[go: up one dir, main page]

EP0591104A1 - Apparatus for ultra-sonic eroding of a workpiece - Google Patents

Apparatus for ultra-sonic eroding of a workpiece Download PDF

Info

Publication number
EP0591104A1
EP0591104A1 EP93810666A EP93810666A EP0591104A1 EP 0591104 A1 EP0591104 A1 EP 0591104A1 EP 93810666 A EP93810666 A EP 93810666A EP 93810666 A EP93810666 A EP 93810666A EP 0591104 A1 EP0591104 A1 EP 0591104A1
Authority
EP
European Patent Office
Prior art keywords
transformer
transducer
converter
tool
designed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP93810666A
Other languages
German (de)
French (fr)
Other versions
EP0591104B1 (en
Inventor
Ag I.K. Erosonic
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DAMATEC AG
Original Assignee
EROSONIC AG iK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EROSONIC AG iK filed Critical EROSONIC AG iK
Publication of EP0591104A1 publication Critical patent/EP0591104A1/en
Application granted granted Critical
Publication of EP0591104B1 publication Critical patent/EP0591104B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B3/02—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency involving a change of amplitude
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto

Definitions

  • the invention relates to a device for ultrasonic erosion on a workpiece according to the preamble of claim 1.
  • Such devices are particularly suitable for the processing of hard and brittle materials such as glass or ceramic.
  • the rotary movement of the tool is carried out to increase the removal rate, the tool being equipped with an abrasive grain, for example made of diamond. Alternatively, you can work with a loose abrasive grain.
  • the ultrasonic amplitude that can be achieved with the known electroacoustic transducers is too low for processing purposes.
  • a mechanical amplitude amplifier, with which useful values can be achieved, is therefore connected downstream of the devices.
  • the physical basics of such transformers are known to the person skilled in the art and are therefore not described in more detail.
  • the transformers with the processing tool at the last stage are coupled in a row axially one behind the other to the electroacoustic transducer.
  • the length of the coupled components cannot be chosen arbitrarily. Rather, in order for the entire vibration system to vibrate in resonance, it is necessary to tune each component to half the wavelength ⁇ / 2 of the excitation frequency. In the case of several transformer stages, this results in large overall lengths in which the rigidity and thus the dimensional precision decrease considerably. With tools that are additionally rotated around their own axis, there are considerable runout problems.
  • the overall height can ideally be reduced to ⁇ / 2 even with several amplifier stages. This not only improves the mechanical stability, it also makes it much easier to clamp the entire system. Since the vibration nodes of the individual components can also be arranged on a single level, this also opens up the possibility of lateral support of the components with one another in the node level.
  • the components By designing the components as a non-contact rotor, the moment of inertia and the imbalance of the tool spindle can be kept very small. As a result, high speeds are possible.
  • the storage in the non-contact bearing points causes only little friction and it also allows the rotor with the tool parts attached to it to be changed in a simple manner.
  • the bearings can be hydrostatic, magnetostatic or aerostatic bearings.
  • Non-contact bearings of this type are also used in other machine tools used and are already known to the expert.
  • hydrostatic bearings the problem of the necessary cooling of the vibrator can also be optimally solved.
  • the converter can be designed as a hollow shaft and the transformer can be held concentrically in the hollow shaft in such a way that the vibration nodes of the converter and the transformer lie approximately on the same level.
  • the transformer can also be designed as a hollow shaft and the converter can be held in the hollow shaft in such a way that the vibration nodes of the converter and the transformer lie approximately on the same level.
  • the transformer and the transducer can be supported against one another in a simple manner in the plane of their vibration node.
  • the converter is designed as a magnetostrictive oscillator with an external converter and an internal transformer, which is surrounded by a stationary excitation coil.
  • the power supply to the stationary excitation coil is completely unproblematic and takes place via fixed lines. This eliminates the slip rings required for power transmission on rotating parts.
  • the transducer can also be designed as a piezoelectric oscillator which carries slip rings for the current supply in the node plane.
  • the transformer can be designed as a hollow shaft, the coupling means being arranged at the end of a drive shaft which projects into the transformer.
  • the converter can of course also be designed as a hollow shaft.
  • the coupling means can have a permanent magnet which connects the drive shaft in a rotationally fixed manner to the converter or to the transformer.
  • other coupling means would of course also be conceivable, such as contactless magnetic couplings, fluid couplings or the like.
  • a transmission of the rotary movement by means of a suitable gear would also be conceivable.
  • the rotor is preferably mounted in such a way that it can be pulled out of the bearing points in the axial direction on the tool side. This has the advantage that individual tools no longer have to be replaced, since each tool type can be equipped with its own rotor. This eliminates the problem of delicate, acoustic coupling between the tool and the tool holder.
  • the processing device consists of a housing 21, in which an excitation coil 3 is arranged on a winding support 12.
  • the excitation coil is connected to a high-frequency generator 4.
  • a tubular transducer 2 is mounted in the housing 21 at the bearings 6 and 6 '.
  • These bearings are only shown schematically here. These are liquid bearings, magnetic bearings or air bearings, which hold the transducer 2 so that it can rotate in the housing 21 and within the excitation coil 3 such that an annular gap 22 remains with the stationary components.
  • the tubular transducer 2 consists of a magnetostrictive material, for example of nickel. Together with the excitation coil 3, it forms a magnetostrictive oscillator with the node level 9, which oscillates at its two ends, as shown in the diagram on the right, with a certain amplitude AAW.
  • the converter 2 is coupled at one end at a coupling point 8 to a transformer 7, which acts as a mechanical vibration transformer.
  • a transformer 7 acts as a mechanical vibration transformer.
  • the input amplitude EAT at the upper end of the transformer 7 increases as a result of the cross-sectional reduction up to the output amplitude AAT at the tool-side end of the transformer.
  • a tool holder 14 is provided, which can hold a diamond-tipped tool 13, for example.
  • the tool-side end of the transformer 7 itself could also be designed directly as a tool.
  • a workpiece 1 made of hard material can be provided with a bore, for example.
  • the transformer 7 is itself tubular. In the area of its node level 9 there is a fixed or detachable connection 15 with a drive shaft 11 which projects into the transformer.
  • the drive shaft is provided with a continuous channel 19, through which a rinsing liquid can be pumped to the tool 13.
  • the drive shaft 11 is detachably connected to a drive device 5 via a coupling 17.
  • a centering support 20 supports the drive shaft 11 when changing the rotor.
  • the drive device 5 is preferably an electric motor.
  • the converter 2 and the transformer 7 as a whole form a rotor 18 which serves as a tool spindle.
  • the rotor 18 is provided with a circumferential groove 24.
  • a tool changer 23 of an automatic changing device can grip the rotor at this groove and pull it out of the bearing points 6, 6 '. This means that individual tools are no longer replaced, but entire tool units that already form part of the electroacoustic transducer.
  • the transducer 2 is designed as a piezoelectric oscillator which is excited by the two piezoelectric disks 25, 25 '.
  • the peculiarity of this transducer is that the masses vibrating around the node plane are not separated by the piezoelectric disks as usual, but are formed in one piece.
  • the elastic connection between the two masses is formed by the relatively thin-walled part of the transducer in the area of the node level.
  • the piezoelectric disks are preloaded by means of a ring nut 26.
  • This design of the transducer permits contactless mounting in the bearing points 6 and 6 '.
  • the current is supplied to the piezoelectric disks 25 and 25 'via the slip rings 27 and 27', which lie approximately in the node plane 9.
  • a transformer 7 is coupled to the upper end of the coupling point 8.
  • the internal transformer vibrates at the tool end with the output amplitude AAT.
  • the tool 13 is fastened to the transformer by means of the tool holder 14.
  • the transformer is supported on the support 10 on the piezoelectric disks, which in turn rest on the transducer by means of an insulating ring 28.
  • the entire rotor 18 is driven by the drive shaft 11, analogously to the exemplary embodiment according to FIG.
  • the coupling 17 also establishes the coolant connection to a coolant source (not shown here) for tool cooling.
  • the centering support 20 ensures the coaxiality of the drive shaft 11 during a change operation.
  • the entire rotor 18 is changed in the same way as in the exemplary embodiment according to FIG. 1.
  • the transducer 2 is also designed as a piezoelectric vibrator.
  • the converter 2 is surrounded by the transformer 7 here.
  • the power supply to the piezo disks 25 and 25 'via the slip rings 27, 27' through the transformer 7 must necessarily take place here.
  • the piezoelectric transducer 2 is of a conventional type, i.e. the two masses on both sides of the piezo disks are completely separate from one another and are only connected to one another via the hollow screw 26.
  • the amplification of the amplitude from the input amplitude EAT to the output amplitude AAT takes place in the same way, although the tool 13 or the tool holder 14 must have a somewhat different configuration.
  • the rotor change takes place in the same way as in the previous exemplary embodiments.
  • the connection of the rotor 18 to the drive device 5 is also identical.
  • FIG. 1 is particularly advantageous for high speeds, since no slip rings are required.
  • FIGS. 2 and 3 have a somewhat higher efficiency owing to the piezo technology, but are more suitable for lower speeds.
  • the use of tools with a larger diameter, in particular circular tools, is possible without any problems.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

An ultrasonic tool (13) is set in rotation to increase the eroding capacity. For this purpose, use is made of a magnetostrictive or piezoelectric transducer (2) which is coupled to a transformer (7) to increase the output amplitude. To reduce the overall length, transducer and transformer are fitted concentrically into each other in such a way that their overall lengths at least partly overlap. In addition, the transducer and transformer form a rotor which is mounted in contactless bearings. With such an apparatus, optimal concentric-running properties are achieved. <IMAGE>

Description

Die Erfindung betrifft eine Vorrichtung für die Ultraschall-Erosion an einem Werkstück gemäss dem Oberbegriff von Anspruch 1. Derartige Vorrichtungen eignen sich namentlich für die Bearbeitung harter und spröder Werkstoffe wie Glas oder Keramik. Die Drehbewegung des Werkzeuges erfolgt zur Erhöhung der Abtragsleistung, wobei das Werkzeug mit einem Schleifkorn, beispielsweise aus Diamant, bestückt ist. Alternativ kann auch mit einem losen Schleifkorn gearbeitet werden.The invention relates to a device for ultrasonic erosion on a workpiece according to the preamble of claim 1. Such devices are particularly suitable for the processing of hard and brittle materials such as glass or ceramic. The rotary movement of the tool is carried out to increase the removal rate, the tool being equipped with an abrasive grain, for example made of diamond. Alternatively, you can work with a loose abrasive grain.

Die mit den bekannten elektroakustischen Wandlern erreichbare Ultraschall-Amplitude ist für Bearbeitungszwecke zu gering. Daher wird bei den Vorrichtungen ein mechanischer Amplitudenverstärker nachgeschaltet, mit dem brauchbare Werte erreicht werden können. Die physikalischen Grundlagen derartiger Transformatoren sind dem Fachmann bekannt und werden daher nicht näher beschrieben.The ultrasonic amplitude that can be achieved with the known electroacoustic transducers is too low for processing purposes. A mechanical amplitude amplifier, with which useful values can be achieved, is therefore connected downstream of the devices. The physical basics of such transformers are known to the person skilled in the art and are therefore not described in more detail.

Bei den bekannten Vorrichtungen zur Ultraschallerzeugung sind die Transformatoren mit dem Bearbeitungswerkzeug an der letzten Stufe in einer Reihe axial hintereinander an den elektroakustischen Wandler angekoppelt. Bekanntlich kann die Länge der zusammengekoppelten Bauteile nicht beliebig gewählt werden. Damit das ganze Schwingungssystem in Resonanz schwingen kann, ist es vielmehr erforderlich, jedes Bauteil auf die halbe Wellenlänge λ/2 der Erregerfrequenz abzustimmen. Bei mehreren Transformatorstufen ergibt dies grosse Baulängen, bei denen die Steifigkeit und damit die massliche Präzision erheblich abnimmt. Bei Werkzeugen, die zusätzlich noch um die eigene Achse gedreht werden, ergeben sich dabei erhebliche Rundlaufprobleme.In the known devices for ultrasound generation, the transformers with the processing tool at the last stage are coupled in a row axially one behind the other to the electroacoustic transducer. As is known, the length of the coupled components cannot be chosen arbitrarily. Rather, in order for the entire vibration system to vibrate in resonance, it is necessary to tune each component to half the wavelength λ / 2 of the excitation frequency. In the case of several transformer stages, this results in large overall lengths in which the rigidity and thus the dimensional precision decrease considerably. With tools that are additionally rotated around their own axis, there are considerable runout problems.

Zusätzliche Lagerungsprobleme ergeben sich auch noch dadurch, dass das schwingende System nur in der schwingungsfreien Knotenebene gestützt werden kann. Schliesslich bereiten die bekannten Vorrichtungen auch beim Werkzeugswechsel Probleme, insbesondere wenn der Werkzeugwechsel automatisch erfolgen sollte. Bei einer nicht einwandfreien akustischen Koppelung zwischen Werkzeugaufnahme und Werkzeug treten nämlich Störungen im Arbeitsprozess auf.Additional storage problems also arise from the fact that the vibrating system is only in the vibration-free Node level can be supported. Finally, the known devices also cause problems when changing tools, in particular when the tool change should take place automatically. If the acoustic coupling between the tool holder and the tool is not perfect, malfunctions occur in the work process.

Es ist daher eine Aufgabe der Erfindung, eine Vorrichtung der eingangs genannten Art zu schaffen, bei welcher bei gleichbleibenden Eigenschaften bezüglich der Transformation der Amplitude die Baulänge verkürzt und die Rundlaufeigenschaft verbessert werden kann. Ausserdem soll der Werkzeugwechsel schneller und einfacher erfolgen können, als dies bei den bekannten Systemen möglich wäre. Diese Aufgabe wird erfindungsgemäss mit einer Vorrichtung gelöst, welche die Merkmale im Anspruch 1 aufweist.It is therefore an object of the invention to provide a device of the type mentioned in the introduction, in which the overall length can be shortened and the concentricity can be improved while the properties regarding the transformation of the amplitude remain the same. In addition, the tool change should be quicker and easier than would be possible with the known systems. This object is achieved according to the invention with a device which has the features in claim 1.

Durch das Ineinanderschieben der Bauteile mit endseitiger Ankoppelung kann die gesamte Bauhöhe im Idealfall auch bei mehreren Verstärkerstufen auf λ/2 reduziert werden. Damit wird nicht nur die mechanische Stabilität verbessert, sondern auch die Einspannung des gesamten Systems wird wesentlich erleichtert. Da die Schwingungsknoten der Einzelbauteile ebenfalls auf einer einzigen Ebene angeordnet werden können, eröffnet dies auch die Möglichkeit einer seitlichen Abstützung der Bauteile untereinander in der Knotenebene. Durch die Ausbildung der Bauteile als berührungslos gelagerter Rotor kann das Massenträgheitsmoment und die Unwucht der Werkzeugspindel sehr klein gehalten werden. Als Folge davon sind hohe Drehzahlen möglich. Die Lagerung in den berührungslosen Lagerstellen verursacht nur eine geringe Reibung und sie erlaubt es ausserdem, den Rotor mit den daran befestigten Werkzeugteilen auf einfache Weise zu wechseln.By pushing the components into each other with coupling at the end, the overall height can ideally be reduced to λ / 2 even with several amplifier stages. This not only improves the mechanical stability, it also makes it much easier to clamp the entire system. Since the vibration nodes of the individual components can also be arranged on a single level, this also opens up the possibility of lateral support of the components with one another in the node level. By designing the components as a non-contact rotor, the moment of inertia and the imbalance of the tool spindle can be kept very small. As a result, high speeds are possible. The storage in the non-contact bearing points causes only little friction and it also allows the rotor with the tool parts attached to it to be changed in a simple manner.

Bei den Lagerstellen kann es sich um hydrostatische, magnetostatische oder um aerostatische Lager handeln. Berührungslose Lager dieser Art werden auch bei anderen Werkzeugmaschinen eingesetzt und sind dem Fachmann bereits bekannt. Bei der Verwendung hydrostatischer Lager kann gleichzeitig auch das Problem der notwendigen Kühlung des Schwingers optimal gelöst werden.The bearings can be hydrostatic, magnetostatic or aerostatic bearings. Non-contact bearings of this type are also used in other machine tools used and are already known to the expert. When using hydrostatic bearings, the problem of the necessary cooling of the vibrator can also be optimally solved.

Der Wandler kann als Hohlwelle ausgebildet sein und der Transformator kann derart konzentrisch in der Hohlwelle gehalten sein, dass die Schwingungsknoten des Wandlers und des Transformators etwa auf der gleichen Ebene liegen. Umgekehrt kann aber auch der Transformator als Hohlwelle ausgebildet sein und der Wandler kann derart in der Hohlwelle gehalten sein, dass die Schwingungsknoten des Wandlers und des Transformators etwa auf der gleichen Ebene liegen. Der Transformator und der Wandler können dabei auf einfache Weise in der Ebene ihres Schwingungsknotens aneinander abgestützt sein.The converter can be designed as a hollow shaft and the transformer can be held concentrically in the hollow shaft in such a way that the vibration nodes of the converter and the transformer lie approximately on the same level. Conversely, however, the transformer can also be designed as a hollow shaft and the converter can be held in the hollow shaft in such a way that the vibration nodes of the converter and the transformer lie approximately on the same level. The transformer and the transducer can be supported against one another in a simple manner in the plane of their vibration node.

Erhebliche Vorteile lassen sich erzielen, wenn bei aussenliegendem Wandler und innenliegendem Transformator der Wandler als magnetostriktiver Schwinger ausgebildet ist, der von einer stationären Erregerspule umgeben ist. Die Stromzufuhr zu der stationären Erregerspule ist völlig unproblematisch und erfolgt über feste Leitungen. Dadurch fallen die für die Stromübertragung an drehenden Teilen erforderlichen Schleifringe weg.Considerable advantages can be achieved if the converter is designed as a magnetostrictive oscillator with an external converter and an internal transformer, which is surrounded by a stationary excitation coil. The power supply to the stationary excitation coil is completely unproblematic and takes place via fixed lines. This eliminates the slip rings required for power transmission on rotating parts.

Der Wandler kann aber auch als piezoelektrischer Schwinger ausgebildet sein, der in der Knotenebene Schleifringe für die Stromzuführung trägt.However, the transducer can also be designed as a piezoelectric oscillator which carries slip rings for the current supply in the node plane.

Wenn eine Antriebswelle etwa in der gemeinsamen Knotenebene am Wandler oder am Transformator angreift, können relativ einfache Kupplungen eingesetzt werden, bei denen die Längsschwingung nicht berücksichtigt werden muss. So kann der Transformator beispielsweise als Hohlwelle ausgebildet sein, wobei das Kupplungsmittel am Ende einer Antriebswelle angeordnet ist, welche in den Transformator hineinragt. Auf gleiche Weise kann selbstverständlich auch der Wandler als Hohlwelle ausgebildet sein. Das Kupplungsmittel kann einen Permanentmagneten aufweisen, welcher die Antriebswelle drehfest mit dem Wandler bzw. mit dem Transformator verbindet. Zur Uebertragung der Drehbewegung von der Antriebsvorrichtung auf die Werkzeugspindel bzw. auf den Rotor wären selbstverständlich auch andere Kupplungsmittel denkbar, wie z.B. berührungslose Magnetkupplungen, Flüssigkeitskupplungen oder dergleichen. Auch eine Uebertragung der Drehbewegung mittels geeigneter Getriebe wäre denkbar.If a drive shaft engages the converter or transformer in the common node level, relatively simple couplings can be used in which the longitudinal vibration does not have to be taken into account. For example, the transformer can be designed as a hollow shaft, the coupling means being arranged at the end of a drive shaft which projects into the transformer. On in the same way, the converter can of course also be designed as a hollow shaft. The coupling means can have a permanent magnet which connects the drive shaft in a rotationally fixed manner to the converter or to the transformer. To transfer the rotary movement from the drive device to the tool spindle or to the rotor, other coupling means would of course also be conceivable, such as contactless magnetic couplings, fluid couplings or the like. A transmission of the rotary movement by means of a suitable gear would also be conceivable.

Der Rotor ist vorzugsweise so gelagert, dass er werkzeugseitig in axialer Richtung aus den Lagerstellen herausziehbar ist. Dies hat den Vorteil, dass nicht mehr einzelne Werkzeuge ausgewechselt werden müssen, da jeder Werkzeugtyp mit einem eigenen Rotor ausgerüstet werden kann. Damit erübrigt sich das Problem der heiklen, akustischen Koppelung zwischen dem Werkzeug und der Werkzeughalterung.The rotor is preferably mounted in such a way that it can be pulled out of the bearing points in the axial direction on the tool side. This has the advantage that individual tools no longer have to be replaced, since each tool type can be equipped with its own rotor. This eliminates the problem of delicate, acoustic coupling between the tool and the tool holder.

Weitere Einzelmerkmale der Erfindung ergeben sich aus der nachstehenden Beschreibung verschiedener Ausführungsbeispiele und aus den Zeichungen. Es zeigen:

Figur 1
einen magnetostriktiven Schwinger mit aussenliegendem Wandler und innenliegendem Transformator,
Figur 2
einen piezoelektrischen Schwinger mit aussenliegendem Wandler und innenliegendem Transformator, und
Figur 3
einen piezoelektrischen Schwinger mit aussenliegendem Transformator und innenliegendem Wandler.
Further individual features of the invention result from the following description of various exemplary embodiments and from the drawings. Show it:
Figure 1
a magnetostrictive transducer with an external transducer and an internal transformer,
Figure 2
a piezoelectric transducer with an external transducer and an internal transformer, and
Figure 3
a piezoelectric transducer with an external transformer and an internal converter.

Die Bearbeitungsvorrichtung gemäss Figur 1 besteht aus einem Gehäuse 21, in welchem auf einem Wicklungsträger 12 eine Erregerspule 3 angeordnet ist. Die Erregerspule ist mit einem Hochfrequenzgenerator 4 verbunden. Ein rohrförmiger Wandler 2 ist im Gehäuse 21 an den Lagerstellen 6 und 6' gelagert.The processing device according to FIG. 1 consists of a housing 21, in which an excitation coil 3 is arranged on a winding support 12. The excitation coil is connected to a high-frequency generator 4. A tubular transducer 2 is mounted in the housing 21 at the bearings 6 and 6 '.

Diese Lagerstellen sind hier nur schematisch dargestellt. Es handelt sich dabei um Flüssigkeitslager, Magnetlager oder Luftlager, welche den Wandler 2 derart drehbeweglich im Gehäuse 21 und innerhalb der Erregerspule 3 halten, dass gegenüber den stationären Bauteilen ein Ringspalt 22 verbleibt.These bearings are only shown schematically here. These are liquid bearings, magnetic bearings or air bearings, which hold the transducer 2 so that it can rotate in the housing 21 and within the excitation coil 3 such that an annular gap 22 remains with the stationary components.

Der rohrförmige Wandler 2 besteht aus einem magnetostriktiven Werkstoff, beispielsweise aus Nickel. Er bildet zusammen mit der Erregerspule 3 einen magnetostriktiven Schwinger mit der Knotenebene 9, der an seinen beiden Enden, wie im Diagramm rechts dargestellt, mit einer bestimmten Amplitude AAW schwingt.The tubular transducer 2 consists of a magnetostrictive material, for example of nickel. Together with the excitation coil 3, it forms a magnetostrictive oscillator with the node level 9, which oscillates at its two ends, as shown in the diagram on the right, with a certain amplitude AAW.

Zur Amplitudenverstärkung ist der Wandler 2 an einem Ende an einer Koppelungsstelle 8 mit einem Transformator 7 gekoppelt, der als mechanischer Schwingungstransformator wirkt. Zu diesem Zweck ist der Materialquerschnitt am werkzeugseitigen Ende kleiner, als an der Koppelungsstelle 8. Die Eingangsamplitude EAT am oberen Ende des Transformators 7 verstärkt sich infolge der Querschnittsreduktion bis zur Ausgangsamplitude AAT am werkzeugseitigen Ende des Transformators. Am werkzeugseitigen Ende ist eine Werkzeughalterung 14 vorgesehen, welche beispielsweise ein diamantbestücktes Werkzeug 13 aufnehmen kann. Alternativ könnte aber auch das werkzeugseitige Ende des Transformators 7 selbst unmittelbar als Werkzeug ausgebildet sein. Mit Hilfe des Werkzeugs 13 kann ein Werkstück 1 aus hartem Material beispielsweise mit einer Bohrung versehen werden.To amplify the amplitude, the converter 2 is coupled at one end at a coupling point 8 to a transformer 7, which acts as a mechanical vibration transformer. For this purpose, the material cross-section at the tool-side end is smaller than at the coupling point 8. The input amplitude EAT at the upper end of the transformer 7 increases as a result of the cross-sectional reduction up to the output amplitude AAT at the tool-side end of the transformer. At the tool end, a tool holder 14 is provided, which can hold a diamond-tipped tool 13, for example. Alternatively, however, the tool-side end of the transformer 7 itself could also be designed directly as a tool. With the help of the tool 13, a workpiece 1 made of hard material can be provided with a bore, for example.

Der Transformator 7 ist selber rohrförmig ausgebildet. Im Bereich seiner Knotenebene 9 erfolgt eine feste oder lösbare Verbindung 15 mit einer Antriebswelle 11, welche in den Transformator hineinragt. Die Antriebswelle ist mit einem durchgehenden Kanal 19 versehen, durch welchen eine Spülflüssigkeit zum Werkzeug 13 gepumpt werden kann.The transformer 7 is itself tubular. In the area of its node level 9 there is a fixed or detachable connection 15 with a drive shaft 11 which projects into the transformer. The drive shaft is provided with a continuous channel 19, through which a rinsing liquid can be pumped to the tool 13.

Die Antriebswelle 11 ist mit einer Antriebsvorrichtung 5 über eine Kupplung 17 lösbar verbunden. Eine Zentrierstütze 20 stützt die Antriebswelle 11 beim Rotorwechsel. Die Antriebsvorrichtung 5 ist vorzugsweise ein Elektromotor.The drive shaft 11 is detachably connected to a drive device 5 via a coupling 17. A centering support 20 supports the drive shaft 11 when changing the rotor. The drive device 5 is preferably an electric motor.

Ersichtlicherweise bilden der Wandler 2 und der Transformator 7 insgesamt einen Rotor 18, der als Werkzeugspindel dient. Auf der gemeinsamen Knotenebene 9 erfolgt einerseits die Abstützung 10 zwischen dem Wandler 2 und dem Transformator 7 und andererseits die Ankoppelung der Antriebswelle 11. Auf diese Weise wird ein bezüglich seiner Rundlaufeigenschaften sehr vorteilhaftes System erreicht, wobei der Rotor leicht aus dem Gehäuse 21 entfernt werden kann.As can be seen, the converter 2 and the transformer 7 as a whole form a rotor 18 which serves as a tool spindle. On the common node level 9 there is on the one hand the support 10 between the converter 2 and the transformer 7 and on the other hand the coupling of the drive shaft 11. In this way a very advantageous system with regard to its concentricity properties is achieved, the rotor being easily removed from the housing 21 .

Am werkzeugseitigen Ende ist der Rotor 18 mit einer umlaufenden Nut 24 versehen. An dieser Nut kann ein Werkzeugwechsler 23 einer automatischen Wechselvorrichtung den Rotor ergreifen und aus den Lagerstellen 6, 6' herausziehen. Dadurch werden nicht mehr einzelne Werkzeuge ausgewechselt, sondern ganze Werkzeugeinheiten, die bereits einen Bestandteil des elektroakustischen Wandlers bilden.At the tool end, the rotor 18 is provided with a circumferential groove 24. A tool changer 23 of an automatic changing device can grip the rotor at this groove and pull it out of the bearing points 6, 6 '. This means that individual tools are no longer replaced, but entire tool units that already form part of the electroacoustic transducer.

Beim Ausführungsbeispiel gemäss Figur 2 ist der Wandler 2 als piezoelektrischer Schwinger ausgebildet, der durch die beiden piezoelektrischen Scheiben 25, 25' angeregt wird. Die Besonderheit dieses Wandlers besteht dabei darin, dass die um die Knotenebene schwingenden Massen nicht wie üblich durch die piezoelektrischen Scheiben getrennt sind, sondern einstückig ausgebildet sind. Die elastische Verbindung zwischen den beiden Massen wird durch die relativ dünnwandige Partie des Wandlers im Bereich der Knotenebene gebildet. Die Vorspannung der piezoelektrischen Scheiben erfolgt durch eine Ringmutter 26. Diese Ausführung des Wandlers erlaubt die berührungslose Lagerung in den Lagerstellen 6 und 6'. Ueber die Schleifringe 27 und 27', welche etwa in der Knotenebene 9 liegen, erfolgt die Stromzufuhr zu den piezoelektrischen Scheiben 25 und 25'. Um die Ausgangsamplitude AAW des Wandlers 2 zu erhöhen ist am oberen Ende an der Koppelungsstelle 8 wiederum ein Transformator 7 angekoppelt. Der innenliegende Transformator schwingt dadurch am werkzeugseitigen Ende mit der Ausgangsamplitude AAT. Das Werkzeug 13 ist mittels der Werkzeughalterung 14 am Transformator befestigt. Der Transformator ist zur Erhöhung der mechanischen Steifigkeit in der Knotenebene 9 über die Abstützung 10 an den piezoelektrischen Scheiben abgestützt, welche wiederum am Wandler mittels Isolierring 28 aufliegen.In the exemplary embodiment according to FIG. 2, the transducer 2 is designed as a piezoelectric oscillator which is excited by the two piezoelectric disks 25, 25 '. The peculiarity of this transducer is that the masses vibrating around the node plane are not separated by the piezoelectric disks as usual, but are formed in one piece. The elastic connection between the two masses is formed by the relatively thin-walled part of the transducer in the area of the node level. The piezoelectric disks are preloaded by means of a ring nut 26. This design of the transducer permits contactless mounting in the bearing points 6 and 6 '. The current is supplied to the piezoelectric disks 25 and 25 'via the slip rings 27 and 27', which lie approximately in the node plane 9. To increase the output amplitude AAW of the converter 2 is on a transformer 7 is coupled to the upper end of the coupling point 8. The internal transformer vibrates at the tool end with the output amplitude AAT. The tool 13 is fastened to the transformer by means of the tool holder 14. To increase the mechanical rigidity in the node plane 9, the transformer is supported on the support 10 on the piezoelectric disks, which in turn rest on the transducer by means of an insulating ring 28.

Der Drehantrieb des gesamten Rotors 18 erfolgt durch die Antriebswelle 11, analog zum Ausführungsbeispiel gemäss Figur 1. Die lösbare Kupplung 17 überträgt das Antriebsdrehmoment, wobei durch eine Anschlagfläche 29 die genaue axiale Position des Rotors nach einem Werkzeugwechsel gesichert wird. Die Kupplung 17 stellt auch die Kühlmittelverbindung zu einer hier nicht dargestellten Kühlmittelquelle für die Werkzeugkühlung her. Die Zentrierstütze 20 sichert die Koaxialität der Antriebswelle 11 während einer Wechseloperation. Der Wechsel des gesamten Rotors 18 erfolgt gleich wie beim Ausführungsbeispiel gemäss Figur 1.The entire rotor 18 is driven by the drive shaft 11, analogously to the exemplary embodiment according to FIG. The coupling 17 also establishes the coolant connection to a coolant source (not shown here) for tool cooling. The centering support 20 ensures the coaxiality of the drive shaft 11 during a change operation. The entire rotor 18 is changed in the same way as in the exemplary embodiment according to FIG. 1.

Beim Ausführungsbeispiel gemäss Figur 3 ist der Wandler 2 ebenfalls als piezoelektrischer Schwinger ausgebildet. Im Gegensatz zum Ausführungsbeispiel gemäss Figur 2 ist hier jedoch der Wandler 2 vom Transformator 7 umgeben. Notwendigerweise muss hier die Stromzufuhr zu den Piezoscheiben 25 und 25' über die Schleifringe 27, 27' durch den Transformator 7 hindurch erfolgen. Der piezoelektrische Wandler 2 ist von konventioneller Bauart, d.h. die beiden Massen auf beiden Seiten der Piezoscheiben sind völlig voneinander getrennt und nur über die Hohlschraube 26 miteinander verbunden.In the embodiment shown in Figure 3, the transducer 2 is also designed as a piezoelectric vibrator. In contrast to the exemplary embodiment according to FIG. 2, however, the converter 2 is surrounded by the transformer 7 here. The power supply to the piezo disks 25 and 25 'via the slip rings 27, 27' through the transformer 7 must necessarily take place here. The piezoelectric transducer 2 is of a conventional type, i.e. the two masses on both sides of the piezo disks are completely separate from one another and are only connected to one another via the hollow screw 26.

Die Amplitudenverstärkung von der Eingangsamplitude EAT zur Ausgangsamplitude AAT erfolgt auf gleiche Weise, wobei allerdings das Werkzeug 13 bzw. die Werkzeughalterung 14 eine etwas unterschiedliche Konfiguration haben müssen. Dagegen erfolgt der Rotorwechsel gleich wie bei den vorhergehenden Ausführungsbeispielen. Ebenfalls identisch ist die Verbindung des Rotors 18 mit der Antriebsvorrichtung 5.The amplification of the amplitude from the input amplitude EAT to the output amplitude AAT takes place in the same way, although the tool 13 or the tool holder 14 must have a somewhat different configuration. On the other hand the rotor change takes place in the same way as in the previous exemplary embodiments. The connection of the rotor 18 to the drive device 5 is also identical.

Selbstverständlich sind weitere Ausführungsbeispiele denkbar, welche nach dem erfindungsgemässen Prinzip aufgebaut sind. So wäre beispielsweise auch ein magnetostriktiv arbeitender Rotor denkbar, bei welchem der Transformator aussen und der Wandler innen angeordnet ist. Zur weiteren Verstärkung der Ausgangsamplitude könnte neben einer ersten Transformatorstufe noch eine zweite Transformatorstufe angekoppelt werden. Das Ausführungsbeispiel gemäss Figur 1 eignet sich besonders vorteilhaft für hohe Drehzahlen, da keine Schleifringe erforderlich sind. Die Ausführungsbeispiele gemäss den Figuren 2 und 3 haben dank der Piezotechnik einen etwas höheren Wirkungsgrad, eignen sich jedoch eher für tiefere Drehzahlen. Beim Ausführungsbeispiel gemäss Figur 3 ist die Anwendung von Werkzeugen mit grösserem Durchmesser, insbesondere kreisringförmige Werkzeuge, problemlos möglich.Of course, further exemplary embodiments are conceivable, which are constructed according to the principle according to the invention. For example, a magnetostrictive rotor would also be conceivable, in which the transformer is arranged outside and the converter is arranged inside. To further amplify the output amplitude, a second transformer stage could be coupled in addition to a first transformer stage. The embodiment according to FIG. 1 is particularly advantageous for high speeds, since no slip rings are required. The exemplary embodiments according to FIGS. 2 and 3 have a somewhat higher efficiency owing to the piezo technology, but are more suitable for lower speeds. In the embodiment according to FIG. 3, the use of tools with a larger diameter, in particular circular tools, is possible without any problems.

Claims (12)

Vorrichtung für die Ultraschall-Erosion an einem Werkstück (1) mit einem elektroakustischen Wandler (2) zum Erzeugen von Ultraschall-Schwingungen, mit wenigstens einem auf einer Seite des Wandlers angekoppelten Transformator (7) zur mechanischen Transformation der Amplitude des Wandlers und mit einer drehantreibbaren Werkzeugspindel mit einem Werkzeug (13), dadurch gekennzeichnet, dass entweder der Wandler (2) oder der Transformator (7) als Hohlkörper ausgebildet ist und dass der Wandler und der Transformator derart ineinandergeschoben sind, dass sich ihre Baulängen wenigstens teilweise überlappen, wobei der Wandler und der Transformator einen die Werkzeugspindel darstellenden Rotor (18) bilden, der in berührungslosen Lagerstellen (6, 6') gelagert ist.Device for ultrasonic erosion on a workpiece (1) with an electroacoustic transducer (2) for generating ultrasonic vibrations, with at least one transformer (7) coupled to one side of the transducer for mechanical transformation of the amplitude of the transducer and with a rotationally drivable one Tool spindle with a tool (13), characterized in that either the converter (2) or the transformer (7) is designed as a hollow body and that the converter and the transformer are pushed into one another in such a way that their overall lengths at least partially overlap, the converter and the transformer forms a rotor (18) representing the tool spindle, which is mounted in contactless bearing points (6, 6 '). Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass die Lagerstellen (6, 6') hydrostatische Lager sind.Device according to claim 1, characterized in that the bearing points (6, 6 ') are hydrostatic bearings. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass die Lagerstellen (6, 6') magnetostatische Lager sind.Device according to claim 1, characterized in that the bearing points (6, 6 ') are magnetostatic bearings. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass die Lagerstellen (6, 6') aerostatische Lager sind.Device according to claim 1, characterized in that the bearing points (6, 6 ') are aerostatic bearings. Vorrichtung nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass der Wandler (2) als Hohlwelle ausgebildet ist und dass der Transformator (7) derart konzentrisch in der Hohlwelle gehalten ist, dass die Schwingungsknoten des Wandlers und des Transformators etwa auf der gleichen Ebene liegen.Device according to one of claims 1 to 4, characterized in that the converter (2) is designed as a hollow shaft and that the transformer (7) is held concentrically in the hollow shaft in such a way that the vibration nodes of the converter and the transformer are at approximately the same level lie. Vorrichtung nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass der Transformator (7) als Hohlwelle ausgebildet ist und dass der Wandler (2) derart in der Hohlwelle gehalten ist, dass die Schwingungsknoten des Wandlers und des Transformators etwa auf der gleichen Ebene liegen.Device according to one of claims 1 to 4, characterized in that the transformer (7) as a hollow shaft is formed and that the transducer (2) is held in the hollow shaft in such a way that the vibration nodes of the transducer and the transformer lie approximately on the same level. Vorrichtung nach Anspruch 5 oder 6, dadurch gekennzeichnet, dass der Transformator (7) und der Wandler (2) in der Ebene (9) ihres Schwingungsknotens aneinander abgestützt sind.Apparatus according to claim 5 or 6, characterized in that the transformer (7) and the transducer (2) are supported on one another in the plane (9) of their vibration node. Vorrichtung nach Anspruch 5, dadurch gekennzeichnet, dass der Wandler (2) als magnetostriktiver Schwinger ausgebildet ist, der von einer stationären Erregerspule (3) umgeben ist.Apparatus according to claim 5, characterized in that the transducer (2) is designed as a magnetostrictive vibrator which is surrounded by a stationary excitation coil (3). Vorrichtung nach Anspruch 5 oder 6, dadurch gekennzeichnet, dass der Wandler (2) als piezoelektrischer Schwinger ausgebildet ist, der in der Knotenebene Schleifringe (27, 27') für die Stromzuführung trägt.Apparatus according to claim 5 or 6, characterized in that the transducer (2) is designed as a piezoelectric oscillator which carries slip rings (27, 27 ') for the current supply in the node plane. Vorrichtung nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass eine Antriebswelle (11) etwa in der gemeinsamen Knotenebene (9) am Wandler (2) oder am Transformator (7) angreift und eine lösbare Verbindung zu einer Antriebsvorrichtung (5) herstellt.Device according to one of claims 1 to 9, characterized in that a drive shaft (11) acts approximately in the common node level (9) on the converter (2) or on the transformer (7) and establishes a detachable connection to a drive device (5). Vorrichtung nach Anspruch 10, dadurch gekennzeichnet, dass die Antriebswelle (11) als Hohlwelle für die Zufuhr eines Kühlmittels zum Werkzeug (13) ausgebildet ist.Apparatus according to claim 10, characterized in that the drive shaft (11) is designed as a hollow shaft for the supply of a coolant to the tool (13). Vorrichtung nach einem der Ansprüche 1 bis 11, dadurch gekennzeichnet, dass der Rotor (18) werkzeugseitig in axialer Richtung aus den Lagerstellen (6, 6') herausziehbar ist.Device according to one of claims 1 to 11, characterized in that the rotor (18) can be pulled out of the bearing points (6, 6 ') on the tool side in the axial direction.
EP93810666A 1992-10-01 1993-09-21 Apparatus for ultra-sonic eroding of a workpiece Expired - Lifetime EP0591104B1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CH306892 1992-10-01
CH3068/92 1992-10-01
CH3067/92 1992-10-01
CH306792 1992-10-01

Publications (2)

Publication Number Publication Date
EP0591104A1 true EP0591104A1 (en) 1994-04-06
EP0591104B1 EP0591104B1 (en) 1998-06-17

Family

ID=25692094

Family Applications (1)

Application Number Title Priority Date Filing Date
EP93810666A Expired - Lifetime EP0591104B1 (en) 1992-10-01 1993-09-21 Apparatus for ultra-sonic eroding of a workpiece

Country Status (3)

Country Link
US (1) US5361543A (en)
EP (1) EP0591104B1 (en)
DE (1) DE59308691D1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008037348A1 (en) * 2006-09-27 2008-04-03 Fischerwerke Gmbh & Co. Kg Ultrasonic vibration transducer for ultrasonic drilling
CN103710494A (en) * 2013-12-30 2014-04-09 江苏大学 Ultrasonic based method and ultrasonic based device for reinforcing a small hole
CN104138831A (en) * 2014-07-25 2014-11-12 陶晓明 General rotating ultrasonic transducer assembly of high-speed motorized spindle
CN104624463A (en) * 2015-01-09 2015-05-20 天津大学 Two-dimensional ultrasound vibration platform
EP2937149A1 (en) * 2014-04-22 2015-10-28 Inspire AG für mechatronische Produktionssysteme und Fertigungstechnik Device for processing workpieces by means of high frequency vibrations
CN114918746A (en) * 2022-04-26 2022-08-19 深圳市中扬数控机床有限公司 Ultrasonic knife handle and ultrasonic numerical control machine tool

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4444853B4 (en) * 1994-12-16 2006-09-28 Hilti Ag Hand tool for material-removing machining with an electro-acoustic transducer for the generation of ultrasonic vibrations
JP3745829B2 (en) * 1996-05-15 2006-02-15 株式会社デンソー Tapered surface grinding method and tapered surface grinding apparatus
SE515173C2 (en) * 1999-11-10 2001-06-25 Skf Nova Ab Device at a tool carrying unit for moving a rotatable shaft in the axial direction
KR101118799B1 (en) * 2004-07-02 2012-03-20 싸우에르 게엠바하 Tool with an oscillating head
ES2659512T3 (en) * 2004-12-13 2018-03-16 Fritz Studer Ag Tool unit for ultrasonic assisted rotary machining
US7824247B1 (en) 2007-06-01 2010-11-02 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Portable rapid and quiet drill
JP5646734B2 (en) * 2010-04-29 2014-12-24 エジソン・ウェルディング・インスティチュート，インコーポレーテッド Ultrasonic machining assembly for use with portable devices
JP5746553B2 (en) * 2011-04-28 2015-07-08 株式会社東芝 Substrate processing system and substrate processing program
USD712852S1 (en) * 2012-03-20 2014-09-09 Veeco Instruments Inc. Spindle key
USD726133S1 (en) 2012-03-20 2015-04-07 Veeco Instruments Inc. Keyed spindle
US9816184B2 (en) 2012-03-20 2017-11-14 Veeco Instruments Inc. Keyed wafer carrier
US10245652B2 (en) * 2012-11-05 2019-04-02 M4 Sciences Llc Rotating tool holder assembly for modulation assisted machining
CN103447892B (en) * 2013-09-13 2016-02-24 辽宁科技大学 The ultrasonic wave magnetic multiple grinding device of jade relief handicraft and grinding technics
KR101643736B1 (en) * 2014-03-26 2016-07-29 선문대학교 산학협력단 Portable surface treating apparatus
CN104015117B (en) * 2014-06-20 2016-03-30 河北工业大学 A Controllable Amplitude Small-Aperture Aspheric Surface Polishing Device
JP6594961B2 (en) * 2014-09-05 2019-10-23 エジソン・ウェルディング・インスティチュート，インコーポレーテッド Tool attachment and axial coolant used for ultrasonic machining modules
JP6106248B2 (en) * 2014-11-07 2017-03-29 東台精機股▲ふん▼有限公司Ｔｏｎｇｔａｉ Ｍａｃｈｉｎｅ ＆ Ｔｏｏｌ Ｃｏ．，Ｌｔｄ． Machine tool having high frequency vibration and detection / feedback signal control method
US10875138B1 (en) 2016-08-09 2020-12-29 M4 Sciences Llc Tool holder assembly for machining system
TWI615233B (en) * 2016-11-29 2018-02-21 財團法人金屬工業研究發展中心 Apparatus for ultrasonic-assisted machining
US10391609B1 (en) * 2017-09-05 2019-08-27 Optipro Systems, LLC Modular contact assembly for rotating machine tool
TWI699256B (en) * 2019-11-12 2020-07-21 李慧玲 Ultrasonic knife handle assembly
CN111185357A (en) * 2020-01-06 2020-05-22 清华大学 A single-circuit rotating giant magnetostrictive ultrasonic transducer

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1510141A (en) * 1976-04-02 1978-05-10 Gearing & Watson Ltd Electromagnetic devices
US4180946A (en) * 1975-10-02 1980-01-01 Maurice Brunet Tool holding spindle assembly particularly for a grinding machine
EP0340661A2 (en) * 1988-05-03 1989-11-08 Mafell-Ultrasonics Gmbh Keramik-Erosion Apparatus for machining very hard material by means of a machining tool, and method therefor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2968132A (en) * 1956-09-18 1961-01-17 Omni American Engineering Comp Magnetostrictive grinding machine
US3105482A (en) * 1960-09-15 1963-10-01 Marie Louise Spira Klein Machine for drilling holes in hard materials
US3561462A (en) * 1969-10-10 1971-02-09 Branson Instr Ultrasonic drive assembly for machine tool
US3614484A (en) * 1970-03-25 1971-10-19 Branson Instr Ultrasonic motion adapter for a machine tool
JPS5973272A (en) * 1982-10-18 1984-04-25 Inoue Japax Res Inc Numerical controlled polishing device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4180946A (en) * 1975-10-02 1980-01-01 Maurice Brunet Tool holding spindle assembly particularly for a grinding machine
GB1510141A (en) * 1976-04-02 1978-05-10 Gearing & Watson Ltd Electromagnetic devices
EP0340661A2 (en) * 1988-05-03 1989-11-08 Mafell-Ultrasonics Gmbh Keramik-Erosion Apparatus for machining very hard material by means of a machining tool, and method therefor

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008037348A1 (en) * 2006-09-27 2008-04-03 Fischerwerke Gmbh & Co. Kg Ultrasonic vibration transducer for ultrasonic drilling
CN103710494A (en) * 2013-12-30 2014-04-09 江苏大学 Ultrasonic based method and ultrasonic based device for reinforcing a small hole
CN103710494B (en) * 2013-12-30 2016-04-27 江苏大学 A kind of based on hyperacoustic reinforcement method for small hole and device
EP2937149A1 (en) * 2014-04-22 2015-10-28 Inspire AG für mechatronische Produktionssysteme und Fertigungstechnik Device for processing workpieces by means of high frequency vibrations
CN104138831A (en) * 2014-07-25 2014-11-12 陶晓明 General rotating ultrasonic transducer assembly of high-speed motorized spindle
CN104138831B (en) * 2014-07-25 2017-01-18 陶晓明 General rotating ultrasonic transducer assembly of high-speed motorized spindle
CN104624463A (en) * 2015-01-09 2015-05-20 天津大学 Two-dimensional ultrasound vibration platform
CN104624463B (en) * 2015-01-09 2017-01-25 天津大学 A two-dimensional ultrasonic vibration platform
CN114918746A (en) * 2022-04-26 2022-08-19 深圳市中扬数控机床有限公司 Ultrasonic knife handle and ultrasonic numerical control machine tool
CN114918746B (en) * 2022-04-26 2023-03-10 深圳市中扬数控机床有限公司 Ultrasonic knife handle and ultrasonic numerical control machine tool

Also Published As

Publication number Publication date
EP0591104B1 (en) 1998-06-17
US5361543A (en) 1994-11-08
DE59308691D1 (en) 1998-07-23

Similar Documents

Publication Publication Date Title
EP0591104B1 (en) Apparatus for ultra-sonic eroding of a workpiece
DE60206006T2 (en) Spindle structure on ultrasonic machine and carrying horn for use in the same
DE975266C (en) A processing device that causes a material decrease
DE3919895C2 (en) Method and device for machining the inner surfaces of bores
EP1669148B1 (en) Tool-unit for ultrasonic rotational machining
EP0625083B1 (en) Workpiece grinder
DE10310543B4 (en) Wafer cleaning system and method for cleaning a wafer
DE1214827B (en) Method and device for driving shafts or cylindrical bodies of small diameter at high speeds
DE202017100736U1 (en) Ultrasonic hand drill
DE69511553T2 (en) TRANSDUCER DRIVEN TOOL TIPS
WO2019063139A1 (en) Cooling system for an ultrasonic drill
EP0231940A2 (en) Piezoelectric drive
EP0633827A1 (en) Ultrasonically excited honing tool and process for readjusting it
EP0340661A2 (en) Apparatus for machining very hard material by means of a machining tool, and method therefor
DE1279595B (en) Device for pulling wires
EP2929981B1 (en) Holding device for receiving and holding at least one component and vibratory grinding method
EP0555285B1 (en) Process for machining the inner surfaces of bores
WO2002087459A2 (en) Handpiece for linear actuation of a tool, preferably a dental tool
DE9212079U1 (en) Ultrasonic drive head for machining tools
WO2019052695A1 (en) Cooling system for ultrasonic drilling machine
CH671530A5 (en) Ultrasonic machining tool for milling or boring applications - has tool crown subjected to both axial and radial oscillations
AT236184B (en) Method and device for driving small-diameter shafts or cylindrical bodies connected to them at high rotational speed
DE4121495C1 (en) Machine for workpiece bore machining - has elongated tubular sleeve for drill spindle, retaining latter support bearing
DE102006029936B4 (en) Repair tool for a grinding tool and method for repairing a grinding tool
DE1143733B (en) Machine for fine machining of pre-machined center bores

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): CH DE FR GB LI

17P Request for examination filed

Effective date: 19940816

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: EROSONIC AG

19W Proceedings resumed before grant after interruption of proceedings

Effective date: 19970903

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: DAMATEC AG

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

17Q First examination report despatched

Effective date: 19971205

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): CH DE FR GB LI

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REF Corresponds to:

Ref document number: 59308691

Country of ref document: DE

Date of ref document: 19980723

RIN2 Information on inventor provided after grant (corrected)

Free format text: BORY, MICHAEL

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: PATENTANWALTSBUERO DIPL.-ING. S. V. KULHAVY + CO.

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 19980917

ET Fr: translation filed
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20000925

Year of fee payment: 8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20000927

Year of fee payment: 8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20001129

Year of fee payment: 8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20001219

Year of fee payment: 8

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20010921

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20010930

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20010930

REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20020501

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20010921

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20020531

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST