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EP0502303A1 - Procédé pour le traitement d'objets avec un gaz contenant du fluor et appareil pour le mener à bien - Google Patents

Procédé pour le traitement d'objets avec un gaz contenant du fluor et appareil pour le mener à bien Download PDF

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Publication number
EP0502303A1
EP0502303A1 EP92101160A EP92101160A EP0502303A1 EP 0502303 A1 EP0502303 A1 EP 0502303A1 EP 92101160 A EP92101160 A EP 92101160A EP 92101160 A EP92101160 A EP 92101160A EP 0502303 A1 EP0502303 A1 EP 0502303A1
Authority
EP
European Patent Office
Prior art keywords
gas
fluorine
reaction chamber
storage container
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP92101160A
Other languages
German (de)
English (en)
Other versions
EP0502303B1 (fr
Inventor
Bernd Möller
Arthur Koch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ahlbrandt System GmbH
Original Assignee
Ahlbrandt System GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ahlbrandt System GmbH filed Critical Ahlbrandt System GmbH
Publication of EP0502303A1 publication Critical patent/EP0502303A1/fr
Application granted granted Critical
Publication of EP0502303B1 publication Critical patent/EP0502303B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/10—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed before the application
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0433—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being a reactive gas
    • B05D3/044—Pretreatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases

Definitions

  • the invention relates to a method for treating the surface of objects with a fluorine-containing gas in a reaction chamber.
  • the invention further relates to a device for performing this method.
  • a disadvantage of surface pretreatment with fluorine is that, because of the extreme aggressiveness of fluorine, a relatively great effort has to be made to prevent fluorine from getting into the environment.
  • an inert gas is first introduced into the reaction container and then the fluorine gas is pumped in until the required fluorine concentration is reached.
  • the reaction chamber is double-walled and the space between its walls is carefully monitored for the presence of fluorine. The for security reasons required equipment is relatively large in the known method.
  • the invention is based on the problem of designing a method of the type mentioned at the outset in such a way that the escape of fluorine can be ruled out with as little effort as possible. Furthermore, a device for performing this method is to be developed.
  • the first-mentioned problem is solved according to the invention in that first a storage container is evacuated and then the appropriate concentration of fluorine in the gas is produced in it while maintaining negative pressure by adding a fluorine mixture, and then this conditioned gas is fed into the previously likewise evacuated reaction chamber and after Treatment is pumped back into the storage container and that the gas is sucked off and disposed of if the vacuum in the reaction chamber or the storage container is too close to the atmospheric pressure.
  • the entire device required for its implementation is under negative pressure as long as it contains fluorine. Therefore, leaks can only lead to the inflow of ambient air and not to the escape of fluorine.
  • Such an inflow of air can usually be determined by noise generation and can be monitored very easily by pressure sensors, so that in such a case the fluorine can be disposed of immediately.
  • the method according to the invention can therefore be carried out in a very simply constructed device.
  • a double-walled design of the reaction chamber is not necessary. Since the gas is processed in the storage tank, the pumped-back gas can be enriched with fluorine to the required extent, until the vacuum was reduced to such an extent that gas disposal and reprocessing with gas of higher vacuum becomes necessary for safety reasons.
  • the process sequence is particularly advantageous if two reaction chambers and a storage container are used. With such a procedure, one can unload a reaction chamber and load it with new objects while the pretreatment takes place in the other reaction chamber. Maintenance of one reaction chamber is also possible while the other is still in operation. Of course, more than two reaction chambers can also be provided. These can also have different sizes. It is only important for the process sequence that the storage container is as large as the largest reaction chamber.
  • the entire system including the gas disposal system, is under negative pressure, if fluorine is present in it, when the gas is sucked out of the treatment room or the treatment rooms and the storage container by means of a vacuum pump arranged behind a gas disposal system.
  • the second-mentioned problem namely the creation of a device for treating objects with a fluorine-containing gas in a gas-tight reaction chamber, is solved according to the invention in that a storage container which is constantly under vacuum is provided for setting the required fluorine concentration in the gas and in that the reaction chamber also for Working under vacuum is designed.
  • Such a device offers very high security against the escape of fluorine with little effort. Leakages lead to the inflow of ambient air into the device and therefore to a very easily detectable reduction in the vacuum.
  • the device according to the invention therefore does not require a double-walled reaction chamber.
  • the performance of the device is particularly high when two reaction chambers are provided parallel to the storage container. Such a device makes it possible to unload and load or maintain one reaction chamber while pretreatment with fluorine takes place in the other reaction chamber.
  • the invention allows numerous embodiments. To further clarify its basic principle, a device designed according to the invention is shown as a circuit diagram in the drawing and is described below.
  • two reaction chambers 2, 3 are arranged on both sides of a storage container 1.
  • the inputs of the reaction chambers 2, 3 and the input of the storage container 1 are connected to a line 4, via which 5 fluorine or a source 6 can supply inert gas from a fluorine storage container.
  • the outlets of the reaction chambers 2, 3 and the outlet of the storage container 1 are also connected to a common line 7.
  • the storage container 1 is evacuated to, for example, 0.1 bar using a vacuum pump 8.
  • fluorine is allowed to flow into the storage container 1 until a fluorine sensor 9 on the storage container 1 indicates the required fluorine concentration and the fluorine supply is then shut off.
  • the pressure in the storage container 1 then rose to, for example, 0.2 bar due to the fluorine supply.
  • the objects to be treated are, for example, placed in the reaction chamber 2 and the reaction chamber 2 is then closed in a gastight manner.
  • the reaction chamber 2 is then evacuated with the vacuum pump 8 and the gas is pumped from the storage container 1 with the vacuum pump 8 via lines 10, 11 into the reaction chamber 2 so that the fluorine pretreatment can begin in it.
  • reaction chamber 3 can already be filled with objects to be treated and evacuated by means of a vacuum pump 12.
  • the gas is pumped back into the storage container 1 by means of the vacuum pump 8.
  • This is followed by a purging process with inert gas from the source 6.
  • the purging gas with fluorine residues is fed from the vacuum pump 8 to a disposal system 13, which has a catalyst 14 and a gas scrubber 15.
  • a further vacuum pump 16 is connected behind the disposal system 13, which ensures that there is negative pressure in the entire system even during disposal.
  • the flushed and therefore fluorine-free reaction chamber 2 can be vented and opened after being disconnected from the source 6 and the vacuum pump 8 will.
  • the fluorine concentration reduced by reactions with the objects to be treated and air residues in the reaction chambers 2, 3 can be raised again to the required value and then the gas after the reaction chamber 3 has been closed and evacuated by means of the vacuum pump Pump 12 into the reaction chamber 3.
  • the required supply of fluorine in the storage container 1 necessarily reduces the negative pressure in the storage container 1.
  • Pressure sensors 17, 18, 19 in the reaction chambers 2, 3 and the storage container 1 respond as soon as the negative pressure reaches a value of, for example, 0.9 bar has decreased.
  • all the fluorine-containing gas is disposed of from the plant via the disposal plant 13 and mixed again in the storage container 1 fluorine-containing gas with the correct fluorine concentration and a vacuum of 0.2 bar.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Processing Of Solid Wastes (AREA)
EP92101160A 1991-02-20 1992-01-24 Procédé pour le traitement d'objets avec un gaz contenant du fluor et appareil pour le mener à bien Expired - Lifetime EP0502303B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4105179A DE4105179A1 (de) 1991-02-20 1991-02-20 Verfahren zur behandlung von gegenstaenden mit einem fluor enthaltenden gas sowie vorrichtung zu seiner durchfuehrung
DE4105179 1991-02-20

Publications (2)

Publication Number Publication Date
EP0502303A1 true EP0502303A1 (fr) 1992-09-09
EP0502303B1 EP0502303B1 (fr) 1995-05-31

Family

ID=6425421

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92101160A Expired - Lifetime EP0502303B1 (fr) 1991-02-20 1992-01-24 Procédé pour le traitement d'objets avec un gaz contenant du fluor et appareil pour le mener à bien

Country Status (3)

Country Link
EP (1) EP0502303B1 (fr)
DE (2) DE4105179A1 (fr)
ES (1) ES2073194T3 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4304792A1 (de) * 1993-02-17 1994-08-18 Moeller Bernd Verfahren zur Behandlung der Oberfläche von Gegenständen
DE4320388A1 (de) * 1993-06-19 1994-12-22 Ahlbrandt System Gmbh Verfahren zur Vorbehandlung von zu lackierenden Oberflächen von Kunststoffteilen
EP0644031A3 (fr) * 1993-09-20 1996-01-24 Avondale Property Holdings Ltd Extrusion de tubes stratifiés.
GB2309663A (en) * 1993-09-20 1997-08-06 Avondale Property Limited Bonding by extrusion a layer of plastics material to a metallic layer
EP1097960A3 (fr) * 1999-11-03 2001-08-08 Air Products And Chemicals, Inc. Procédé pour modifier chimiquement les propriétés de la surface d'un article polymère

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0629654B1 (fr) * 1993-06-19 1998-05-13 Fluor Technik System GmbH Procédé pour le prétraitement de surfaces de pièces en matière plastique avant peinture
DE19527883A1 (de) * 1995-07-29 1997-01-30 Fluor Tech Sys Gmbh Verfahren zum Beschichten von elektrisch nicht leitenden Kunststoffteilen
DE19731771A1 (de) * 1997-07-24 1999-01-28 Bultykhanova Natalia Abdichtungsverfahren

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2154694A1 (fr) * 1971-09-30 1973-05-11 Air Prod & Chem
FR2294206A1 (fr) * 1974-12-12 1976-07-09 Air Prod & Chem Perfectionnement apporte aux polyesters utilises pour le renforcement de caoutchoucs
US3998180A (en) * 1975-04-07 1976-12-21 Union Carbide Corporation Vapor deposition apparatus including fluid transfer means
US4296151A (en) * 1978-12-12 1981-10-20 Phillips Petroleum Company Fluorinated polymeric surfaces
US4467075A (en) * 1983-08-05 1984-08-21 Union Carbide Corporation Surface treatment of a solid polymeric material with a reactive gas
US4576837A (en) * 1985-03-19 1986-03-18 Tarancon Corporation Method of treating surfaces
US4994308A (en) * 1988-05-31 1991-02-19 Tarancon Corporation Direct fluorination of polymeric materials by using dioxifluorine fluid (mixture of CO2 and F2)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4237156A (en) * 1978-11-17 1980-12-02 Phillips Petroleum Company Fluorinated poly(arylene sulfides)
DE8703823U1 (de) * 1987-03-13 1987-04-23 Lohmann Gmbh & Co Kg, 5450 Neuwied Vorrichtung zur kontinuierlichen Oberflächenbehandlung von bahnförmigem Kunststoffmaterial mit gasförmigem Fluor

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2154694A1 (fr) * 1971-09-30 1973-05-11 Air Prod & Chem
FR2294206A1 (fr) * 1974-12-12 1976-07-09 Air Prod & Chem Perfectionnement apporte aux polyesters utilises pour le renforcement de caoutchoucs
US3998180A (en) * 1975-04-07 1976-12-21 Union Carbide Corporation Vapor deposition apparatus including fluid transfer means
US4296151A (en) * 1978-12-12 1981-10-20 Phillips Petroleum Company Fluorinated polymeric surfaces
US4467075A (en) * 1983-08-05 1984-08-21 Union Carbide Corporation Surface treatment of a solid polymeric material with a reactive gas
US4576837A (en) * 1985-03-19 1986-03-18 Tarancon Corporation Method of treating surfaces
US4994308A (en) * 1988-05-31 1991-02-19 Tarancon Corporation Direct fluorination of polymeric materials by using dioxifluorine fluid (mixture of CO2 and F2)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4304792A1 (de) * 1993-02-17 1994-08-18 Moeller Bernd Verfahren zur Behandlung der Oberfläche von Gegenständen
DE4320388A1 (de) * 1993-06-19 1994-12-22 Ahlbrandt System Gmbh Verfahren zur Vorbehandlung von zu lackierenden Oberflächen von Kunststoffteilen
EP0644031A3 (fr) * 1993-09-20 1996-01-24 Avondale Property Holdings Ltd Extrusion de tubes stratifiés.
US5580405A (en) * 1993-09-20 1996-12-03 Avondale Property (Holdings) Limited Extrusion of laminate pipes
GB2309663A (en) * 1993-09-20 1997-08-06 Avondale Property Limited Bonding by extrusion a layer of plastics material to a metallic layer
GB2309663B (en) * 1993-09-20 1998-02-18 Avondale Property Extrusion of laminate pipes
EP0920972A1 (fr) * 1993-09-20 1999-06-09 UNICOR ROHRSYSTEME GmbH Extrusion de tubes stratifiés
EP1097960A3 (fr) * 1999-11-03 2001-08-08 Air Products And Chemicals, Inc. Procédé pour modifier chimiquement les propriétés de la surface d'un article polymère
US6462142B1 (en) 1999-11-03 2002-10-08 Air Products And Chemicals, Inc. Processes for improved surface properties incorporating compressive heating of reactive gases

Also Published As

Publication number Publication date
DE4105179A1 (de) 1992-08-27
DE59202375D1 (de) 1995-07-06
ES2073194T3 (es) 1995-08-01
EP0502303B1 (fr) 1995-05-31

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