EP0622733A1 - Method and device for testing integrated power devices - Google Patents
Method and device for testing integrated power devices Download PDFInfo
- Publication number
- EP0622733A1 EP0622733A1 EP93830186A EP93830186A EP0622733A1 EP 0622733 A1 EP0622733 A1 EP 0622733A1 EP 93830186 A EP93830186 A EP 93830186A EP 93830186 A EP93830186 A EP 93830186A EP 0622733 A1 EP0622733 A1 EP 0622733A1
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- EP
- European Patent Office
- Prior art keywords
- variation
- fact
- determining
- tested
- integrated device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000012360 testing method Methods 0.000 title claims description 27
- 238000000034 method Methods 0.000 title claims description 26
- 238000010998 test method Methods 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims description 6
- 230000002596 correlated effect Effects 0.000 claims description 4
- 230000000875 corresponding effect Effects 0.000 claims description 3
- 230000007812 deficiency Effects 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 230000002950 deficient Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2853—Electrical testing of internal connections or -isolation, e.g. latch-up or chip-to-lead connections
Definitions
- the present invention relates to a method and device for testing integrated power devices.
- each contact pad on the device is connected to a respective pin on the lead frame using two parallel wires, so as to increase the maximum current with- standable by the connection.
- a 2 mil gold wire for example, is incapable of withstanding indefinitely a current of over 2 A, so a second wire is added parallel to the first to double the current capacity.
- the voltage drop will be 33 mV, which is roughly a hundred times smaller than the voltage drop (roughly 3 V) on the series diode normally provided.
- the different voltage drop due to the presence of one as opposed to two wires is thus undetectable.
- One known solution to the above problem consists in providing two contact pads connected by a respective wire to the same pin. While enabling testing in the conventional way, such a solution involves an increase in the area of the device, due to the greater number of contact pads employed, which, in view of the current tendency towards ever increasing miniaturisation of integrated circuits and devices, is strictly undesirable.
- the present invention also relates to a device for testing integrated power devices, as claimed in Claim 9.
- Fig.1 shows a portion of an integrated device 1 of which the connections between contact pads 2a, 2b and respective pins 3a, 3b are to be tested.
- the die 4 of device 1 is fixed to lead frame 6 by a known bonding layer 5, and pads 2 are connected to respective pins 3 by respective two-wire connections 7, each consisting of two parallel gold wires 8.
- the method according to the present invention is based on the fact that, when a two-wire connection is supplied with fairly high current, a considerable amount of power is dissipated by the wires, which are thus heated. Consequently, as the resistance of gold wires depends closely on temperature, by monitoring the voltage drop produced by the current as a function of time, it is possible to distinguish between two-wire connections and faulty ones, in which only one of the two wires has been correctly bonded. In fact, with the same current supply, if only one wire is present, all the current will flow through this, thus resulting in four times the power dissipation of a correct connection, in which the current is divided substantially equally between the two wires.
- monitoring the voltage drop produced by a high current supply also provides for testing attachment of the die to the lead frame in the areas involving the power elements of the circuit. Poor attachment in fact (air pockets between the corresponding die region and the lead frame) results in a more rapid increase in die-lead frame thermal resistance and, hence, in a change in thermal behaviour. As such, parts with poorly attached dies may be detected by measuring the speed at which the voltage drop varies over a predetermined time period after the high current is applied, and by comparing this with a standard (correct) value.
- the pads need not necessarily be two-wire-connected to the pin, the only requirement being that it be an integrated power device with a good degree of power dissipation through the lead frame, and to which, among other things, a high current may be supplied for adequately differentiating between the behaviour of parts with correctly, poorly, or badly attached dies.
- the Fig.2 graph shows the normalized voltage drop DV with respect to the value measured at the start instant, i.e. by subtracting from the value measured at each instant the initial voltage drop value measured immediately following application of the current.
- the curves show the normalized voltage drop DV resulting from supplying a constant high current between two pins two-wire-connected to respective pads in turn mutually connected by a diode.
- Fig.2 shows four curves relative to experimental measurements conducted on four theoretically identical parts, but with different problems as regards wire connection or die attachment.
- Curve A shows the results of a series of measurements relative to a part presenting both the two-wire connections and a correctly attached die; curve B to a part presenting the two-wire connections but a poorly attached die; curve C to a part lacking one of the wires on one of the connections; and curve D to a part presenting the two-wire connections but a badly attached die.
- voltage drop DV is considerably greater than that of a perfectly sound part (curve A) or one with a poor, though still acceptable, die attachment (curve B).
- test device and method according to the present invention will now be described with reference to Fig.s 3 and 4.
- Fig.3 shows the electric diagram of device 1 in Fig.1, wherein pads 2a and 2b are assumed mutually connected by a diode 10.
- Pins 3a and 3b are connected to the test device indicated by 15 and including a current source 16 series connected between pins 2a and 2b; a voltage measuring element 17 parallel to source 16; and a processing unit 18, which may, of course, incorporate voltage measuring element 17.
- a current 21 is supplied by source 16 therefore, in the event each connection 7 presents both wires 8, each wire 8 will be supplied with current I, thus resulting in current dissipation of R1 2 , where R is the resistance of the wire (variable as a function of time).
- This step is indicated in Fig.4 by block 25.
- the Fig.4 process is obviously repeated for all the two-wire connections for testing, or at any rate for all the connections with power regions whose die attachment is to be tested.
- the method and device described also provide for simultaneously testing die attachment in the power elements (output power stages).
- the present method may be applied to any pair of power pins, providing the respective pads are mutually connected by a low-voltage path, and especially when the voltage drop produced by the internal path is normally no more than 4-5 V.
- the method described does not apply to testing two-wire connections towards the lead frame, as on the emitter of bottom NPN transistors of audio power devices, in which case, as opposed to flowing through the two-wire connection and the pad, the current flows through the substrate, as shown in Fig.5, which shows the final stage 35 of an audio power device.
- the Fig.5 example shows a substrate indicated by line 36 and connected to a portion 37 of the lead frame; a supply line 38 connected to a pad 39; a diode 40 interposed between lines 36 and 38; and two final power transistors - PNP transistor 41 and NPN transistor 42 - series connected between lines 38 and 36.
- transistor 41 is connected by the emitter to supply line 38 and by the collector to pad 43, which is also connected to the collector of transistor 42, the emitter of which is in turn connected to pad 44.
- a diode 45 is interposed between substrate 36 and pad 43, with its anode connected to (or formed directly by) substrate 36.
- a diode 46 is interposed between the collector and emitter of transistor 42 (with the anode connected to the emitter); and pads 39, 43 and 44 are connected respectively by a two-wire connection 7 to pins 49, 50 and frame 37.
- diode 46 between pads 43 and 44, and preferably of the same size as pad 44, so as to enable the current to flow from frame portion 37 through two-wire connection 7 to pad 44, and through diode 46 and pad 43 to pin 50, and so enable the voltage drop produced by the current to be measured as described above.
- diode 46 between pads 43 and 44, and preferably of the same size as pad 44, so as to enable the current to flow from frame portion 37 through two-wire connection 7 to pad 44, and through diode 46 and pad 43 to pin 50, and so enable the voltage drop produced by the current to be measured as described above.
- such a solution would provide for also testing the two-wire connection towards the lead frame with no increase in the area of the device.
- the present method and device may also be applied to power devices not featuring two-wire connections, for merely testing the die attachment, providing obviously that the pad-pin connections are capable of withstanding high current (a few Amps).
- the present method may be employed in dual mode, by applying a voltage of a given value or pattern, monitoring the current pattern produced by the thermal resistance of the wires or the die-lead frame attachment, and comparing it with correct values for detecting faulty devices.
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
Abstract
Description
- The present invention relates to a method and device for testing integrated power devices.
- As known, on integrated power devices, each contact pad on the device is connected to a respective pin on the lead frame using two parallel wires, so as to increase the maximum current with- standable by the connection. A 2 mil gold wire, for example, is incapable of withstanding indefinitely a current of over 2 A, so a second wire is added parallel to the first to double the current capacity.
- The problem therefore arises of automatically testing the integrity and correct bonding of both the wires, in view of the bonding process currently employed involving a deficiency rate of roughly 50-100 ppm. Traditional test methods, however, such as measuring pin-to-pin continuity, fail to provide for discriminating between a faulty connection in which only one wire (of a two-wire connection) is present, and correct connection of both wires, in that the resistance of gold wires is negligible as compared with the overall resistance of the circuit under test. For example, a 2 mil, 3 mm long gold wire presents a resistance of 33 mQ. Assuming the test is conducted using 1 A current, the voltage drop will be 33 mV, which is roughly a hundred times smaller than the voltage drop (roughly 3 V) on the series diode normally provided. Bearing in mind dispersion of the voltage drop on the diode, the different voltage drop due to the presence of one as opposed to two wires is thus undetectable.
- One known solution to the above problem consists in providing two contact pads connected by a respective wire to the same pin. While enabling testing in the conventional way, such a solution involves an increase in the area of the device, due to the greater number of contact pads employed, which, in view of the current tendency towards ever increasing miniaturisation of integrated circuits and devices, is strictly undesirable.
- Moreover, on power devices, the necessity frequently arises of testing attachment of the die to the lead frame in the areas involving the power elements of the circuit (typically the final power stages) for ensuring adequate power dissipation.
- It is an object of the present invention to provide a test method designed to overcome the drawbacks typically associated with known methods.
- According to the present invention, there is provided a method of testing integrated power devices, as claimed in
Claim 1. - The present invention also relates to a device for testing integrated power devices, as claimed in Claim 9.
- A preferred, non-limiting embodiment of the present invention will be described by way of example with reference to the accompanying drawings, in which:
- Fig.1 shows a view in perspective of two two-wire connections between two contact pads of an integrated power device and respective pins;
- Fig.2 shows a graph of electrical quantities employed in the method according to the present invention;
- Fig.3 shows a circuit diagram of the test device according to the present invention, for testing the two-wire connections in Fig.1;
- Fig.4 shows a flow chart of one embodiment of the method according to the present invention;
- Fig.5 shows the electric diagram of a portion of an integrated device to which the present method is applied.
- Fig.1 shows a portion of an integrated
device 1 of which the connections betweencontact pads respective pins device 1 is fixed to leadframe 6 by a knownbonding layer 5, and pads 2 are connected to respective pins 3 by respective two-wire connections 7, each consisting of twoparallel gold wires 8. - The method according to the present invention is based on the fact that, when a two-wire connection is supplied with fairly high current, a considerable amount of power is dissipated by the wires, which are thus heated. Consequently, as the resistance of gold wires depends closely on temperature, by monitoring the voltage drop produced by the current as a function of time, it is possible to distinguish between two-wire connections and faulty ones, in which only one of the two wires has been correctly bonded. In fact, with the same current supply, if only one wire is present, all the current will flow through this, thus resulting in four times the power dissipation of a correct connection, in which the current is divided substantially equally between the two wires. In the event of a faulty connection, therefore, this will result in a greater increase in the temperature, in a greater increase in the resistance and, hence, in a higher voltage drop of the wire, so that, by comparing the voltage drop as a function of time with that of the same connection on a part known to be sound, it is possible to determine the absence of one of the wires.
- Moreover, monitoring the voltage drop produced by a high current supply also provides for testing attachment of the die to the lead frame in the areas involving the power elements of the circuit. Poor attachment in fact (air pockets between the corresponding die region and the lead frame) results in a more rapid increase in die-lead frame thermal resistance and, hence, in a change in thermal behaviour. As such, parts with poorly attached dies may be detected by measuring the speed at which the voltage drop varies over a predetermined time period after the high current is applied, and by comparing this with a standard (correct) value. In this case, the pads need not necessarily be two-wire-connected to the pin, the only requirement being that it be an integrated power device with a good degree of power dissipation through the lead frame, and to which, among other things, a high current may be supplied for adequately differentiating between the behaviour of parts with correctly, poorly, or badly attached dies.
- By way of explanation, the Fig.2 graph shows the normalized voltage drop DV with respect to the value measured at the start instant, i.e. by subtracting from the value measured at each instant the initial voltage drop value measured immediately following application of the current. In particular, the curves show the normalized voltage drop DV resulting from supplying a constant high current between two pins two-wire-connected to respective pads in turn mutually connected by a diode. Fig.2 shows four curves relative to experimental measurements conducted on four theoretically identical parts, but with different problems as regards wire connection or die attachment. Curve A shows the results of a series of measurements relative to a part presenting both the two-wire connections and a correctly attached die; curve B to a part presenting the two-wire connections but a poorly attached die; curve C to a part lacking one of the wires on one of the connections; and curve D to a part presenting the two-wire connections but a badly attached die. As can be seen, in the event of a disconnected wire or badly attached die (curves C and D), after a given time interval, e.g. 40-50 ms, voltage drop DV is considerably greater than that of a perfectly sound part (curve A) or one with a poor, though still acceptable, die attachment (curve B). On the basis of the above information alone, therefore, it is possible to distinguish between sound and defective parts. In addition, however, it is possible to determine whether the problems involved are due to the absence of one of the wires or to a badly attached die by evaluating the voltage drop over the final portion of the measurement. In fact, over the final portion, curve D relative to a badly attached die presents twice the slope of curve C relative solely to the absence of one wire, so that each may be distinguished by simply monitoring DV over the final portion of the measurement.
- One embodiment of the test device and method according to the present invention will now be described with reference to Fig.s 3 and 4.
- Fig.3 shows the electric diagram of
device 1 in Fig.1, whereinpads diode 10.Pins current source 16 series connected betweenpins voltage measuring element 17 parallel tosource 16; and aprocessing unit 18, which may, of course, incorporatevoltage measuring element 17. When a current 21 is supplied bysource 16, therefore, in the event eachconnection 7 presents bothwires 8, eachwire 8 will be supplied with current I, thus resulting in current dissipation of R12, where R is the resistance of the wire (variable as a function of time). Conversely, if one of the wires of even only one ofconnections 7 is absent, the remaining wire in the same connection is supplied with the whole of current 21, thus resulting in current dissipation of 4R12, that is, four times the dissipation of a correct connection. The wire of the one-wire connection therefore presents a higher temperature and produces a more rapidly increasing voltage drop as compared with the part with a correct (two-wire) connection. - The method according to the present invention therefore consists initially in measuring and memorizing data relative to undoubtedly sound parts, i.e. having both two-wire connections and a good die attachment. For this purpose, a high current is supplied (by which is meant a current high enough to cause an evident variation in the thermal resistance of the wire and in the die attachment, e.g. 5 A), and the resulting normalized voltage drop is measured, for example, by sampling it at successive instants. Voltage drop DVT(t) is thus determined at a given instant t2 (e.g. after 50 ms), and a quantity is calculated correlated to the slope of the curve at the final step, e.g. the difference dVT between the DV values measured at two successive instants ti and t2 according to the equation:
- This step is indicated in Fig.4 by
block 25. - The same high current is then supplied to the device for testing (block 26), and the corresponding DV values at
instant 13, and the difference dV = DV(t2) - DV(ti) between DV at instants t2 and ti are measured (block 27). - The correct values DVT(t2), dVT are then compared in
block 28 with the test values DV(t2), dV, and, in the event the difference between even one of the test values and the respective nominal value exceeds a predetermined value Ki, K2 (YES output of block 28), the part is rejected (block 29). Conversely, the test is terminated. Values Ki, K2 are conveniently determined on the basis of deviation a of a group of undoubtedly sound devices (e.g. K1 = K2 = 6 a). - The Fig.4 process is obviously repeated for all the two-wire connections for testing, or at any rate for all the connections with power regions whose die attachment is to be tested.
- The advantages of the method and device according to the present invention will be clear from the foregoing description. In particular, they provide for safely detecting the absence of even only one wire in a two-wire connection, thus ensuring top quality and reliability of the passed devices, and with no increase in the area of the device as a result of doubling the power contact pads.
- Moreover, the solution described is highly straightforward, requires no complicated hardware, and provides for extremely high-speed testing in 30-50 ms.
- Finally, as already stated, in addition to determining the presence of both wires in two-wire connections, the method and device described also provide for simultaneously testing die attachment in the power elements (output power stages).
- To those skilled in the art it will be clear that changes may be made to the method and device described and illustrated herein without, however, departing from the scope of the present invention. In particular, the present method may be applied to any pair of power pins, providing the respective pads are mutually connected by a low-voltage path, and especially when the voltage drop produced by the internal path is normally no more than 4-5 V.
- Generally speaking, the method described does not apply to testing two-wire connections towards the lead frame, as on the emitter of bottom NPN transistors of audio power devices, in which case, as opposed to flowing through the two-wire connection and the pad, the current flows through the substrate, as shown in Fig.5, which shows the
final stage 35 of an audio power device. The Fig.5 example shows a substrate indicated byline 36 and connected to aportion 37 of the lead frame; asupply line 38 connected to apad 39; adiode 40 interposed betweenlines PNP transistor 41 and NPN transistor 42 - series connected betweenlines - More specifically,
transistor 41 is connected by the emitter to supplyline 38 and by the collector topad 43, which is also connected to the collector oftransistor 42, the emitter of which is in turn connected topad 44. Adiode 45 is interposed betweensubstrate 36 andpad 43, with its anode connected to (or formed directly by)substrate 36. Adiode 46 is interposed between the collector and emitter of transistor 42 (with the anode connected to the emitter); andpads wire connection 7 topins frame 37. - Assuming to begin with that
diode 46 is absent (a reasonable assumption in the great majority of cases), to test the two-wire connection 7 betweenframe portion 37 andpad 44, it is not enough to supply current toframe portion 37 and measure the voltage drop between this and, say,pin 50, as, in this case, the current would follow the path indicated by the doubledotted line 53, and would flow directly fromframe portion 37 tosubstrate 36 and throughdiode 45 andpad 43 topin 50. To solve this problem, we propose to specifically provide fordiode 46 betweenpads pad 44, so as to enable the current to flow fromframe portion 37 through two-wire connection 7 to pad 44, and throughdiode 46 andpad 43 to pin 50, and so enable the voltage drop produced by the current to be measured as described above. In view of the size and location of the special diode provided, such a solution would provide for also testing the two-wire connection towards the lead frame with no increase in the area of the device. - As already stated, the present method and device may also be applied to power devices not featuring two-wire connections, for merely testing the die attachment, providing obviously that the pad-pin connections are capable of withstanding high current (a few Amps).
- Finally, the present method may be employed in dual mode, by applying a voltage of a given value or pattern, monitoring the current pattern produced by the thermal resistance of the wires or the die-lead frame attachment, and comparing it with correct values for detecting faulty devices.
Claims (14)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP93830186A EP0622733B1 (en) | 1993-04-30 | 1993-04-30 | Method and device for testing integrated power devices |
DE69312263T DE69312263T2 (en) | 1993-04-30 | 1993-04-30 | Test procedure and arrangement for integrated power circuits |
US08/233,645 US5521511A (en) | 1993-04-30 | 1994-04-26 | Method and device for testing integrated power devices |
JP6091769A JPH07146327A (en) | 1993-04-30 | 1994-04-28 | Method and apparatus for testing integrated power devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP93830186A EP0622733B1 (en) | 1993-04-30 | 1993-04-30 | Method and device for testing integrated power devices |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0622733A1 true EP0622733A1 (en) | 1994-11-02 |
EP0622733B1 EP0622733B1 (en) | 1997-07-16 |
Family
ID=8215158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP93830186A Expired - Lifetime EP0622733B1 (en) | 1993-04-30 | 1993-04-30 | Method and device for testing integrated power devices |
Country Status (4)
Country | Link |
---|---|
US (1) | US5521511A (en) |
EP (1) | EP0622733B1 (en) |
JP (1) | JPH07146327A (en) |
DE (1) | DE69312263T2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0720023A1 (en) * | 1994-12-30 | 1996-07-03 | STMicroelectronics S.r.l. | Test method for power integrated devices |
EP0752593A2 (en) * | 1995-07-07 | 1997-01-08 | Siemens Aktiengesellschaft | Method for the early recognition of failures of power semiconductor modules |
EP0905776A1 (en) * | 1997-09-29 | 1999-03-31 | STMicroelectronics SA | Semiconductor device comprising two ground contact pads connected to a ground connection lead and testing procedure for the device |
WO2004040324A2 (en) | 2002-10-29 | 2004-05-13 | Aeroflex International Ltd | A method of and apparatus for testing for integrated circuit contact defects |
FR2951828A1 (en) * | 2009-10-28 | 2011-04-29 | Peugeot Citroen Automobiles Sa | Method for signaling hot spot between ends of busbar type electrical conductor in e.g. hybrid vehicle, involves signaling existence of hot spot between ends of conductor when test curve is detected with respect to changes in resistance |
Families Citing this family (6)
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US5786700A (en) * | 1996-05-20 | 1998-07-28 | International Business Machines Corporation | Method for determining interconnection resistance of wire leads in electronic packages |
JP3179394B2 (en) | 1997-11-28 | 2001-06-25 | 富山日本電気株式会社 | Electrical inspection device and electrical inspection method for printed wiring board |
US6946856B1 (en) * | 2004-06-24 | 2005-09-20 | Texas Instruments Incorporated | Thermal testing method for integrated circuit chips and packages |
DE102006025031A1 (en) * | 2006-05-26 | 2007-11-29 | Micronas Gmbh | Test circuit arrangement and test method for testing a circuit path of a circuit |
JP6229876B2 (en) | 2013-08-27 | 2017-11-15 | 日本電産リード株式会社 | Inspection device |
JP6090523B1 (en) * | 2016-08-10 | 2017-03-08 | 富士電機株式会社 | Uninterruptible power system |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0075079A1 (en) * | 1981-09-21 | 1983-03-30 | International Business Machines Corporation | Circuit network checking system |
EP0351911A1 (en) * | 1988-07-20 | 1990-01-24 | Koninklijke Philips Electronics N.V. | Method and device for testing multiple power supply connections of an integrated circuit on a printed-circuit board |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3933311A1 (en) * | 1989-10-05 | 1991-04-18 | Endress Hauser Gmbh Co | TEMPERATURE MEASURING |
US5166627A (en) * | 1991-05-30 | 1992-11-24 | The United States Of America As Represented By The United States Department Of Energy | Method and apparatus for remote tube crevice detection by current and voltage probe resistance measurement |
AT397311B (en) * | 1991-08-16 | 1994-03-25 | Hans Dr Leopold | METHOD FOR DETERMINING A MEASURED VALUE AND CIRCUIT ARRANGEMENT FOR IMPLEMENTING THE METHOD |
-
1993
- 1993-04-30 DE DE69312263T patent/DE69312263T2/en not_active Expired - Fee Related
- 1993-04-30 EP EP93830186A patent/EP0622733B1/en not_active Expired - Lifetime
-
1994
- 1994-04-26 US US08/233,645 patent/US5521511A/en not_active Expired - Lifetime
- 1994-04-28 JP JP6091769A patent/JPH07146327A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0075079A1 (en) * | 1981-09-21 | 1983-03-30 | International Business Machines Corporation | Circuit network checking system |
EP0351911A1 (en) * | 1988-07-20 | 1990-01-24 | Koninklijke Philips Electronics N.V. | Method and device for testing multiple power supply connections of an integrated circuit on a printed-circuit board |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0720023A1 (en) * | 1994-12-30 | 1996-07-03 | STMicroelectronics S.r.l. | Test method for power integrated devices |
US5801536A (en) * | 1994-12-30 | 1998-09-01 | Sgs-Thomson Microelectronics S.R.L. | Test method for power integrated devices |
EP0752593A2 (en) * | 1995-07-07 | 1997-01-08 | Siemens Aktiengesellschaft | Method for the early recognition of failures of power semiconductor modules |
EP0752593A3 (en) * | 1995-07-07 | 1998-01-07 | Siemens Aktiengesellschaft | Method for the early recognition of failures of power semiconductor modules |
EP0905776A1 (en) * | 1997-09-29 | 1999-03-31 | STMicroelectronics SA | Semiconductor device comprising two ground contact pads connected to a ground connection lead and testing procedure for the device |
FR2769131A1 (en) * | 1997-09-29 | 1999-04-02 | St Microelectronics Sa | SEMICONDUCTOR DEVICE HAVING TWO GROUND CONNECTION POINTS CONNECTED TO A GROUND CONNECTION LEG AND METHOD FOR TESTING SUCH A DEVICE |
US5986345A (en) * | 1997-09-29 | 1999-11-16 | Stmicroelectronics S. A. | Semiconductor device having two ground pads connected to a ground connection lead and method for testing the same |
US6100710A (en) * | 1997-09-29 | 2000-08-08 | Stmicroelectronics S.A. | Semiconductor device having two ground pads connected to a ground connection lead and method for testing the same |
WO2004040324A2 (en) | 2002-10-29 | 2004-05-13 | Aeroflex International Ltd | A method of and apparatus for testing for integrated circuit contact defects |
WO2004040324A3 (en) * | 2002-10-29 | 2004-12-23 | Aeroflex Internat Ltd | A method of and apparatus for testing for integrated circuit contact defects |
US7385410B2 (en) | 2002-10-29 | 2008-06-10 | Aeroflex International Limited, Of Longacres House | Method of and apparatus for testing for integrated circuit contact defects |
FR2951828A1 (en) * | 2009-10-28 | 2011-04-29 | Peugeot Citroen Automobiles Sa | Method for signaling hot spot between ends of busbar type electrical conductor in e.g. hybrid vehicle, involves signaling existence of hot spot between ends of conductor when test curve is detected with respect to changes in resistance |
Also Published As
Publication number | Publication date |
---|---|
DE69312263D1 (en) | 1997-08-21 |
US5521511A (en) | 1996-05-28 |
DE69312263T2 (en) | 1997-10-30 |
JPH07146327A (en) | 1995-06-06 |
EP0622733B1 (en) | 1997-07-16 |
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