[go: up one dir, main page]

EP0290046A3 - Surface analyzer - Google Patents

Surface analyzer Download PDF

Info

Publication number
EP0290046A3
EP0290046A3 EP88107344A EP88107344A EP0290046A3 EP 0290046 A3 EP0290046 A3 EP 0290046A3 EP 88107344 A EP88107344 A EP 88107344A EP 88107344 A EP88107344 A EP 88107344A EP 0290046 A3 EP0290046 A3 EP 0290046A3
Authority
EP
European Patent Office
Prior art keywords
surface analyzer
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP88107344A
Other versions
EP0290046B1 (en
EP0290046A2 (en
Inventor
Masahiko C/O Nissin Electric Co. Ltd. Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Publication of EP0290046A2 publication Critical patent/EP0290046A2/en
Publication of EP0290046A3 publication Critical patent/EP0290046A3/en
Application granted granted Critical
Publication of EP0290046B1 publication Critical patent/EP0290046B1/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
EP88107344A 1987-05-07 1988-05-06 Surface analyzer Expired EP0290046B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62111162A JPS63276860A (en) 1987-05-07 1987-05-07 Surface analyzing device
JP111162/87 1987-05-07

Publications (3)

Publication Number Publication Date
EP0290046A2 EP0290046A2 (en) 1988-11-09
EP0290046A3 true EP0290046A3 (en) 1989-12-27
EP0290046B1 EP0290046B1 (en) 1992-08-05

Family

ID=14554048

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88107344A Expired EP0290046B1 (en) 1987-05-07 1988-05-06 Surface analyzer

Country Status (4)

Country Link
US (1) US4866272A (en)
EP (1) EP0290046B1 (en)
JP (1) JPS63276860A (en)
DE (1) DE3873399T2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8324567B2 (en) 2007-12-12 2012-12-04 University Of Southampton Ion spectrum analysing apparatus and method

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3904032A1 (en) * 1989-02-10 1990-08-16 Max Planck Gesellschaft ELECTRONIC MICROSCOPE FOR THE STUDY OF SOLID CARBON SURFACES
DE69212858T2 (en) * 1991-02-22 1997-03-20 Shimadzu Corp Backscatter ion spectrometer
US5602390A (en) * 1996-04-03 1997-02-11 Colterjohn, Jr.; Walter L. Electrostatic repulsion ion microscope
US7022987B2 (en) 2001-02-20 2006-04-04 Carl Zeiss Nis Gmbh Particle-optical arrangements and particle-optical systems
DE10235981B9 (en) * 2002-08-06 2009-01-22 Leo Elektronenmikroskopie Gmbh Particle-optical device and electron microscope
DE10107910A1 (en) * 2001-02-20 2002-08-22 Leo Elektronenmikroskopie Gmbh Particle beam system with a mirror corrector
JP5885474B2 (en) * 2011-11-17 2016-03-15 キヤノン株式会社 Mass distribution analysis method and mass distribution analyzer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3866042A (en) * 1972-07-21 1975-02-11 Cameca Microanalyser convertible into a mass spectrometer
US3955084A (en) * 1974-09-09 1976-05-04 California Institute Of Technology Electro-optical detector for use in a wide mass range mass spectrometer
US4564758A (en) * 1984-02-01 1986-01-14 Cameca Process and device for the ionic analysis of an insulating sample
EP0253336A2 (en) * 1986-07-12 1988-01-20 Nissin Electric Company, Limited Surface analyzer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3311195A1 (en) * 1983-03-26 1984-10-04 Kernforschungsanlage Jülich GmbH, 5170 Jülich ELECTRONIC POWER ANALYZER WITH MULTI-CHANNEL DETECTOR

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3866042A (en) * 1972-07-21 1975-02-11 Cameca Microanalyser convertible into a mass spectrometer
US3955084A (en) * 1974-09-09 1976-05-04 California Institute Of Technology Electro-optical detector for use in a wide mass range mass spectrometer
US4564758A (en) * 1984-02-01 1986-01-14 Cameca Process and device for the ionic analysis of an insulating sample
EP0253336A2 (en) * 1986-07-12 1988-01-20 Nissin Electric Company, Limited Surface analyzer

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, Section B2, vol. 230, no. 1/3, March 1984, pages 340-345, Amsterdam, NL; D.W. MINGAY et al.: "The enhanced yield of nitrogen ions backscattered AT 180". *
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, vol. B15, no. 1/6, April 1986, pages 142-145, Elsevier, NL; T. OKU et al.: "Proton energy loss spectroscopy for surface layer analysis in the monolayer regime". *
PATENT ABSTRACTS OF JAPAN, vol. 11, no. 93 (P-559(2540), 24 March 1987; & JP-A-61 245 046 (NATIONAL INSTITUTE FOR RESEARCH IN INORGANIC MATTER) 31-10-1986 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8324567B2 (en) 2007-12-12 2012-12-04 University Of Southampton Ion spectrum analysing apparatus and method

Also Published As

Publication number Publication date
DE3873399T2 (en) 1993-01-21
EP0290046B1 (en) 1992-08-05
US4866272A (en) 1989-09-12
EP0290046A2 (en) 1988-11-09
JPS63276860A (en) 1988-11-15
DE3873399D1 (en) 1992-09-10

Similar Documents

Publication Publication Date Title
EP0275469A3 (en) Surface inspection
GB8626812D0 (en) Surface inspection
EP0290046A3 (en) Surface analyzer
AU98521S (en) Sea - or drag - anchor
GB8707516D0 (en) Surface analysis
EP0253336A3 (en) Surface analyzer
GB8815610D0 (en) Analysis
ZA889438B (en) N-hydroxy-5-phenyl-2 furancarboximidamides useful
GB2202637B (en) Analysis
HUT49410A (en) Gluten-enteropathy test
GB9027519D0 (en) Analysis
CS65787A1 (en) Zpusob izolace insulinu z vodnych roztoku
GB8727336D0 (en) Microtome
GB8729919D0 (en) Analytical technique
RU1769008C (en) Rate-of-temperature-variation measurement technique
CS882787A1 (en) Preteinaceous component
GB8730033D0 (en) Analysis
PL268696A1 (en) Sampler
CS665187A1 (en) Plosny utvar z plastu
CS296287A1 (en) Sposob ziskavania amorfu z krystalickych kovov
CS667587A1 (en) Pripojka hadic z plasticke hmoty
CS66487A1 (en) Zpusob tepelneho zpracovani vykovku z chromniklovych austenitickych oceli
CS346187A1 (en) Sposob odstranenia izolacneho laku z vodicov
CS700687A1 (en) Zpusob tvareni polotovaru z austenitickych oceli
CS352287A1 (en) Sposob vyroby tenkych tvrdych drevovlaknitych dosak z makkych nelisovanych drevovlaknitych materialov

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): DE GB NL

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): DE GB NL

17P Request for examination filed

Effective date: 19900312

17Q First examination report despatched

Effective date: 19910910

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE GB NL

REF Corresponds to:

Ref document number: 3873399

Country of ref document: DE

Date of ref document: 19920910

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 19970428

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 19970531

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 19970627

Year of fee payment: 10

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19980506

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19981201

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 19980506

NLV4 Nl: lapsed or anulled due to non-payment of the annual fee

Effective date: 19981201

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19990302