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EP0364514B1 - Device for a twin-disk lapping machine - Google Patents

Device for a twin-disk lapping machine Download PDF

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Publication number
EP0364514B1
EP0364514B1 EP89902018A EP89902018A EP0364514B1 EP 0364514 B1 EP0364514 B1 EP 0364514B1 EP 89902018 A EP89902018 A EP 89902018A EP 89902018 A EP89902018 A EP 89902018A EP 0364514 B1 EP0364514 B1 EP 0364514B1
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EP
European Patent Office
Prior art keywords
spindle
disk
tool
column
tool disk
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP89902018A
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German (de)
French (fr)
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EP0364514A1 (en
Inventor
Arthur Werner STÄHLI
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Individual
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Definitions

  • the present invention relates to a device on a two-disc lapping machine for bringing an upper tool disc into its working position according to the preamble of patent claim 1.
  • Two-disc lapping machines have been known for around 40 to 50 years. Workpieces to be machined are drawn through and machined by so-called rotor disks by means of an inner and outer pin ring between the two tool disks. With double-disc lapping machines, it is possible to achieve a very high degree of parallelism between the machined surfaces of the workpieces. With the advent of new technologies, such as the production of silicon wafers for integrated circuits, the production of quartz or the finest ceramic plates, ever increasing demands were placed on lapping machines. Especially when machining extremely thin-walled materials, the working pressure control of the upper tool disc of double disc lapping machines should be given the greatest attention.
  • the upper tool disc In today's known types of double-disc lapping machines, the upper tool disc is in most cases suspended from a motor-driven and axially displaceable spindle.
  • the spindle is connected to a radially swiveling column stand of the lapping machine via a bearing component.
  • Via a hydraulic or pneumatic cylinder drive which engages the axially displaceable spindle, the upper tool disk attached to the lower end of the spindle can be fed to, placed on and pressed onto the workpiece.
  • the cylinder drive must first compensate for the weight of the upper tool disc, which weighs up to several 1,000 Newtons, bring the tool disc to the workpiece, slowly set it down as already described, and begin the load by reducing the weight compensation.
  • the machine equipped with the device according to the invention is structurally much simpler in construction.
  • the invention solves this problem according to the features listed in the characterizing part of claim 1.
  • the lapping machine comprises a column stand 3 which is mounted and guided in a stand guide 2.
  • the stand guide 2 is rigidly connected to the frame of the machine in a manner not shown.
  • a bar 11 is arranged essentially at right angles thereto and is pivotably mounted approximately in the middle.
  • the beam 11 consists of two essentially parallel to mutually extending longitudinal beams 11 a, which are connected at their rear end 28 by cross members 11 b and at their front end 13 by a headstock 14.
  • an axis 12 extends at right angles to the longitudinal beams 11a through a bore in the latter and in the column stand.
  • the beam 11 is pivotally supported by the axis 12.
  • the headstock 14 arranged at the front end between the longitudinal beams 11a supports the tool spindle 15.
  • the upper tool disk 21 is articulated via a joint head 20.
  • an electric motor as the first drive means 17 is preferably arranged on the front part of the beam behind the headstock 14 and connected to the latter.
  • the electric motor 17 is equipped with a reduction gear 18 and, via a transmission means 19, for example a belt drive, serves to drive the tool spindle 15.
  • the tool spindle 15 which preferably has a longitudinal bore, there is a sensor 16 for measuring the workpiece thickness, through the mentioned bore , assembled. It is an essential feature of the present invention that the tool spindle 15 is mounted in the headstock 14 without the possibility of axial displacement.
  • the column stand 3 has in its upper region a counter-holder 27 pointing rearward and running essentially parallel to the beam 11.
  • the counter-holder 27 comprises two carriers 27a which run parallel to one another and are essentially tangentially connected to the column stand 3 and have a spacing from one another.
  • At the rear end 28 of the beam 11 there is a first adjustment means between the longitudinal beams 11a via a first bearing axis 31 29 pivotally connected to the beam 11.
  • the first adjusting means 29 has the task of compensating for the weight of the upper tool disk 21 by up to several 1,000 Newtons and to keep the bar 11 in a substantially horizontal position.
  • a travel limiting device 37, 38, 41 arranged at the rear end 28 of the beam 11 has the task of limiting the pivoting movement of the beam 11.
  • the construction is designed so that the mentioned pivoting movement of the beam 11 at the front end 13 is at most 20 mm.
  • the path limiting device consists of a groove 41 which is incorporated into a cross member 11b of the beam 11 at the rear beam end 28.
  • the pivoting movement of the beam 11 can also be adjusted with an adjustable stop 38 arranged in the counter holder 27.
  • the column stand 3 has at its lower end a concentrically arranged one with an internal thread Hole 5 on.
  • a lifting spindle 4 which can be driven by means of, for example, an electric motor 6 as a second drive means via a gear 7, engages in the thread of the bore 5 for lifting and lowering the column stand 3.
  • the motor 6 with the gear 7 and the lifting spindle 4 are connected to the frame of the lapping machine.
  • Another essential feature of the device according to the invention is that there is a functional separation between bringing the tool disk 21 into its working position and controlling the working pressure of the tool disk 21 on the surface of the workpieces 23.
  • the feeding takes place by the lowering movement of the column stand 3 by means of the lifting spindle 4 and the control of the working pressure takes place by applying a deflecting force to the beam 11 via the second cylinder drive 30.
  • the first and the second measuring means 8, 39 and the sensor 16 for measuring the workpiece thickness are connected to a control device, not shown, of the lapping machine.
  • the control device processes the signals received from the measuring means 8, 39 and from the sensor 16 to control the lifting spindle 4 and the cylinder drives 29, 30.
  • the lower end of the column stand 3 is flanged to a swivel cylinder 10.
  • the swivel cylinder 10 serves to swivel the column stand 3 with the upper tool disk 21.
  • the swivel position is shown in FIG. 2.
  • the latter can be locked by means of a clamping cylinder 9 arranged in the stand guide 2.
  • the upper working disk 21 always has a position parallel to the lower working disk 22 despite the pivoting movement of the beam 11, the upper tool disk is connected to the lower end of the tool spindle via a joint head 20.
  • the lateral offset of the upper tool disk 21 relative to the lower tool disk 22 that occurs as a result is negligible.
  • a lapping process with the device according to the invention on a two-disc lapping machine is described below.
  • the column stand 3 is in a raised position and the upper tool disk 21 is in the pivoted-out position.
  • the workpieces 23 to be machined are placed in the receiving openings of the rotor disk 24 on the surface of the lower tool disk 22.
  • the upper tool disk 21, which is in the swiveled-out position, is swiveled in with the swivel cylinder 10.
  • the pivoting position is limited, for example, by a stop (not shown) in such a way that the two tool disks 21, 22 lie one above the other centrally.
  • the thickness of the unworked workpieces plus a tolerance of preferably 0.2 mm is entered into the control device (not shown) as the feed dimension for the upper tool disk.
  • the upper tool disk 21 is rapidly lowered in the direction of the surface of the workpieces 23 via the lifting spindle 4.
  • the control device monitors the signal from the first measuring means 8 and ensures that the lowering movement of the column stand 3 is stopped in time, just before the upper tool disk 21 touches the surface of the workpieces 23.
  • the first cylinder drive 29 keeps the bar 11 permanently in a horizontal position. With the second cylinder drive 30, a small, upward force is applied. As a result, the upper tool disk 21 lowers slowly and without any appreciable working pressure onto the surface of the workpieces 23.
  • the lapping process can begin.
  • a time program which is stored, for example, in the control device of the lapping machine, which is not shown, a lapping process begins, the control device continuously monitoring the workpiece thickness on the basis of the signal supplied by the sensor 16 and the working pressure of the tool disk 21 via the second cylinder drive 30 on the basis of the set one controls the program dependent on the workpiece to be machined.
  • the vertical position of the column stand 3 is secured with the clamping cylinder 9.
  • the working pressure of the upper tool disc is reduced and the beam 11 is brought into the horizontal position by the first cylinder drive 29.
  • the rotational movements of the tool disks 21, 22, the pin rings 25 and / or 26 are switched off.
  • the column stand 3 is raised by actuating the lifting spindle 4.
  • the swivel cylinder 10 With the swivel cylinder 10, the upper tool disk 21 is brought back into the swiveled-out position.
  • the lapping machine can be unloaded and equipped with new workpieces 23 to be machined.
  • the two cylinder drives 29, 30 enable the upper tool disk 21 to be precisely controlled in terms of working pressure, since the otherwise customary shifting cylinder with the known disadvantageous holding torque (slip-stik) and with the pressure reversal occurring during the working process are eliminated.
  • the column stand 3 is loaded relatively little by the balance beam principle. The uplifting of the column stand known from other designs of double-disc lapping machines is thereby avoided.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

A beam (11) is arranged generally vertically on the upper end of a radially-rotatable pillar support (3) in such a way that it can pivot around its generally central part. A tool spindle (15) is mounted axially, in a non-adjustable position, on the front end (13) of the beam in a spindle head (14) connected to the beam (11) and is driven by a first driving means (17). The upper tool disk (21) is mounted at the lower end of the tool spindle (15) on an articulated head (20). The pillar support (3), which is positioned and guided in the support guiding device (2), can be raised and lowered by means of a lifting spindle (4) driven by a second driving means (6) in order to bring the tool disk (21) into its working position. A first adjusting means (29) engaged on the rear end (28) of the beam is used to maintain the beam (11) in a generally horizontal position. A second adjusting means (30) which is also engaged on the rear end (28) of the beam is used to control the working pressure of the tool disk (21). The design of said invention provides an easy solution for suspending, positioning and driving the tool disk (21) because the tool spindle (15) can no longer be axially shifted. The working pressure of the tool disk (21) can be controlled with high precision. Lapping machines according to said invention are particularly suited for processing wafers, quartz and thin-walled ceramic plates.

Description

Die vorliegende Erfindung betrifft eine Einrichtung an einer Zweischeibenläppmaschine zum Zubringen einer oberen Werkzeugscheibe in ihre Arbeitsposition gemäss dem Oberbegriff des Patentanspruches 1.The present invention relates to a device on a two-disc lapping machine for bringing an upper tool disc into its working position according to the preamble of patent claim 1.

Zweischeibenläppmaschinen sind seit ca. 40 bis 50 Jahren bekannt. Zu bearbeitende Werkstücke werden dabei durch sogenannte Läuferscheiben mittels eines inneren und äusseren Stiftkranzes zwischen den zwei Werkzeugscheiben durchgezogen und bearbeitet. Mit Zweischeibenläppmaschinen ist es möglich, eine sehr grosse Parallelität der bearbeiteten Flächen der Werkstücke zu erreichen. Durch das Aufkommen von neuen Technologien, wie das Herstellen von Siliziumscheiben für integrierte Schaltungen, das Herstellen von Quarzen oder von feinsten Keramikplatten wurden auch an Läppmaschinen immer grössere Anforderungen gestellt. Insbesondere beim Bearbeiten von äusserst dünnwandigen Materialien ist der Arbeitsdrucksteuerung der oberen Werkzeugscheibe von Zweischeibenläppmaschinen die grösste Aufmerksamkeit zu schenken. Es werden heute Maschinen verlangt, bei denen die Zubringung der oberen Werkzeugscheibe möglichst rasch bis unmittelbar vor das Berühren der Werkzeugscheibe mit der Oberfläche der zu bearbeitenden Werkstücke erfolgt. Das Aufsetzen der oberen Werkzeugscheibe auf die Bearbeitungsoberfläche der Werkstücke soll aber möglichst fein, praktisch ohne Druck erfolgen. Während dem Bearbeiten der Werkstücke ist der Arbeitsdruck je nach Anwendungsfall nach bestimmten Vorschriften kontinuierlich zu steigern und am Ende der Bearbeitung wieder zu senken, um schlussendlich die obere Werkzeugscheibe, zum Entleeren der Läppmaschine, von den Werkstücken abzuheben und auf die Seite zu schwenken.Two-disc lapping machines have been known for around 40 to 50 years. Workpieces to be machined are drawn through and machined by so-called rotor disks by means of an inner and outer pin ring between the two tool disks. With double-disc lapping machines, it is possible to achieve a very high degree of parallelism between the machined surfaces of the workpieces. With the advent of new technologies, such as the production of silicon wafers for integrated circuits, the production of quartz or the finest ceramic plates, ever increasing demands were placed on lapping machines. Especially when machining extremely thin-walled materials, the working pressure control of the upper tool disc of double disc lapping machines should be given the greatest attention. Today, machines are required in which the upper tool disk is fed as quickly as possible until immediately before the tool disk touches the surface of the workpieces to be machined. However, the upper tool disc should be placed on the machining surface of the workpieces as finely as possible, practically without pressure. Depending on the application, the working pressure must be continuously increased according to certain regulations during the machining of the workpieces and reduced again at the end of the machining, in the end the upper one Tool disc, for emptying the lapping machine, to be lifted off the workpieces and swiveled to the side.

Bei heute bekannten Ausführungsarten von Zweischeibenläppmaschinen ist die obere Werkzeugscheibe in den meisten Fällen an einer motorisch antreibbaren und axial verschiebbaren Spindel aufgehängt. Die Spindel ist über einen Lagerbauteil mit einem radial schwenkbaren Säulenständer der Läppmaschine verbunden. Ueber einen hydraulischen oder pneumatischen Zylinderantrieb, der an der genannten axial verschiebbaren Spindel angreift, ist die am unteren Ende der Spindel befestigte obere Werkzeugscheibe zum Werkstück zuführ-, aufsetz- und andrückbar. Der Zylinderantrieb muss das Gewicht der bis zu mehreren 1′000 Newton schweren oberen Werkzeugscheibe zuerst kompensieren, die Werkzeugscheibe zum Werkstück zubringen, wie bereits geschildert langsam aufsetzen und mit der Belastung, durch Reduktion der Gewichtskompensation beginnen. Da heute Arbeitsdrücke bis zu einigen 10′000 Newton verlangt werden, ergeben sich einerseits schlecht kontrollierbare Andruckverhältnisse, wenn beim Aufheben der Gewichtskompensation der oberen Werkzeugscheibe durch Druckumkehr im Zylinderantrieb auf eine zusätzliche Belastung übergegangen wird und andererseits neigen die heutigen Maschinen dazu, dass sich der Säulenständer mit der radial ausgelegten oberen Werkzeugscheibe als Folge des enormen Arbeitsdruckes aufbäumt. In beiden Fällen ist eine Einbusse der Arbeitsgenauigkeit die Folge.In today's known types of double-disc lapping machines, the upper tool disc is in most cases suspended from a motor-driven and axially displaceable spindle. The spindle is connected to a radially swiveling column stand of the lapping machine via a bearing component. Via a hydraulic or pneumatic cylinder drive which engages the axially displaceable spindle, the upper tool disk attached to the lower end of the spindle can be fed to, placed on and pressed onto the workpiece. The cylinder drive must first compensate for the weight of the upper tool disc, which weighs up to several 1,000 Newtons, bring the tool disc to the workpiece, slowly set it down as already described, and begin the load by reducing the weight compensation. Since working pressures of up to a few 10,000 Newtons are required today, pressure conditions are difficult to control if, when lifting the weight compensation of the upper tool disc due to pressure reversal in the cylinder drive, an additional load is transferred and, on the other hand, today's machines tend to have a column stand rears up with the radially designed upper tool disc as a result of the enormous working pressure. In both cases, the result is a loss of working accuracy.

Eine weitere Ausführungsform gemäss der deutschen Offenlegungsschrift DE-A-35 20 713 versucht die genannten Schwierigkeiten dadurch zu umgehen, dass die am unteren Ende einer in einem axial verschiebbaren Lagerbauteil gelagerten Spindel angebrachte obere Werkzeugscheibe an einem Ende eines zweiarmigen Hebels aufgehängt ist, während die pneumatisch wirkenden Verstellvorrichtungen am anderen Hebelende angreifen. Diese Ausführungsform ist sowohl mechanisch ais auch steuerungstechnisch aufwendig.Another embodiment according to German published patent application DE-A-35 20 713 tries to circumvent the difficulties mentioned in that the upper tool disk attached to the lower end of a spindle mounted in an axially displaceable bearing component is suspended from one end of a two-armed lever, while the latter is pneumatic acting adjustment devices on the other Attack the lever end. This embodiment is expensive both mechanically and in terms of control technology.

Es ist die Aufgabe der vorliegenden Erfindung, eine Einrichtung an einer Zweischeibenläppmaschine zu schaffen, mit der die genannten Nachteile des Zubringens und Andrückens der oberen Werkzeugscheibe auf die Werkstückoberfläche nicht auftreten. Gegenüber den bekannten Ausführungsformen von Zweischeibenläppmaschinen ist die mit der erfindungsgemässen Einrichtung ausgerüstete Maschine konstruktiv wesentlich einfacher aufgebaut.It is the object of the present invention to provide a device on a two-disc lapping machine with which the disadvantages mentioned of bringing and pressing the upper tool disc onto the workpiece surface do not occur. Compared to the known embodiments of double-disc lapping machines, the machine equipped with the device according to the invention is structurally much simpler in construction.

Die Erfindung löst diese Aufgabe gemäss den im kennzeichnenden Teil des Patentanspruches 1 aufgeführten Merkmalen.The invention solves this problem according to the features listed in the characterizing part of claim 1.

Im folgenden ist ein Ausführungsbeispiel anhand von Zeichnungen näher erläutert. Es zeigen

  • Fig. 1 eine Seitenansicht mit Teilschnitten,
  • Fig. 2 eine Aufsicht und
  • Fig. 3 eine Vorderansicht der erfindungsgemässen Einrichtung an einer Zweischeibenläppmaschine.
An exemplary embodiment is explained in more detail below with reference to drawings. Show it
  • 1 is a side view with partial sections,
  • Fig. 2 is a supervision and
  • Fig. 3 is a front view of the device according to the invention on a two-disc lapping machine.

In den oben aufgelisteten Figuren ist eine Zweischeibenläppmaschine dargestellt, wobei darauf geachtet worden ist, dass vor allem die erfindungsgemässe Einrichtung zum Zubringen einer oberen Werkzeugscheibe in ihre Arbeitsposition optimal ersichtlich ist und die übrigen Teile der Läppmaschine nur andeutungsweise vorhanden sind. Die Läppmaschine umfasst einen Säulenständer 3, der in einer Ständerführung 2 gelagert und geführt ist. Die Ständerführung 2 ist in nicht dargestellter Weise mit dem Rahmen der Maschine starr verbunden. Oben am Säulenständer 3 ist ein Balken 11 im wesentlichen rechtwinklig dazu angeordnet und ungefähr mittig schwenkbar gelagert. Der Balken 11 besteht aus zwei im wesentlichen parallel zu- einander verlaufenden Längsträgern 11a, die an ihrem hinteren Ende 28 durch Querträger 11b und an ihrem vorderen Ende 13 durch einen Spindelstock 14 miteinander verbunden sind. Ungefähr mittig in Längsrichtung der Längsträger 11a gesehen, verläuft eine Achse 12 rechtwinklig zu den Längsträgern 11a durch je eine in letzteren und im Säulenständer angebrachte Bohrung. Durch die Achse 12 ist der Balken 11 schwenkbar gelagert. Der am vorderen Ende zwischen den Längsträgern 11a angeordnete Spindelstock 14 lagert die Werkzeugspindel 15. Am unteren Ende der genannten Werkzeugspindel 15 ist über einen Gelenkkopf 20 die obere Werkzeugscheibe 21 gelenkig befestigt. Beispielsweise ein Elektromotor als erstes Antriebsmittel 17 ist vorzugsweise am vorderen Balkenteil hinter dem Spindelstock 14 angeordnet und mit letzterem verbunden. Der Elektromotor 17 ist mit einem Reduktionsgetriebe 18 ausgerüstet und dient über ein Uebertragungsmittel 19, beispielsweise einen Riementrieb, zum Antreiben der Werkzeugspindel 15. Am oberen Ende der vorzugsweise eine Längsbohrung aufweisenden Werkzeugspindel 15 ist ein Sensor 16 zum Messen der Werkstückdicke, durch die erwähnte Bohrung hindurch, montiert. Es ist ein wesentliches Merkmal der vorliegenden Erfindung, dass die Werkzeugspindel 15 im Spindelstock 14 ohne die Möglichkeit einer axialen Verschiebung gelagert ist.In the figures listed above, a two-disc lapping machine is shown, care being taken to ensure that, above all, the device according to the invention for bringing an upper tool disc into its working position is optimally visible and the other parts of the lapping machine are only hinted at. The lapping machine comprises a column stand 3 which is mounted and guided in a stand guide 2. The stand guide 2 is rigidly connected to the frame of the machine in a manner not shown. At the top of the column stand 3, a bar 11 is arranged essentially at right angles thereto and is pivotably mounted approximately in the middle. The beam 11 consists of two essentially parallel to mutually extending longitudinal beams 11 a, which are connected at their rear end 28 by cross members 11 b and at their front end 13 by a headstock 14. Seen approximately in the center in the longitudinal direction of the longitudinal beams 11a, an axis 12 extends at right angles to the longitudinal beams 11a through a bore in the latter and in the column stand. The beam 11 is pivotally supported by the axis 12. The headstock 14 arranged at the front end between the longitudinal beams 11a supports the tool spindle 15. At the lower end of the tool spindle 15 mentioned, the upper tool disk 21 is articulated via a joint head 20. For example, an electric motor as the first drive means 17 is preferably arranged on the front part of the beam behind the headstock 14 and connected to the latter. The electric motor 17 is equipped with a reduction gear 18 and, via a transmission means 19, for example a belt drive, serves to drive the tool spindle 15. At the upper end of the tool spindle 15, which preferably has a longitudinal bore, there is a sensor 16 for measuring the workpiece thickness, through the mentioned bore , assembled. It is an essential feature of the present invention that the tool spindle 15 is mounted in the headstock 14 without the possibility of axial displacement.

Der Säulenständer 3 weist in seinem oberen Bereich einen nach hinten weisenden, im wesentlichen parallel zum Balken 11 verlaufenden Gegenhalter 27 auf. Der Gegenhalter 27 umfasst zwei parallel zueinander verlaufende, mit dem Säulenständer 3 im wesentlichen tangential verbundene, einen Abstand zueinander aufweisende Träger 27a. Am hinteren Ende 28 des Balkens 11 ist zwischen den Längsträgern 11a über eine erste Lagerachse 31 ein erstes Verstellmittel 29 schwenkbar mit dem Balken 11 verbunden. Das erste Verstellmittel 29, das vorzugsweise einen pneumatischen oder einen hydraulischen Zylinderantrieb umfasst, ist auf seiner anderen Seite über eine zweite Lagerachse 32 zwischen den Trägern 27a mit dem Gegenhalter 27 verbunden. Das erste Verstellmittel 29 hat die Aufgabe, das Gewicht der oberen Werkzeugscheibe 21 von bis zu mehreren 1′000 Newton zu kompensieren und den Balken 11 in einer im wesentlichen horizontalen Lage zu halten. Ein zweites Verstellmittel 30, das vorzugsweise ebenfalls aus einem pneumatischen oder hydraulischen Zylinderantrieb besteht, ist wie eben beschrieben, über eine dritte Lagerachse 33 mit dem hinteren Balkenende 28 des Balkens 11 und über eine vierte Lagerachse 34 mit dem Gegenhalter 27 verbunden. Dieser Zylinderantrieb dient zur Steuerung des Arbeitsdruckes der oberen Werkzeugscheibe 21.The column stand 3 has in its upper region a counter-holder 27 pointing rearward and running essentially parallel to the beam 11. The counter-holder 27 comprises two carriers 27a which run parallel to one another and are essentially tangentially connected to the column stand 3 and have a spacing from one another. At the rear end 28 of the beam 11 there is a first adjustment means between the longitudinal beams 11a via a first bearing axis 31 29 pivotally connected to the beam 11. The first adjustment means 29, which preferably comprises a pneumatic or a hydraulic cylinder drive, is connected on its other side to the counter-holder 27 via a second bearing axis 32 between the carriers 27a. The first adjusting means 29 has the task of compensating for the weight of the upper tool disk 21 by up to several 1,000 Newtons and to keep the bar 11 in a substantially horizontal position. A second adjusting means 30, which preferably also consists of a pneumatic or hydraulic cylinder drive, is, as just described, connected to the rear beam end 28 of the beam 11 via a third bearing axis 33 and to the counter-holder 27 via a fourth bearing axis 34. This cylinder drive serves to control the working pressure of the upper tool disk 21.

Eine am hinteren Ende 28 des Balkens 11 angeordnete Wegbegrenzungseinrichtung 37, 38, 41 hat zur Aufgabe, die Schwenkbewegung des Balkens 11 zu begrenzen. Die Konstruktion ist so ausgelegt, dass die genannte Schwenkbewegung des Balkens 11 am vorderen Ende 13 höchstens 20 mm beträgt. Die Wegbegrenzungseinrichtung besteht aus einer Nut 41, die am hinteren Balkenende 28 in einen Querträger 11b des Balkens 11 eingearbeitet ist. Ein hakenförmig ausgebildetes Halteelement 37, das mit dem Gegenhalter 27 verstellbar verbunden ist, greift zur Begrenzung der Schwenkbewegung des Balkens 11 in die genannte Nut 41 ein. Mit einem im Gegenhalter 27 angeordneten verstellbaren Anschlag 38 lässt sich die Schwenkbewegung des Balkens 11 zusätzlich einstellen.A travel limiting device 37, 38, 41 arranged at the rear end 28 of the beam 11 has the task of limiting the pivoting movement of the beam 11. The construction is designed so that the mentioned pivoting movement of the beam 11 at the front end 13 is at most 20 mm. The path limiting device consists of a groove 41 which is incorporated into a cross member 11b of the beam 11 at the rear beam end 28. A hook-shaped holding element 37, which is adjustably connected to the counter-holder 27, engages in said groove 41 to limit the pivoting movement of the beam 11. The pivoting movement of the beam 11 can also be adjusted with an adjustable stop 38 arranged in the counter holder 27.

Der Säulenständer 3 weist an seinem unteren Ende eine konzentrisch angeordnete, mit einem Innengewinde versehene Bohrung 5 auf. Eine mittels beispielsweise einem Elektromotor 6 als zweitem Antriebsmittel über ein Getriebe 7 antreibbare Hubspindel 4 greift in das Gewinde der Bohrung 5 zum Heben und Senken des Säulenständers 3 ein. Der Motor 6 mit dem Getriebe 7 und der Hubspindel 4 sind mit dem Rahmen der Läppmaschine verbunden. Ein weiteres wesentliches Merkmal der erfindungsgemässen Einrichtung besteht darin, dass eine funktionale Trennung zwischen dem Zubringen der Werkzeugscheibe 21 in ihre Arbeitsposition und dem Steuern des Arbeitsdruckes der Werkzeugscheibe 21 auf der Oberfläche der Werkstücke 23 besteht. Das Zubringen geschieht durch die Senkbewegung des Säulenständers 3 mittels der Hubspindel 4 und die Steuerung des Arbeitsdruckes erfolgt durch Beaufschlagen des Balkens 11 mit einer Auslenkkraft über den zweiten Zylinderantrieb 30.The column stand 3 has at its lower end a concentrically arranged one with an internal thread Hole 5 on. A lifting spindle 4, which can be driven by means of, for example, an electric motor 6 as a second drive means via a gear 7, engages in the thread of the bore 5 for lifting and lowering the column stand 3. The motor 6 with the gear 7 and the lifting spindle 4 are connected to the frame of the lapping machine. Another essential feature of the device according to the invention is that there is a functional separation between bringing the tool disk 21 into its working position and controlling the working pressure of the tool disk 21 on the surface of the workpieces 23. The feeding takes place by the lowering movement of the column stand 3 by means of the lifting spindle 4 and the control of the working pressure takes place by applying a deflecting force to the beam 11 via the second cylinder drive 30.

Ein erstes Messmittel 8, das an der Ständerführung 2 angeordnet ist, erlaubt die vertikale Position des Säulenständers 3 zu messen. Mit einem zweiten Messmittel 39 ist die Schwenkbewegung und damit die Auslenkung des Balkens 11 messbar. Das erste und das zweite Messmittel 8, 39 sowie der Sensor 16 zum Messen der Werkstückdicke sind mit einer nicht dargestellten Steuereinrichtung der Läppmaschine verbunden. Die Steuereinrichtung verarbeitet die von den Messmitteln 8, 39 und vom Sensor 16 erhaltenen Signale zur Steuerung der Hubspindel 4 und der Zylinderantriebe 29, 30.A first measuring means 8, which is arranged on the stand guide 2, allows the vertical position of the column stand 3 to be measured. With a second measuring device 39, the pivoting movement and thus the deflection of the beam 11 can be measured. The first and the second measuring means 8, 39 and the sensor 16 for measuring the workpiece thickness are connected to a control device, not shown, of the lapping machine. The control device processes the signals received from the measuring means 8, 39 and from the sensor 16 to control the lifting spindle 4 and the cylinder drives 29, 30.

Zum einfachen Be- und Entladen der Läppmaschine ist das untere Ende des Säulenständers 3 an einen Schwenkzylinder 10 angeflanscht.For easy loading and unloading of the lapping machine, the lower end of the column stand 3 is flanged to a swivel cylinder 10.

Der Schwenkzylinder 10 dient zum Ausschwenken des Säulenständers 3 mit der oberen Werkzeugscheibe 21. In der Fig. 2 ist die Ausschwenkstellung dargestellt. Zur Sicherung einer mit der Hubspindel 4 eingestellten vertikalen Position des Säulenständers 3 ist letzterer mittels einem in der Ständerführung 2 angeordneten Klemmzylinder 9 arretierbar.The swivel cylinder 10 serves to swivel the column stand 3 with the upper tool disk 21. The swivel position is shown in FIG. 2. To Securing a vertical position of the column stand 3 set with the lifting spindle 4, the latter can be locked by means of a clamping cylinder 9 arranged in the stand guide 2.

Damit die obere Arbeitsscheibe 21 trotz der Schwenkbewegung des Balkens 11 immer eine zur unteren Arbeitsscheibe 22 parallele Position inne hat, ist die obere Werkzeugscheibe über einen Gelenkkopf 20 mit dem unteren Ende der Werkzeugspindel verbunden. In Anbetracht der nur sehr kleinen Schwenkbewegungen des Balkens 11 ist der dadurch erfolgende seitliche Versatz der oberen Werkzeugscheibe 21 zur unteren Werkzeugscheibe 22 vernachlässigbar.So that the upper working disk 21 always has a position parallel to the lower working disk 22 despite the pivoting movement of the beam 11, the upper tool disk is connected to the lower end of the tool spindle via a joint head 20. In view of the very small pivoting movements of the beam 11, the lateral offset of the upper tool disk 21 relative to the lower tool disk 22 that occurs as a result is negligible.

Ein Läppvorgang mit der erfindungsgemässen Einrichtung an einer Zweischeibenläppmaschine ist im folgenden beschrieben. Der Säulenständer 3 befindet sich in einer angehobenen Position und die obere Werkzeugscheibe 21 in der Ausschwenkstellung. Die zu bearbeitenden Werkstücke 23 werden in die Aufnahmeöffnungen der Läuferscheibe 24 auf die Oberfläche der unteren Werkzeugscheibe 22 gelegt. Mit dem Schwenkzylinder 10 wird die sich in der Ausschwenkstellung befindende obere Werkzeugscheibe 21 eingeschwenkt. Die Einschwenkstellung ist beispielsweise durch einen nicht dargestellten Anschlag so begrenzt, dass die beiden Werkzeugscheiben 21, 22 zentral übereinanderliegen. Als Zubringmass für die obere Werkzeugscheibe wird die Dicke der unbearbeiteten Werkstücke plus eine Toleranz von vorzugsweise 0,2 mm in die nicht dargestellte Steuereinrichtung eingegeben. Ueber die Hubspindel 4 erfolgt die Schnellabsenkung der oberen Werkzeugscheibe 21 in Richtung Oberfläche der Werkstücke 23. Die Steuereinrichtung überwacht das Signal vom ersten Messmittel 8 und sorgt für den rechtzeitigen Stopp der Senkbewegung des Säulenständers 3, kurz bevor die obere Werkzeugscheibe 21 die Oberfläche der Werkstücke 23 berührt. Der erste Zylinderantrieb 29 hält dabei den Balken 11 dauernd in einer horizontalen Lage. Mit dem zweiten Zylinderantrieb 30 wird eine kleine, nach aufwärts gerichtete Kraft aufgeführt. Dadurch senkt sich die obere Werkzeugscheibe 21 langsam und ohne nennenswerten Arbeitsdruck auf die Oberfläche der Werkstücke 23. Durch die vorgängig in Rotation versetzte untere Werkzeugscheibe 22, des inneren Stiftkranzes 25 und/oder des äusseren Stiftkranzes 26 sowie der oberen Werkzeugscheibe 21 mittels dem Elektromotor 17, kann der Läppvorgang beginnen. Anhand eines zeitlichen Programmes, das beispielsweise in der nicht dargestellten Steuereinrichtung der Läppmaschine gespeichert ist, beginnt ein Läppvorgang abzulaufen, wobei die Steuereinrichtung die Werkstückdicke anhand des vom Sensor 16 gelieferten Signales dauernd überwacht und den Arbeitsdruck der Werkzeugscheibe 21 über den zweiten Zylinderantrieb 30 anhand des eingestellten, vom zu bearbeitenden Werkstück abhängigen Programmes steuert. Während des Bearbeitungsvorganges ist die vertikale Position des Säulenständers 3 mit dem Klemmzylinder 9 gesichert. Am Ende des Läppvorganges wird der Arbeitsdruck der oberen Werkzeugscheibe abgebaut und der Balken 11 durch den ersten Zylinderantrieb 29 in die horizontale Lage gebracht. Die Rotationsbewegungen der Werkzeugscheiben 21, 22, der Stiftkränze 25 und/oder 26 werden abgeschaltet. Nach dem Entlasten des Klemmzylinders 9 wird der Säulenständer 3 durch Betätigen der Hubspindel 4 angehoben. Mit dem Schwenkzylinder 10 wird die obere Werkzeugscheibe 21 wieder in die Ausschwenkstellung gebracht. Die Läppmaschine kann entladen und mit neuen, zubearbeitenden Werkstücken 23 bestückt werden.A lapping process with the device according to the invention on a two-disc lapping machine is described below. The column stand 3 is in a raised position and the upper tool disk 21 is in the pivoted-out position. The workpieces 23 to be machined are placed in the receiving openings of the rotor disk 24 on the surface of the lower tool disk 22. The upper tool disk 21, which is in the swiveled-out position, is swiveled in with the swivel cylinder 10. The pivoting position is limited, for example, by a stop (not shown) in such a way that the two tool disks 21, 22 lie one above the other centrally. The thickness of the unworked workpieces plus a tolerance of preferably 0.2 mm is entered into the control device (not shown) as the feed dimension for the upper tool disk. The upper tool disk 21 is rapidly lowered in the direction of the surface of the workpieces 23 via the lifting spindle 4. The control device monitors the signal from the first measuring means 8 and ensures that the lowering movement of the column stand 3 is stopped in time, just before the upper tool disk 21 touches the surface of the workpieces 23. The first cylinder drive 29 keeps the bar 11 permanently in a horizontal position. With the second cylinder drive 30, a small, upward force is applied. As a result, the upper tool disk 21 lowers slowly and without any appreciable working pressure onto the surface of the workpieces 23. Due to the lower tool disk 22 previously set in rotation, the inner pin ring 25 and / or the outer pin ring 26 and the upper tool disk 21 by means of the electric motor 17, the lapping process can begin. On the basis of a time program, which is stored, for example, in the control device of the lapping machine, which is not shown, a lapping process begins, the control device continuously monitoring the workpiece thickness on the basis of the signal supplied by the sensor 16 and the working pressure of the tool disk 21 via the second cylinder drive 30 on the basis of the set one controls the program dependent on the workpiece to be machined. During the machining process, the vertical position of the column stand 3 is secured with the clamping cylinder 9. At the end of the lapping process, the working pressure of the upper tool disc is reduced and the beam 11 is brought into the horizontal position by the first cylinder drive 29. The rotational movements of the tool disks 21, 22, the pin rings 25 and / or 26 are switched off. After relieving the clamping cylinder 9, the column stand 3 is raised by actuating the lifting spindle 4. With the swivel cylinder 10, the upper tool disk 21 is brought back into the swiveled-out position. The lapping machine can be unloaded and equipped with new workpieces 23 to be machined.

Die mit der erfindungsgemässen Einrichtung ausgerüstete Zweischeibenläppmaschine weist die folgenden zusätzlichen vorteilhaften Merkmale auf:The two-disc lapping machine equipped with the device according to the invention has the following additional advantageous features:

Durch die funktionale Trennung des Zubringens der oberen Werkzeugscheibe 21 in ihre Arbeitsposition mit der Hubspindel 4 und der Steuerung des Arbeitsdruckes über den Balken 11 mit dem zweiten Zylinderantrieb 30 ist es nicht mehr notwendig, die Werkzeugspindel 15 der oberen Werkzeugscheibe oder deren Lagerbauteil in axialer Richtung verschiebbar auszuführen. Dadurch werden die Lagerung, die Abdichtung gegen Oel und der Antrieb der oberen Werkzeugscheibe gegenüber bekannten Läppmaschinen wesentlich vereinfacht und verbilligt. Die Bauweise der oberen Werkzeugspindel wird verkürzt und das Durchführen vom Mess-Sensor 16 und von Kühlleitungen durch die Hohlspindel werden vereinfacht.Due to the functional separation of bringing the upper tool disk 21 into its working position with the lifting spindle 4 and the control of the working pressure via the bar 11 with the second cylinder drive 30, it is no longer necessary to move the tool spindle 15 of the upper tool disk or its bearing component in the axial direction to execute. This considerably simplifies and reduces the cost of storage, sealing against oil and driving the upper tool disc compared to known lapping machines. The design of the upper tool spindle is shortened and the passage of the measuring sensor 16 and cooling lines through the hollow spindle are simplified.

Durch die beiden Zylinderantriebe 29, 30 kann eine genaue Arbeitsdrucksteuerung der oberen Werkzeugscheibe 21 erfolgen, da der sonst übliche Verschiebezylinder mit dem bekannten nachteiligen Haftmoment (Slip-stik) und mit der während dem Arbeitsvorgang erfolgenden Druckumkehr wegfällt.The two cylinder drives 29, 30 enable the upper tool disk 21 to be precisely controlled in terms of working pressure, since the otherwise customary shifting cylinder with the known disadvantageous holding torque (slip-stik) and with the pressure reversal occurring during the working process are eliminated.

Eine bisher vorhandene Unfallquelle wird praktisch ausgeschaltet, da durch die Hubspindel 4 kein ungewolltes Absenken der oberen Werkzeugscheibe 21 mehr möglich ist.A previously existing source of accidents is practically eliminated, since the upper spindle 21 can no longer be inadvertently lowered by the lifting spindle 4.

Durch das Waagebalkenprinzip wird der Säulenständer 3 relativ wenig belastet. Das von anderen Ausführungsarten von Zweischeibenläppmaschinen her bekannte Aufbäumen des Säulenständers wird dadurch vermieden.The column stand 3 is loaded relatively little by the balance beam principle. The uplifting of the column stand known from other designs of double-disc lapping machines is thereby avoided.

Claims (8)

1. Device on a double-disk lapping machine for conveying an upper machining disk (21) into its working position, with a fixed or radially pivotable column (3) and a roughly centrally pivotable beam (11) arranged on the column (3) essentially at a right angle to it, with the upper machining disk (21) driveable via a tool spindle (15) by means of a first driving means (17), characterized in that the column (3) is raisable and lowerable by means of a drivable lifting spindle (4) with a second driving means (6) to perform conveyance movements of the upper machining disk (21), that the tool spindle (15) is situated in an axially non-sliding way in a spindle head (14) rigidly connected with the front beam end (13), that a first adjusting means (29) is arranged on the rear beam end (28) to maintain an essentially horizontal position of the beam (11), and that a second adjusting means (30) to control the working pressure of the upper machining disk (21) is provided between a holder arm (27) firmly connected to the column (3) and the rear beam end (28).
2. Device according to claim 1, characterized in that the first and second adjusting means (29, 30) are pneumatically or hydraulically operable.
3. Device according to claim 1 or 2, characterized in that the swivel movement of the beam (11) is limited by a path limiting device (37, 38, 41).
4. Device according to claim 3, characterized in that the swivel movement of the beam (11) amounts to at most 20 mm at its front end (13).
5. Device according to one of claims 1 to 4, characterized in that the first driving means (17) is preferably arranged on the front beam end and is connected to the tool spindle (15) via a reducing gear (18) as well as a transmitting medium (19).
6. Device according to one of claims 1 to 5, characterized in that the machining disk (21) is hung flexibly on the lower end of the tool spindle (15).
7. Device according to one of claims 1 to 6, characterized in that a first measuring means (8) is provided to measure the vertical position of the column (3).
8. Device according to one of claims 1 to 7, characterized in that a second measuring means (39) is provided to measure the swivel movement of the beam (11).
EP89902018A 1988-04-07 1989-02-17 Device for a twin-disk lapping machine Expired - Lifetime EP0364514B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH1277/88 1988-04-07
CH1277/88A CH684321A5 (en) 1988-04-07 1988-04-07 Device on a double disk.

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EP0364514A1 EP0364514A1 (en) 1990-04-25
EP0364514B1 true EP0364514B1 (en) 1991-12-18

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EP (1) EP0364514B1 (en)
CH (1) CH684321A5 (en)
WO (1) WO1989009679A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105904324A (en) * 2015-05-28 2016-08-31 海宁奇晟轴承有限公司 Automatic double-disk grinding machine

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2677291B1 (en) * 1991-06-06 1995-12-15 Commissariat Energie Atomique PRESSURE CONTROL POLISHING MACHINE.
GB9402140D0 (en) * 1994-02-04 1994-03-30 Actis Uk Limited Grainger Alla Lapping machine
JPH08257902A (en) * 1995-03-28 1996-10-08 Ebara Corp Polishing device
US5632669A (en) * 1995-05-26 1997-05-27 Censtor Corporation Interactive method for lapping transducers
US5653624A (en) * 1995-09-13 1997-08-05 Ebara Corporation Polishing apparatus with swinging structures
US5951371A (en) * 1996-11-04 1999-09-14 Seagate Technology, Inc. Multi-point bending of bars during fabrication of magnetic recording heads
USRE38340E1 (en) * 1996-11-04 2003-12-02 Seagate Technology Llc Multi-point bending of bars during fabrication of magnetic recording heads
US6287170B1 (en) 1996-12-13 2001-09-11 Seagate Technology Llc Multipoint bending apparatus for lapping heads of a data storage device
US6475064B2 (en) 1996-12-13 2002-11-05 Seagate Technology Llc Multipoint bending apparatus for lapping heads of a data storage device
TW377467B (en) * 1997-04-22 1999-12-21 Sony Corp Polishing system, polishing method, polishing pad, and method of forming polishing pad
JPH11207608A (en) * 1998-01-22 1999-08-03 Speedfam Co Ltd Upper surface plate elevating and lowering mechanism in surface grinding device
US6217425B1 (en) * 1998-06-12 2001-04-17 Tdk Corporation Apparatus and method for lapping magnetic heads
US6083082A (en) * 1999-08-30 2000-07-04 Lam Research Corporation Spindle assembly for force controlled polishing
ITTV20020049A1 (en) * 2002-04-22 2003-10-22 Luca Toncelli SUPPORT STRUCTURE OF THE SPINDLE IN A MACHINE TOOL AND PROCEDURE FOR ITS REALIZATION
CN102380800A (en) * 2010-09-06 2012-03-21 无锡瑞茂光电科技有限公司 Siamesed mainshaft encoder
CN113211212A (en) * 2021-05-08 2021-08-06 万冬冬 Auxiliary device for leveling base-layer wall surface and facilitating painting of gypsum mortar

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1377119A (en) * 1920-03-15 1921-05-03 Pike Mfg Company Machine for shaping sharpening-stones
US1843300A (en) * 1929-03-25 1932-02-02 Norton Co Lapping machine
US2238859A (en) * 1939-09-15 1941-04-15 Norton Co Lapping machine
US2603041A (en) * 1945-09-27 1952-07-15 Alfred J Bowen Surface grinder
US2840957A (en) * 1957-06-07 1958-07-01 Walter J Warden Lapping device
CH412612A (en) * 1964-07-29 1966-04-30 Kunz Beck Emil Grinding machine
US3461617A (en) * 1965-08-18 1969-08-19 Miles Machinery Co Methods and apparatus for lapping workpieces
JPS603948B2 (en) * 1975-09-16 1985-01-31 日本電信電話株式会社 polishing equipment
US4315383A (en) * 1980-05-13 1982-02-16 Spitfire Tool & Machine, Co. Inc. Inner gear drive for abrading machines
US4450652A (en) * 1981-09-04 1984-05-29 Monsanto Company Temperature control for wafer polishing
NL8301700A (en) * 1982-05-18 1983-12-16 Mueller Georg Nuernberg GRINDING METHOD AND APPARATUS FOR CARRYING OUT THE METHOD AND PROCESSING OF WORKPIECES FROM BROS-CRUCKY MATERIALS
JPS6034266A (en) * 1983-08-08 1985-02-21 Toshiba Corp Polishing method
DE3520713A1 (en) * 1985-06-10 1986-12-11 Fa. Peter Wolters, 2370 Rendsburg CONTROL DEVICE FOR MACHINING PRESSURE ON LAEPP, HONING AND POLISHING MACHINES
US4837982A (en) * 1987-12-02 1989-06-13 Kwik-Way Manufacturing Corporation Control circuit for a honing machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105904324A (en) * 2015-05-28 2016-08-31 海宁奇晟轴承有限公司 Automatic double-disk grinding machine
CN105904324B (en) * 2015-05-28 2017-11-03 海宁奇晟轴承有限公司 A kind of automatic two-lap lapping machine

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WO1989009679A1 (en) 1989-10-19
EP0364514A1 (en) 1990-04-25
CH684321A5 (en) 1994-08-31
US5317837A (en) 1994-06-07

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