invention is to decrease damage to a magnetostrictive alloy ribbon during manufacturing and reduce unevenness in output of a torque sensor by improving the shape of the slits in a magnetostrictive alloy ribbon.
  • a torque sensor of this invention comprises a magnetostrictive alloy ribbon fixed to a surface of a shaft, and means for detecting magnetic change arranged outside said ribbon, wherein the magnetostrictive alloy ribbon possesses plural rows of plural holes disposed at a required angle with respect to the longitudinal direction of the shaft, and said rows of holes being arranged longitudinally with respect to said shaft.
  • the magnetostrictive alloy ribbon is formed cylindrically, so that the longitudinal direction is substantially vertical, and capable of withstanding a load of 10g or more uniformly applied on top of the ribbon (see Fig. 9b).
  • the magnetostrictive alloy ribbon is formed cylindrically, so that the longitudinal direction is substantially vertical, and capable of withstanding a load of 80g or more uniformly applied on top of the ribbon.
  • the dimension of the holes is from 2 to 5mm long, and from 0.1 to 2mm wide.
  • the holes are positioned in a line, and the spacing between adjacent holes in a line is from 0.1 to lmm, and the spacing between adjacent lines is from 0.5 to 5mm.
  • the plural hole lines are arranged obliquely in two directions to the shaft longitudinally.
  • the oblique angles are about +45° and about -45°.
  • the holes have a curved shape.
  • the curved portion of the holes has the shape corresponding to at least one of the group consisting of a circle, an ellipse, and an oval.
  • the magnetostrictive metal ribbon comprises amorphous magnetostrictive alloy.
  • the amorphous magnetostrictive alloy is at least one member selected from the group consisting of Fe-Cr-Si-B-based, Fe-Nb-Si-B-based, Fe-V-Si-B-based, Fe-Co-Si-B-based, Fe-W-Si-B-based, Fe-Ni-Cr-Si-B-based, Fe-Ni-Nb-B-based, and Fe-Ni-Mo-B-based alloy.
  • the composition of the amorphous magnetostrictive alloy is Fe:75atom%, Cr:4atom%, Si:12.5atom%, B:8.5atom% (hereinafter, Fe 75 Cr 4 Si 12.5 B 8.5 ).
  • the means for detecting magnetic change is a coil means.
  • the unevenness of the output voltage is 10% or less per full-scale of torque (100kgfcm).
  • a method of manufacturing a torque sensor of this invention comprising the steps of:
  • the annealing temperature ranges from 350°C to 600°C. It is especially preferable that the annealing temperature is the crystalization temperature or less of the magnetostrictive alloy, and is suitable for curling the magnetostrictive alloy ribbon.
  • the annealing atmosphere is at least one non-oxidizing atmosphere selected from the group consisting of an inert atmosphere and a depressurized atmosphere.
  • the depressurized atmosphere ranges from 1 torr to 1 ⁇ 10 -6 torr.
  • the inert atmosphere is at least one gas selected from the group consisting of Ar, He, Ne, N 2 , and CO.
  • the material of the inner structure has a high coefficient of thermal expansion while the material of the outer structure has a low coefficient of thermal expansion.
  • the distance between the inner structure and the outer structure ranges from 10 to 500 ⁇ m.
  • the magnetostrictive alloy ribbon of the torque sensor of the invention as mentioned above has plural rows of plural hole groups arranged at a required angle to a shaft longitudinally, which can decrease damage to the magnetostrictive alloy ribbon during manufacturing and reduce the output unevenness of the torque sensor.
  • the reason for this is as follows.
  • Plural rows of plural hole groups are formed instead of slits of the prior art, which increase the stability of sequent parts in the direction of the face of the magnetostrictive alloy ribbon. As a result, even if stress is applied, the force is not concentrated but scattered, and therefore the strength is increased.
  • the magnetostrictive alloy ribbon is formed cylindrically, so that the longitudinal direction is substantially vertical, and is capable of withstanding a load of 10g or more uniformly applied on top of the ribbon, which can decrease damage to the magnetostrictive alloy ribbon during manufacturing and reduce output unevenness of a torque sensor.
  • the magnetostrictive alloy ribbon is formed cylindrically, so that the longitudinal direction is substantially vertical, and is capable of withstanding a load of 80g or more uniformly applied on top of the ribbon, which can decrease damage to the magnetostrictive alloy ribbon during manufacturing and reduce output unevenness of a torque sensor.
  • the dimension of the holes comprising the hole groups is from 2 to 5mm long, and from 0.1 to 2mm wide, which can decrease damage to the magnetostrictive alloy ribbon during manufacturing, and reduce output unevenness of a torque sensor.
  • the hole groups form lines, and the spacing between adjacent holes in the same line is from 0.1 to 1mm, and the spacing between two lines is from 0.5 to 5mm, which can decrease damages of the magnetostrictive alloy ribbon during manufacturing and reduce output unevenness of a torque sensor.
  • the plural hole lines and groups are arranged obliquely in two directions to the shaft longitudinally, which can detect more precisely the longitudinal and circumferential distortion. It is especially preferable that the oblique angle is substantially +45° and -45°.
  • the holes have a curved shape, which is hardly damaged under stress. It is especially preferable in this method that the shape is at least one shape selected from the group consisting of a circle, an ellipse, and an oval.
  • the magnetostrictive metal ribbon comprises amorphous magnetostrictive alloy, which can detect torque precisely.
  • the amorphous magnetostrictive alloy is at least one member selected from the group consisting of Fe-Cr-Si-B-based, Fe-Nb-Si-B-based, Fe-V-Si-B-based, Fe-Co-Si-B-based, Fe-W-Si-B-based, Fe-Ni-Cr-Si-B-based, Fe-Ni-Nb-B-based, and Fe-Ni-Mo-B-based alloy.
  • the means for detecting magnetic change is a coil means, which enables the detection of torque more precisely.
  • the unevenness of the output voltage is 10% or less of the torque's full-scale (100kgfcm), which enables the detection of torque more precisely.
  • the annealing temperature ranges from 350°C to 600°C, which is suitable for curling the magnetostrictive metal ribbon.
  • the annealing atmosphere is at least one non-oxidizing atmosphere selected from the group consisting of an inert atmosphere and a depressurized atmosphere, which can be suitable for inhibiting the oxidation of the magnetostrictive alloy ribbon and curling the magnetostrictive alloy ribbon. It is also preferable as a non-oxidising atmosphere that the depressurized atmosphere ranges from 1 torr to 1 ⁇ 10 -6 torr, or that the inert atmosphere is at least one gas selected from the group consisting of Ar, He, Ne, N 2 , and CO.
  • the material of the inner structure has a high coefficient of thermal expansion while the material of the outer structure has a low coefficient of thermal expansion.
  • the distance between the inner structure and the outer structure at room temperature may be reduced because the addition of the heat in annealing will have less effect, which will make it possible to wind the magnetostrictive metal ribbon uniformly.
  • Softer metals like brass, copper, and aluminum are preferred for the material of the inner structure, because the metals have high coefficients of thermal expansion.
  • titanium, titanium steel, steel, Fe-nickel steel, stainless steel, nickel and the like are preferred for the material of the outer structure, because the metals have low coefficients of thermal expansion.
  • the distance between the inner structure and the outer structure ranges from 10 to 500 ⁇ m, which is more suitable to curl the magnetostrictive metal ribbon uniformly.
  • the method of this invention does not generate distortions of slits which have been generated in the manufacturing process of the prior art. As a result, output repeatability of the torque sensor may be improved since damage can be prevented.
  • Fig. 1 shows an exploded view of a magnetostrictive metal ribbon which is used for a torque sensor of one embodiment of the invention.
  • Fig. 2 shows an enlarged section view of holes of the torque sensor of Fig. 1.
  • Fig. 3 shows a view of forming the magnetostrictive metal ribbon into cylindrical shape.
  • the ribbon is used for a torque sensor of one embodiment of the invention.
  • Fig. 4 shows the structure of a torque sensor of one embodiment of the invention.
  • Fig. 5(a) and Fig. 5(b) explain the process of forming cylindrically a magnetostrictive metal ribbon of one embodiment of the invention, and Fig. 5(a) shows the process of winding cylindrically the magnetostrictive metal ribbon on an inner structure, and Fig. 5(b) shows the process of applying an outer structure on the magnetostrictive metal ribbon and annealing.
  • Fig. 6(a) and Fig. 6(b) show enlarged section views of a magnetostrictive metal ribbon formed with elliptic holes of one embodiment of the invention, and Fig. 6(a) explains plural holes, and Fig. 6(b) explains one of the holes.
  • Fig. 7(a) and Fig. 7(b) show enlarged section views of a magnetostrictive metal ribbon formed with oval holes of one embodiment of the invention, and Fig. 7(a) explains plural holes, and Fig. 7(b) explains one of the holes.
  • Fig. 8(a) and Fig. 8(b) show enlarged section views of a magnetostrictive metal ribbon formed with rectangle holes of one embodiment of the invention, and Fig. 8(a) explains plural holes, and Fig. 8(b) explains one of the holes.
  • Fig. 9(a) and Fig. 9(b) show how to measure the loading strength in order to compare a magnetostrictive metal ribbon of this invention with an example of the prior art.
  • Fig. 9(a) shows the process of placing a cylindrical magnetostrictive metal ribbon on a glass plate and then placing another glass plate on the cylindrical magnetostrictive metal ribbon.
  • Fig. 9(b) shows the process of placing a weight on the glass plate on the cylindrical magnetostrictive metal ribbon.
  • Fig. 10 shows an exploded view of a magnetostrictive metal ribbon formed with slits according to the prior art.
  • Fig. 11 explains the damaged parts of the magnetostrictive metal ribbon formed with slits according to the prior art.
  • Fig. 12 shows an example of the optimum output and unevenness range of a torque sensor which was formed with elliptic holes of one embodiment of the invention.
  • Fig. 13 shows an example of the optimum output and unevenness range of a torque sensor which was formed with oval holes of one embodiment of the invention.
  • Fig. 14 shows an example of the optimum output and unevenness range of a torque sensor which was formed with rectangle holes of one embodiment of the invention.
  • Fig. 15 shows an example of the optimum output and unevenness range of a torque sensor which was formed with slits of the prior art.
  • Table 1 shows some examples of the materials of an amorphous magnetostrictive alloy ribbon suitable for use in this invention. Table 1 also shows the crystallization temperature of the materials. Composition (atom%) Crystallization Temperature(°C) Fe 75 Cr 4 Si 12.5 B 8.5 460 Fe 70 Cr 4 Si 16 B 10 480 Fe 80 NbSi 6 B 13 510 Fe 79 V 2 Si 6 B 13 480 Fe 70 Co 8 Si 13 B 9 520 Fe 74 W 2 Si 10 B 15 560 Fe 40 Ni 35 Cr 4 Si 12 B 9 440 Fe 40 Ni 39 Nb 2 B 19 400 Fe 40 Ni 38 Mo 4 B 18 390
  • Fig. 1 shows an exploded view of the magnetostrictive metal ribbon which is used for the torque sensor of one embodiment of the invention.
  • the number 2 in Fig. 1 is the amorphous magnetostrictive metal ribbon.
  • the composition of the amorphous magnetostrictive alloy ribbon 2 was Fe 75 Cr 4 Si 12.5 B 8.5 .
  • the thickness was 32 ⁇ m
  • the crystallization temperature was 460°C
  • the saturation magnetostriction constant was 22ppm.
  • the magnetostrictive alloy ribbon 2 was produced by a single roller rapid quenching technique (e.g. it was rapidly quenched from 1,400°C to room temperature at 10,000°C per second).
  • the center distances between two hole lines (j and k) were 2mm respectively.
  • the above-mentioned holes were produced by an etching process.
  • the direction of longitudinal (a) becomes circumferential when used for a torque sensor.
  • the white holes and slashed holes in Fig. 1 are a little different in dimension, which is explained in Fig. 2.
  • the white hole (ellipse) and the slashed hole (ellipse) in Fig. 2 are equivalent to the ones in Fig. 1 respectively.
  • the white holes are 4mm long (l 1 to l 3 ) and 0.3mm wide (p 1 ).
  • the slashed hole is 2.95mm long (l 4 ) and 0.3mm wide (p 2 ).
  • the center distance between a hole line and the next one (n) is 2mm.
  • Fig. 3 shows the formation of a magnetostrictive metal ribbon 2 into a cylindrical shape, which is used for a torque sensor of one embodiment of the invention. This was produced by etching the amorphous magnetostrictive alloy ribbon 2 and giving it a cylindrical curl by annealing (440°C) to fit the periphery of the inner structure 4 in Fig. 5(a).
  • Fig. 5(a) shows an example of the process for curling the amorphous magnetostrictive alloy ribbon 2.
  • the number 4 in the figure is a brass inner structure whose periphery is equal in the peripheral diameter to the diameter of the shaft (11.80mm at 20°C).
  • the number 5 is an outer structure whose inner diameter is processed about 130 ⁇ m larger than the peripheral diameter of the inner structure (11.93mm at 20°C). Titanium steel was used as the material.
  • the magnetostrictive alloy ribbon was placed between the inner structure 4 and the outer structure 5, and distorted cylindrically. In this condition, the magnetostrictive alloy ribbon was annealed in a vacuum at 440°C (at the crystallization temperature or less) for 40 minutes to be curled.
  • the coefficient of thermal expansion of the titanium steel was 9.4 ⁇ 10 -6 /°C, and the coefficient of thermal expansion of the brass was 22 ⁇ 10 -6 /°C.
  • the difference between the inner diameter of the outer structure and the peripheral diameter of the inner structure was 0.068mm.
  • the half of the difference (0.034mm or 34 ⁇ m) was the distance.
  • FIG. 9 shows how to measure the loading strength to compare the magnetostrictive metal ribbon of the invention and that of the prior art.
  • a cylindrical magnetostrictive metal ribbon 11 was placed on a glass plate 12, on which a glass plate 13 (2g in weight) was placed, on which a weight 14 was placed. Increasing the load in this way, the load was examined visually when the cylindrical magnetostrictive metal ribbon 11 was distorted. As a result, the cylindrical magnetostrictive ribbon shown in Fig. 3 of the embodiment began to deform at 80 to 120g in weight.
  • the sample of the embodiment was formed with plural hole groups in plural rows, which increased sequent parts in the direction of the face of the magnetostrictive alloy ribbon. As a result, even if stress was applied, the force was not concentrated but scattered, and the strength was increased. Substantially, the amorphous alloy ribbon shown in Fig.
  • Fig. 11 shows the patterns of the damage classified through a number of experiments. In Fig. 11, encircled parts of the magnetostrictive alloy ribbon 22 (u 1 to u 7 ) show that damage was concentrated on the center parts or edges of the slits. The cause of the damage, though not certain, is considered that the stress is concentrated on edges because of the slit's distortion or the like by the outer force.
  • Fig. 4 shows the structure of a torque sensor of one embodiment of the invention.
  • the number 1 in the figure is a titanium shaft whose diameter (r) is 11.8mm.
  • Magnetostrictive alloy ribbon 2 is an amorphous magnetostrictive alloy ribbon produced by a single roller rapid quenching technique (e.g. it was quenched from 1,400°C to room temperature at 10,000°C per second) which was etched with plural rows of plural oval holes (2a and 2b) in the helical direction of +45° and -45° to the shaft longitudinally.
  • the composition of the amorphous magnetostrictive alloy ribbon 2 was Fe 75 Cr 4 Si 12.5 B 8.5 .
  • the thickness was 32 ⁇ m, the crystallization temperature was 460°C, and the saturation magnetostriction constant was 22ppm.
  • amorphous magnetostrictive alloy ribbon 2 an adhesive of a determined weight was applied to shaft 1. Then a magnetostrictive alloy ribbon was placed and glued to the shaft under pressure by nitrogen gas at 10atm (10kg/cm 2 ) at 250°C.
  • a torque sensor was produced by arranging coil means 3a and 3b outside the glued magnetostrictive alloy ribbon. The detection accuracy property of this torque sensor will be explained later.
  • Figs. 6, 7, and 8 show examples of etching on magnetostrictive alloy ribbons of other embodiments of this invention.
  • the preferable length of an elliptic hole (l 5 ) ranges from 2 to 5mm
  • the width (p 3 ) ranges from 0.1 to 2mm.
  • a preferable distance between elliptic holes (m 4 ) ranges from 0.2 to 1mm.
  • the pitch (l 5 +m 4 ) ranges from 2.2 to 6mm.
  • a preferable distance between a center of a hole line and the next one (n 2 ) ranges from 0.5 to 5mm.
  • the angle ⁇ of a hole line is 45° , though the angle can be selected at random.
  • the preferable length of an oval hole (16) ranges from 2 to 5mm
  • the preferable width (p 4 ) ranges from 0.1 to 2mm
  • a preferable distance between oval holes (m 5 ) ranges from 0.2 to 1 mm.
  • the pitch (l 6 +m 5 ) ranges from 2.2 to 6mm.
  • a preferable distance between a center of a hole line and the next one (n 3 ) ranges from 0.5 to 5mm.
  • the angle ⁇ of a hole line is 45°, though the angle can be selected at random.
  • the preferable length of a rectangle hole (l 7 ) ranges from 2 to 5mm
  • the preferable width (p 5 ) ranges from 0.1 to 2mm
  • a preferable distance between rectangle holes (m 6 ) ranges from 0.2 to 1mm.
  • the pitch (l 7 +m 6 ) ranges from 2.2 to 6mm.
  • a preferable distance between a center of a hole line and the next one (n 4 ) ranges from 0.5 to 5mm.
  • the angle ⁇ of a hole line is 45°, though the angle can be selected at random.
  • Fig. 12 represents the torque sensor using magnetostrictive alloy ribbon in Figs. 1, 2, and 3. All the measurements were carried out at room temperature. The slashed parts in the figures show the range of unevenness of the produced sensor. The solid line shows the output for the minimum adhesion unevenness, or alternatively, the ideal adhesion. The measurement was carried out in the ⁇ 100kgfcm of torque range.
  • longitudinal direction of holes and hole shape can be varied.
  • the above-mentioned is an example of a torque detection range (100gcm) of a torque sensor whose shaft is 11.8mm in diameter.
  • torque detection range can be expanded theoretically in proportion to the cube power of the diameter of the shaft. For instance, if the diameter of the shaft becomes 20mm, it is possible to obtain output characteristics whose torque scale is 4.87 times of the one shown in Figs. 12, 13, 14. (Torque detection range can be expanded up to 487gcm.)
  • the dimension of the hole shown in Fig. 2 (l 1 to l 4 , m 1 to m 3 , p 1 , p 2 , n) is in the range of above-mentioned embodiment in order to prevent damage to the metal ribbon, when the dimensions of the magnetostrictive metal ribbon (a and b) shown in Fig. 1 are magnified 1.69 times to match the diameter of the shaft.

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  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Engineering & Computer Science (AREA)
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  • Power Steering Mechanism (AREA)
  • Measuring Magnetic Variables (AREA)

Claims (22)

  1. Drehmomentsensor, der eine Welle (1) und Einrichtungen zum Messen einer magnetischen Änderung (3a,3b) aufweist, gekennzeichnet durch ein auf der Oberfläche der Welle (1) befestigtes magnetostriktives Legierungsband (2), wobei die Einrichtungen zum Messen der magnetischen Änderung außerhalb des magnetostriktiven Legierungsbands (2) angeordnet sind, wobei das magnetostriktive Legierungsband (2) mehrere Reihen von mehreren, in einem gewünschten Winkel bezüglich der Längsrichtung der Welle angeordneten Löchern hat, und wobei die Reihen von Löchern längs zur Welle (1) angeordnet sind.
  2. Drehmomentsensor nach Anspruch 1, wobei das magnetostriktive Legierungsband (2) zylindrisch geformt ist, so daß die Längsrichtung im wesentlichen vertikal ist, und es in der Lage ist, eine gleichförmig auf dem Band (2) anliegende Last von 10g oder mehr auszuhalten.
  3. Drehmomentsensor nach Anspruch 1, wobei das magnetostriktive Legierungsband (2) zylindrisch geformt ist, so daß die Längsrichtung im wesentlichen vertikal ist, und es in der Lage ist, eine gleichförmig auf dem Band (2) anliegende Last von 80g oder mehr auszuhalten.
  4. Drehmomentsensor nach Anspruch 1, 2 oder 3, wobei die Löcher (2a,2b) 2 bis 5mm lang und 0,1 bis 2mm breit sind.
  5. Drehmomentsensor nach einem der Ansprüche 1 bis 4, wobei die Löcher (2a,2b) Linien bilden, ein Abstand zwischen benachbarten Löchern in der gleichen Linie zwischen 0,1 und 1mm liegt, und ein Abstand zwischen benachbarten Lochlinien zwischen 0,5 und 5mm liegt.
  6. Drehmomentsensor nach einem der Ansprüche 1 bis 5, wobei mehrere Lochlinien schräg in zwei Richtungen längs zur Welle (1) angeordnet sind.
  7. Drehmomentsensor nach Anspruch 6, wobei die schrägen Richtungen im wesentlichen +45° und -45° sind.
  8. Drehmomentsensor nach eine der Ansprüche 1 bis 7, wobei die Löcher eine gekrümmte Form haben.
  9. Drehmomentsensor nach Anspruch 8, wobei die gekrümmte Form aus der Gruppe bestehend aus Kreis, Ellipse und Oval ausgewählt ist.
  10. Drehmomentsensor nach einem der Ansprüche 1 bis 9, wobei das magnetostriktive Metallband (2) eine amorphe magnetostriktive Legierung aufweist.
  11. Drehmomentsensor nach Anspruch 10, wobei die amorphe magnetostriktive Legierung mindestens eine Legierung ist, die aus der folgenden Gruppe ausgewählt ist: Legierung auf Fe-Cr-Si-B-Basis, Fe-Nb-Si-B-Basis Fe-V-Si-B-Basis, Fe-Co-Si-B-Basis, Fe-W-Si-B-Basis, Fe-Ni-Cr-Si-B-Basis, Fe-Ni-Nb-B-Basis und Fe-Ni-Mo-B-Basis.
  12. Drehmomentsensor nach Anspruch 10, wobei die amorphe magnetostriktive Legierung Fe75Cr4Si12,5B8,5 ist.
  13. Drehmomentsensor nach einem der Ansprüche 1 bis 12, wobei die Einrichtungen zum Messen einer magnetischen Änderung (3a,3b) Spulen sind.
  14. Drehmomentsensor nach einem der Ansprüche 1 bis 13, wobei die Ungenauigkeit der Ausgangsspannung bei einem Drehmoment von 0kgfcm 10% oder weniger des gesamten Drehmomentbereichs (100kgfcm) ist.
  15. Drehmomentsensor nach einem der Ansprüche 1 bis 14, wobei die Kennlinie bei graphischer Darstellung im wesentlichen eine gerade Linie zeigt.
  16. Verfahren zur Herstellung eines Drehmomentsensors, der ein an einer Oberfläche einer Welle (1) befestigtes magnetostriktives Legierungsband (2) und außerhalb des Bands angeordnete Einrichtungen zum Messen einer magnetischen Änderung (3a,3b) hat, mit folgenden Schritten:
    Ätzen eines magnetostriktiven Legierungsbands (2), um mehrere Reihen von mehreren, in einem gewünschten Winkel längs zur Welle angeordneten Löchern (2a,2b) zu bilden, und wobei die Reihen von Löchern längs zur Welle angeordnet sind;
    Wickeln des magnetostriktiven Legierungsbands (2) auf eine zylindrische Innenstruktur (4), deren Durchmesser im wesentlichen gleich dem Durchmesser der Welle (1) ist;
    Anordnen des magnetostriktiven Legierungsbands (2) und der Innenstruktur innerhalb einer zylindrischen Außenstruktur (5), die hohl ist; und
    Rollen des magnetostriktiven Legierungsbands (2) durch Glühen.
  17. Verfahren zur Herstellung eines Drehmomentsensors nach Anspruch 16, wobei die Glühtemperatur zwischen 350°C und 600°C liegt.
  18. Verfahren zur Herstellung eines Drehmomentsensors nach Anspruch 16 oder 17, wobei die Glühatmosphäre mindestens eine nichtoxidierende Atmosphäre ist, die aus der Gruppe bestehend aus inerter Atmosphäre und Unterdruck-Atmosphäre ausgewählt ist.
  19. Verfahren zur Herstellung eines Drehmomentsensors nach Anspruch 18, wobei der Druck der Unterdruck-Atmosphäre zwischen 1 Torr und 1x10-6 Torr liegt.
  20. Verfahren zur Herstellung eines Drehmomentsensors nach Anspruch 18 oder 19, wobei die inerte Atmosphäre mindestens ein Gas ist, das aus der Gruppe bestehend aus Ar, He, Ne, N2 und CO ausgewählt ist.
  21. Verfahren nach einem der Ansprüche 16 bis 20, wobei die Innenstruktur (4) aus einem Material mit einem hohen Koeffizienten der thermischen Ausdehnung hergestellt ist, während die Außenstruktur (5) aus einem Material mit einem niedrigen Koeffizienten der thermischen Ausdehnung hergestellt ist.
  22. Verfahren nach einem der Ansprüche 16 bis 21, wobei der Abstand zwischen der Innenstruktur (4) und der Außenstruktur (5) zwischen 10 und 500µm liegt.
EP94113303A 1993-08-26 1994-08-25 Drehmomentsensor mit Verwendung einer magnetostriktiven Legierung und Verfahren zu dessen Herstellung Expired - Lifetime EP0640817B1 (de)

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JP211234/93 1993-08-26
JP21123493 1993-08-26

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EP0640817A3 EP0640817A3 (de) 1995-03-22
EP0640817B1 true EP0640817B1 (de) 1998-12-02

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DE69414937T2 (de) 1999-04-22
EP0640817A3 (de) 1995-03-22
US5557974A (en) 1996-09-24
KR0151747B1 (ko) 1998-12-01
US5675886A (en) 1997-10-14
EP0640817A2 (de) 1995-03-01
DE69414937D1 (de) 1999-01-14
KR950006436A (ko) 1995-03-21

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