DK79198A - Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft - Google Patents

Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft

Info

Publication number: DK79198A
Authority: DK; Denmark
Prior art keywords: transducer; membrane; producing; clamping force; predetermined clamping
Prior art date: 1998-06-11

Application number

DK199800791A

Other languages

English (en)

Inventor

Matthias Muellenborn

Pirmin Rombach

Original Assignee

Microtronic As

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1998-06-11

Filing date

1998-06-11

Publication date

1999-12-12

1998-06-11 Application filed by Microtronic As filed Critical Microtronic As

1998-06-11 Priority to DK199800791A priority Critical patent/DK79198A/da

1999-06-10 Priority to PCT/DK1999/000315 priority patent/WO1999065277A1/en

1999-06-10 Priority to EP99924802A priority patent/EP1093703B1/en

1999-06-10 Priority to CNB998084190A priority patent/CN1162043C/zh

1999-06-10 Priority to DK99924802T priority patent/DK1093703T3/da

1999-06-10 Priority to US09/719,208 priority patent/US6622368B1/en

1999-06-10 Priority to CA002334640A priority patent/CA2334640C/en

1999-06-10 Priority to DE69926757T priority patent/DE69926757T2/de

1999-06-10 Priority to JP2000554170A priority patent/JP4233218B2/ja

1999-06-10 Priority to AU41339/99A priority patent/AU4133999A/en

1999-12-12 Publication of DK79198A publication Critical patent/DK79198A/da

Classifications

- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
- H04R31/003—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49007—Indicating transducer

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Physics & Mathematics (AREA)
Acoustics & Sound (AREA)
Signal Processing (AREA)
Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Measuring Fluid Pressure (AREA)
Micromachines (AREA)
Pressure Sensors (AREA)

DK199800791A 1998-06-11 1998-06-11 Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft DK79198A (da)

Priority Applications (10)

Application Number	Priority Date	Filing Date	Title
DK199800791A DK79198A (da)	1998-06-11	1998-06-11	Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft
PCT/DK1999/000315 WO1999065277A1 (en)	1998-06-11	1999-06-10	A method of manufacturing a transducer having a diaphragm with a predetermined tension
EP99924802A EP1093703B1 (en)	1998-06-11	1999-06-10	A method of manufacturing a transducer having a diaphragm with a predetermined tension
CNB998084190A CN1162043C (zh)	1998-06-11	1999-06-10	含预定张力的膜的转换器的制造方法
DK99924802T DK1093703T3 (da)	1998-06-11	1999-06-10	Fremgangsmåde til fremstilling af en transducer med en membran med forudbestemt opspændingskraft
US09/719,208 US6622368B1 (en)	1998-06-11	1999-06-10	Method of manufacturing a transducer having a diaphragm with a predetermined tension
CA002334640A CA2334640C (en)	1998-06-11	1999-06-10	A method of manufacturing a transducer having a diaphragm with a predetermined tension
DE69926757T DE69926757T2 (de)	1998-06-11	1999-06-10	Verfahren zur herstellung eines wandlers mit vorgegebener spannung
JP2000554170A JP4233218B2 (ja)	1998-06-11	1999-06-10	所定張力を持つダイアフラムを有するトランスデューサを製造する方法
AU41339/99A AU4133999A (en)	1998-06-11	1999-06-10	A method of manufacturing a transducer having a diaphragm with a predetermined tension

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DK199800791A DK79198A (da)	1998-06-11	1998-06-11	Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft

Publications (1)

Publication Number	Publication Date
DK79198A true DK79198A (da)	1999-12-12

Family

ID=8097602

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
DK199800791A DK79198A (da)	1998-06-11	1998-06-11	Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft
DK99924802T DK1093703T3 (da)	1998-06-11	1999-06-10	Fremgangsmåde til fremstilling af en transducer med en membran med forudbestemt opspændingskraft

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
DK99924802T DK1093703T3 (da)	1998-06-11	1999-06-10	Fremgangsmåde til fremstilling af en transducer med en membran med forudbestemt opspændingskraft

Country Status (9)

Country	Link
US (1)	US6622368B1 (da)
EP (1)	EP1093703B1 (da)
JP (1)	JP4233218B2 (da)
CN (1)	CN1162043C (da)
AU (1)	AU4133999A (da)
CA (1)	CA2334640C (da)
DE (1)	DE69926757T2 (da)
DK (2)	DK79198A (da)
WO (1)	WO1999065277A1 (da)

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DK79198A (da) *	1998-06-11	1999-12-12	Microtronic As	Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft
US6760454B1 (en) *	2000-08-04	2004-07-06	Trw Inc.	Passive voice-activated microphone and transceiver system
US6741709B2 (en) *	2000-12-20	2004-05-25	Shure Incorporated	Condenser microphone assembly
US6800912B2 (en) *	2001-05-18	2004-10-05	Corporation For National Research Initiatives	Integrated electromechanical switch and tunable capacitor and method of making the same
US6859542B2 (en)	2001-05-31	2005-02-22	Sonion Lyngby A/S	Method of providing a hydrophobic layer and a condenser microphone having such a layer
WO2005050680A1 (ja)	2003-11-20	2005-06-02	Matsushita Electric Industrial Co., Ltd.	エレクトレット及びエレクトレットコンデンサー
WO2005086534A1 (ja)	2004-03-03	2005-09-15	Matsushita Electric Industrial Co., Ltd.	エレクトレットコンデンサーマイクロフォンユニット
KR20060129041A (ko) *	2004-03-05	2006-12-14	마츠시타 덴끼 산교 가부시키가이샤	일렉트릿 컨덴서
JP2006319595A (ja) *	2005-05-12	2006-11-24	Audio Technica Corp	リボンマイクロホンの製造方法
EP1771036A3 (en) *	2005-09-26	2013-05-22	Yamaha Corporation	Capacitor microphone and diaphragm therefor
JP2007116650A (ja) *	2005-09-26	2007-05-10	Yamaha Corp	ダイヤフラム及びダイヤフラムの製造方法並びにコンデンサマイクロホン
JP4535046B2 (ja) *	2006-08-22	2010-09-01	ヤマハ株式会社	静電容量センサ及びその製造方法
DE102005056759A1 (de) *	2005-11-29	2007-05-31	Robert Bosch Gmbh	Mikromechanische Struktur zum Empfang und/oder zur Erzeugung von akustischen Signalen, Verfahren zur Herstellung einer mikromechanischen Struktur und Verwendung einer mikromechanischen Struktur
JP4787648B2 (ja)	2006-03-29	2011-10-05	パナソニック株式会社	コンデンサマイクロホンの製造方法およびコンデンサマイクロホン
JP4660426B2 (ja) *	2006-05-31	2011-03-30	三洋電機株式会社	センサ装置およびダイアフラム構造体
US8121315B2 (en) *	2007-03-21	2012-02-21	Goer Tek Inc.	Condenser microphone chip
FR2922305B1 (fr) *	2007-10-12	2010-02-26	Senseor	Procede de fabrication collective de capteurs de temperature et de pression sans calibrage a base de dispositifs a ondes acoustiques
IT1395550B1 (it)	2008-12-23	2012-09-28	St Microelectronics Rousset	Trasduttore acustico integrato in tecnologia mems e relativo processo di fabbricazione
CN102066239A (zh) *	2009-01-09	2011-05-18	松下电器产业株式会社	微电子机械系统器件
JP5321111B2 (ja) *	2009-02-13	2013-10-23	船井電機株式会社	マイクロホンユニット
EP2679024B1 (en)	2011-02-25	2020-01-08	Nokia Technologies Oy	A transducer apparatus with a tension actuator
TWI430424B (zh) *	2011-03-18	2014-03-11	Pixart Imaging Inc	微機電系統聲壓感測元件及其製作方法
JP5875244B2 (ja) *	2011-04-06	2016-03-02	キヤノン株式会社	電気機械変換装置及びその作製方法
DE102013108464B4 (de) *	2013-08-06	2020-06-25	Tdk Corporation	Verfahren zur Herstellung eines mikroelektromechanischen Wandlers
JP2020022038A (ja) *	2018-07-31	2020-02-06	Tdk株式会社	Ｍｅｍｓマイクロフォン
DE112019005997T5 (de) *	2018-12-01	2021-09-16	Knowles Electronics, Llc	Verbundmembran mit ausgeglichener Spannung

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JPS5019183B1 (da) *	1970-03-10	1975-07-04
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JPS5650408B2 (da) *	1973-07-05	1981-11-28
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US4429192A (en) *	1981-11-20	1984-01-31	Bell Telephone Laboratories, Incorporated	Electret transducer with variable electret foil thickness
US4524247A (en) *	1983-07-07	1985-06-18	At&T Bell Laboratories	Integrated electroacoustic transducer with built-in bias
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US4872945A (en) *	1986-06-25	1989-10-10	Motorola Inc.	Post seal etching of transducer diaphragm
NL8702589A (nl) *	1987-10-30	1989-05-16	Microtel Bv	Elektro-akoestische transducent van de als elektreet aangeduide soort, en een werkwijze voor het vervaardigen van een dergelijke transducent.
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US5170283A (en) *	1991-07-24	1992-12-08	Northrop Corporation	Silicon spatial light modulator
WO1993022140A1 (en) *	1992-04-23	1993-11-11	Seiko Epson Corporation	Liquid jet head and production thereof
FR2697675B1 (fr) *	1992-11-05	1995-01-06	Suisse Electronique Microtech	Procédé de fabrication de transducteurs capacitifs intégrés.
US6030851A (en) *	1995-06-07	2000-02-29	Grandmont; Paul E.	Method for overpressure protected pressure sensor
US5573679A (en) *	1995-06-19	1996-11-12	Alberta Microelectronic Centre	Fabrication of a surface micromachined capacitive microphone using a dry-etch process
AU2923397A (en) *	1996-04-18	1997-11-07	California Institute Of Technology	Thin film electret microphone
US6556417B2 (en) *	1998-03-10	2003-04-29	Mcintosh Robert B.	Method to construct variable-area capacitive transducers
DK79198A (da) *	1998-06-11	1999-12-12	Microtronic As	Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft
US6522762B1 (en) *	1999-09-07	2003-02-18	Microtronic A/S	Silicon-based sensor system

1998
- 1998-06-11 DK DK199800791A patent/DK79198A/da not_active Application Discontinuation
1999
- 1999-06-10 CA CA002334640A patent/CA2334640C/en not_active Expired - Fee Related
- 1999-06-10 EP EP99924802A patent/EP1093703B1/en not_active Expired - Lifetime
- 1999-06-10 CN CNB998084190A patent/CN1162043C/zh not_active Expired - Lifetime
- 1999-06-10 DE DE69926757T patent/DE69926757T2/de not_active Expired - Lifetime
- 1999-06-10 WO PCT/DK1999/000315 patent/WO1999065277A1/en active IP Right Grant
- 1999-06-10 JP JP2000554170A patent/JP4233218B2/ja not_active Expired - Lifetime
- 1999-06-10 AU AU41339/99A patent/AU4133999A/en not_active Abandoned
- 1999-06-10 US US09/719,208 patent/US6622368B1/en not_active Expired - Lifetime
- 1999-06-10 DK DK99924802T patent/DK1093703T3/da active

Also Published As

Publication number	Publication date
DE69926757D1 (de)	2005-09-22
JP2002518913A (ja)	2002-06-25
CA2334640C (en)	2008-12-30
JP4233218B2 (ja)	2009-03-04
CN1162043C (zh)	2004-08-11
WO1999065277A1 (en)	1999-12-16
DE69926757T2 (de)	2006-06-14
AU4133999A (en)	1999-12-30
DK1093703T3 (da)	2005-11-28
CN1308832A (zh)	2001-08-15
CA2334640A1 (en)	1999-12-16
EP1093703B1 (en)	2005-08-17
US6622368B1 (en)	2003-09-23
EP1093703A1 (en)	2001-04-25

Publication	Publication Date	Title
DK79198A (da)	1999-12-12	Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft
DK1276551T3 (da)	2009-11-16	Kompositmembran og fremgangsmåde til fremstilling af samme
DK1140331T3 (da)	2003-04-07	Fremgangsmåde til fremstilling af en integral asymmetrisk polyolefinmembran
DK0793681T3 (da)	2000-01-24	Fremgangsmåde til fremstilling af fleksible skum
DK0820568T3 (da)	2000-08-28	Fremgangsmåde til fremstilling af ikke-plane, lufttomme isoleringsplader
DK1293507T3 (da)	2007-12-27	Fremgangsmåde til fremstilling af krystaller
FR2753253B1 (fr)	2000-03-31	Valve a membranes
DE50111921D1 (de)	2007-03-15	Atmungsfreie Membraneinspannung
DE69636357D1 (de)	2006-08-24	Membranmodul mit frei schwingenden Hohlfasermembranen
DK1303478T3 (da)	2004-08-30	Fremgangsmåde til fremstilling af substituerede octanoylamider
DE69738497D1 (de)	2008-03-20	Verbesserte filtrationsanordnung mit mikroporöser membrane
AU2001276692A1 (en)	2002-02-13	Modified hollow-fiber membrane
DK0809441T3 (da)	2002-01-21	Fremgangsmåde til fremstilling af en blød eller halvblød fibrøs ost
IL123462A0 (en)	1998-09-24	A method for potting or casting inorganic hollow fiber membranes intotube sheets
FI20010984A (fi)	2001-05-10	Vedyn erotusmembraani
FR2810259B1 (fr)	2002-08-30	Procede de fabrication d'une membrane de nanofiltration, et membrane obtenue
DE69931804D1 (de)	2006-07-20	Druckwandler mit einer siliziumkarbidenthaltenden membran und verfahren zu seiner herstellung
DK0994091T3 (da)	2003-11-24	Fremgangsmåde til fremstilling methanol
DE59708833D1 (de)	2003-01-09	Membrane für eine membranpumpe
DK1092243T3 (da)	2003-06-30	Fremgangsmåde til fremstilling af en mikroporøs film
DE60021617D1 (de)	2005-09-01	Mikroporöse membran
DK0970939T3 (da)	2003-04-07	Fremgangsmåde til fremstilling af methanol
ATA79499A (de)	2002-06-15	Einrichtung zur befestigung einer perforierten membran an einer platte, membran und profilleiste hiefür
DE69811568D1 (de)	2003-04-03	Pneumatisch anpassbares Einrichtungswerkzeug mit bogenförmiger Membran
ID16798A (id)	1997-11-13	Proses pengisolasian suatu katalis dengan membran elektrodialisis

Legal Events

Date	Code	Title	Description
2009-10-19	AHS	Application shelved for other reasons than non-payment