[go: up one dir, main page]

EP0465212A2 - Tintenstrahldruckköpfe - Google Patents

Tintenstrahldruckköpfe Download PDF

Info

Publication number
EP0465212A2
EP0465212A2 EP91305984A EP91305984A EP0465212A2 EP 0465212 A2 EP0465212 A2 EP 0465212A2 EP 91305984 A EP91305984 A EP 91305984A EP 91305984 A EP91305984 A EP 91305984A EP 0465212 A2 EP0465212 A2 EP 0465212A2
Authority
EP
European Patent Office
Prior art keywords
layer
resistor
resistors
ink
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP91305984A
Other languages
English (en)
French (fr)
Other versions
EP0465212A3 (en
Inventor
Abdul M. Elhatem
Steven A. Buhler
Mohammed M. Mojaradi
Putul D. Patel
Parviz P. Mazdiyazni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of EP0465212A2 publication Critical patent/EP0465212A2/de
Publication of EP0465212A3 publication Critical patent/EP0465212A3/en
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit

Definitions

  • heater board 20 includes an electrically-insulated silicon substrate 27 with a major surface 28 on which there is patterned CMOS drive circuitry 16 and channel stops 30.
  • drive circuitry 16 could be fabricated using other fabrication techniques.
  • Major surface 28, drive circuitry 16, and channel stops 30 are covered by a passivation layer 32, which consists of a 1 f..lm thick layer of silicon dioxide.
  • passivation layer 32 On the top surface of passivation layer 32 there are patterned heater resistors 14, addressing electrodes 18, a power bus 34 for supplying power to resistors 14, and terminals 36 connected to addressing electrodes 18 and power bus 34, and aluminum interconnects 38.
  • Aluminum interconnects 38 connect heating resistors 14 to power bus 34, and connect drive circuitry 16 to respective addressing electrodes 18 and respective heating resistors 14.
  • each resistor 14 has ends 56 that abut its respective contact regions 54, and ends 56 lie beneath and approximately coincident with edges 58 of the portion of the top surface of tantalum regions 46 not covered by passivation layer 48. In this manner, resistors 14 are separated from the ink only by silicon oxide regions 42, silicon nitride regions 44 and tantalum regions 46.
  • Field oxide regions 60 are constructed in the same steps used to fabricate channel stops 30. In this manner, field oxide regions 60 are constructed without adding any steps to the conventional CMOS fabrication process, or other conventional fabrication process used to fabricate drive circuitry 16.
  • Passivation layer 32 includes three separate layers, a middle layer 62 doped with phosphorus, a non-doped underglaze 64, and non-doped overglaze mesas 66.
  • Middle layer 62 is doped with phosphorus to facilitate reflow of middle layer 62.
  • Underglaze 64 is positioned below, in contact and coextensive with, middle layer 62, and above drive circuitry 16 and field oxide regions 60. Underglaze 64 prevents phosphorus from middle doped layer 62 from diffusing to drive circuitry 16 and altering the electrical characteristics, particularly the electrical characteristics in the drift regions (not shown).
  • One overglaze mesa 66 is positioned between middle layer 62 and resistors 14. Overglaze mesas 66 prevent phosphorus from middle layer 62 from diffusing to resistors 14 and altering their electrical characteristics.
  • middle layer 62, underglaze 64 and mesas 66 could be used by themselves to provide a reliable printhead 10.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP19910305984 1990-07-02 1991-07-02 Ink jet printheads Withdrawn EP0465212A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US54756790A 1990-07-02 1990-07-02
US547567 1990-07-02

Publications (2)

Publication Number Publication Date
EP0465212A2 true EP0465212A2 (de) 1992-01-08
EP0465212A3 EP0465212A3 (en) 1992-11-25

Family

ID=24185172

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19910305984 Withdrawn EP0465212A3 (en) 1990-07-02 1991-07-02 Ink jet printheads

Country Status (3)

Country Link
EP (1) EP0465212A3 (de)
JP (1) JPH04232751A (de)
CA (1) CA2044402A1 (de)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4532530A (en) * 1984-03-09 1985-07-30 Xerox Corporation Bubble jet printing device
US4719477A (en) * 1986-01-17 1988-01-12 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
US4935752A (en) * 1989-03-30 1990-06-19 Xerox Corporation Thermal ink jet device with improved heating elements
EP0396315A1 (de) * 1989-05-01 1990-11-07 Xerox Corporation Wärmetintenstrahldruckknopf mit Blasen erzeugenden Heizelementen

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4532530A (en) * 1984-03-09 1985-07-30 Xerox Corporation Bubble jet printing device
US4719477A (en) * 1986-01-17 1988-01-12 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
US4935752A (en) * 1989-03-30 1990-06-19 Xerox Corporation Thermal ink jet device with improved heating elements
EP0396315A1 (de) * 1989-05-01 1990-11-07 Xerox Corporation Wärmetintenstrahldruckknopf mit Blasen erzeugenden Heizelementen

Also Published As

Publication number Publication date
EP0465212A3 (en) 1992-11-25
JPH04232751A (ja) 1992-08-21
CA2044402A1 (en) 1992-01-03

Similar Documents

Publication Publication Date Title
EP0154515B1 (de) Tintenstrahldrucker mit Bläschen
JP4332227B2 (ja) 熱式インク・ジェット・プリンタ用薄膜駆動ヘッド
EP1326279B1 (de) Dünnfilmtransistor als Heizelement für eine Mikroreaktionskammer
US4774530A (en) Ink jet printhead
EP0434946B1 (de) Farbstrahldruckkopf mit ionischer Passivierung der elektrischen Schaltungen
EP3529081B1 (de) Verfahren zur herstellung eines thermischen tintenstrahldruckkopfs, thermischer tintenstrahldruckkopf und halbleiterwafer
JPH09174851A (ja) チップ内の熱障壁としてフィールド酸化物を具備する印刷ヘッド
US8651604B2 (en) Printheads
EP0438295B1 (de) Thermische Tintenstrahldruckköpfe
US4835553A (en) Thermal ink jet printhead with increased drop generation rate
EP1352744B1 (de) Flüssigkeitsspender und Drucker
EP0594369B1 (de) Heizelelementenbauart für Farbstrahl-Thermo-Drucker
US20060121747A1 (en) Ink-jet printhead fabrication
EP1205303B9 (de) Drucker, Druckkopf und Druckkopfherstellungsverfahren
US6132032A (en) Thin-film print head for thermal ink-jet printers
EP0465212A2 (de) Tintenstrahldruckköpfe
JP3584752B2 (ja) 液体噴射記録装置およびその製造方法
KR19990063906A (ko) 잉크 젯 프린팅 헤드 및 그 제조 방법
US6109733A (en) Printhead for thermal ink jet devices
US6146914A (en) Thermal ink jet printhead with increased heater resistor control
EP1568498B1 (de) Anordnung metallischer Schichten in einer Flüssigkeitsausstossvorrichtung
US5969392A (en) Thermal ink jet printheads with power MOS driver devices having enhanced transconductance
CN110406258B (zh) 液体喷头基板、制造液体喷头基板的方法和液体喷头
CN100594131C (zh) 喷墨头芯片结构
KR20040055230A (ko) 잉크젯 프린트헤드 및 그 제조방법

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): DE FR GB

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): DE FR GB

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Withdrawal date: 19930406