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EP0055331A3 - Method of trimming thin metal resistors - Google Patents

Method of trimming thin metal resistors Download PDF

Info

Publication number
EP0055331A3
EP0055331A3 EP81107584A EP81107584A EP0055331A3 EP 0055331 A3 EP0055331 A3 EP 0055331A3 EP 81107584 A EP81107584 A EP 81107584A EP 81107584 A EP81107584 A EP 81107584A EP 0055331 A3 EP0055331 A3 EP 0055331A3
Authority
EP
European Patent Office
Prior art keywords
thin metal
metal resistors
trimming thin
trimming
resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP81107584A
Other versions
EP0055331A2 (en
EP0055331B1 (en
Inventor
Joseph Francis Hevesi
Stanley Frank Kambic
Joseph Bruno Kluepfel
Frank John Schmidt
Thomas Jerome Van Duynhoven
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of EP0055331A2 publication Critical patent/EP0055331A2/en
Publication of EP0055331A3 publication Critical patent/EP0055331A3/en
Application granted granted Critical
Publication of EP0055331B1 publication Critical patent/EP0055331B1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/2408—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by pulsed voltage erosion, e.g. spark erosion

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
EP19810107584 1980-12-31 1981-09-23 Method of trimming thin metal resistors Expired EP0055331B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US22169580A 1980-12-31 1980-12-31
US221695 1980-12-31

Publications (3)

Publication Number Publication Date
EP0055331A2 EP0055331A2 (en) 1982-07-07
EP0055331A3 true EP0055331A3 (en) 1983-05-18
EP0055331B1 EP0055331B1 (en) 1985-05-15

Family

ID=22828942

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19810107584 Expired EP0055331B1 (en) 1980-12-31 1981-09-23 Method of trimming thin metal resistors

Country Status (3)

Country Link
EP (1) EP0055331B1 (en)
JP (1) JPS57121201A (en)
DE (1) DE3170519D1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2519776B2 (en) * 1988-06-17 1996-07-31 富士通株式会社 Method and apparatus for evaluating transparent conductive sheet resistance
KR100971220B1 (en) * 2009-08-17 2010-07-20 주식회사 에프티랩 The inspection method of the capacitive touch screen panel using lc resonance frequency shift

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1149775A (en) * 1966-09-21 1969-04-23 Associated Semiconductor Mft Thin film resistors
DE2344504A1 (en) * 1973-09-04 1975-03-13 Siemens Ag Dynamic matching device for thin-film resistors - has HF electrode supplied via HV capacitor and arc-trimming resistance layer
US4087625A (en) * 1976-12-29 1978-05-02 International Business Machines Corporation Capacitive two dimensional tablet with single conductive layer
FR2376399A1 (en) * 1977-11-18 1978-07-28 Ibm Flat plate capacitor construction - has pairs of complementary electrodes defining network of parallel lines of equipotential on surface of support substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1149775A (en) * 1966-09-21 1969-04-23 Associated Semiconductor Mft Thin film resistors
DE2344504A1 (en) * 1973-09-04 1975-03-13 Siemens Ag Dynamic matching device for thin-film resistors - has HF electrode supplied via HV capacitor and arc-trimming resistance layer
US4087625A (en) * 1976-12-29 1978-05-02 International Business Machines Corporation Capacitive two dimensional tablet with single conductive layer
FR2376399A1 (en) * 1977-11-18 1978-07-28 Ibm Flat plate capacitor construction - has pairs of complementary electrodes defining network of parallel lines of equipotential on surface of support substrate

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IBM TECHNICAL DISLCOSURE BULLETIN, vol. 23, no. 2, July 1980, pages 666-667, New York (USA); *

Also Published As

Publication number Publication date
JPS57121201A (en) 1982-07-28
DE3170519D1 (en) 1985-06-20
JPS6117124B2 (en) 1986-05-06
EP0055331A2 (en) 1982-07-07
EP0055331B1 (en) 1985-05-15

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