EP0259459B1 - Powder atomizing methods and apparatus - Google Patents
Powder atomizing methods and apparatus Download PDFInfo
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- EP0259459B1 EP0259459B1 EP87901997A EP87901997A EP0259459B1 EP 0259459 B1 EP0259459 B1 EP 0259459B1 EP 87901997 A EP87901997 A EP 87901997A EP 87901997 A EP87901997 A EP 87901997A EP 0259459 B1 EP0259459 B1 EP 0259459B1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
- B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
- C22B9/16—Remelting metals
- C22B9/22—Remelting metals with heating by wave energy or particle radiation
- C22B9/226—Remelting metals with heating by wave energy or particle radiation by electric discharge, e.g. plasma
Definitions
- This invention relates to atomization techniques for producing ceramic powders and metal powders with extremely fine particle size, high density and optimum crystal and grain structure.
- apparatus for atomizing of ceramics or metals comprising
- the invention provides a method for atomizing granulated metal and ceramic feed material into fine particle size powder, comprising the steps of conveying an impact substrate comprising a thin film of polyetrafluoroethylene polymer edge-wise along a continuous path through an impact zone in an enclosed chamber, cleaning the exposed surface of the impact substrate, delivering granulated feed material entrained in a stream of gas through a plasma torch having its hot plasma jet directed toward the substrate in the impact zone, producing molten drops of feed material impacted and rebounding into molten droplets, delivering a stream of chilling gas through a quench gas chill zone adjacent to the impact zone, rapidly solidifying the molten droplets into fine particle size powder, and recovering the fine particle size powder from the enclosed chamber.
- Atomized powders are produced with very fine particle diameters, high densities, and optimum internal structures. These are well adapted for flame coating, hot pressing, sintering and heat treatment at unexpectedly low temperature ranges, and they permit highly effective "alloying" of two or more different phases of fine ceramic powders or metals or combinations of metals with ceramics in the final hot pressed or sintered product.
- Free-flowing powders for flame spray applications are disclosed in detail in my previous patents US-A-3,909,241, US-A-3,974,245 and US-A-3,881,911. Desired particle size ranges less than 60 micrometers (i.e., "microns") and preferably with 80 percent of the particles having sizes less then 30 micrometers have been considered optimal for flame spraying applications. Such powders have been produced by milling, screening and cyclone separation, with undersized particles being recycled into the original slurry and spray dried to leave only the desired particle size ranges for flame spraying use.
- the rapid solidification of the molten droplets rebounding from the impact substrate produces the desired range of fine particle sizes coupled with unexpectedly valuable characteristics in the resulting fine particles of atomized metal or ceramic.
- Virtually instantaneous chilling produces optimum chemical homogeneity of the solidified particles, and molecules of all different elements present are uniformly distributed in each solidified particle. Rapid chilling produces fine grain size, achieving strength and toughness in the resulting solid, enhanced resistance to chemical attack or corrosion, and in some cases, enhanced electrical properties.
- Quick chilling minimizes the time available for growth of ordered crystal structures freezing outward from crystallization centers to meet each other along grain boundaries, producing either a single crystal, an amorphous glass-like particle with no internal grain boundaries, or a particle with desirably fine grain size.
- a principal object of the present invention is to combine plasma torch melting with impact atomization and rapid chilling steps to achieve highly desired very fine particle powders of metals or ceramics.
- Another object of the invention is to provide such methods and apparatus producing atomized powders having a majority of their particles substantially spheroidal in shape with desirably high densities and uniform, homogeneous structure.
- a further object is to provide such methods and apparatus taking advantage of rapid chilling and solidification of molten droplets to produce atomized particles comprising a single crystal or having an amorphous, glass-like composition or having very fine grain size.
- Still another object of the invention is to provide such methods and apparatus for producing such atomized powder particles with particle size ranges falling between one-tenth and twenty-five micrometers.
- a still further object to the invention is to provide methods and apparatus for producing such atomized powders efficiently and economically.
- FIGURES 1 and 3 A preferred embodiment of the apparatus employed in one form of the present invention is illustrated schematically in FIGURES 1 and 3, where all of the moving parts of the apparatus are shown positioned inside a double-walled, water-jacketed enclosure 10.
- This heat insulating dual-walled enclosure is provided with a cooling water inlet conduit 11 and outlet conduit 12. It is also provided with two hinged gasketed doors 13 on opposite side walls which may be clamped shut or swung open to provide ready access to the interior of housing 10.
- Each of the doors 13 is gasketed with suitable O-ring type gasket material 49 of heat resistant polymer, and each hinged door is also provided with internal cooling cavities connected by external flexible tubing 11A and 12A to the cooling water chambers inside the dual walls of housing 10.
- Belt 14 passes over an upper roller 15 and forms a closed loop spanning the distance between roller 15 and a lower idler roller 16, which may be biased downward by springs or weights if desired to take up any slack in belt 14. This maintains slight tension in the belt, assuring that its sides, serving as the impact zones for the atomization step, are smooth and flat.
- a support platen 17 Directly behind each smooth, falt side run of belt 14 is positioned a support platen 17. These support platens are shown positioned between the two straight runs of belt 14 on the interior of the endless belt loop, and anchored in these positions with their end edges secured to the interior walls of the housing 10. They are preferably hollow, with their interior chambers connected to the cooling water chambers inside the dual walls of housing 10.
- FIGURE 1 Shown at the upper right and lower left of the internal chamber of housing 10 in FIGURE 1 are two plasma torches 18 mounted for reciprocating transverse movement parallel to the surface of the flat side runs of endless belt 14 with their output streams aimed at the exposed face of the belt.
- Support platens 17 serve to counteract any belt deflection which would otherwise be produced by the impact stream from each plasma torch.
- the plasma torches 18 are shown schematically in the drawings, and they incorporated the features shown in FIGURE 3, where a Dresser Industries' Plasmagun is shown in a cross-sectional side elevation view delineating its working parts.
- the plasma gun or torch 18 is formed with a high voltage internal electric arc passing between its central cathode 19 and the surrounding ring-shaped nozzle or anode 20.
- a continuous supply of high-pressure gas, typically helium, argon or nitrogen, is delivered through a gas inlet 21.
- the electric arc produced between the cathode 19 and the anode 20 is thereby swept forward through the nozzle anode as a high temperature plasma jet 22, whose temperature normally exceeds 3,000 degrees Celsius.
- a stream of pulverized feed stock powder ranging in average particle size from 50 to 500 micrometers is also supplied to the plasma torch 18 through a powder feed tube 23, delivering the powder feed stock directly into the ring-shaped anode 20 where it is swept from the plasma torch in the high temperature plasma jet 22. Pulverized particles of the powder are rapidly melted and the plasma jet thus becomes a high temperature, high velocity gas jet in which drops of molten feed stock powder are entrained.
- a flexible supply conduit 25 inside housing 10 connects feed tube 23, cooling water conduits 24 and 27 and electrical power cables to each plasma torch 18.
- each plasma jet 22 issuing from each plasma torch 18 is directed toward the smooth flat vertical run of substrate belt 14.
- Each plasma torch 18 is mounted for reciprocating transverse movement, parallel to the flat vertical run face of belt 14, moving back and forth along a guide bar 28 and driven by such means as a reversible rack and pinion drive or an articulating pivoted counterweighted support linkage (not shown in the drawings).
- Supply conduit 25 flexes freely to accommodate this reciprocating torch movement.
- Aluminum foil with a laminated polytetrafluoroethylene "Teflon" surface layer has proved to be a highly effective impact substrate.
- FIGURE 5 a greatly enlarged cross-sectional of this preferred substrate is illustrated.
- the outermost layer of belt 14 is formed of a thin film 29 of Teflon FEP, approximately one mil thick.
- This Teflon layer 29 is laminated directly to a slightly thicker layer of aluminum foil 31, two mils thick, for example.
- the opposite face of foil layer 31 is bonded by a layer of adhesive cement 32 to a flexible temperature-resistant belt 33 of sheet metal or woven or non-woven fabric.
- the adhesive layer 32 and the belt 33 are both flexible and the Teflon coating 29 and the very thin layer of aluminum foil 31 are also flexible.
- the flexible impact film 29 of Teflon may be laminated directly to thicker flexible sheet aluminum backing performing the functions of foil 31 and metal backing 33 in FIGURE 5, and eliminating the need for adhesive 32.
- This flexibility allows belt 14 to flex freely as it passes around the large diameter rollers 15 and 16. This assures that belt 14 will have an extended useful life despite the high temperatures employed in the atomization step of the process.
- the reciprocating transverse movement of plasma torches 18 back and forth across the width of belt 14 produces a constantly shifting impact zone as the belt moves along its endless path between rollers 15 and 16.
- the combination of belt advance and reciprocating torch movement produces a zigzag pattern of impact zones on the belt and minimizes local heating by the plasma jets 22 impacting upon the surface of Teflon-coated belt substrate 14.
- Aluminum foil layer 31 aids in rapidly carrying away heat, further extending the useful life of belt 14.
- the desired relative motion of substrate belt 14 and torch 18 can be produced by driving the belt rollers 15 and 16 in a combination of axial reciprocating and rotational movement so that all points on the peripheral surfaces of the rollers follow a sinusoidal path, producing sinusoidal movement of belt 14 relative to torch 18.
- the two components of this belt movement relative to torch 18 should of course be out of phase to assure that every pass of belt 14 through each plasma torch impact zone exposes a fresh area of the belt to the hot plasma stream.
- the impact substrate can also be formed as a greatly elongated web 46 unwound from a supply reel 47 past torch 18 and between plasma jet 22 and support paten 17, to be rewound on a takeup reel 48.
- Liquid rinsing jet 45 and wipin squeegee 34 remove residual powder, and the elongated web 46 can be rewound on the supply reel like movie film and repeatedly reused in the same fashion, employing suitable drive motors on reels 47 and 48.
- Residues of atomized powder are minimized on the Teflon surface of belt 14 because the smooth, low friction surface of the Teflon coating resists wetting of the substrate surface by the impacting molten drops of pulverized material.
- Atomized powder particles which might happen to adhere to the Teflon surface of the substrate belt 14 would tend to interfere with subsequent impact atomization, on the next pass of the belt beneath the plasma torch 18. Therefore, such residues are preferably removed from the belt by the squeegee wiping action of a liquid-wetted wiping sponge 34 beneath which the belt 14 passes in sliding engagement, being sandwiched between sponge 34 and support platen 17, as shown in FIGURE 1.
- any accumulated powder adhering to the Teflon surface 29 of belt 14 is wiped away by the sponge, and drained from the sponge by the impregnating liquid.
- This liquid is preferably water in the case of ceramic powder atomization, and oil or an organic liquid such as hexane in the case of metal powder atomization.
- Liquid squeezed from the sponge 34 by its compression against the passing belt 14 carries away any excess powder picked up from belt 14 and entrained in the excess liquid. Any moisture remaining on the surface of belt 14 is quickly evaporated by the high ambient temperatures inside housing 10 resulting from operation of the plasma torches 18.
- one or more jets of pressurized liquid such as jets 45 shown in FIGURE 1, may be aimed at substrate 14.
- a revolving cleaning brush 40 engaging the impact substrate 29, or a vacuum intake hood 50, or a vacuum cleaner type combination of brush 40 and vacuum hood 50 may be employed to remove accumulated atomized powder residues from the impact substrate.
- a quench gas stream enters the interior of housing 10 at room temperature through one or more nozzles 36 aimed at the impact zone of each plasma jet.
- the quench gas temperature may be reduced by its expansion through nozzles 36.
- each of the molten liquid drops carried by the plasma jet impacts to form a ring-shaped droplet corona, taking advantage of the smoothness of belt 14 and the non-wetting, low-friction Teflon surface, with the resulting tiny droplets rapidly chilling due to the action of the quench gas stream delivered by quench gas nozzle means 36 aligned with the plasma torch and aimed at the impact stream's impact zone on belt 14.
- the quench gas may be the same gas supplied through gas inlet 21 to create the plasma jet and carry the molten droplets to the impact zone.
- Helium or hydrogen are preferred quench gases because of their high thermal conductivity, but argon and nitrogen are often used. This quick chilling, at a chill rate on the order of 100,000 or more degrees per second, produces such rapid solidification of the atomized droplets that they customarily exhibit homogeneous internal structure. These particles also exhibit very fine grain size, and may even be amorphous, i.e., without ordered atomic structure. Most of these atomized particles solidify with a spheroidal outer surface.
- the resulting cloud of atomized fine powder particles filling the interior of housing 10 descends by gravity toward the bottom of the housing, passing with excess rinsing liquid through a hopper 37 to a powder collection sump 38.
- the powder sump 38 is preferably detachable and interchangeable so that it may be removed and replaced by a fresh empty sump 38 in order to facilitate the powder recovery operation.
- the sump 38 is provided with a sight glass 39 indicating the level of accumulated liquid collected therein.
- the sump 38 is also provided with a detachable latch 41 securing it to the lower end of hopper 37 forming the bottom of housing 10.
- latch 41 can be opened and the detachable sump 38 disconnected from the lower end of hopper 37.
- a fresh, empty collection sump 38 is then moved into position and secured to hopper 37 by closing latch 41 and the accumulated contents of the filled sump 38 may be recovered by evaporating the liquid or centrifuging the powder slurry to separate the powder and liquid in the sump.
- Wet filtration or vacuum drying or spray drying techniques may also be used to recover the atomized powder particles collected in the liquid of sump 38.
- the impact substrate for atomization of molten powder drops carried in the plasma torch jet takes the form of a revolving metal or ceramic disk 42.
- the cross-section of the disk 42 is generally similar to FIGURE 5, preferably with a thin layer 29 of Teflon FEP forming the exposed impact surface, with its underside bonded to a thicker layer of aluminum foil 31 secured by an adhesive 32 to a metal or ceramic turntable disk taking the place of the temperature resistant belt 33 illustrated in FIGURE 5.
- the disk 42 is centrally supported on the end of a motor shaft 43 turned by motor 44 and thereby presenting a constantly changing zone of the substrate 29 in the impact path of plasma torch 18.
- Quench gas delivered by the quench gas nozzles 36 aimed at the impact zone is supplied at a much lower temperature than the similar gas forming part of the plasma torch jet, and the introduction of a gas under pressure through both torch 18 and nozzle 36 produces a current tending to cause atomized powder particles, suspended in the atmosphere inside the housing surrounding the assembly shown in FIGURE 2, to flow through a vacuum intake powder collector 46 which may be provided with one or more fine mesh filter screens similar to dust collector bags, or may employ electrostatic precipitation techniques to attract the atomized powder particles to collection surfaces inside the powder collector 46.
- the revolving brush 40, or the vacuum intake hood 50, or both employed together, as shown in FIGURE 2 are used to remove residual atomized powder from impact surface 29 before each pass through the plasma jet stream 22.
- a wiper sponge 34 may be positioned for squeegee wiping contact with substrate 29, and provided with a liquid jet supply 47 through rinsing liquid jets 45, or a liquid manifold 48 positioned adjacent to the squeegee wiper 34.
- the rotating disk embodiment illustrated in FIGURE 2 is customarilly used with ceramic powder atomization processes, in which the rinsing liquid is normally water, and the operating temperatures maintained by plasma torch 18 quickly evaporate liquid employed soon after the squeegee wiping action has been completed, assuring that the liquid leaves the working chamber as a vapor mixed with the flowing gas stream carrying atomized powder particles into powder collector 46. Since the wiping water is rapidly vaporized, there is no need for a liquid collection sump in the disk embodiment of FIGURE 2 corresponding to sump 38 shown in the embodiment of FIGURE 1, and the rotating disk atomization process is performed as a substantially dry operation.
- the rinsing liquid is normally water
- the operating temperatures maintained by plasma torch 18 quickly evaporate liquid employed soon after the squeegee wiping action has been completed, assuring that the liquid leaves the working chamber as a vapor mixed with the flowing gas stream carrying atomized powder particles into powder collector 46. Since the wiping water is rapidly vaporized, there is no need for a liquid collection sump in
- FIGURE 2 While a single plasma torch is shown in FIGURE 2 and a pair of plasma torches as shown in FIGURE 1, three, four or more plasma torches may be employed if desired in a wider or longer housing 10, thus permitting scaling up of the volume of atomized powder produced while maintaining substantially the same operating characteristics for the process.
- the squeegee sponges 34 are shown removed some distance away from the impact zone of the plasma torch jet on the substrate in FIGURE 1. However, for the best results it is often desirable to move the squeegee sponge 34 to a position closely adjacent and just upstream of the plasma jet impact zone on the moving substrate, to minimize any random deposit of airborne powder on the substrate before the plasma jet impact.
- the belt drive motor 34 is preferably positioned outside housing 10 to assure that the motor and its bearings are isolated from the dusty environment inside the housing 10, and a dust seal around the motor shaft rotating the drive roller 15 is employed in the wall of housing 10. Dust-proof gaskets 49 on doors 13 retain the atomized powder particles inside housing 10.
- Atomization runs on calcia-stabilized zirconia, 200/325 mesh (75/45 ⁇ m) "PP-42" produced by Bay State Abrasives of Westboro, Massachusetts were employed to compare the effects of changes in gun-to-substrate distance, plasma stream impact angle, and recycling the atomized material in a double atomization operation.
- the starting powder appeared to be sharp irregular chips having dimensions ranging from 20 to 50 micrometers.
- the resuling atomized powder particles are almost entirely spherical, with diameters ranging between 1 and 10 micrometers.
- Teflon FEP film When Teflon FEP film was employed dry as the impact substrate, good results were achieved for several minutes, after which small patches of melted ceramic appeared on the substrate. This is believed to have been caused by fine powder electrostatically adhering to the substrate. On subsequent passes of the substrate through the plasma stream impact zone, such residual powder apparently melted and coalesced in situ .
- Cleansing of the impact substrate before each pass through the impact zone to remove such residual powder particles can be achieved successfully by vacuum cleaning, or by a liquid rinse and squeegee wiping step. This removes any residual accumulations of electrostatically attracted powder, and facilitates continuous powder atomization over long production runs.
- Table 1 shows the particle sizes observed after a series of seven powder production runs, Sample 14-1 was atomized using the dry Teflon FEP substrate described above. The remaining runs were all made on a Teflon FEP substrate which was liquid rinsed and squeegee wiped. For runs 15-3, 14-2 and 15-2, the axis of the plasma stream was substantially normal to the substrate surface, and the distance was reduced successively from 5 inches (12.7 cms) to 4 inches (10 cms) to 3 inches (7.62 cms), producing successively finer average particle sizes as Table 1 shows.
- run 14-3 the plasma stream axis was inclined at 45 degrees to the surface of the impact substrate, producing a wider range of particle sizes and a slight increase in average particle diameter.
- FIGURES 6A, 6B and 6C show the shape and size distribution of zirconia powder atomized by plasma torch jet impact against a dry Teflon FEP film substrate utilizing the equipment illustrated in the embodiment of FIGURE 2. Virtually all these atomized powder particles are spherical and their size ranges are shown in the particle size distribution figures summarized in Table 1.
- Particle sizes for the atomized zirconia powder particles are shown in the particle size distribution diagrams annexed as the diagrams of FIGURES 7-11. As clearly illustrated in these size distribution curves, 50% of the atomized powder particles are customarily smaller than five micrometers in diameter and may be smaller than one, two or three micrometers in diameter. The great majority of atomized powder particles are less than ten micrometers in diameter.
- Table 2 summarizes the excellent density figures for these powders after consolidation by hot pressing, i.e., the application of heat and pressure to the powders. This confirms that these powders are ideal for hot pressing purposes. It is conjectured that these good hot pressing results are promoted by the very fine and stable particle size, sphericity, and extremely favorable powder densities.
- Agglomerated molybdenum powder, -200 + 325 mesh (75 to 45 ⁇ m) was delivered at the rate of 10 lbs. (4.53 Kg) per hour to the plasma gun shown in FIGURE 1, spaced 4 inches (10 cms) from the rotating disk Teflon FEP substrate with the plasma stream axis normal to the disk surface. Average current of 600 amp. was drawn at voltages ranging between 25 and 30 volts. The resulting atomized powder comprised almost entirely spherical particles having diameters under 10 micrometers.
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Abstract
Description
- This invention relates to atomization techniques for producing ceramic powders and metal powders with extremely fine particle size, high density and optimum crystal and grain structure.
- It has previously been proposed in WO84/02864 to make powders by melting particulate material in a plasma torch and impacting the stream of high temperature gas and molten material against a substrate such as dry ice or smooth quartz. However, it is desirable to prevent build-up of accumulated residues of the impacted material and it is an object of the present invention to provide a powder atomizing method and apparatus enabling such accumulated residues to be avoided.
- According to the present invention there is provided apparatus for atomizing of ceramics or metals comprising
- A. a heat-resistant housing enclosing an impact chamber and having gasketed access door means formed therein,
- B. cooling means installed in the housing and door means,
- C. substrate-advancing means juxtaposed to an impact zone in the chamber and supported by the housing,
- D. an impact substrate comprising a thin film of polytetrafluoroethylene polymer mounted on the advancing means for advancing said impact substrate with an edge-wise movement through the impact zone,
- E. chilling gas nozzle means supported by the housing and aimed to deliver pressurized chilling gas through to a quench gas chill zone adjacent to the impact zone,
- F. a plasma torch supported in the chamber, connected to a source of electrical power and to a pressurized supply source of gas entraining pulverized feed material to be atomized, aimed to deliver the hot plasma jet carrying molten drops of feed material to impact on the advancing substrate in the impact zone, producing rebounding atomized droplets that are chilled and solidified to produce microatomized particles in the quench gas chill zone by the chilling gas,
- G. substrate-cleaning means supported in the chamber juxtaposed to the advancing substrate near the impact zone,
- H. powder recovery means connected to receive and collect powder produced in the impact zone.
- Viewed from a further aspect the invention provides a method for atomizing granulated metal and ceramic feed material into fine particle size powder, comprising the steps of conveying an impact substrate comprising a thin film of polyetrafluoroethylene polymer edge-wise along a continuous path through an impact zone in an enclosed chamber, cleaning the exposed surface of the impact substrate, delivering granulated feed material entrained in a stream of gas through a plasma torch having its hot plasma jet directed toward the substrate in the impact zone, producing molten drops of feed material impacted and rebounding into molten droplets, delivering a stream of chilling gas through a quench gas chill zone adjacent to the impact zone, rapidly solidifying the molten droplets into fine particle size powder, and recovering the fine particle size powder from the enclosed chamber.
- Atomized powders are produced with very fine particle diameters, high densities, and optimum internal structures. These are well adapted for flame coating, hot pressing, sintering and heat treatment at unexpectedly low temperature ranges, and they permit highly effective "alloying" of two or more different phases of fine ceramic powders or metals or combinations of metals with ceramics in the final hot pressed or sintered product.
- Free-flowing powders for flame spray applications are disclosed in detail in my previous patents US-A-3,909,241, US-A-3,974,245 and US-A-3,881,911. Desired particle size ranges less than 60 micrometers (i.e., "microns") and preferably with 80 percent of the particles having sizes less then 30 micrometers have been considered optimal for flame spraying applications. Such powders have been produced by milling, screening and cyclone separation, with undersized particles being recycled into the original slurry and spray dried to leave only the desired particle size ranges for flame spraying use.
- Several prior United States patents have suggested impact methods for subdividing molten metal or metaloid streams to produce fine particle sizes, such as United States patents 4,419,060 and 4,435,342. These patents employ heated crucibles of molten metal, but the techniques of the present invention avoid the inconvenience, expense and the risk of contamination of feed stocks by delivering the gas and pulverized feed materials directly to the plasma torch with temperatures of 3000 degrees Celsius and upwards are created almost instantaneously as the torch delivers the molten drops in its output stream. The method steps and the combined apparatus subassemblies employed in the techniques of the present invention are believed to be entirely different from all prior art techniques.
- Much finer particle sizes, ranging between one-tenth and twenty-five micrometers, and preferably between one and ten micrometers have been in great demand for metal powders, and between one-tenth and one micrometer for ceramic powders, for such techniques as hot pressing, low temperature sintering, pressure assisted sintering and ceramic mold processing, to improve the density of the sintered components with reduced microporosity and shortened sintering time.
- The rapid solidification of the molten droplets rebounding from the impact substrate produces the desired range of fine particle sizes coupled with unexpectedly valuable characteristics in the resulting fine particles of atomized metal or ceramic. Virtually instantaneous chilling produces optimum chemical homogeneity of the solidified particles, and molecules of all different elements present are uniformly distributed in each solidified particle. Rapid chilling produces fine grain size, achieving strength and toughness in the resulting solid, enhanced resistance to chemical attack or corrosion, and in some cases, enhanced electrical properties. Quick chilling minimizes the time available for growth of ordered crystal structures freezing outward from crystallization centers to meet each other along grain boundaries, producing either a single crystal, an amorphous glass-like particle with no internal grain boundaries, or a particle with desirably fine grain size.
- Accordingly, a principal object of the present invention is to combine plasma torch melting with impact atomization and rapid chilling steps to achieve highly desired very fine particle powders of metals or ceramics.
- Another object of the invention is to provide such methods and apparatus producing atomized powders having a majority of their particles substantially spheroidal in shape with desirably high densities and uniform, homogeneous structure.
- A further object is to provide such methods and apparatus taking advantage of rapid chilling and solidification of molten droplets to produce atomized particles comprising a single crystal or having an amorphous, glass-like composition or having very fine grain size.
- Still another object of the invention is to provide such methods and apparatus for producing such atomized powder particles with particle size ranges falling between one-tenth and twenty-five micrometers.
- A still further object to the invention is to provide methods and apparatus for producing such atomized powders efficiently and economically.
- Other objects of the invention will in part be obvious and will in part appear hereinafter.
- The invention accordingly comprises the features of construction, combinations of elements, and arrangements of parts which will be exemplified in the constructions hereinafter set forth, and the scope of the invention will be indicated in the claims.
- For a fuller understanding of the nature and objects of the invention, reference should be had to the following detailed description taken in connection with the accompanying drawings, in which
-
- FIGURE 1 is a perspective schematic view broken away to show the internal construction of the plasma melting and atomization apparatus employed in a first embodiment of the present invention.
- FIGURE 2 is a schematic perspective view of the apparatus employed in a second embodiment of the present invention;
- FIGURE 3 is a schematic cross-sectional side elevation view of a plasma torch or plasma gun which is commercially available, of the kind used in the methods of the present invention;
- FIGURE 4 is a top plan view of the water-jacketed housing surrounding the working chamber illustrated in FIGURE 1;
- FIGURE 4A is a schematic side elevation view of the apparatus employed in a third embodiment of the invention.
- FIGURE 5 is a greatly enlarged cross-sectional side elevation view of a portion of the substrate employed in the methods and apparatus of the present invention.
- FIGURES 6A, 6B and 6C are three photomicrographs taken at successive magnifications of 480x, 1000x and 4000x, showing atomized zirconia particles produced by the techniques of this invention employing Teflon FEP film as an impact substrate; and
- FIGURES 7-11 are particle size distribution charts for representative sample powder batches identified in Table 1 below.
- A preferred embodiment of the apparatus employed in one form of the present invention is illustrated schematically in FIGURES 1 and 3, where all of the moving parts of the apparatus are shown positioned inside a double-walled, water-jacketed
enclosure 10. This heat insulating dual-walled enclosure is provided with a cooling water inlet conduit 11 andoutlet conduit 12. It is also provided with two hinged gasketeddoors 13 on opposite side walls which may be clamped shut or swung open to provide ready access to the interior ofhousing 10. Each of thedoors 13 is gasketed with suitable O-ringtype gasket material 49 of heat resistant polymer, and each hinged door is also provided with internal cooling cavities connected by externalflexible tubing 11A and 12A to the cooling water chambers inside the dual walls ofhousing 10. - Vertically arrayed between the two
doors 13 is anendless belt 14 with an extremely smooth, low friction outer surface.Belt 14 passes over anupper roller 15 and forms a closed loop spanning the distance betweenroller 15 and alower idler roller 16, which may be biased downward by springs or weights if desired to take up any slack inbelt 14. This maintains slight tension in the belt, assuring that its sides, serving as the impact zones for the atomization step, are smooth and flat. - Directly behind each smooth, falt side run of
belt 14 is positioned asupport platen 17. These support platens are shown positioned between the two straight runs ofbelt 14 on the interior of the endless belt loop, and anchored in these positions with their end edges secured to the interior walls of thehousing 10. They are preferably hollow, with their interior chambers connected to the cooling water chambers inside the dual walls ofhousing 10. - Shown at the upper right and lower left of the internal chamber of
housing 10 in FIGURE 1 are twoplasma torches 18 mounted for reciprocating transverse movement parallel to the surface of the flat side runs ofendless belt 14 with their output streams aimed at the exposed face of the belt.Support platens 17 serve to counteract any belt deflection which would otherwise be produced by the impact stream from each plasma torch. - The
plasma torches 18 are shown schematically in the drawings, and they incorporated the features shown in FIGURE 3, where a Dresser Industries' Plasmagun is shown in a cross-sectional side elevation view delineating its working parts. The plasma gun ortorch 18 is formed with a high voltage internal electric arc passing between itscentral cathode 19 and the surrounding ring-shaped nozzle oranode 20. A continuous supply of high-pressure gas, typically helium, argon or nitrogen, is delivered through agas inlet 21. The electric arc produced between thecathode 19 and theanode 20 is thereby swept forward through the nozzle anode as a hightemperature plasma jet 22, whose temperature normally exceeds 3,000 degrees Celsius. - A stream of pulverized feed stock powder ranging in average particle size from 50 to 500 micrometers is also supplied to the
plasma torch 18 through apowder feed tube 23, delivering the powder feed stock directly into the ring-shaped anode 20 where it is swept from the plasma torch in the hightemperature plasma jet 22. Pulverized particles of the powder are rapidly melted and the plasma jet thus becomes a high temperature, high velocity gas jet in which drops of molten feed stock powder are entrained. - The enormous temperatures achieved in the plasma jet would soon melt the
plasma torch 18 if it were not provided with a continuous supply of cooling water entering the device through awater inlet 24, to encircle the periphery of the ring-shaped anode in acooling chamber 26 from which it travels rearwardly through a rear peripheral portion ofchamber 26 encircling thecathode 19, and then exits from the torch through awater outlet 27. - A flexible supply conduit 25 inside
housing 10 connectsfeed tube 23,cooling water conduits plasma torch 18. - As shown in FIGURE 1, the
plasma jet 22 issuing from eachplasma torch 18 is directed toward the smooth flat vertical run ofsubstrate belt 14. Eachplasma torch 18 is mounted for reciprocating transverse movement, parallel to the flat vertical run face ofbelt 14, moving back and forth along aguide bar 28 and driven by such means as a reversible rack and pinion drive or an articulating pivoted counterweighted support linkage (not shown in the drawings).Supply conduit 25 flexes freely to accommodate this reciprocating torch movement. - Aluminum foil with a laminated polytetrafluoroethylene "Teflon" surface layer has proved to be a highly effective impact substrate. In FIGURE 5 a greatly enlarged cross-sectional of this preferred substrate is illustrated. The outermost layer of
belt 14 is formed of athin film 29 of Teflon FEP, approximately one mil thick. ThisTeflon layer 29 is laminated directly to a slightly thicker layer ofaluminum foil 31, two mils thick, for example. The opposite face offoil layer 31 is bonded by a layer ofadhesive cement 32 to a flexible temperature-resistant belt 33 of sheet metal or woven or non-woven fabric. Theadhesive layer 32 and thebelt 33 are both flexible and theTeflon coating 29 and the very thin layer ofaluminum foil 31 are also flexible. If desired, theflexible impact film 29 of Teflon may be laminated directly to thicker flexible sheet aluminum backing performing the functions offoil 31 andmetal backing 33 in FIGURE 5, and eliminating the need foradhesive 32. This flexibility allowsbelt 14 to flex freely as it passes around thelarge diameter rollers belt 14 will have an extended useful life despite the high temperatures employed in the atomization step of the process. - The reciprocating transverse movement of plasma torches 18 back and forth across the width of
belt 14 produces a constantly shifting impact zone as the belt moves along its endless path betweenrollers plasma jets 22 impacting upon the surface of Teflon-coatedbelt substrate 14.Aluminum foil layer 31 aids in rapidly carrying away heat, further extending the useful life ofbelt 14. - Alternatively, the desired relative motion of
substrate belt 14 andtorch 18 can be produced by driving thebelt rollers belt 14 relative to torch 18. The two components of this belt movement relative to torch 18 should of course be out of phase to assure that every pass ofbelt 14 through each plasma torch impact zone exposes a fresh area of the belt to the hot plasma stream. - The impact substrate, as shown in FIGURE 4A, can also be formed as a greatly
elongated web 46 unwound from asupply reel 47past torch 18 and betweenplasma jet 22 andsupport paten 17, to be rewound on atakeup reel 48. Liquid rinsingjet 45 andwipin squeegee 34 remove residual powder, and theelongated web 46 can be rewound on the supply reel like movie film and repeatedly reused in the same fashion, employing suitable drive motors onreels - Residues of atomized powder are minimized on the Teflon surface of
belt 14 because the smooth, low friction surface of the Teflon coating resists wetting of the substrate surface by the impacting molten drops of pulverized material. Atomized powder particles which might happen to adhere to the Teflon surface of thesubstrate belt 14 would tend to interfere with subsequent impact atomization, on the next pass of the belt beneath theplasma torch 18. Therefore, such residues are preferably removed from the belt by the squeegee wiping action of a liquid-wettedwiping sponge 34 beneath which thebelt 14 passes in sliding engagement, being sandwiched betweensponge 34 andsupport platen 17, as shown in FIGURE 1. - As a result, any accumulated powder adhering to the
Teflon surface 29 ofbelt 14 is wiped away by the sponge, and drained from the sponge by the impregnating liquid. This liquid is preferably water in the case of ceramic powder atomization, and oil or an organic liquid such as hexane in the case of metal powder atomization. Liquid squeezed from thesponge 34 by its compression against the passingbelt 14 carries away any excess powder picked up frombelt 14 and entrained in the excess liquid. Any moisture remaining on the surface ofbelt 14 is quickly evaporated by the high ambient temperatures insidehousing 10 resulting from operation of the plasma torches 18. - In place of or supplementing the liquid rinsing and squeegee wiping shown in FIGURE 1, one or more jets of pressurized liquid such as
jets 45 shown in FIGURE 1, may be aimed atsubstrate 14. Alternatively as indicated in FIGURE 2, a revolvingcleaning brush 40 engaging theimpact substrate 29, or avacuum intake hood 50, or a vacuum cleaner type combination ofbrush 40 andvacuum hood 50 may be employed to remove accumulated atomized powder residues from the impact substrate. - A quench gas stream enters the interior of
housing 10 at room temperature through one ormore nozzles 36 aimed at the impact zone of each plasma jet. The quench gas temperature may be reduced by its expansion throughnozzles 36. - While the exact mechanism of the atomization impact of the
plasma jet 22 against the Teflon facedbelt 14 is not certain, it is believed that each of the molten liquid drops carried by the plasma jet impacts to form a ring-shaped droplet corona, taking advantage of the smoothness ofbelt 14 and the non-wetting, low-friction Teflon surface, with the resulting tiny droplets rapidly chilling due to the action of the quench gas stream delivered by quench gas nozzle means 36 aligned with the plasma torch and aimed at the impact stream's impact zone onbelt 14. The quench gas may be the same gas supplied throughgas inlet 21 to create the plasma jet and carry the molten droplets to the impact zone. Helium or hydrogen are preferred quench gases because of their high thermal conductivity, but argon and nitrogen are often used. This quick chilling, at a chill rate on the order of 100,000 or more degrees per second, produces such rapid solidification of the atomized droplets that they customarily exhibit homogeneous internal structure. These particles also exhibit very fine grain size, and may even be amorphous, i.e., without ordered atomic structure. Most of these atomized particles solidify with a spheroidal outer surface. - The resulting cloud of atomized fine powder particles filling the interior of
housing 10 descends by gravity toward the bottom of the housing, passing with excess rinsing liquid through ahopper 37 to apowder collection sump 38. Thepowder sump 38 is preferably detachable and interchangeable so that it may be removed and replaced by a freshempty sump 38 in order to facilitate the powder recovery operation. - As indicated in FIGURE 1, the
sump 38 is provided with asight glass 39 indicating the level of accumulated liquid collected therein. Thesump 38 is also provided with adetachable latch 41 securing it to the lower end ofhopper 37 forming the bottom ofhousing 10. When the level of liquid indicated insight glass 39 reaches the point whensump 38 should be emptied and the powder collected therein recovered, latch 41 can be opened and thedetachable sump 38 disconnected from the lower end ofhopper 37. A fresh,empty collection sump 38 is then moved into position and secured tohopper 37 by closinglatch 41 and the accumulated contents of the filledsump 38 may be recovered by evaporating the liquid or centrifuging the powder slurry to separate the powder and liquid in the sump. - Wet filtration or vacuum drying or spray drying techniques may also be used to recover the atomized powder particles collected in the liquid of
sump 38. - In the embodiment of the invention illustrated in FIGURE 2, the impact substrate for atomization of molten powder drops carried in the plasma torch jet takes the form of a revolving metal or
ceramic disk 42. The cross-section of thedisk 42 is generally similar to FIGURE 5, preferably with athin layer 29 of Teflon FEP forming the exposed impact surface, with its underside bonded to a thicker layer ofaluminum foil 31 secured by an adhesive 32 to a metal or ceramic turntable disk taking the place of the temperatureresistant belt 33 illustrated in FIGURE 5. Thedisk 42 is centrally supported on the end of amotor shaft 43 turned bymotor 44 and thereby presenting a constantly changing zone of thesubstrate 29 in the impact path ofplasma torch 18. Quench gas delivered by the quenchgas nozzles 36 aimed at the impact zone is supplied at a much lower temperature than the similar gas forming part of the plasma torch jet, and the introduction of a gas under pressure through bothtorch 18 andnozzle 36 produces a current tending to cause atomized powder particles, suspended in the atmosphere inside the housing surrounding the assembly shown in FIGURE 2, to flow through a vacuumintake powder collector 46 which may be provided with one or more fine mesh filter screens similar to dust collector bags, or may employ electrostatic precipitation techniques to attract the atomized powder particles to collection surfaces inside thepowder collector 46. The revolvingbrush 40, or thevacuum intake hood 50, or both employed together, as shown in FIGURE 2, are used to remove residual atomized powder fromimpact surface 29 before each pass through theplasma jet stream 22. As indicated in FIGURE 1, awiper sponge 34 may be positioned for squeegee wiping contact withsubstrate 29, and provided with aliquid jet supply 47 through rinsingliquid jets 45, or aliquid manifold 48 positioned adjacent to thesqueegee wiper 34. - The rotating disk embodiment illustrated in FIGURE 2 is customarilly used with ceramic powder atomization processes, in which the rinsing liquid is normally water, and the operating temperatures maintained by
plasma torch 18 quickly evaporate liquid employed soon after the squeegee wiping action has been completed, assuring that the liquid leaves the working chamber as a vapor mixed with the flowing gas stream carrying atomized powder particles intopowder collector 46. Since the wiping water is rapidly vaporized, there is no need for a liquid collection sump in the disk embodiment of FIGURE 2 corresponding tosump 38 shown in the embodiment of FIGURE 1, and the rotating disk atomization process is performed as a substantially dry operation. - While a single plasma torch is shown in FIGURE 2 and a pair of plasma torches as shown in FIGURE 1, three, four or more plasma torches may be employed if desired in a wider or
longer housing 10, thus permitting scaling up of the volume of atomized powder produced while maintaining substantially the same operating characteristics for the process. Thesqueegee sponges 34 are shown removed some distance away from the impact zone of the plasma torch jet on the substrate in FIGURE 1. However, for the best results it is often desirable to move thesqueegee sponge 34 to a position closely adjacent and just upstream of the plasma jet impact zone on the moving substrate, to minimize any random deposit of airborne powder on the substrate before the plasma jet impact. As shown in the top view of FIGURE 4, thebelt drive motor 34 is preferably positioned outsidehousing 10 to assure that the motor and its bearings are isolated from the dusty environment inside thehousing 10, and a dust seal around the motor shaft rotating thedrive roller 15 is employed in the wall ofhousing 10. Dust-proof gaskets 49 ondoors 13 retain the atomized powder particles insidehousing 10. - Atomization runs on calcia-stabilized zirconia, 200/325 mesh (75/45 µm) "PP-42" produced by Bay State Abrasives of Westboro, Massachusetts were employed to compare the effects of changes in gun-to-substrate distance, plasma stream impact angle, and recycling the atomized material in a double atomization operation. Viewed in the electron microscope, the starting powder appeared to be sharp irregular chips having dimensions ranging from 20 to 50 micrometers. As shown in FIGURES 6A, 6B and 6C, the resuling atomized powder particles are almost entirely spherical, with diameters ranging between 1 and 10 micrometers.
- When Teflon FEP film was employed dry as the impact substrate, good results were achieved for several minutes, after which small patches of melted ceramic appeared on the substrate. This is believed to have been caused by fine powder electrostatically adhering to the substrate. On subsequent passes of the substrate through the plasma stream impact zone, such residual powder apparently melted and coalesced in situ.
- Cleansing of the impact substrate before each pass through the impact zone to remove such residual powder particles can be achieved successfully by vacuum cleaning, or by a liquid rinse and squeegee wiping step. This removes any residual accumulations of electrostatically attracted powder, and facilitates continuous powder atomization over long production runs.
- Table 1 shows the particle sizes observed after a series of seven powder production runs, Sample 14-1 was atomized using the dry Teflon FEP substrate described above. The remaining runs were all made on a Teflon FEP substrate which was liquid rinsed and squeegee wiped. For runs 15-3, 14-2 and 15-2, the axis of the plasma stream was substantially normal to the substrate surface, and the distance was reduced successively from 5 inches (12.7 cms) to 4 inches (10 cms) to 3 inches (7.62 cms), producing successively finer average particle sizes as Table 1 shows.
- In run 14-3, the plasma stream axis was inclined at 45 degrees to the surface of the impact substrate, producing a wider range of particle sizes and a slight increase in average particle diameter.
- The accompanying photomicrographs of FIGURES 6A, 6B and 6C show the shape and size distribution of zirconia powder atomized by plasma torch jet impact against a dry Teflon FEP film substrate utilizing the equipment illustrated in the embodiment of FIGURE 2. Virtually all these atomized powder particles are spherical and their size ranges are shown in the particle size distribution figures summarized in Table 1.
- Particle sizes for the atomized zirconia powder particles are shown in the particle size distribution diagrams annexed as the diagrams of FIGURES 7-11. As clearly illustrated in these size distribution curves, 50% of the atomized powder particles are customarily smaller than five micrometers in diameter and may be smaller than one, two or three micrometers in diameter. The great majority of atomized powder particles are less than ten micrometers in diameter.
- Table 2 summarizes the excellent density figures for these powders after consolidation by hot pressing, i.e., the application of heat and pressure to the powders. This confirms that these powders are ideal for hot pressing purposes. It is conjectured that these good hot pressing results are promoted by the very fine and stable particle size, sphericity, and extremely favorable powder densities.
- These dense powders permit powder uniformity and high packing densities in the molding cavity, reducing the extent of compaction needed to produce the final part. This is believed to be explained by the better flow and packing properties exhibited by these atomized powders as compared with other powders of comparable agglomerate or particle sizes, presumably because the great majority of the powder particles are dense and spherical. These characteristics evidently facilitate powder flow and packing to improve die and mold filling, producing the resulting extremely high densities and absence of flaws or voids observed with hot pressed components formed from these atomized powders. Presumably the smooth, spherical powder particles produced by the processes of this invention allow more particle movement during the early pressure application stages of the hot pressing process.
- Excellent results have also been achieved with the processes and apparatus of the invention in producing very fine metal powders.
- Agglomerated molybdenum powder, -200 + 325 mesh (75 to 45 µm) was delivered at the rate of 10 lbs. (4.53 Kg) per hour to the plasma gun shown in FIGURE 1, spaced 4 inches (10 cms) from the rotating disk Teflon FEP substrate with the plasma stream axis normal to the disk surface. Average current of 600 amp. was drawn at voltages ranging between 25 and 30 volts. The resulting atomized powder comprised almost entirely spherical particles having diameters under 10 micrometers.
- 316 L stainless steel powder, -200 + 325 mesh (75 to 45 µm) was treated similarly, with the gun spaced 3 inches from the rotating disk Teflon FEP substrate. 500 amp. average current was drawn at 20-25 volts, producing atomized stainless steel powder of the same character and particle size range, almost entirely spherical particles under 10 micrometers in diameter.
- Water was employed as the substrate rinsing liquid with both the agglomerated molybdenum powder and the 316 L stainless steel powder. In addition, the stainless steel powder was also delivered through the plasma gun to a slightly different impact substrate, 0.001˝ (0.00254 cms) "Teflon PFA" polytetrafluoethylene film supported on 0.002˝ (0.0051 cms) aluminum foil cemented to the rotating disk. This Teflon PFA substrate was selected for temperature stability rated even higher than that of "Teflon FEP". Equivalent atomized stainless steel powder was produced using each substrate.
- Furthermore, the replacement of water by hexane as the substrate rinsing liquid, produced the same atomized stainless steel powder, indicating that volatile hydrocarbon solvents may be used in place of water in the processes of this invention.
- The orientation of the rotating disk of FIGURE 2 in either a vertical or a horizontal plane was also found to have no effect on the atomized powder produced.
Claims (26)
conveying an impact substrate comprising a thin film of polytetrafluoroethylene polymer edge-wise along a continuous path through an impact zone in an enclosed chamber,
cleaning the exposed surface of the impact substrate,
delivering granulated feed material entrained in a stream of gas through a plasma torch having its hot plasma jet directed toward the substrate in the impact zone, producing molten drops of feed material impacted and rebounding into molten droplets,
delivering a stream of chilling gas through a quench gas chill zone adjacent to the impact zone, rapidly solidifying the molten droplets into fine particle size powder, and
recovering the fine particle size powder from the enclosed chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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AT87901997T ATE70758T1 (en) | 1986-03-13 | 1987-03-09 | POWDER SPRAYING METHOD AND APPARATUS. |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US83926486A | 1986-03-13 | 1986-03-13 | |
US839264 | 1986-03-13 |
Publications (3)
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EP0259459A1 EP0259459A1 (en) | 1988-03-16 |
EP0259459A4 EP0259459A4 (en) | 1988-06-23 |
EP0259459B1 true EP0259459B1 (en) | 1991-12-27 |
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EP87901997A Expired - Lifetime EP0259459B1 (en) | 1986-03-13 | 1987-03-09 | Powder atomizing methods and apparatus |
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EP (1) | EP0259459B1 (en) |
JP (1) | JPS63502839A (en) |
AT (1) | ATE70758T1 (en) |
DE (1) | DE3775499D1 (en) |
WO (1) | WO1987005548A1 (en) |
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FR2679473B1 (en) * | 1991-07-25 | 1994-01-21 | Aubert Duval | METHOD AND DEVICE FOR PRODUCING POWDERS AND ESPECIALLY METAL POWDERS BY ATOMIZATION. |
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FR2223318B1 (en) * | 1973-03-30 | 1978-03-03 | Saint Gobain | |
US4069045A (en) * | 1974-11-26 | 1978-01-17 | Skf Nova Ab | Metal powder suited for powder metallurgical purposes, and a process for manufacturing the metal powder |
US4264641A (en) * | 1977-03-17 | 1981-04-28 | Phrasor Technology Inc. | Electrohydrodynamic spraying to produce ultrafine particles |
US4386896A (en) * | 1979-03-23 | 1983-06-07 | Allied Corporation | Apparatus for making metallic glass powder |
JPS58197206A (en) * | 1982-04-30 | 1983-11-16 | Hitachi Metals Ltd | Production of powder of high grade metal or its alloy |
US4592781A (en) * | 1983-01-24 | 1986-06-03 | Gte Products Corporation | Method for making ultrafine metal powder |
US4559187A (en) * | 1983-12-14 | 1985-12-17 | Battelle Development Corporation | Production of particulate or powdered metals and alloys |
JPS60224706A (en) * | 1984-04-20 | 1985-11-09 | Hitachi Ltd | Manufacturing method of ultrafine metal particles |
JPS62280306A (en) * | 1986-05-30 | 1987-12-05 | Nippon Yakin Kogyo Co Ltd | Method and apparatus for producing metallic grain |
-
1987
- 1987-03-09 DE DE8787901997T patent/DE3775499D1/en not_active Expired - Lifetime
- 1987-03-09 EP EP87901997A patent/EP0259459B1/en not_active Expired - Lifetime
- 1987-03-09 JP JP62501948A patent/JPS63502839A/en active Pending
- 1987-03-09 AT AT87901997T patent/ATE70758T1/en not_active IP Right Cessation
- 1987-03-09 WO PCT/US1987/000488 patent/WO1987005548A1/en active IP Right Grant
Non-Patent Citations (1)
Title |
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WO 84/02864 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7997439B2 (en) | 2003-06-06 | 2011-08-16 | Jamak Fabrication-Tex, Llc | Flexible bakeware having a multi-piece carrier system |
US7966970B2 (en) | 2005-07-19 | 2011-06-28 | M Management-Tex, Llc | Dairy inflation |
US8402921B2 (en) | 2005-07-19 | 2013-03-26 | M Management-Tex, Llc | Dairy inflation |
Also Published As
Publication number | Publication date |
---|---|
EP0259459A4 (en) | 1988-06-23 |
JPS63502839A (en) | 1988-10-20 |
WO1987005548A1 (en) | 1987-09-24 |
DE3775499D1 (en) | 1992-02-06 |
ATE70758T1 (en) | 1992-01-15 |
EP0259459A1 (en) | 1988-03-16 |
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