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EP0025092B1 - Ultrasonic transducer assembly and process for its production - Google Patents

Ultrasonic transducer assembly and process for its production Download PDF

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Publication number
EP0025092B1
EP0025092B1 EP80103708A EP80103708A EP0025092B1 EP 0025092 B1 EP0025092 B1 EP 0025092B1 EP 80103708 A EP80103708 A EP 80103708A EP 80103708 A EP80103708 A EP 80103708A EP 0025092 B1 EP0025092 B1 EP 0025092B1
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EP
European Patent Office
Prior art keywords
transducer elements
metal coating
ultrasonic
transducer
flat
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP80103708A
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German (de)
French (fr)
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EP0025092A1 (en
Inventor
Heinrich Dr. Diepers
Bertram Sachs
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Siemens AG
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Siemens AG
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Priority to AT80103708T priority Critical patent/ATE7083T1/en
Publication of EP0025092A1 publication Critical patent/EP0025092A1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B06B1/0614—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile for generating several frequencies

Definitions

  • the invention relates to an ultrasound transducer arrangement with a matrix of separately controlled ultrasound transducers, each consisting of a matrix of acoustically separated and electrically jointly controlled columnar transducer elements.
  • images are produced from the inside of a body to be examined with the aid of ultrasound pulses, which are emitted by a transducer element which is arranged on the surface of the body.
  • the position of an error location can be derived from the transit time of the ultrasound signal and the echo signal.
  • the ultrasonic transducer arrangement in the form of a so-called array consists of a large number of ultrasonic transducers with transducer elements made of piezo material, which are arranged next to one another at a short distance.
  • the transducer elements can be controlled together or in rows and in groups (US Pat. No. 4,122,725).
  • the entire array can consist of ultrasonic transducers, each of which is divided into transducer elements by so-called fine division, which are acoustically separated and electrically controlled together. This fine division shifts the transverse radiation of the transducer elements, which is also emitted, to higher frequencies, and its influence on the resolution is thus reduced.
  • Several transducer elements can be combined into groups by common electrical control. Each group contact then receives its own control line connection. The formation of additional transverse columns results in a matrix version (German design specification 28 29 570).
  • the invention is therefore based on the object of specifying an ultrasound transducer arrangement with a matrix of ultrasound transducers, each of which is provided in a particularly simple manner with a control connection and with which electronic focusing is possible both in the longitudinal direction and in the transverse direction of the arrangement.
  • the above object is achieved in an ultrasonic transducer arrangement of the type mentioned at the outset with the design features according to the characterizing part of claim 1.
  • the diameter preferably consist of a piezoelectric material with low quality, ie high self-damping.
  • the pulse therefore has a correspondingly broad characteristic and the ultrasonic oscillator thus has approximately the same sensitivity in a relatively wide frequency range.
  • Suitable material for such broadband transducer elements is, for example, lead metanobate Pb (Nb0 3 ) 2 or lead zirconate titanate Pb (Zr, Ti10 3) , which is generally referred to as PZT.
  • the strips created by the fine division are arranged at a very short distance from one another, so that the gap formed by the separation practically disappears.
  • a thin plastic interlayer with a thickness of a few can be used as a precaution.
  • the transducer elements can be polarized before the transducer plate is divided or after the transducer elements have been attached to the common electrical contact.
  • FIG. 1 schematically illustrates part of an ultrasonic transducer arrangement according to the invention.
  • FIG. 2 shows a section of an areal array. A section through part of FIG. 2 is shown in FIG. 3.
  • the transducer elements 2 are each provided on their lower end face with a metallization 8, which is made, for example, of a chromium or platinum and gold-containing alloy or can also consist of chrome and gold and chrome-nickel.
  • the transducer elements 2 are fastened with the aid of a solder layer 12 to a metal foil 14, which can be made of silver, for example, and which forms a common electrical connecting conductor for all transducer elements of the entire transducer arrangement.
  • the metal layer 14 is fastened on a damping body 18 with the aid of an adhesive layer 16.
  • the electrical connection conductor 2 of the ultrasonic oscillator 21 connected to the upper end face of the transducer elements is not shown in the figure.
  • a square area of the transducer elements 2 with a length 1 of, for example, approximately 3 mm is obtained.
  • the distances a in the y direction i.e. the spaces between the transducer elements, parallel to the x-direction according to FIG. 1, are kept considerably smaller by the stacking technique of the strips. For example, they can only be approximately 5 .mu.m and will generally not exceed 10 .mu.m accordingly.
  • the extent of the oscillators 21 in the y-direction is correspondingly smaller.
  • the transducer arrangement according to Fi. 2 can consist, for example, of a matrix of 324 transducers, which are arranged in columns 19 and rows 20 and each contain a matrix of 64 transducer elements, as is indicated in the ultrasound transducer 21 for clarification by a grid, although the individual transducer elements in the practical embodiment the arrangement are not visible.
  • the transducer elements of the individual ultrasonic transducers can be controlled in succession with two or more different frequencies.
  • the near-far field boundary referred to as the natural focus can thus be optimally shifted in the depth of an object to be examined by electronically selecting the size of the two-dimensional oscillating field. This is particularly advantageous if you focus electronically because the focus point is in the near-far field boundary or shorter.
  • the individual oscillators 21 to 26 of each of the rows 20 are each provided with a separate connecting conductor, which are designated 36 to 41 for the oscillators of the row 20 in the figure.
  • the individual transducers of the remaining lines are each provided with a connecting conductor, not shown in the figure.
  • this embodiment of the transducer arrangement as a matrix both electronic focusing in the x direction and electronic focusing in the y direction are possible.
  • this embodiment has the advantage that an electronic magnifying glass can be implemented. With a sufficiently large array and a sufficient line density, for example in a first step an object can be rough, i.e. at a larger spatial distance between the volume elements.
  • a detected error with increased line density in this area and reduced line density in its surroundings with a constant total number of lines can then be considered.
  • the two-dimensionally shaped focus can be fixed on this area and an additional optimization is then carried out by the choice of frequency. Since at the same time the area around the fault location is roughly scanned, the overview is always retained.
  • a flat body made of piezoelectric material is metallized on both flat sides and then releasably fastened on a base with one flat side.
  • the body is then moved in its longitudinal direction, i.e. finely divided by cuts parallel to the x-direction according to FIG. 1.
  • the columns 4 thus produced as strips are then connected to one another on the other flat side by a common metal support 14, for example with the aid of the solder layer 12.
  • This metal support 14 is then attached to the damping body 18, for example by means of the adhesive layer 16. Then the strip-like body from his original work pad, which is now on top of the matrix.
  • the fine division takes place in the transverse direction, i.e. parallel to the y-direction, and the matrix of the transducer elements 2 is created.
  • the metallization of the piezoelectric body is also separated in each case and the metal supports are formed on the end faces of the transducer elements, the lower ones of which are shown in FIG. 1 and designated by 8 are.
  • the metal pad 14 serving as a common electrical connection conductor for all transducer elements can preferably consist of the metallization of a plastic film, in particular of polyimide (Kapton), the thickness of which can be, for example, approximately 2 to 10 ⁇ m.
  • the distances between the individual oscillators 21 to 26 and 31 to 35 can correspond to the sawing gaps of the subdivision. In the practical embodiment, these distances are preferably kept as small, for example by stacking technology, as the distances between the individual transducer elements 2 of the ultrasonic transducers.
  • the matrix of transducer elements can also be produced in that the flat body made of piezoelectric material, which is metallized on both flat sides, first in strips with a length of 1 Transducer elements disassembled and then these strips are separated into sections, the length of which is equal to the width b of the transducer elements 2. Then the columnar transducer elements 2 produced in this way are lined up with their separating surfaces both in the x- and in the y-direction at a very short distance and fastened on a metal base, which is then applied to the damping body. With this stacking technique, the spaces c between the transducer elements 2 according to FIG. 1 can also be kept very small.
  • the ultrasonic vibrators using this method, it is expedient to manufacture one of the metal supports on the end faces of the transducer elements 2 from ferromagnetic material.
  • the individual transducer elements 2 can then be transferred to the metal support 14 with the aid of magnetic forces.
  • the individual transducer elements 2 that are already finished can also be transferred, for example, with the aid of an adhesive tape.
  • the transducer elements 2 can also be strung together directly on a stretchable work surface as a matrix. The minimum distance required for decoupling is then established by stretching the work surface. Under certain circumstances, it may be expedient to choose the metal pad 14 serving as a common electrical contact or also the metallization of a plastic film as the working base.
  • the transducer elements 2 according to FIG. 3 are provided on one end face with a common connecting conductor, the metal support 14, while on the opposite end face only the transducer elements of the matrix of the relevant ultrasonic vibrator 21 are provided with a Connection conductor are provided, which can preferably be carried out in the form of a conductor track.
  • a common cover 42 made of plastic, in particular polyimide (Kapton) is provided on its lower flat side in the region of the matrix of the vibrator 21 with a metallization 44, which can consist, for example, of a chrome-silver alloy. This metallization can preferably be evaporated onto the film.
  • the cover 42 is provided with an opening 46. Then the upper flat side of the cover 42 is provided with conductor tracks which represent the connecting conductors 36, 37 and 38. In each case one of these conductor tracks leads to one of the openings in the cover 42 and thus establishes the electrical connection with a control line (not shown in more detail).
  • the metal pad 44 can then be provided with a solder layer 52, which can preferably be vapor-deposited, and with the aid of this solder layer 52, the cover 42 with the connecting conductors 315 to 38 is fastened on the metal pads 48 of the transducer elements 2.
  • solder layer 52 for example an electrically conductive adhesive, a so-called conductive adhesive, can also be used to fasten the cover 42 with the conductor tracks on the transducer elements 2.
  • the entire upper flat side of the cover 42 can be provided with a metal coating, from which the parts which are not required as connecting leads are then removed, for example by means of photoetching technology.
  • the conductor tracks of the connecting conductors 36 to 38 can also be applied to the surface of the cover 42 using mask technology.
  • the oscillators of several lines for example the oscillators of six successive lines 20, 30, 40, 50, 60 and 70 can be combined into a transducer matrix.
  • This matrix can be scanned linearly in the x direction over the entire oscillator field in order to build up an image line sequence.
  • electronic focusing can also be achieved in the transverse direction in both the x and y directions by delaying the delay of the echo pulses or the echo and transmit pulses.
  • the common connecting conductor 14 serving as counter contact is arranged on the underside of the converter elements 2. This common counter contact can also be provided on the top of the transducer elements 2. In this embodiment, the connecting conductors for the individual ultrasonic vibrators are then arranged between the transducer elements and the damping body 18.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)

Abstract

In an ultrasonic transducer arrangement having a plurality of ultrasonic oscillators, the ultrasonic oscillators each consist of a matrix of column shaped transducer elements, which are arranged in columns and rows. A planar array which can be addressed separately is formed from a matrix of such ultrasonic oscillators. This array permits focussing of the radiated sound in its longitudinal as well as transversal direction.

Description

Die Erfindung bezieht sich auf eine Ultraschallwandleranordnung mit einer Matrix von getrennt gesteuerten Ultraschallschwingern, die jeweils aus einer Matrix von akustisch voneinander getrennten und elektrisch gemeinsam gesteuerten säulenförmigen Wandlerelementen bestehen.The invention relates to an ultrasound transducer arrangement with a matrix of separately controlled ultrasound transducers, each consisting of a matrix of acoustically separated and electrically jointly controlled columnar transducer elements.

In der zerstörungsfreien Werkstoffprüfung werden Bilder aus dem Inneren eines zu untersuchenden Körpers mit Hilfe von Ultraschallimpulsen hergestellt, die von einem Wandlerelement ausgestrahlt werden, das an der Oberfläche des Körpers angeordnet ist. Aus der Laufzeit des Ultraschallsignals und des Echosignals kann die Lage einer Fehlerstelle abgeleitet werden. Die Ultraschallwandleranordnung in der Form eines sogenannten Arrays besteht aus einer Vielzahl von Ultraschallschwingern mit Wandlerelementen aus Piezomaterial, die in geringem Abstand nebeneinander angeordnet sind. Die Wandlerelemente können gemeinsam oder reihenweise sowie gruppenweise gesteuert werden (US-Patent 4 122 725).In the non-destructive material testing, images are produced from the inside of a body to be examined with the aid of ultrasound pulses, which are emitted by a transducer element which is arranged on the surface of the body. The position of an error location can be derived from the transit time of the ultrasound signal and the echo signal. The ultrasonic transducer arrangement in the form of a so-called array consists of a large number of ultrasonic transducers with transducer elements made of piezo material, which are arranged next to one another at a short distance. The transducer elements can be controlled together or in rows and in groups (US Pat. No. 4,122,725).

Das gesamte Array kann aus Ultraschallschwingern bestehen, die durch sogenannte Feinteilung jeweils in Wandlerelemente aufgetrennt sind, die akustisch getrennt und elektrisch gemeinsam gesteuert sind. Durch diese Feinteilung wird die ebenfalls abgestrahlte Querschwingung der Wandlerelemente zu höheren Frequenzen verschoben und ihr Einfluß auf die Auflösung wird somit vermindert. Mehrere Wandlerelemente können durch gemeinsame elektrische Steuerung zu Gruppen zusammengefaßt werden. Jede Gruppenkontaktierung erhält dann einen eigenen Steuerleitungsanschluß. Durch die Bildung zusätzlicher Querspalten erhält man eine Matrix-Ausführung (deutsche Auslegeschrift 28 29 570).The entire array can consist of ultrasonic transducers, each of which is divided into transducer elements by so-called fine division, which are acoustically separated and electrically controlled together. This fine division shifts the transverse radiation of the transducer elements, which is also emitted, to higher frequencies, and its influence on the resolution is thus reduced. Several transducer elements can be combined into groups by common electrical control. Each group contact then receives its own control line connection. The formation of additional transverse columns results in a matrix version (German design specification 28 29 570).

Der Erfindung liegt deshalb die Aufgabe zugrunde, eine Ultraschallwandleranordnung mit einer Matrix von Ultraschallschwingern anzugeben, die jeweils in besonders einfacher Weise mit einem Steueranschluß versehen sind, und mit der eine elektronische Fokussierung sowohl in Längsrichtung als auch in Querrichtung der Anordnung möglich ist.The invention is therefore based on the object of specifying an ultrasound transducer arrangement with a matrix of ultrasound transducers, each of which is provided in a particularly simple manner with a control connection and with which electronic focusing is possible both in the longitudinal direction and in the transverse direction of the arrangement.

Nach der Erfindung wird die genannte Aufgabe bei einer Ultraschallwandleranordnung der eingangs genannten Art gelöst mit den Gestaltungsmerkmalen entsprechend dem Kennzeichnungsteil des Anspruches 1. Die säulenförmigen Wandlerelemente mit quadratischem, rechteckigem oder auch rundem Querschnitt, deren Höhe vorzugsweise etwa doppelt so groß ist wie die Breite bzw. der Durchmesser, bestehen vorzugsweise aus einem piezoelektrischen Material mit geringer Güte, d.h. hoher Eigendämpfung. Der Impuls hat deshalb eine entsprechend breite Charakteristik und der Ultraschallschwinger hat somit in einem verhältnismäßig weiten Frequenzbereich annähernd gleiche Empfindlichkeit. Als Material für solche breitbandigen Wandlerelemente ist beispielsweise Bleimetaniobat Pb(Nb03)2 oder auch Bleizirkonat-Titanat Pb(Zr, Ti103 geeignet, das allgemein mit PZT bezeichnet wird.According to the invention, the above object is achieved in an ultrasonic transducer arrangement of the type mentioned at the outset with the design features according to the characterizing part of claim 1. the diameter, preferably consist of a piezoelectric material with low quality, ie high self-damping. The pulse therefore has a correspondingly broad characteristic and the ultrasonic oscillator thus has approximately the same sensitivity in a relatively wide frequency range. Suitable material for such broadband transducer elements is, for example, lead metanobate Pb (Nb0 3 ) 2 or lead zirconate titanate Pb (Zr, Ti10 3) , which is generally referred to as PZT.

In der Anordnung werden die durch Feinteilung entstandenen Streifen in sehr geringem Abstand voneinander angeordnet, so daß der durch die Trennung entstandene Spalt praktisch verschwindet. Als Abstandhalter kann vorsugsweise eine dünne Kunststoffzwischenlage von wenigen ,um Dicke verwendet werden. Die Polarisation der Wandlerelemente kann vor der Aufteilung des Schwingerplättchens oder auch nach der Befestigung der Wandlerelemente auf dem gemeinsamen elektrischen Kontakt vorgenommen werden.In the arrangement, the strips created by the fine division are arranged at a very short distance from one another, so that the gap formed by the separation practically disappears. As a spacer, a thin plastic interlayer with a thickness of a few can be used as a precaution. The transducer elements can be polarized before the transducer plate is divided or after the transducer elements have been attached to the common electrical contact.

Alle Ultraschallschwinger der gesamten Wandleranordnung sind an einer Stirnfläche elektrisch leitend miteinander verbunden. Auf der anderen Stirnseite sind jeweils nur die Wandlerelemente der einzelnen Ultraschallschwinger mit einem gemeinsamen Steueranschluß verbunden der als Leiterbahn auf einer isolierenden Zwischenlage ausgeführt ist. Diese Gestaltung ermöglicht eine elektronische Fokussierung durch Laufzeitverzögerung sowohl in der Längsrichtung als auch in der Querrichtung des Arrays.All ultrasonic transducers of the entire transducer arrangement are connected to one another in an electrically conductive manner on one end face. On the other end, only the transducer elements of the individual ultrasonic vibrators are connected to a common control connection, which is designed as a conductor track on an insulating intermediate layer. This design enables electronic focusing by delay time in both the longitudinal and transverse directions of the array.

Zur weiteren Erläuterung der Erfindung wird auf die Zeichnung Bezug genommen, in deren Figur 1 ein Teil einer Ultraschallwandleranordnung nach der Erfindung schematisch veranschaulicht ist. Figur 2 zeigt einen Ausschnitt eines flächenhaften Arrays. Ein Schnitt durch einen Teil der Fig. 2 ist in Fig. 3 dargestellt.To further explain the invention, reference is made to the drawing, in which FIG. 1 schematically illustrates part of an ultrasonic transducer arrangement according to the invention. FIG. 2 shows a section of an areal array. A section through part of FIG. 2 is shown in FIG. 3.

Nach Figur 1 bildet eine Matrix von 64 Wandlerelementen 2, die jeweils in acht Spalten 4 und acht Zeilen 6 angeordnet sind, einen Ultraschallschwinger 21. Die Wandlerelemente 2 sind auf ihrer unteren Stirnfläche jeweils mit einer Metallisierung 8 versehen, die beispielsweise aus einer Chrom, Platin und Gold enthaltenden Legierung oder auch aus Chrom und Gold sowie aus Chrom-Nickel bestehen kann. Die Wandlerelemente 2 sind mit Hilfe einer Lotschicht 12 auf einer Metallfolie 14 befestigt, die beispielsweise aus Silber bestehen kann und die einen gemeinsamen elektrischen Anschlußleiter für alle Wandlerelemente der gesamten Wandleranordnung bildet. Die Metallschicht 14 ist mit Hilfe einer Kleberschicht 16 auf einem Dämpfungskörper 18 befestigt. Der mit der oberen Stirnfläche der Wandlerelemente verbundene elektrische Anschlußleiter 2 des Ultraschallschwingers 21 ist in der Figur nicht dargestellt.According to FIG. 1, a matrix of 64 transducer elements 2, which are each arranged in eight columns 4 and eight rows 6, forms an ultrasonic oscillator 21. The transducer elements 2 are each provided on their lower end face with a metallization 8, which is made, for example, of a chromium or platinum and gold-containing alloy or can also consist of chrome and gold and chrome-nickel. The transducer elements 2 are fastened with the aid of a solder layer 12 to a metal foil 14, which can be made of silver, for example, and which forms a common electrical connecting conductor for all transducer elements of the entire transducer arrangement. The metal layer 14 is fastened on a damping body 18 with the aid of an adhesive layer 16. The electrical connection conductor 2 of the ultrasonic oscillator 21 connected to the upper end face of the transducer elements is not shown in the figure.

Werden in dieser Ausführungsform mit Wandlerelementen 2 beispielsweise der Höhe h=600 um und der Breite b=300 µm sowie der 1 änga 1=300 11m die zunächst hergestellten Spalten 4 als über das gesamte Array reichende Streifen mit einem sehr geringen Abstand, beispielsweise a=2 bis 20 ,um, vorzugsweise 4 bis 8 µm, voneinander angeordnet, so wird die Spaltbreite c im wesentlichen ausgefüllt und praktisch für das Array wirksam gemacht.In this embodiment, the transducer elements 2, for example the height h = 600 μm and the width b = 300 μm and the 1 anga 1 = 300 11 m, are the ones initially produced If columns 4 are arranged as strips extending over the entire array with a very small spacing, for example a = 2 to 20 .mu.m, preferably 4 to 8 .mu.m, the gap width c is essentially filled and made effective for the array.

Mit einem Abstand c von beispielsweise 70 ,um und einer Breite b der Elemente 2 von beispielsweise etwa jeweils 300 ,um erhält man eine quadratische Fläche der Wandlerelemente 2 mit einer Länge 1 von beispielsweise etwa 3 mm. Dagegen können die Abstände a in der y-Richtung, d.h. die Zwischenräume zwischen den Wandlerelementen, parallel zur x-Richtung nach Figur 1 durch die Stepeltechnik der Streifen wesentlich geringer gehalten werden. Sie können beispielsweise nur etwa 5 ym betragen und werden im allgemeinen 10 um nicht wesentlich überschreiten Dementsprechend geringer ist die Ausdehnung der Schwinger 21 in der y-Richtung.With a distance c of, for example, 70 .mu.m and a width b of the elements 2 of, for example, approximately 300 .mu.m each, a square area of the transducer elements 2 with a length 1 of, for example, approximately 3 mm is obtained. In contrast, the distances a in the y direction, i.e. the spaces between the transducer elements, parallel to the x-direction according to FIG. 1, are kept considerably smaller by the stacking technique of the strips. For example, they can only be approximately 5 .mu.m and will generally not exceed 10 .mu.m accordingly. The extent of the oscillators 21 in the y-direction is correspondingly smaller.

Die Wandleranordnung nach Fi. 2 kann beispielsweise aus einer Matrix von 324 Schwingern bestehen, die in Spalten 19 und Zeilen 20 angeordnet sind und jeweils eine Matrix von 64 Wandlerelementen enthalten, wie es im Ultraschallschwinger 21 zur Verdeutlichung durch ein Raster angedeutet ist, obwohl die einzelnen Wandlerelemente in der praktischen Ausführungsform der Anordnung nicht sichtbar sind. Die Spalten, von denen nur die erste strichpunktiert angedeutet und mit 19 bezeichnet ist, enthalten dann beispielsweise jeweils 54 Ultraschallschwinger und die Zeilen 20 enthalten jeweils 6 Ultraschallschwinger.The transducer arrangement according to Fi. 2 can consist, for example, of a matrix of 324 transducers, which are arranged in columns 19 and rows 20 and each contain a matrix of 64 transducer elements, as is indicated in the ultrasound transducer 21 for clarification by a grid, although the individual transducer elements in the practical embodiment the arrangement are not visible. The columns, of which only the first one is indicated by dash-dotted lines and designated by 19, then each contain, for example, 54 ultrasound transducers and the rows 20 each contain 6 ultrasound transducers.

Die Wandlerelemente können vorzugsweise aus PZT-Keramik mit niedriger Güte, beispielsweise Q=20, bestehen. Bei Verwendung solcher Breitbandschwinger können die Wandlerelemente der einzelnen Ultraschallschwinger mit zwei oder mehr unterschiedlichen Frequenzen nacheinander angesteuert werden. Damit kann in einfacher Weise die als natürlicher Fokus bezeichnete Nah- Fernfeldgrenze durch elektronische Wahl der Größe des zweidimensionalen Schwingerfeldes optimal in der Tiefe eines zu untersuchenden Objekts verschoben werden. Dies ist besonders vorteilhaft, wenn man elektronisch fokussiert, weil der Fokuspunkt in die Nah- Fernfeldgrenze oder kürzer zu legen ist.The transducer elements can preferably consist of PZT ceramic with a low quality, for example Q = 20. When using such broadband transducers, the transducer elements of the individual ultrasonic transducers can be controlled in succession with two or more different frequencies. The near-far field boundary referred to as the natural focus can thus be optimally shifted in the depth of an object to be examined by electronically selecting the size of the two-dimensional oscillating field. This is particularly advantageous if you focus electronically because the focus point is in the near-far field boundary or shorter.

In der Ausführungsform der Matrix nach Fig. 2 sind die einzelnen Schwinger 21 bis 26 jeder der Zeilen 20 jeweils mit einem getrennten Anschlußleiter versehen, die in der Figur für die Schwinger der Zeile 20 mit 36 bis 41 bezeichnet sind. In gleicher Weise sind die einzelnen Schwinger der übrigen Zeilen jeweils mit einem in der Figur nicht näher bezeichneten Anschlußleiter versehen. In dieser Ausführungsform der Wandleranordnung als Matrix ist sowohl eine elektronische Fokussierung in der x-Richtung als auch eine elektronische Fokussierung in der y-Richtung möglich. Ferner hat diese Ausführungsform den Vorteil, daß eine elektronische Lupe realisiert werden kann. Bei einem ausreichend großen Array und einer ausreichenden Zeilendichte kann beispielsweise in einem ersten Schritt ein Objekt grob, d.h. in einem größeren räumlichen Abstand der Volumenelemente, abgetastet werden. In einem zweiten Schritt kann dann ein erkannter Fehler mit erhöhter Zeilendichte in diesem Bereich und reduzierter Zeilendichte in seiner Umgebung bei konstanter Gesamtzeilenzahl genauer betrachtet werden. Dabei kann der zweidimensional geformte Fokus auf diesen Bereich fixiert werden und eine zusätzliche Optimierung erfolgt dann durch die Wahl der Frequenz. Da gleichzeitig die Umgebung der Fehlerstelle grob abgetastet wird, bleibt stets auch der Überblick erhalten.In the embodiment of the matrix according to FIG. 2, the individual oscillators 21 to 26 of each of the rows 20 are each provided with a separate connecting conductor, which are designated 36 to 41 for the oscillators of the row 20 in the figure. In the same way, the individual transducers of the remaining lines are each provided with a connecting conductor, not shown in the figure. In this embodiment of the transducer arrangement as a matrix, both electronic focusing in the x direction and electronic focusing in the y direction are possible. Furthermore, this embodiment has the advantage that an electronic magnifying glass can be implemented. With a sufficiently large array and a sufficient line density, for example in a first step an object can be rough, i.e. at a larger spatial distance between the volume elements. In a second step, a detected error with increased line density in this area and reduced line density in its surroundings with a constant total number of lines can then be considered. The two-dimensionally shaped focus can be fixed on this area and an additional optimization is then carried out by the choice of frequency. Since at the same time the area around the fault location is roughly scanned, the overview is always retained.

Zum Herstellen einer Ultraschallwandleranordnung nach den Figuren 1 und 2 wird ein flacher Körper aus piezoelektrischem Material, dessen Dicke wenigstens annähernd gleich der Höhe h der Wandlerelemente 2 beträgt, auf beiden Flachseiten metallisiert und dann mit einer Flachseite auf einer Unterlage lösbar befestigt. Anschließend wird der Körper in seiner Längsrichtung, d.h. durch Schnitte parallel zur x-Richtung nach Fig. 1, feingeteilt. Die so als Streifen hergestellten Spalten 4 werden dann auf der anderen Flachseite durch eine gemeinsame Metallauflage 14 miteinander verbunden, beispielsweise mit Hilfe der Lotschicht 12. Diese Metallauflage 14 wird dann auf dem Dämpfungskörper 18 befestigt, beispielsweise mittels der Klebeschicht 16. Dann wird der streifenförmige Körper von seiner ursprünglichen Arbeitsunterlage, die sich jetzt auf der Oberseite der Matrix befindet, gelöst. Anschließend erfolgt die Feinteilung in Querrichtung, d.h. parallel zur y-Richtung, und es entsteht die Matrix der Wandlerelemente 2. Mit der Feinteilung wird jeweils auch die Metallisierung des piezoelektrischen Körpers aufgetrennt und es entstehen an den Stirnflächen der Wandlerelemente die Metallauflagen, von denen die unteren in Figur 1 dargestellt und mit 8 bezeichnet sind.To produce an ultrasonic transducer arrangement according to FIGS. 1 and 2, a flat body made of piezoelectric material, the thickness of which is at least approximately equal to the height h of the transducer elements 2, is metallized on both flat sides and then releasably fastened on a base with one flat side. The body is then moved in its longitudinal direction, i.e. finely divided by cuts parallel to the x-direction according to FIG. 1. The columns 4 thus produced as strips are then connected to one another on the other flat side by a common metal support 14, for example with the aid of the solder layer 12. This metal support 14 is then attached to the damping body 18, for example by means of the adhesive layer 16. Then the strip-like body from his original work pad, which is now on top of the matrix. Then the fine division takes place in the transverse direction, i.e. parallel to the y-direction, and the matrix of the transducer elements 2 is created. With the fine division, the metallization of the piezoelectric body is also separated in each case and the metal supports are formed on the end faces of the transducer elements, the lower ones of which are shown in FIG. 1 and designated by 8 are.

Die als gemeinsamer elektrischer Anschlußleiter für alle Wandlerelemente dienende Metallauflage 14 kann vorzugsweise aus der Metallisierung einer Kunststofffolie, insbesondere aus Polyimid (Kapton), bestehen, deren Dicke beispielsweise etwa 2 bis 10,um betragen kann.The metal pad 14 serving as a common electrical connection conductor for all transducer elements can preferably consist of the metallization of a plastic film, in particular of polyimide (Kapton), the thickness of which can be, for example, approximately 2 to 10 μm.

Die in Figur 2 zur Verdeutlichung vergrößert dargestellten und nicht näher bezeichneten Abstände zwischen den einzelnen Schwingern 21 bis 26 und 31 bis 35 können den Sägespalten der Unterteilung entsprechen. In der praktischen Ausführungsform werden diese Abstände vorzugsweise ebenso klein gehalten, beispielsweise durch die Stapteltechnik, wie die Abstände zwischen den einzelnen Wandlerelementen 2 der Ultraschallschwinger.The distances between the individual oscillators 21 to 26 and 31 to 35, which are shown enlarged in FIG. 2 for clarification and not described in greater detail, can correspond to the sawing gaps of the subdivision. In the practical embodiment, these distances are preferably kept as small, for example by stacking technology, as the distances between the individual transducer elements 2 of the ultrasonic transducers.

Außerdem kann die Matrix aus Wandlerelementen auch dadurch hergestellt werden, daß der flache Körper aus piezoelektrischem Material, der auf beiden Flachseiten metallisiert ist, zunächst in Streifen mit der Länge 1 der Wandlerelemente zerlegt und anschließend diese Streifen in Abschnitte aufgetrennt werden, deren Länge gleich der Breite b der Wandlerelemente 2 ist. Dann werden die so hergestellten säulenförmigen Wandlerelemente 2 mit ihren Trennflächen sowohl in der x- als auch in der y-Richtung mit sehr geringem Abstand aneinandergereiht und auf einer Metallunterlage befestigt, die dann auf den Dämpfungskörper aufgebracht wird. Mit dieser Stapeltechnik kann man auch noch die Zwischenräume c der Wandlerelemente 2 nach Figur 1 sehr gering halten.In addition, the matrix of transducer elements can also be produced in that the flat body made of piezoelectric material, which is metallized on both flat sides, first in strips with a length of 1 Transducer elements disassembled and then these strips are separated into sections, the length of which is equal to the width b of the transducer elements 2. Then the columnar transducer elements 2 produced in this way are lined up with their separating surfaces both in the x- and in the y-direction at a very short distance and fastened on a metal base, which is then applied to the damping body. With this stacking technique, the spaces c between the transducer elements 2 according to FIG. 1 can also be kept very small.

Bei der Herstellung der Ultraschallschwinger nach diesem Verfahren ist es zweckmäßig, eine der Metallauflagen an den Stirnflächen der Wandlerelemente 2 aus ferromagnetischem Material herzustellen. Dann kann man die einzelnen Wandlerelemente 2 mit Hilfe magnetischer Kräfte zur Metallauflage 14 übertragen. Die einzelnen bereits fertigen Wandlerelemente 2 können aber beispielsweise auch mit Hilfe eines Klebebandes übertragen werden.In the manufacture of the ultrasonic vibrators using this method, it is expedient to manufacture one of the metal supports on the end faces of the transducer elements 2 from ferromagnetic material. The individual transducer elements 2 can then be transferred to the metal support 14 with the aid of magnetic forces. However, the individual transducer elements 2 that are already finished can also be transferred, for example, with the aid of an adhesive tape.

Die Wandlerelemente 2 können ferner auf einer dehnbaren Arbeitsunterlage als matrix unmittelbar aneinandergereiht werden. Anschließend wird der zur Entkoppelung erforderliche Mindestabstand durch Dehnen der Arbeitsunterlage hergestellt. Unter Umständen kann es zweckmäßig sein, die als gemeinsamer elektrischer Kontakt dienende Metallauflage 14 oder auch die Metallisierung einer Kunststoffolie als Arbeitsunterlage wählen.The transducer elements 2 can also be strung together directly on a stretchable work surface as a matrix. The minimum distance required for decoupling is then established by stretching the work surface. Under certain circumstances, it may be expedient to choose the metal pad 14 serving as a common electrical contact or also the metallization of a plastic film as the working base.

In der Wandleranordnung nach Figur 2 mit getrennter Ansteuerung der einzelnen Ultraschallschwinger werden die Wandlerelemente 2 nach Fig. 3 auf einer Stirnfläche mit einem gemeinsamen Anschlußleiter, der Metallauflage 14, versehen, während auf der gegenüberliegenden Stirnfläche nur die Wandlerelemente der Matrix des betreffenden Ultraschallschwingers 21 mit einem Anschlußleiter versehen werden, der vorzugsweise in Form einer Leiterbahn ausgeführt werden kann. Zu diesem Zweck wird eine gemeinsame Abdeckung 42 aus Kunststoff, insbesondere Polyimid (Kapton), auf ihrer unteren Flachseite jeweils im Bereich der Matrix des Schwingers 21 mit einer Metallisierung 44 versehen, die beispielsweise aus einer Chrom-Silber-Legierung bestehen kann. Diese Metallisierung kann vorzugsweise auf die Folie aufgedampft werden. Im Bereich des Ultraschallschwingers 21 erhält die Abdeckung 42 eine Öffnung 46. Anschließend wird die oberen Flachseite der Abdeckung 42 mit Leiterbahnen versehen, welche die Anschlußleiter 36, 37 und 38 darstellen. Jeweils eine dieser Leiterbahnen führt zu einer der Öffnungen in der Abdeckung 42 und stellt damit die elektrische Verbindung mit einer nicht näher dargestellten Steuerleitung her. Die Metallauflage 44 kann dann mit einer Lotschicht 52 versehen werden, die vorzugsweise aufgedampft werden kann und mit Hilfe dieser Lotschicht 52 wird die Abdeckung 42 mit den Anschlußleitern 315 bis 38 auf den Metallauflagen 48 der Wandlerelemente 2 befestigt. Anstelle der Lotschicht 52 kann zur Befestigung der Abdeckung 42 mit den Leiterbahnen auf den Wandlerelementen 2 beispielsweise auch ein elektrisch leitender Kleber, ein sogenannter Leitkleber, verwendet werden.In the transducer arrangement according to FIG. 2 with separate control of the individual ultrasonic vibrators, the transducer elements 2 according to FIG. 3 are provided on one end face with a common connecting conductor, the metal support 14, while on the opposite end face only the transducer elements of the matrix of the relevant ultrasonic vibrator 21 are provided with a Connection conductor are provided, which can preferably be carried out in the form of a conductor track. For this purpose, a common cover 42 made of plastic, in particular polyimide (Kapton), is provided on its lower flat side in the region of the matrix of the vibrator 21 with a metallization 44, which can consist, for example, of a chrome-silver alloy. This metallization can preferably be evaporated onto the film. In the area of the ultrasonic vibrator 21, the cover 42 is provided with an opening 46. Then the upper flat side of the cover 42 is provided with conductor tracks which represent the connecting conductors 36, 37 and 38. In each case one of these conductor tracks leads to one of the openings in the cover 42 and thus establishes the electrical connection with a control line (not shown in more detail). The metal pad 44 can then be provided with a solder layer 52, which can preferably be vapor-deposited, and with the aid of this solder layer 52, the cover 42 with the connecting conductors 315 to 38 is fastened on the metal pads 48 of the transducer elements 2. Instead of the solder layer 52, for example an electrically conductive adhesive, a so-called conductive adhesive, can also be used to fasten the cover 42 with the conductor tracks on the transducer elements 2.

Zum Herstellen der Leiterbahnen 36 bis 38 kann beispielsweise die gesamte oberen Flachseite der Abdeckung 42 mit einer Metallauflage versehen werden, aus der dann beispielsweise mittels Photoätztechnik die als Anschlußleiter nicht benötigten Teile entfernt werden. Außerdem können die Leiterbahnen der Anschlußleiter 36 bis 38 auch in Maskentechnik auf die Oberfläche der Abdeckung 42 aufgebracht werden.To produce the conductor tracks 36 to 38, for example, the entire upper flat side of the cover 42 can be provided with a metal coating, from which the parts which are not required as connecting leads are then removed, for example by means of photoetching technology. In addition, the conductor tracks of the connecting conductors 36 to 38 can also be applied to the surface of the cover 42 using mask technology.

In der Ausführungsform der Ultraschallwandleranordnung mit einzeln steuerbaren Schwingern nach Figur 2, die jeweils in der x-und y-Richtung feingeteilt sind, können durch die Steuerung die Schwinger mehrerer Zeilen, beispielsweise die Schwinger von sechs aufeinanderfolgenden Zeilen 20, 30, 40, 50, 60 und 70 zu einer Schwingermatrix zusammengefaßt werden. Diese Matrix kann zum Aufbau einer Bildzeilenfolge linear in der x-Richtung über das gesamte Schwingerfeld gescant werden. Damit kann sowohl in x- wie in y-Richtung durch Laufzeitverzögerung der Echoimpulse oder der Echo- und Sendeimpulse eine elektronische Fokussierung zusätzlich in Querrichtung erreicht werden.In the embodiment of the ultrasonic transducer arrangement with individually controllable oscillators according to FIG. 2, which are each finely divided in the x and y directions, the oscillators of several lines, for example the oscillators of six successive lines 20, 30, 40, 50, 60 and 70 can be combined into a transducer matrix. This matrix can be scanned linearly in the x direction over the entire oscillator field in order to build up an image line sequence. This means that electronic focusing can also be achieved in the transverse direction in both the x and y directions by delaying the delay of the echo pulses or the echo and transmit pulses.

Im Ausführungsbeispiel ist der gemeinsame, als Gegenkontakt dienende Anschlußleiter 14 auf der Unterseite der Wandlerelemente 2 angeordnet. Dieser gemeinsame Gegenkontakt kann aber auch auf der Oberseite der Wandlerelemente 2 vorgesehen sein. In dieser Ausführungsform werden dann die Anschlußleiter für die einzelnen Ultraschallschwinger zwischen den Wandlerelementen und dem Dämpfungskörper 18 angeordnet.In the exemplary embodiment, the common connecting conductor 14 serving as counter contact is arranged on the underside of the converter elements 2. This common counter contact can also be provided on the top of the transducer elements 2. In this embodiment, the connecting conductors for the individual ultrasonic vibrators are then arranged between the transducer elements and the damping body 18.

Claims (12)

1. An ultrasonic transducer arrangement comprising a matrix of separately controlled ultrasonic transducers (21 to 26 and 31 to 35), each of which consists of a matrix of column- like transducer elements (2) which are acoustically separately controlled and electrically commonly controlled, characterised in that all the ultrasonic transducers (21 to 26 and 31 to 35) are provided at one end face with a common electrical connecting conductor (14), and that at the other end face, only the transducer elements (2) in each case of the individual ultrasonic transducers (21 to 26 and 31 to 35) are provided with a metal coating (44) as a common electrically conductive connection; and that a covering (42) of synthetic resin material is provided which has a respective opening (46) in the region of each of the ultrasonic transducers (21 to 26 and 31 to 35), and is provided with the metal coating (44) on one flat face thereof, and, on the other' flat face, with conductor paths which serve as connecting conductors (36 to 41) for the transducer elements (2) of one of the ultrasonic, transducers (21 to 26 and 31 to 35) in each case, and which conductor paths are each connected through one of the openings (46) with the metal coating (44) which is assigned to the corresponding ultrasonic transducer (21 to 26 and 31 to 35).
2. An ultrasonic transducer arrangement according to Claim 1, characterised in that an electrically insulating intermediate layer is arranged between the individual transducer elements (2).
3. A process for the production of an ultrasonic transducer arrangement according to Claim 1 or Claim 2, characterised in that a flat body made of piezoelectric material, the thickness of which is at least approximately equal to the height (h) of the transducer elements (2), is metallised on both flat faces (8, 48), and is then detachably secured at one flat face to a working base and subsequently finely divided transversally to its longitudinal direction; that the strips so produced are then electrically connected to one another at their other flat face by the common metal coating (14); that the strips are then removed from the working base and attached by their metal coating (14) to a damping body (18); and that the strips are then finely divided parallel to its longitudinal direction.
4. A process according to Claim 3, characterised in that a metallised synthetic resin film is used as the metal coating (14).
5. A process according to Claim 3, characterised in that the strips produced from the flat body are aligned with their cut surfaces at a very short distance apart and are then provided at one end face with the common metal coating (14).
6. A process for the production of an ultrasonic transducer arrangement according to Claim 1 or Claim 2, characterised in that a flat body made of piezoelectric material the thickness of which is at least approximately equal to the height (h) of the transducer elements (2), is metallized on both flat faces (8, 48) and is then divided into strips whose width is equal to the length (I) of the transducer elements (2); that the strips are then divided into sections whose length is equal to the width (b) of the transducer elements (2); that the transducer elements (2) produced in this way are transferred to the common metal coating (14) where they are arranged beside one another as a matrix with their cut surfaces spaced apart at a very short interval (a, c), and are then connected to the common metal coating (14) which is attached to a damping body (18); and that the free end surfaces of the transducer elements (2) of the individual transducers (21 to 26 and 31 to 35) are there provided with the common electric connecting conductor (36 to 41).
7. A process according to Claim 6, characterised in that the transducer elements (2) are transferred with the assistance of an adhesive strip.
8. A process according to one of Claims 3 to 7, characterised in that the covering (42) of the free end faces of the transducer elements (2) is provided with one of the openings (46) in the region of each of the individual ultrasonic transducers and then on one flat side in these regions is provided with the metal coating (44); that the opposite flat face is then provided with conductor paths which serve as dielectric connecting conductors (36 to 41) and of which one (e.g. 36) is connected through one of the openings (46) to the metal coating (44) of the assigned ultrasonic transducer (21 to 26 and 31 to 35), which coating is electrically conductively connected to the end faces of the transducer elements (2); and that the opposite flat face is then covered by a matching coating (54) (Figure 3).
9. A process according to Claim 8, characterised in that the electrically conductive connection between the metal coating (44) and the transducer elements (2) is produced by a solder coating (52).
10. A process according to Claim 9, characterised in that the solder coating (52) is produced by vapour deposition.
11. A process according to Claim 8, characterised in that the electrically conductive connection between the metal coating (44) and the transducer elements (2) is produced by a conductive adhesive.
12. A process according to Claim 8, characterised in that the conductor paths (36 to 41 ) are produced by metallising the entire flat face of the covering (42), whereafter the unrequired parts of the metal coating are removed by a photo-etching technique.
EP80103708A 1979-07-20 1980-06-30 Ultrasonic transducer assembly and process for its production Expired EP0025092B1 (en)

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AT80103708T ATE7083T1 (en) 1979-07-20 1980-06-30 ULTRASONIC TRANSDUCER ARRANGEMENT AND METHOD OF PRODUCTION.

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DE19792929541 DE2929541A1 (en) 1979-07-20 1979-07-20 ULTRASONIC CONVERTER ARRANGEMENT
DE2929541 1979-07-20

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JPS5620400A (en) 1981-02-25
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EP0025092A1 (en) 1981-03-18
US4371805A (en) 1983-02-01
DE2929541A1 (en) 1981-02-05

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