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EP0012920B1 - Luminescent screen for picture display tubes and method of its manufacture - Google Patents

Luminescent screen for picture display tubes and method of its manufacture Download PDF

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Publication number
EP0012920B1
EP0012920B1 EP79105078A EP79105078A EP0012920B1 EP 0012920 B1 EP0012920 B1 EP 0012920B1 EP 79105078 A EP79105078 A EP 79105078A EP 79105078 A EP79105078 A EP 79105078A EP 0012920 B1 EP0012920 B1 EP 0012920B1
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EP
European Patent Office
Prior art keywords
layer
metal
recesses
contrast border
screen plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP79105078A
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German (de)
French (fr)
Other versions
EP0012920A1 (en
Inventor
Manfred Dr. Phil. Kobale
Hans Peter Dr. Rer. Nat. Lorenz
Kaspar Dr. Rer. Nat. Weingand
Rolf Dr. Rer. Nat. Wengert
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Siemens AG
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Siemens AG
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Publication date
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Priority to AT79105078T priority Critical patent/ATE2033T1/en
Publication of EP0012920A1 publication Critical patent/EP0012920A1/en
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Publication of EP0012920B1 publication Critical patent/EP0012920B1/en
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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/18Luminescent screens
    • H01J29/30Luminescent screens with luminescent material discontinuously arranged, e.g. in dots, in lines
    • H01J29/32Luminescent screens with luminescent material discontinuously arranged, e.g. in dots, in lines with adjacent dots or lines of different luminescent material, e.g. for colour television
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/18Luminescent screens
    • H01J29/24Supports for luminescent material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/22Applying luminescent coatings
    • H01J9/227Applying luminescent coatings with luminescent material discontinuously arranged, e.g. in dots or lines
    • H01J9/2271Applying luminescent coatings with luminescent material discontinuously arranged, e.g. in dots or lines by photographic processes

Definitions

  • the invention relates to a fluorescent screen for display tubes according to the preamble of patent claim 1.
  • picture display tubes in particular in picture display devices with a flat screen, such as are known, for example, according to the principle of gas discharge display as a plasma panel or plasma display and are described in DE-OS 24 12 869, there is a single or multi-colored finely screened luminescent screen with a high Luminous efficacy required.
  • a plasma serves as the actual cathode, from which an electron beam is drawn via a control perforated plate with matrix control for each illuminated spot to be excited. Compared to the classic.
  • Such a metal layer would also be desirable for the phosphor layer at the luminous points as a protective layer against mechanical loads, in particular when building a flat screen, where spacers are necessary between the fluorescent screen and the control perforated plate. For the reasons mentioned above, however, it would have to be so thin that it could no longer perform these protective functions.
  • the US-PS 27 05 765 describes a fluorescent screen with the features of the preamble of claim 1.
  • electrical control lines which can consist of a silver layer, which is applied to previously made webs between luminous dots.
  • the webs serve as a contrast border.
  • a separate contrast border layer is not suggested by this US patent.
  • the graphite layer described there only serves to carry current in the case of galvanic metallization.
  • the silver specified as the preferred metal is also highly reflective through the usually very thin graphite layer, the contrast border is thereby deteriorated rather than improved.
  • the present invention has for its object to construct a fluorescent screen so that the luminous dots have a sufficiently high luminous efficacy even without a metal mirror and that there is the possibility of supporting spacers on the fluorescent screen without endangering the contrast border or fluorescent layers.
  • the active fluorescent area can be increased considerably.
  • the electron beam hits more phosphor particles.
  • the amount of light emitted towards the front becomes significantly larger per luminous point than if only one fluorescent surface corresponding to the luminous point and only lying in the luminous point plane is used.
  • primary electrons are used.
  • secondary electrons i.e. For example, electrons reflected at the plane of the red dot can hit fluorescent particles on the walls of the depressions and contribute to better light output.
  • the illuminated dots are largely separated from one another. If the depressions are large enough, electrons scattered from a light spot can hardly reach an adjacent light spot. This decoupling of the luminous dots significantly improves the contrast and color purity compared to purely flat screen arrangements.
  • a glass solder layer as Kon Trastumrandung is a particularly vaporized contrast border layer as a carrier layer for spacers much more stable. It is harder and adheres better.
  • contrast border layer Another function of the contrast border layer can be added if it is electrically conductive and serves as a carrier for the fluorescent screen potential. Then there is no need to provide a separate anode layer.
  • the composition of metal and dielectric changes in the course of the layer thickness, with first pure dielectric being applied, then more and more metal being added with a decreasing dielectric component and finally a pure metallic final layer is applied.
  • composition of metal and dielectric changes in the course of the layer thickness, that layers of dielectric and layers of metal are applied alternately with preferably varying layer thicknesses and the last layer is metallic.
  • the metallic components ensure electrical conductivity. Due to the fine distribution of these metallic components, the density of which increases with increasing thickness as viewed by the luminescent screen, the contrasting border layer absorbs light from the viewer side very strongly without reflecting metal. The last, purely metallic, part of the layer additionally makes the layer opaque and increases the absorption, so that even very thin layers appear dark or black.
  • the metal component consists of nickel, copper, platinum or gold.
  • the contrast border layers and the depressions under the phosphor layer are covered with a continuous electrically conductive potential layer, which then serves as an anode layer. This does not affect the resilience above the contrast border layer for the applied spacer.
  • a screen glass plate which is, for example, the front window of a gas discharge display in the form of a flat screen.
  • the screen glass plate 1 is shown cut from the side. At the bottom is the viewer side, at the top the inside of the gas discharge display device. The spacers then placed on top, the perforated control disk supported on it and the entire rear part of the gas discharge display device, as seen by the viewer, are omitted.
  • depressions 2 On the inside of the screen glass plate 1 there are depressions 2 with an approximately rectangular cross section. The bottoms of these depressions are the illuminated dot areas of the fluorescent screen and are accordingly attached in the same grid. A contrast border layer 3 is located on the remaining webs. The bottoms and walls of the depressions 2 and the contrast border layer 3 are covered by a potential layer 4. In the recesses 2 on the floor and pulled up on the walls, there is a phosphor layer 5 above the potential layer 4. The electrons accelerated in the direction of the fluorescent screen are indicated by arrows.
  • the recesses 2 are etched first through the remaining contrast border layer 2 in the windows and then into the screen glass plate 1, for example with hydrofluoric acid or with a mixture of hydrofluoric acid and sulfuric acid. After this etching process, the photoresist is removed and the screen glass plate 1, which is now provided with the depressions 2, is cleaned with the aid of an aqueous ultrasound bath.
  • the potential layer 4 made of indium oxide (In 2 0 3 ) is sputtered on. This is followed, for example, by spraying the floors and walls of the depressions 2 with the phosphor layer 5, so that this covers the bottom of the depressions and is pulled up on the walls thereof.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Abstract

A luminescent screen for flat image display devices, having improved light efficiency comprises a glass screen (1) provided on its inner surface with a pattern of recesses (2) corresponding to a desired luminescent dot pattern with luminescent dot surfaces (5) positioned not only along the bottom of such recesses but also along the upwardly extending recess walls and a contrasting border layer (3) is positioned on the land areas between each recess. In producing such screens, the contrasting border layer is utilized as an etch mask for the recesses and as an application mask for the luminescent material.

Description

Die Erfindung betrifft einen Leuchtschirm für Bildanzeigeröhren nach dem Oberbegriff des Patentanspruchs 1.The invention relates to a fluorescent screen for display tubes according to the preamble of patent claim 1.

Bei Bildanzeigeröhren, insbesondere bei Bildanzeigegeräten mit flachem Bildschirm, wie sie beispielsweise nach dem Prinzip der Gasentladungsanzeige als Plasma-Panel oder Plasma-Display bekannt und in der DE-OS 24 12 869 beschrieben sind, ist ein ein- oder mehrfarbig fein gerasterter Leuchtschirm mit hoher Lichtausbeute erforderlich. Als eigentliche Kathode dient ein Plasma, aus dem über eine Steuerlochplatte mit Matrixansteuerung für jeden anzuregenden Leuchtpunkt ein Elektronenstrahl gezogen wird. Im Vergleich zur klassischen.In picture display tubes, in particular in picture display devices with a flat screen, such as are known, for example, according to the principle of gas discharge display as a plasma panel or plasma display and are described in DE-OS 24 12 869, there is a single or multi-colored finely screened luminescent screen with a high Luminous efficacy required. A plasma serves as the actual cathode, from which an electron beam is drawn via a control perforated plate with matrix control for each illuminated spot to be excited. Compared to the classic.

Kathodenstrahl-Bildröhre, wo ein einziger Elektronenstrahl sämtliche Leuchtpunkte erreichen muß und bei den dadurch erforderlichen Ausmaßen der Bildröhre sehr hohe Beschleunigungen erfahren kann, sind die Elektronenstrahlen bei Gasentladungsanzeigegeräten niederenergetisch, bedingt durch die Gasfüllung und durch die flache Bauweise. Deshalb ist es äußerst wichtig, beim Umsetzen der Elektronenenergie in Lichtenergie oder auch bei einer Lichtsteuerung der Leuchtpunkte etwa durch UV-Licht eine hohe Lichtausbeute zu bekommen.Cathode-ray picture tubes, where a single electron beam has to reach all the luminous points and can experience very high accelerations with the dimensions of the picture tube required as a result, the electron beams in gas discharge display devices are low-energy due to the gas filling and the flat design. It is therefore extremely important to get a high luminous efficacy when converting the electron energy into light energy or also when controlling the light points with UV light, for example.

Zu diesem Zweck ist es schon bei der klassischen Kathodenstrahlröhre bekannt und beispielsweise in der US-PS 3 858 083 beschrieben, die Leuchtstoffpunkte auf der Innenseite mit einer spiegelnden Metallschicht zu überziehen. Das vom angeregten Leuchtstoff nach hinten abgestrahlte Licht wird an dieser Metallschicht größtenteils reflektiert und dem nach vorn abgestrahlten Licht zugeschlagen. An dieser Metallschicht werden aber auch die anregenden Elektronen geschwächt, was bei den hochenergetischen Kathodenstrahlelektronen keine große Rolle spielt, aber bei den niederenergetischen Elektronen der flachen Gasentladungsanzeigegeräte die Anwendung solcher Metallspiegel erschwert. Eine solche Metallschicht wäre zwar für die Leuchtstoffschicht an den Leuchtpunkten auch als Schutzschicht gegen mechanische Belastungen erwünscht, insbesondere beim Aufbau eines flachen Bildschirms, wo zwischen dem Leuchtschirm und der Steuerlochplatte Abstandshalter notwendig sind. Sie müßte aber aus den obengenannten Gründen so dünn sein, daß sie diese Schutzfunktionen nicht mehr erfüllen könnte.For this purpose, it is already known in the classic cathode ray tube and described, for example, in US Pat. No. 3,858,083, to coat the phosphor dots on the inside with a reflective metal layer. Most of the light emitted by the excited phosphor is reflected by this metal layer and added to the light emitted to the front. However, the exciting electrons are also weakened on this metal layer, which does not play a major role in the case of the high-energy cathode-ray electrons, but makes it difficult to use such metal mirrors in the case of the low-energy electrons of the flat gas discharge display devices. Such a metal layer would also be desirable for the phosphor layer at the luminous points as a protective layer against mechanical loads, in particular when building a flat screen, where spacers are necessary between the fluorescent screen and the control perforated plate. For the reasons mentioned above, however, it would have to be so thin that it could no longer perform these protective functions.

Aus der genannten US-PS 3 858 083 ist überdies bekannt, die Leuchtpunkte zur Kontrasterhöhung voneinander durch undurchsichtige Umrandungen abzusetzen. Im Zusammenhang mit flachen Bildanzeigegeräten ist dies als "Schwarzumrandung" auch in der älteren Patentanmeldung P 28 06 436 beschrieben. Unter "Kontrastumrandung" soll hier eine solche undurchsichtige Umrandung der einzelnen Leuchtpunktflächen verstanden werden. Sie besteht aus körnigem Glaslot oder aus metallorganischen Verbindungen, die einem Temperprozeß unterzogen sind. Wieder unter dem Aspekt von notwendigen Abstandshaltern sind solche Kontrastumrandungsschichten als Abstützung für die Abstandshalterungen ungünstig. Körnige Unterlagen können den mechanischen Belastungen nicht genügend standhalten.From the above-mentioned US Pat. No. 3,858,083, it is also known to separate the luminous dots from one another by means of opaque borders in order to increase the contrast. In connection with flat image display devices, this is also described as a "black border" in the earlier patent application P 28 06 436. “Contrast border” is to be understood here to mean such an opaque border of the individual illuminated dot areas. It consists of granular glass solder or organometallic compounds that are subjected to an annealing process. Again, from the point of view of necessary spacers, such contrast border layers are unfavorable as supports for the spacers. Grainy documents cannot withstand the mechanical loads sufficiently.

Die US-PS 27 05 765 beschreibt einen Leuchtschirm mit den Merkmalen des Oberbegriffs von Anspruch 1. Dort sind elektrische Ansteuerungsleitungen beschrieben, welche aus einer Silberschicht bestehen können, die auf vorher hergestellte Stege zwischen Leuchtpunkten aufgebracht ist.The US-PS 27 05 765 describes a fluorescent screen with the features of the preamble of claim 1. There are described electrical control lines, which can consist of a silver layer, which is applied to previously made webs between luminous dots.

Als Kontrastumrandung dienen dort die Stege. Eine gesonderte Kontrastumrandungsschicht ist durch diese US-PS nicht nahegelegt. Die dort beschriebene Graphitschicht dient nur zur Stromführung im Falle der galvanischen Metallisierung. Insbesondere das als bevorzugtes Metall angegebene Silber ist auch durch die üblicherweise sehr dünne Graphitschicht hindurch stark reflektierend, die Kontrastumrandung wird dadurch eher verschlechtert als verbessert.The webs serve as a contrast border. A separate contrast border layer is not suggested by this US patent. The graphite layer described there only serves to carry current in the case of galvanic metallization. In particular, the silver specified as the preferred metal is also highly reflective through the usually very thin graphite layer, the contrast border is thereby deteriorated rather than improved.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, einen Leuchtschirm so aufzubauen, daß die Leuchtpunkte auch ohne Metallspiegel eine genügend hohe Lichtausbeute haben und daß die Möglichkeit besteht, Abstandshalterungen auf dem Leuchtschirm abzustützen, ohne Kontrastumrandung oder Leuchtstoffschichten zu gefährden.The present invention has for its object to construct a fluorescent screen so that the luminous dots have a sufficiently high luminous efficacy even without a metal mirror and that there is the possibility of supporting spacers on the fluorescent screen without endangering the contrast border or fluorescent layers.

Zur Lösung dieser Aufgabe werden bei einem Leuchtschirm gemäß dem Oberbegriff des Patentanspruchs 1 die Merkmale des Kennzeichens des Anspruchs 1 vorgeschlagen.To solve this problem, the features of the characterizing part of claim 1 are proposed for a fluorescent screen according to the preamble of patent claim 1.

Mit Hilfe des erfindungsgemäßen Leuchtschirms läßt sich die aktive Leuchtstoffläche erheblich vergrößern. Der Elektronenstrahl trifft auf mehr Leuchtstoffpartikel. Die nach vorn abgestrahlte Lichtsumme wird pro Leuchtpunkt wesentlich größer, als wenn nur eine dem Leuchtpunkt entsprechende und nur in der Leuchtpunktebene liegende Leuchtstofffläche verwendet wird. Nicht nur primäre Elektronen werden ausgenutzt. Auch Sekundärelektronen, d.h. beispielsweise an der Leuchtpunktebene reflektierte Elektronen können Leuchtstoffpartikel auf den Wänden der Vertiefungen treffen und zur besseren Lichtausbeute beitragen.With the aid of the fluorescent screen according to the invention, the active fluorescent area can be increased considerably. The electron beam hits more phosphor particles. The amount of light emitted towards the front becomes significantly larger per luminous point than if only one fluorescent surface corresponding to the luminous point and only lying in the luminous point plane is used. Not only primary electrons are used. Also secondary electrons, i.e. For example, electrons reflected at the plane of the red dot can hit fluorescent particles on the walls of the depressions and contribute to better light output.

Die Leuchtpunkte sind weitgehend voneinander getrennt. Bei genügend großen Vertiefungen können an einem Leuchtpunkt gestreut reflektierte Elektronen kaum auf einen benachbarten Leuchtpunkt gelangen. Durch diese Entkopplung der Leuchtpunkte werden Kontrast und Farbreinheit gegenüber rein flächigen Schirmanordnungen erheblich verbessert.The illuminated dots are largely separated from one another. If the depressions are large enough, electrons scattered from a light spot can hardly reach an adjacent light spot. This decoupling of the luminous dots significantly improves the contrast and color purity compared to purely flat screen arrangements.

Gegenüber einer Glaslotschicht als Kontrastumrandung ist eine insbesondere aufgedampfte Kontrastumrandungsschicht als Trägerschicht für Abstandshalterungen wesentlich stabiler. Sie ist härter und haftet besser.Opposite a glass solder layer as Kon Trastumrandung is a particularly vaporized contrast border layer as a carrier layer for spacers much more stable. It is harder and adheres better.

Darüber hinaus bietet eine solche Kontrastumrandungsschicht die Möglichkeit, in mehreren Funktionen beim Schirmaufbau verwendet zu werden. Zu diesem Zweck werden bei einem Verfahren zur Schirmherstellung erfindungsgemäß folgende. Schritte vorgeschlagen:

  • 1) die Schirmglasplatte wird auf ihrer Innenseite mit einer dunkel, insbesondere schwarz, gefärbten Kontrastumrandungsschicht aus einer Mischung von Metall mit Dielektrikum versehnen;
  • 2) in die Kontrastumrandungsschicht werden entsprechend dem Leuchtpunktraster Fenster geätzt;
  • 3) die so gerasterte Kontrastumrandungsschicht dient als Maske für das Ätzen der Vertiefungen in der Schirmglasplatte;
  • 4) die Kontrastumrandungsschicht dient als Maske für das Einbringen der Leuchtstoffschicht in die Vertiefungen, insbesondere durch Aufsprühen.
In addition, such a contrast border layer offers the possibility of being used in several functions when building the screen. For this purpose, according to the invention, the following are used in a method for screen manufacture. Steps suggested:
  • 1) the inside of the screen glass plate is covered with a dark, in particular black, contrasting border layer made of a mixture of metal and dielectric;
  • 2) windows are etched into the contrast border layer in accordance with the red dot grid;
  • 3) the contrast border layer thus rasterized serves as a mask for the etching of the depressions in the screen glass plate;
  • 4) the contrast border layer serves as a mask for introducing the phosphor layer into the depressions, in particular by spraying.

Diese Mehrfachfunktion der Kontrastumrandungsschicht verbilligt die Herstellung erheblich.This multiple function of the contrast border layer makes the manufacture considerably cheaper.

Eine weitere Funktion der Kontrastumrandungsschicht kann noch hinzukommen, wenn sie elektrisch leitend ist und als Träger für das Leuchtschirmpotential dient. Dann erübrigt sich das Vorsehen einer eigenen Anodenschicht.Another function of the contrast border layer can be added if it is electrically conductive and serves as a carrier for the fluorescent screen potential. Then there is no need to provide a separate anode layer.

Zu dieser erweiterten Funktion der Kontrastumrandungsschicht wird als Weiterbildung des erfindungsgemäßen Herstellungsverfahrens vorgeschlagen, daß sich die Zusammensetzung aus Metall und Dielektrikum im Verlauf der Schichtdicke ändert, wobei zunächst reines Dielektrikum aufgebracht wird, dann immer mehr Metall zugesetzt wird mit abnehmendem Dielektrikumanteil und schließlich eine reine metallische Abschlußschicht aufgebracht wird.For this extended function of the contrast border layer, it is proposed as a further development of the production method according to the invention that the composition of metal and dielectric changes in the course of the layer thickness, with first pure dielectric being applied, then more and more metal being added with a decreasing dielectric component and finally a pure metallic final layer is applied.

Eine weitere Möglichkeit besteht darin, wobei sich die Zusammensetzung aus Metall und Dielektrikum im Verlauf der Schichtdicke ändert, daß Schichten aus Dielektrikum und Schichten aus Metall abwechselnd mit vorzugsweise variierenden Schichtdicken aufgebracht werden und die letzte Schicht metallisch ist.Another possibility consists in that the composition of metal and dielectric changes in the course of the layer thickness, that layers of dielectric and layers of metal are applied alternately with preferably varying layer thicknesses and the last layer is metallic.

Die metallischen Bestandteile sorgen für die elektrische Leitfähigkeit. Durch die feine Verteilung dieser metallischen Bestandteile, deren Dichte mit zunehmender Dicke vom Leuchtschirmbetrachter her gesehen zunimmt, absorbiert die Kontrastumrandungsschicht Licht von der Betrachterseite sehr stark, ohne metallisch zu reflektieren. Der letzte, rein metallische, Schichtteil macht die Schicht zusätzlich undurchsichtig und erhöht noch die Absorption, so daß schon sehr dünne Schichten dunkel bzw. schwarz erscheinen.The metallic components ensure electrical conductivity. Due to the fine distribution of these metallic components, the density of which increases with increasing thickness as viewed by the luminescent screen, the contrasting border layer absorbs light from the viewer side very strongly without reflecting metal. The last, purely metallic, part of the layer additionally makes the layer opaque and increases the absorption, so that even very thin layers appear dark or black.

Für die beim Herstellungsverfahren anschließende Funktion der Kontrastumrandungsschicht als Maske für das Ätzen des Schirmglases ist vorteilhaft, wenn die Metallkomponente aus Nickel, Kupfer, Platin oder Gold besteht.For the subsequent function of the contrast border layer as a mask for the etching of the screen glass during the production process, it is advantageous if the metal component consists of nickel, copper, platinum or gold.

Nach einer Weiterbildung ist vorgesehen, die Kontrastumrandungsschichten und die Vertiefungen unter der Leuchtstoffschicht mit einer durchgehenden elektrisch leitenden Potentialschicht zu überziehen, die dann als Anodenschicht dient. Die Belastbarkeit über der Kontrastumrandungsschicht für aufgebrachte Abstandshalterung ist dadurch nicht beeinträchtigt.According to a further development, it is provided that the contrast border layers and the depressions under the phosphor layer are covered with a continuous electrically conductive potential layer, which then serves as an anode layer. This does not affect the resilience above the contrast border layer for the applied spacer.

Anhand eines in der Zeichnung dargestellten Ausführungsbeispiels soll die Erfindung näher erläutert werden.The invention will be explained in more detail with reference to an embodiment shown in the drawing.

Mit 1 ist eine Schirmglasplatte bezeichnet, die beispielsweise die Frontscheibe einer Gasentladungsanzeige in der Ausführung als Flacher Bildschirm ist. Die Schirmglasplatte 1 ist dabei von der Seite gesehen geschnitten dargestellt. Unten ist die Betrachterseite, oben die Innenseite des Gasentladungsanzeigegeräts. Weggelassen sind die dann oben aufgesetzten Abstandshalterungen, die darauf abgestützte Steuerlochscheibe und der ganze vom Betrachter aus gesehene hintere Teil des Gasentladungsanzeigegeräts.1 designates a screen glass plate, which is, for example, the front window of a gas discharge display in the form of a flat screen. The screen glass plate 1 is shown cut from the side. At the bottom is the viewer side, at the top the inside of the gas discharge display device. The spacers then placed on top, the perforated control disk supported on it and the entire rear part of the gas discharge display device, as seen by the viewer, are omitted.

Auf der Innenseite der Schirmglasplatte 1 befinden sich Vertiefungen 2 mit annähernd rechteckigem Querschnitt. Die Böden dieser Vertiefungen sind die Leuchtpunktflächen des Leuchtschirms und sind dementsprechend in demselben Raster angebracht. Auf den verbleibenden Stegen befindet sich eine Kontrastumrandungsschicht 3. Die Böden und Wände der Vertiefungen 2 und die Kontrastumrandungsschicht 3 sind von einer Potentialschicht 4 überzogen. In den Vertiefungen 2 auf dem Boden und hochgezogen auf den Wänden liegt über der Potentialschicht 4 eine Leuchtstoffschicht 5. Mit Pfeilen sind die in Richtung des Leuchtschirms beschleunigten Elektronen angedeutet.On the inside of the screen glass plate 1 there are depressions 2 with an approximately rectangular cross section. The bottoms of these depressions are the illuminated dot areas of the fluorescent screen and are accordingly attached in the same grid. A contrast border layer 3 is located on the remaining webs. The bottoms and walls of the depressions 2 and the contrast border layer 3 are covered by a potential layer 4. In the recesses 2 on the floor and pulled up on the walls, there is a phosphor layer 5 above the potential layer 4. The electrons accelerated in the direction of the fluorescent screen are indicated by arrows.

Hergestellt wird dieser dargestellte Leuchtschirm beispielsweise folgendermaßen:

  • Auf die Schirmglasplatte 1, in der sich die Vertiefungen 2 noch nicht befinden, wird ein Gemisch aus einem Dielektrikum, wie Ceroxid (Ce02) oder Aluminiumoxid (AI203) oder Siliciumoxid (SiO) und aus einem Metall, wie Nickel (Ni), aufgedampft. Dabei wird der Nickelanteil während der Aufdampfung von 0 auf 100% vergrößert. Die Aufdampfraten können durch einen über zwei mit den entsprechenden Verdampfungsmaterialien gefüllten Tiegeln oszillierenden Elektronenstrahl mit gesteuerter Verweilzeit oder durch zwei gesteuerte Elektronenstrahlen oder auch durch temperatur- und druckgesteuerte Verdampfung des Dielektrikums in Verbindung mit einer aufdampfratengesteurten Elektronenstrahlkanone für das Metall eingestellt werden. Auf diese Weise entsteht dann eine vom Betrachter her schwarz erscheinende und auf der Innenseite des Gasentladungsanzeigegeräts spiegelnde Kontrastumrandungsschicht 3 mit einer Dicke von beispielsweise 300 nm.
  • Anschließend wird Fotolack aufgebracht, der dann im Leuchtpunktraster entfernt wird, d.h. an den Stellen, an denen die Vertiefungen 2 entstehen sollen. Durch die dabei entstehenden Fotolackfenster wird zunächst die oberste Nickelschicht mit einem geeigneten Ätzmittel, beispielsweise mit einer Mischung aus Salpetersäure und Salzsäure oder Kupfersulfat, entfernt.
The fluorescent screen shown is manufactured for example as follows:
  • A mixture of a dielectric, such as cerium oxide (Ce02) or aluminum oxide (Al 2 O 3 ) or silicon oxide (SiO), and a metal, such as nickel (Ni), is placed on the screen glass plate 1, in which the depressions 2 are not yet located. , evaporated. The nickel content is increased from 0 to 100% during the vapor deposition. The evaporation rates can be set by means of an electron beam oscillating over two crucibles filled with the corresponding evaporation materials with a controlled dwell time or by means of two controlled electron beams or also by temperature and pressure-controlled evaporation of the dielectric in connection with an electron beam gun controlled by evaporation rate. In this way, the viewer gets black appearing and reflecting on the inside of the gas discharge display device contrast border layer 3 with a thickness of 300 nm, for example.
  • Subsequently, photoresist is applied, which is then removed in the red dot grid, ie at the locations where the depressions 2 are to be created. The uppermost nickel layer is first removed with a suitable etching agent, for example with a mixture of nitric acid and hydrochloric acid or copper sulfate, through the resulting photoresist window.

Dann erfolgt die Ausätzung der Vertiefungen 2 zunächst durch die restliche Kontrastumrandungsschicht 2 in den Fenstern und dann in die Schirmglasplatte 1 beispielsweise mit Flußsäure oder mit einem Gemisch aus Flußsäure und Schwefelsäure. Nach diesem Ätzvorgang werden der Fotolack abgelöst und die nun mit den Vertiefungen 2 versehene Schirmglasplatte 1 mit Hilfe eines wäßrigen Ultraschallbades gereinigt.Then the recesses 2 are etched first through the remaining contrast border layer 2 in the windows and then into the screen glass plate 1, for example with hydrofluoric acid or with a mixture of hydrofluoric acid and sulfuric acid. After this etching process, the photoresist is removed and the screen glass plate 1, which is now provided with the depressions 2, is cleaned with the aid of an aqueous ultrasound bath.

Im nächsten Schritt wird die Potentialschicht 4 aus Indiumoxid (ln203) aufgesputtert. Danach erfolgt beispielsweise durch Aufsprühen das Belegen der Böden und Wände der Vertiefungen 2 mit der Leuchtstoffschicht 5, so daß diese den Boden der Vertiefungen bedeckt und an deren Wänden hochgezogen wird.In the next step, the potential layer 4 made of indium oxide (In 2 0 3 ) is sputtered on. This is followed, for example, by spraying the floors and walls of the depressions 2 with the phosphor layer 5, so that this covers the bottom of the depressions and is pulled up on the walls thereof.

Claims (7)

1. A luminescent screen for picture display tubes comprising a glass screen plate and phosphor dots which are positioned thereon and the areas of which are separated from one another by a contrast border, where the phosphor material is accommodated in recesses in the glass screen plate and rises up at the walls thereof, characterised by the following features:
a) a contrast border layer (3) is located on the inner side of the glass screen plate (1) as a boundary of the recesses (2);
b) the contrast border layer (3) comprises a metal layer which is resistant to etching agents for the glass of the glass screen plate (1);
c) the contrast border layer (3) is provided between its metal layer and the glass screen plate with a layer in which metal particles are distributed in a di-electric layer;
d) the concentration of the metal particles in the contrast border layer decreases towards the glass screen plate.
2. A luminescent screen as claimed in Claim 1, chracterised in that nickel particles are distributed in a dielectric layer made of substances of the group Ce02, AIZO3, SiO.
3. A luminescent screen as claimed in Claim 1, characterised in that the contrast border layer (3) serves as a carrier for the luminescent screen potential.
4. A luminescent screen as claimed in Claim 1, characterised in that the contrast border layer (3) and the recesses (2) below the phosphor material layer (5), are covered with a continuous, electrically conductive, potential layer (4).
5. A process for the production of a luminescent screen as claimed in Claim 1 having the features:
a) on its inner side, the glass screen plate is provided with a dark contrast border layer;
b) windows are etched into the contrast border layer in accordance with the phosphor dot raster;
c) recesses are etched into the glass screen plate into which the phosphor material layer is inserted;

characterised by the features:
d) there is applied to the glass screen plate, a contrast border layer (3) made of a mixture of a metal and a dielectric in which the proportion of the metal component increases with increasing thickness of the layer, pure metal finally being applied in order to form a covering layer;
e) the contrast border layer (3) which has been provided with windows, serves as a mask for the etching of recesses (2) into the glass screen plate (1);
f) after the etching of the recesses, the phosphor material layer (5) is inserted into the recesses in such a way that it covers the floors of the recesses and rises up at the walls thereof.
6. A process for the production of a luminescent screen as claimed in Claim 5, characterised in that the composition of the mixture of metal and dielectric changes continuously in the course of the layer thickness, pure dielectric being first applied.
7. A process for the production of a luminescent screen as claimed in Claim 5, characterised in that the composition of the mixture of metal and di-electric changes in the course of the layer thickness, layers made of dielectric and layers made of metal being alternately applied, preferably with varying layer thicknesses, and the last layer applied being a metal layer.
EP79105078A 1978-12-20 1979-12-10 Luminescent screen for picture display tubes and method of its manufacture Expired EP0012920B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT79105078T ATE2033T1 (en) 1978-12-20 1979-12-10 LUMINOUS SCREEN FOR PICTURE DISPLAY TUBES AND METHOD FOR ITS MANUFACTURE.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2855142A DE2855142C2 (en) 1978-12-20 1978-12-20 Luminous screen of a picture display tube
DE2855142 1978-12-20

Publications (2)

Publication Number Publication Date
EP0012920A1 EP0012920A1 (en) 1980-07-09
EP0012920B1 true EP0012920B1 (en) 1982-12-15

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US (1) US4325002A (en)
EP (1) EP0012920B1 (en)
JP (1) JPS5588245A (en)
AT (1) ATE2033T1 (en)
DE (1) DE2855142C2 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4626739A (en) * 1984-05-10 1986-12-02 At&T Bell Laboratories Electron beam pumped mosaic array of light emitters
US4622272A (en) * 1984-07-31 1986-11-11 Siemens Aktiengesellschaft Luminescent screen for picture display apparatus and method for manufacturing such device
US5086297A (en) * 1988-06-14 1992-02-04 Dai Nippon Insatsu Kabushiki Kaisha Plasma display panel and method of forming fluorescent screen thereof
KR910005090B1 (en) * 1989-06-02 1991-07-22 Samsung Electronic Devices Method of making the spacer of display device
US6861803B1 (en) * 1992-01-28 2005-03-01 Fujitsu Limited Full color surface discharge type plasma display device
US5793158A (en) * 1992-08-21 1998-08-11 Wedding, Sr.; Donald K. Gas discharge (plasma) displays
US5461279A (en) * 1992-09-10 1995-10-24 Sanyo Electric Co. Ltd. Flat fluorescent lamp having a luminescent surface with a diffusion groove
US5734224A (en) * 1993-11-01 1998-03-31 Canon Kabushiki Kaisha Image forming apparatus and method of manufacturing the same
US5463273A (en) * 1994-05-04 1995-10-31 Motorola Dimpled image display faceplate for receiving multiple discrete phosphor droplets and having conformal metallization disposed thereon
US6008577A (en) * 1996-01-18 1999-12-28 Micron Technology, Inc. Flat panel display with magnetic focusing layer
US6590334B1 (en) * 1996-01-18 2003-07-08 Micron Technology, Inc. Field emission displays having reduced threshold and operating voltages and methods of producing the same
US5725407A (en) * 1996-04-08 1998-03-10 Industrial Technology Research Institute Process for manufacturing a luminescent display screen that features a sloping structure
DE69722664T2 (en) * 1996-09-18 2003-12-18 Matsushita Electric Industrial Co., Ltd. Manufacturing process of a plasma display panel, suitable for tiny cell structures, and plasma display panel
US5990620A (en) * 1997-09-30 1999-11-23 Lepselter; Martin P. Pressurized plasma display
KR100476043B1 (en) * 1999-06-21 2005-03-10 비오이 하이디스 테크놀로지 주식회사 FED device and method for manufacturing the same
US6570322B1 (en) * 1999-11-09 2003-05-27 Micron Technology, Inc. Anode screen for a phosphor display with a plurality of pixel regions defining phosphor layer holes

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2705765A (en) * 1950-04-03 1955-04-05 Geer Charles Willard Single gun color television receiving tube and screen structure
US2882413A (en) * 1953-12-04 1959-04-14 Vingerhoets Antonius Wilhelmus Luminescent screen
US3146368A (en) * 1961-04-04 1964-08-25 Rauland Corp Cathode-ray tube with color dots spaced by light absorbing areas
US3569760A (en) * 1967-10-26 1971-03-09 George F Fargher Color tube with phosphor strips separated by guard bands
US3582701A (en) * 1969-03-27 1971-06-01 Zenith Radio Corp Color tube screen with light-absorbing cermet deposits
US3619698A (en) * 1970-02-05 1971-11-09 Burroughs Corp Display panel
US3614503A (en) * 1970-02-24 1971-10-19 Zenith Radio Corp Black-surround color picture tube
US3654505A (en) * 1970-06-05 1972-04-04 Motorola Inc Black enamel glass for cathode-ray tube
JPS5029914B1 (en) * 1970-10-15 1975-09-27
NL7016929A (en) * 1970-11-19 1972-05-24
FR2166592A5 (en) * 1971-12-30 1973-08-17 Hitachi Ltd Crt screen - having inner indentations whose walls reflect phosphor light towards viewer
JPS5115853B2 (en) * 1972-02-23 1976-05-20
US3858083A (en) * 1973-05-07 1974-12-31 Gte Sylvania Inc Cathode ray tube screen structure
JPS504662U (en) * 1973-05-15 1975-01-18
DE2412869C3 (en) * 1974-03-18 1980-10-30 Siemens Ag, 1000 Berlin Und 8000 Muenchen Display device with a gas discharge space as electron source, with an electron post-acceleration space and with a luminescent screen and method for operating this display device
JPS5820450B2 (en) * 1974-12-27 1983-04-23 ソニー株式会社 Manufacturing method of discharge type flat color display tube
JPS5816290B2 (en) * 1975-01-21 1983-03-30 ソニー株式会社 Heimenhouden Hiyoujisouchi
JPS5412259A (en) * 1977-06-29 1979-01-29 Hitachi Ltd Color picture tube
DE2806436C2 (en) * 1978-02-15 1984-03-01 Siemens Ag, 1000 Berlin Und 8000 Muenchen Process for producing a black border around luminous dots on the screen glass of a color screen

Also Published As

Publication number Publication date
DE2855142A1 (en) 1980-06-26
ATE2033T1 (en) 1982-12-15
DE2855142C2 (en) 1985-01-17
US4325002A (en) 1982-04-13
JPS5588245A (en) 1980-07-03
EP0012920A1 (en) 1980-07-09

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