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EP0348931B1 - Turbomolecular pump - Google Patents

Turbomolecular pump Download PDF

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Publication number
EP0348931B1
EP0348931B1 EP89111755A EP89111755A EP0348931B1 EP 0348931 B1 EP0348931 B1 EP 0348931B1 EP 89111755 A EP89111755 A EP 89111755A EP 89111755 A EP89111755 A EP 89111755A EP 0348931 B1 EP0348931 B1 EP 0348931B1
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EP
European Patent Office
Prior art keywords
piston
bore
rotor
bearings
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP89111755A
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German (de)
French (fr)
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EP0348931A1 (en
Inventor
Jacques Long
Denis Perrillat-Amede
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
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Alcatel CIT SA
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Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to AT89111755T priority Critical patent/ATE69088T1/en
Publication of EP0348931A1 publication Critical patent/EP0348931A1/en
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Publication of EP0348931B1 publication Critical patent/EP0348931B1/en
Anticipated expiration legal-status Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the present invention relates to a turbomolecular pump.
  • Grease-lubricated turbomolecular, vane, or Ga ⁇ de channel pumps should be closely monitored. Indeed, the maximum time interval between two consecutive lubrication depends on the operating temperature of the pump and the actual time of use. This manual maintenance operation requires vigilance on the part of the user, which is not always possible to obtain.
  • This lubrication operation is carried out with the pump stopped and returned to atmospheric pressure. Lubrication is carried out after removing the inlet plugs, introducing the strictly necessary quantity of new grease using a syringe allowing this quantity to be dosed.
  • the German document DE-A-2,853,742 describes a lubrication system for a turbomolecular vacuum pump.
  • the system comprises in the central shaft of the pump a bore in which are provided grease reserve chambers from which radially leave channels leading to the ball bearings, directly on the ball cage and radially, the bearings not comprising inner ring.
  • the internal raceway of the balls is directly produced on the shaft on which the bearings are mounted.
  • a central piston makes it possible to push the grease from time to time. The end of this piston is threaded and the piston is pushed by rotating the piston using a screwdriver.
  • the central shaft is rotary, in another, the central shaft is fixed carrying the stator of a drive motor, the rotor of which, integral with the pump rotor, is located around the stator of the engine.
  • the present invention aims to overcome all these drawbacks and to allow automatic and metered lubrication of the pump during its operation.
  • the invention thus relates to a turbomolecular pump comprising a rotor and a stator, the rotor being supported in the stator by bearings, the stator, in its part carrying said bearings, being pierced with a bore equipped with a delimiting piston with said bore of the chambers constituting grease reserves, at least one radial channel extending from each of these chambers, said piston comprising, on the side of its external end, means for allowing its insertion into said bore, characterized in that each channel ends in front of a threaded cylindrical seat, integral with the rotor and immediately adjacent to a rotor support bearing, supplying the grease axially to said bearing according to a circular crown, said piston being fitted with a seal located between the chambers and its outer end, said means allowing the piston to be pushed into the bore comprising a motor means started periodically.
  • said rotor is integral with a rotor support shaft on which said bearings are mounted, said bore being drilled parallel to the axis of said shaft, said cylindrical threaded surfaces being located on said rotor support shaft.
  • said stator is integral with a fixed central shaft on which are mounted said bearings and around which rotates said rotor, said bore being drilled in the axis of said fixed central shaft.
  • said bore is tapped at its beginning and cooperates with the end, external side, of the piston carrying a threaded seat, a rotary drive motor being coupled with said piston.
  • the periodic start-up of said motor means is carried out by a command as a function of the effective time of operation of the pump.
  • the control can also take into account the temperature of the pump and also possibly the internal pressure of the machine at the bearings.
  • FIG. 1 represents a part 1 of a stator of a turbomolecular pump of the Ga ⁇ de channel type whose rotor 40, partially shown, is in the shape of a bell which covers the represented part of the stator.
  • the rotor is integral with a rotor support shaft 30 which penetrates into the central bore 2 of part 1 of the stator, and rests in this part 1 of stator on two bearings, for example ball bearings 3 and 4.
  • the stator comprises a second part, not shown, which covers the rotor 40 and comes to rest and fix itself against the bottom 5 of part 1 of the stator.
  • This second part has an intake opening located on the side opposite the bottom 5.
  • part 1 of the stator is pierced with a bore 6 parallel to the axis of the shaft 30.
  • This bore 6 comprises a thread 7 at its start and its bottom 8 is blind.
  • the radial channels 9 and 10 open into the bore 6 respectively in these chambers 16 and 17.
  • These chambers 16 and 17 constitute grease reserves and are made so that their volume be equal.
  • the piston 13 is equipped with an O-ring seal 25 located between the chamber 17 and the external end 26 of the piston. Likewise, a seal 50 is disposed at the end of the piston 13.
  • the rotation is periodic, so as to periodically provide the necessary supply of grease to the bearings, and this during the rotation of the machine.
  • the control takes place automatically according to a certain function of the pump temperature, measured by a thermocouple and / or of the pump operating time. It is also possible to take into account the pressure at the bearings.
  • FIG. 2 represents a variant of the invention.
  • the elements equivalent to figure 1 bear the same references.
  • the rotor 40 partially shown, rotates around a fixed central shaft 41 secured to a stator 42 partially shown, enveloping the rotor and having an opening intake located on the left side of the figure and an exhaust outlet located on the right side of the figure.
  • the ball bearings 3 and 4 are mounted on the fixed central shaft 41.
  • the stator 43 of the electric motor driving the rotor 40 fixed on the fixed central shaft 41 as well as the rotor 44 of the electric drive motor which therefore surrounds its stator 43 and is fixed to the rotor 40 of the pump in a cavity 45.
  • the central shaft 41 being fixed and integral with the pump stator 42, the bore 6 is drilled in the axis of this fixed central shaft 41.
  • the lubrication device of the invention applies to any turbomolecular pump, whether it be a vane or of the Ga ⁇ de or Siegbahn channel type and whether the rotor is bell-shaped or not.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Steroid Compounds (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

Turbomolecular pump comprising a rotor (40) and a stator (1, 42), the rotor being supported in the stator by bearings (3, 4), the stator (1, 42), in its part carrying the said bearings being pierced with a bore (6) equipped with a piston (13) delimiting with the said bore chambers (16, 17) forming grease reserves, at least one radial channel (9, 10) extending from each of these chambers, the said piston (13) possessing towards its outer end, means (14) for allowing it to penetrate into the said bore (6), characterised in that each channel (9, 10) terminates opposite a threaded cylindrical bearing surface (31, 32) integral with the rotor (40) and immediately adjacent to a supporting bearing (3, 4) of the rotor, bringing the grease axially to the said bearing along a circular ring, the said piston (13) being equipped with a gasket (25) located between the chambers (16, 17) and its outer end (26), the said means making it possible for the piston to penetrate into the bore comprising a drive means (20) activated periodically. <IMAGE>

Description

La présente invention concerne une pompe turbomoléculaire. Les pompes turbomoléculaires, à ailettes, ou à canal de Gaëde, lubrifiées à la graisse doivent être l'objet d'une surveillance étroite. En effet, l'intervalle de temps maximal entre deux graissages consécutifs dépend de la température de fonctionnement de la pompe et du temps effectif d'utilisation. Cette opération manuelle de maintenance nécessite une vigilance de la part de l'utilisateur qu'il n'est pas toujours possible d'obtenir. Cette opération de graissage s'effectue pompe arrêtée et remise à la pression atmosphérique. Le graissage est effectué après avoir ôté les bouchons d'arrivée, en introduisant la quantité strictement nécessaire de graisse neuve au moyen d'une seringue permettant de doser cette quantité.The present invention relates to a turbomolecular pump. Grease-lubricated turbomolecular, vane, or Gaëde channel pumps should be closely monitored. Indeed, the maximum time interval between two consecutive lubrication depends on the operating temperature of the pump and the actual time of use. This manual maintenance operation requires vigilance on the part of the user, which is not always possible to obtain. This lubrication operation is carried out with the pump stopped and returned to atmospheric pressure. Lubrication is carried out after removing the inlet plugs, introducing the strictly necessary quantity of new grease using a syringe allowing this quantity to be dosed.

Le document allemand DE-A-2.853.742 décrit un système de graissage d'une pompe à vide turbomoléculaire. Le système comporte dans l'arbre central de la pompe un alésage dans lequel sont ménagées des chambres de réserve de graisse d'où partent radialement des canaux aboutissant aux roulements à billes, directement sur la cage à billes et radialement, les roulements ne comportant pas de bague interne. Le chemin de roulement interne des billes est directement réalisé sur l'arbre sur lequel sont montés les paliers. Un piston central permet de pousser de temps en temps la graisse. L'extrémité de ce piston est filetée et la poussée du piston est réalisée par rotation du piston au moyen d'un tournevis. Dans une première réalisation décrite, l'arbre central est rotatif, dans une autre, l'arbre central est fixe portant le stator d'un moteur d'entraînement, dont le rotor, solidaire du rotor de pompe, est situé autour du stator du moteur.The German document DE-A-2,853,742 describes a lubrication system for a turbomolecular vacuum pump. The system comprises in the central shaft of the pump a bore in which are provided grease reserve chambers from which radially leave channels leading to the ball bearings, directly on the ball cage and radially, the bearings not comprising inner ring. The internal raceway of the balls is directly produced on the shaft on which the bearings are mounted. A central piston makes it possible to push the grease from time to time. The end of this piston is threaded and the piston is pushed by rotating the piston using a screwdriver. In a first embodiment described, the central shaft is rotary, in another, the central shaft is fixed carrying the stator of a drive motor, the rotor of which, integral with the pump rotor, is located around the stator of the engine.

Dans le premier cas, l'avancée du piston ne peut évidemment pas se faire pendant le fonctionnement de la machine puisque l'arbre tourne et le graissage n'est ni dosé, ni contrôlé et est tributaire de la seule force centrifuge poussant la graisse dans les canaux radiaux. Dans le second cas, où l'arbre est fixe, on ne peut pas non plus faire avancer le piston au cours du fonctionnement de la pompe, car pour le faire, il faut ôter une plaque d'étanchéité et alors le vide est "cassé". Il n'y a donc aucun graissage en fonctionnement, car rien ne permet d'apporter la graisse aux roulements à billes, puisque là l'arbre est fixe, et qu'il n'y a donc aucune force centrifuge. Il faut donc, chaque fois que la graisse des roulements est usée ou consommée, arrêter la machine, ôter la plaque d'étanchéité et donner quelque tours de vis au piston.In the first case, the advance of the piston obviously cannot be done during the operation of the machine since the shaft rotates and the lubrication is neither metered nor controlled and is dependent on the only centrifugal force pushing the grease into the radial channels. In the second case, where the shaft is fixed, we cannot either advance the piston during the operation of the pump, because to do this, it is necessary to remove a sealing plate and then the vacuum is "broken ". There is therefore no lubrication in operation, because nothing allows to bring the grease in ball bearings, since the shaft is fixed there, and there is therefore no centrifugal force. Therefore, each time the grease in the bearings is worn or consumed, stop the machine, remove the sealing plate and give the piston a few turns of the screw.

Dans les deux cas, la graisse arrive radialement, ce qui n'est pas du tout favorable à un bon graissage homogène des roulements sur tout leur pourtour ni sur toute leur profondeur.In both cases, the grease arrives radially, which is not at all favorable for good homogeneous lubrication of the bearings over their entire periphery or over their entire depth.

Enfin, dans les deux cas, il y a nécessité d'utiliser des roulements spéciaux sans bague intérieure, l'arbre jouant le rôle de bague interne, d'où la nécessité d'une très grande précision de l'arbre et de réaliser l'arbre et les roulements ensemble.Finally, in both cases, there is a need to use special bearings without an inner ring, the shaft playing the role of an inner ring, hence the need for very high shaft precision and to perform the shaft and bearings together.

La présente invention a pour but de pallier tous ces inconvénients et de permettre un graissage automatique et dosé de la pompe et ce au cours de son fonctionnement.The present invention aims to overcome all these drawbacks and to allow automatic and metered lubrication of the pump during its operation.

L'invention a ainsi pour objet une pompe turbomoléculaire comprenant un rotor et un stator, le rotor étant supporté dans le stator par des paliers, le stator, dans sa partie portant lesdits paliers, étant percé d'un alésage équipé d'un piston délimitant avec ledit alésage des chambres constituant des réserves de graisse, au moins un canal radial partant de chacune de ces chambres, ledit piston comportant, du côté de son extrémité externe, des moyens pour permettre son enfoncement dans ledit alésage, caractérisée en ce que chaque canal aboutit en face d'une portée cylindrique filetée, solidaire du rotor et immédiatement contiguë à un palier support du rotor, apportant la graisse axialement audit palier selon une couronne circulaire, ledit piston étant équipé d'un joint d'étanchéité situé entre les chambres et son extrémité externe, lesdits moyens permettant l'enfoncement du piston dans l'alésage comportant un moyen moteur mis en route périodiquement.The invention thus relates to a turbomolecular pump comprising a rotor and a stator, the rotor being supported in the stator by bearings, the stator, in its part carrying said bearings, being pierced with a bore equipped with a delimiting piston with said bore of the chambers constituting grease reserves, at least one radial channel extending from each of these chambers, said piston comprising, on the side of its external end, means for allowing its insertion into said bore, characterized in that each channel ends in front of a threaded cylindrical seat, integral with the rotor and immediately adjacent to a rotor support bearing, supplying the grease axially to said bearing according to a circular crown, said piston being fitted with a seal located between the chambers and its outer end, said means allowing the piston to be pushed into the bore comprising a motor means started periodically.

Selon une première réalisation, ledit rotor est solidaire d'un arbre support rotorique sur lequel sont montés lesdits paliers, ledit alésage étant percé parallèlement à l'axe dudit arbre, lesdites portées cylindriques filetées étant situées sur ledit arbre support rotorique.According to a first embodiment, said rotor is integral with a rotor support shaft on which said bearings are mounted, said bore being drilled parallel to the axis of said shaft, said cylindrical threaded surfaces being located on said rotor support shaft.

Selon une deuxième réalisation, ledit stator est solidaire d'un arbre central fixe sur lequel sont montés lesdits paliers et autour duquel tourne ledit rotor, ledit alésage étant percé dans l'axe dudit arbre central fixe.According to a second embodiment, said stator is integral with a fixed central shaft on which are mounted said bearings and around which rotates said rotor, said bore being drilled in the axis of said fixed central shaft.

Selon une autre caractéristique, ledit alésage est taraudé à son début et coopère avec l'extrémité, côté externe, du piston portant une portée filetée, un moteur d'entraînement en rotation étant accouplé avec ledit piston.According to another characteristic, said bore is tapped at its beginning and cooperates with the end, external side, of the piston carrying a threaded seat, a rotary drive motor being coupled with said piston.

Selon une réalisation préférée, la mise en route périodique dudit moyen moteur est effectuée par une commande en fonction du temps effectif de fonctionnement de la pompe. La commande peut aussi, en outre, tenir compte de la température de la pompe et aussi éventuellement de la pression interne de la machine au niveau des paliers.According to a preferred embodiment, the periodic start-up of said motor means is carried out by a command as a function of the effective time of operation of the pump. The control can also take into account the temperature of the pump and also possibly the internal pressure of the machine at the bearings.

On va maintenant donner la description d'un exemple de mise en oeuvre de l'invention en se référant au dessin annexé dans lequel:

  • La figure 1 représente partiellement une pompe selon l'invention.
  • La figure 2 représente une seconde réalisation de l'invention.
We will now give the description of an example of implementation of the invention with reference to the accompanying drawing in which:
  • Figure 1 partially shows a pump according to the invention.
  • Figure 2 shows a second embodiment of the invention.

La figure 1 représente une partie 1 d'un stator d'une pompe turbomoléculaire du type à canal de Gaëde dont le rotor 40, partiellement représenté, est en forme de cloche qui vient coiffer la partie représentée du stator. Le rotor est solidaire d'un arbre support rotorique 30 qui pénètre dans l'alésage central 2 de la partie 1 du stator, et repose dans cette partie 1 de stator sur deux paliers, par exemple des roulements à billes 3 et 4.FIG. 1 represents a part 1 of a stator of a turbomolecular pump of the Gaëde channel type whose rotor 40, partially shown, is in the shape of a bell which covers the represented part of the stator. The rotor is integral with a rotor support shaft 30 which penetrates into the central bore 2 of part 1 of the stator, and rests in this part 1 of stator on two bearings, for example ball bearings 3 and 4.

Le stator comporte une seconde partie, non représentée, qui couvre le rotor 40 et vient s'appuyer et se fixer contre le fond 5 de la partie 1 du stator. Cette seconde partie comporte une ouverture d'admission située du côté opposé au fond 5.The stator comprises a second part, not shown, which covers the rotor 40 and comes to rest and fix itself against the bottom 5 of part 1 of the stator. This second part has an intake opening located on the side opposite the bottom 5.

Conformément à l'invention, la partie 1 du stator est percée d'un alésage 6 parallèlement à l'axe de l'arbre 30. Cet alésage 6 comporte un taraudage 7 à son début et son fond 8 est borgne.According to the invention, part 1 of the stator is pierced with a bore 6 parallel to the axis of the shaft 30. This bore 6 comprises a thread 7 at its start and its bottom 8 is blind.

De cet alésage 6 partent deux canaux radiaux 9 et 10 aboutissant respectivement en face de portées cylindriques filetées 31 et 32 de l'arbre support 30. Chacune de ces portées est immédiatement contiguë à un palier à billes 3 et 4. Ces canaux radiaux 9 et 10 sont percés de l'extérieur, et les extrémités de ces canaux, qui aboutissent à l'extérieur, sont ensuite rebouchés à l'aide de bouchons 11 et 12. A l'intérieur de cet alésage 6 est disposé un piston 13 dont l'extrémité, côté externe, située du côté du taraudage 7 comporte un filetage 14 correspondant.From this bore 6 start two radial channels 9 and 10 ending respectively in front of threaded cylindrical bearing surfaces 31 and 32 of the support shaft 30. Each of these bearing surfaces is immediately adjacent to a ball bearing 3 and 4. These radial channels 9 and 10 are drilled from the outside, and the ends of these channels, which lead to the outside, are then plugged with plugs 11 and 12. A the interior of this bore 6 is arranged a piston 13 whose end, external side, located on the side of the thread 7 has a corresponding thread 14.

Le fond de l'alésage 6, situé au-delà de l'extrémité 15 du piston 13, forme une première chambre 16 et une seconde chambre 17 est formée entre le piston 13 et l'alésage 6, délimitée entre un épaulement 18 du piston 13 et un épaulement 19 de l'alésage 6. Les canaux radiaux 9 et 10 débouchent dans l'alésage 6 respectivement dans ces chambres 16 et 17. Ces chambres 16 et 17 constituent des réserves de graisse et sont réalisées de façon à ce que leur volume soit égaux. Le piston 13 est équipé d'un joint d'étanchéité torique 25 situé entre la chambre 17 et l'extrémité externe 26 du piston. De même, un joint 50 est disposé à l'extrémité du piston 13. Lors de la rotation du rotor et donc de l'arbre 30, la graisse est conduite axialement vers les paliers à billes 3 et 4 grâce aux filetages des portées filetées 31 et 32 de l'arbre 30 agissant comme des pompes à vis et apportant la graisse selon une couronne circulaire en réalisant ainsi un graissage parfaitement homogène des paliers sur tout leur pourtour. Compte tenu de la position respective des paliers 3 et 4 et des portées 31 et 32, les filetages de ces portées sont en sens inverse l'un par rapport à l'autre. La rotation du piston 13 entraîne ainsi, grâce à son extrémité filetée 14, son déplacement axial, permettant ainsi d'alimenter périodiquement les paliers en graisse. La rotation du piston 13 est obtenue par un moteur électrique 20. La rotation est périodique, de façon à assurer périodiquement l'apport nécessaire de graisse aux paliers, et ceci pendant la rotation de la machine. La commande s'effectue automatiquement selon une certaine fonction de la température de la pompe, mesurée par un thermo-couple et/ou du temps de fonctionnement de la pompe. On peut également tenir compte éventuellement de la pression au niveau des paliers.The bottom of the bore 6, located beyond the end 15 of the piston 13, forms a first chamber 16 and a second chamber 17 is formed between the piston 13 and the bore 6, delimited between a shoulder 18 of the piston 13 and a shoulder 19 of the bore 6. The radial channels 9 and 10 open into the bore 6 respectively in these chambers 16 and 17. These chambers 16 and 17 constitute grease reserves and are made so that their volume be equal. The piston 13 is equipped with an O-ring seal 25 located between the chamber 17 and the external end 26 of the piston. Likewise, a seal 50 is disposed at the end of the piston 13. When the rotor and therefore the shaft 30 are rotated, the grease is conducted axially towards the ball bearings 3 and 4 thanks to the threads of the threaded bearings 31 and 32 of the shaft 30 acting as screw pumps and supplying the grease in a circular ring, thus achieving perfectly homogeneous lubrication of the bearings around their entire periphery. Taking into account the respective position of the bearings 3 and 4 and of the spans 31 and 32, the threads of these spans are in opposite directions with respect to each other. The rotation of the piston 13 thus causes, thanks to its threaded end 14, its axial displacement, thus making it possible to periodically supply the bearings with grease. The rotation of the piston 13 is obtained by an electric motor 20. The rotation is periodic, so as to periodically provide the necessary supply of grease to the bearings, and this during the rotation of the machine. The control takes place automatically according to a certain function of the pump temperature, measured by a thermocouple and / or of the pump operating time. It is also possible to take into account the pressure at the bearings.

Le remplissage de graisse des chambres 16 et 17, lorsqu'elles sont vides, s'effectue lors de la maintenance de la pompe. Il faut alors, pour bien remplir ces chambres, mettre l'ensemble sous vide, après arrêt et démontage du piston 13.The filling of chambers 16 and 17 with grease, when empty, is carried out during pump maintenance. In order to properly fill these chambers, it is then necessary to put the assembly under vacuum, after stopping and removing the piston 13.

La figure 2 représente une variante de l'invention. Sur cette figure les éléments équivalents à la figure 1 portent les mêmes références. Dans cette variante, il s'agit par exemple d'une pompe turbomoléculaire à ailettes dont le rotor 40, partiellement représenté, tourne autour d'un arbre central fixe 41 solidaire d'un stator 42 partiellement représenté, enveloppant le rotor et ayant une ouverture d'admission située du côté gauche de la figure et une sortie d'échappement située du côté droit de la figure. Les paliers à billes 3 et 4 sont montés sur l'arbre central fixe 41. Dans cette figure, on a figuré le stator 43 du moteur électrique d'entraînement du rotor 40, fixé sur l'arbre central fixe 41 ainsi que le rotor 44 du moteur électrique d'entraînement qui entoure donc son stator 43 et est fixé sur le rotor 40 de la pompe dans une cavité 45.FIG. 2 represents a variant of the invention. On this figure the elements equivalent to figure 1 bear the same references. In this variant, it is for example a turbomolecular pump with fins, the rotor 40, partially shown, rotates around a fixed central shaft 41 secured to a stator 42 partially shown, enveloping the rotor and having an opening intake located on the left side of the figure and an exhaust outlet located on the right side of the figure. The ball bearings 3 and 4 are mounted on the fixed central shaft 41. In this figure, there has been shown the stator 43 of the electric motor driving the rotor 40, fixed on the fixed central shaft 41 as well as the rotor 44 of the electric drive motor which therefore surrounds its stator 43 and is fixed to the rotor 40 of the pump in a cavity 45.

Dans cette réalisation, l'arbre central 41 étant fixe et solidaire du stator 42 de pompe, l'alésage 6 est percé dans l'axe de cet arbre central fixe 41.In this embodiment, the central shaft 41 being fixed and integral with the pump stator 42, the bore 6 is drilled in the axis of this fixed central shaft 41.

Il est bien clair que le dispositif de graissage de l'invention s'applique à toute pompe turbomoléculaire, qu'elle soit à ailettes ou du type à canal de Gaëde ou de Siegbahn et que le rotor soit en cloche ou non.It is quite clear that the lubrication device of the invention applies to any turbomolecular pump, whether it be a vane or of the Gaëde or Siegbahn channel type and whether the rotor is bell-shaped or not.

Ainsi, grâce à l'invention, on élimine les oublis dûs à un graissage manuel, en le rendant indépendant d'une défaillance humaine.Thus, thanks to the invention, it eliminates the oversights due to manual lubrication, making it independent of human failure.

Il est à noter que le graissage est parfaitement dosé, car une fois la mise en route de la machine effectuée et le premier remplissage des roulements et des volumes morts réalisé, toute rotation ultérieure du piston, d'un angle déterminé apporte intégralement aux roulements le volume correspondant et parfaitement défini de graisse.It should be noted that the lubrication is perfectly dosed, because once the machine has been started and the bearings and dead volumes have been filled for the first time, any subsequent rotation of the piston by a determined angle brings the bearings fully corresponding and perfectly defined volume of fat.

Claims (7)

1. A turbomolecular pump comprising a rotor (40) and a stator (1, 42), the rotor being supported inside the stator on bearings (3, 4), the portion of the stator (1, 42) carrying said bearings being pierced by a bore (6) fitted with a piston (13), said bore and said piston together delimiting chambers (16, 17) constituting reserves of grease, at least one radial channel (9, 10) leaving each of said chambers, the external end of said piston (13) comprising means (14) for enabling it to be urged into said bore (6), the pump being characterized in that each channel (9, 10) opens out over a threaded cylindrical surface (31, 32) fixed to the rotor (40) and immediately adjacent to a corresponding one of the rotor support bearings (3, 4) and serving to convey grease axially to said bearing around a circular ring, said piston (13) being fitted with a sealing perimeter (25) situated between the two chambers (16, 17) and with a sealing ring situated at its external end (26), said means for urging the piston into the bore including motor means (20) put into operation periodically.
2. A turbomolecular pump according to claim 1, characterized in that said rotor (40) is fixed to a rotor support shaft (30) on which said bearings (3, 4) are mounted, said bore (6) being pierced parallel to the axis of said shaft and said threaded cylindrical surfaces (31, 32) being situated on said rotor support shaft.
3. A turbomolecular pump according to claim 1, characterized in that the stator (42) is fixed to a stationary central shaft (41) on which said bearings (3, 4) are mounted and around which said rotor (40) rotates, said bore (6) being pierced along the axis of said stationary central shaft (41).
4. A turbomolecular pump according to claim 2 or 3, characterized in that said bore (6) is tapped at its beginning and co-operates with the external end of the piston (13) which includes a threaded portion (14), said piston being coupled to a rotary drive motor (20).
5. A turbomolecular pump according to any one of claims 1 to 4, characterized in that said motor means (20) is periodically put into operation by a command as a function of the effective operating time of the pump.
6. A turbomolecular pump according to claim 5, characterized in that said command also acts as a function of the temperature of the pump.
7. A turbomolecular pump according to claim 6, characterized in that said command also acts as a function of the internal pressure at the bearings.
EP89111755A 1988-06-29 1989-06-28 Turbomolecular pump Expired - Lifetime EP0348931B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT89111755T ATE69088T1 (en) 1988-06-29 1989-06-28 TURBOMOLECULAR PUMP.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8808738A FR2633675B1 (en) 1988-06-29 1988-06-29 TURBOMOLECULAR PUMP
FR8808738 1988-06-29

Publications (2)

Publication Number Publication Date
EP0348931A1 EP0348931A1 (en) 1990-01-03
EP0348931B1 true EP0348931B1 (en) 1991-10-30

Family

ID=9367850

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89111755A Expired - Lifetime EP0348931B1 (en) 1988-06-29 1989-06-28 Turbomolecular pump

Country Status (6)

Country Link
EP (1) EP0348931B1 (en)
JP (1) JPH0278798A (en)
AT (1) ATE69088T1 (en)
DE (1) DE68900380D1 (en)
FI (1) FI893103A (en)
FR (1) FR2633675B1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0508013D0 (en) * 2005-04-20 2005-05-25 Boc Group Plc Vacuum pump
JP6079052B2 (en) * 2012-08-24 2017-02-15 株式会社島津製作所 Vacuum pump
DE102012220040A1 (en) * 2012-11-02 2014-05-08 Pfeiffer Vacuum Gmbh vacuum pump
US10022531B2 (en) 2016-01-21 2018-07-17 Teva Medical Ltd. Luer lock adaptor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2954845A (en) * 1957-06-11 1960-10-04 Salvador A Minera Temperature actuated lubricating device
GB1487268A (en) * 1976-02-25 1977-09-28 Telehoist Ltd Methods of lubricating
DE2853742A1 (en) * 1978-12-13 1980-10-02 Leybold Heraeus Gmbh & Co Kg Turbo-molecular vacuum pump with two=part rotor spindle - has solid lubricant ejected from spindle interior towards top and bottom bearings
NL8601666A (en) * 1986-06-25 1988-01-18 Skf Ind Trading & Dev LUBRICATION DEVICE.

Also Published As

Publication number Publication date
FI893103A (en) 1989-12-30
JPH0278798A (en) 1990-03-19
ATE69088T1 (en) 1991-11-15
FI893103A0 (en) 1989-06-26
FR2633675A1 (en) 1990-01-05
FR2633675B1 (en) 1991-02-15
EP0348931A1 (en) 1990-01-03
DE68900380D1 (en) 1991-12-05

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