DK2823357T3 - Fremgangsmåde til fremstilling af en værktøjsdel til en sprøjtestøbeproces, en varm-prægnings-proces, en nano-prægnings-proces, eller en ekstruderings-proces - Google Patents
Fremgangsmåde til fremstilling af en værktøjsdel til en sprøjtestøbeproces, en varm-prægnings-proces, en nano-prægnings-proces, eller en ekstruderings-proces Download PDFInfo
- Publication number
- DK2823357T3 DK2823357T3 DK13710287.7T DK13710287T DK2823357T3 DK 2823357 T3 DK2823357 T3 DK 2823357T3 DK 13710287 T DK13710287 T DK 13710287T DK 2823357 T3 DK2823357 T3 DK 2823357T3
- Authority
- DK
- Denmark
- Prior art keywords
- projections
- master structure
- etching
- protrusions
- metal insert
- Prior art date
Links
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 19
- 238000002161 passivation Methods 0.000 claims description 19
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
- B29C33/3857—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts
- B29C33/3878—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts used as masters for making successive impressions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
- B29C33/3857—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
- B29C33/424—Moulding surfaces provided with means for marking or patterning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/70—Maintenance
- B29C33/72—Cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/263—Moulds with mould wall parts provided with fine grooves or impressions, e.g. for record discs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
- B29C33/3857—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts
- B29C2033/3864—Spraying at least one layer to create the mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
- B29C33/424—Moulding surfaces provided with means for marking or patterning
- B29C2033/426—Stampers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/37—Mould cavity walls, i.e. the inner surface forming the mould cavity, e.g. linings
- B29C45/372—Mould cavity walls, i.e. the inner surface forming the mould cavity, e.g. linings provided with means for marking or patterning, e.g. numbering articles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
- Y10T29/49885—Assembling or joining with coating before or during assembling
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Claims (14)
1. Fremgangsmåde til fremstilling af en værktøjsdel til en sprøjtestøbeproces, en varm-prægnings-proces, nano-prægnings-proces eller en ekstruderings-proces, hvilken fremgangsmåde omfatter at tilvejebringe en halvleder-masterstruktur (10) med et overfladeareal omfattende nanometer-størrelses-fremspring (11) med en minimumdensitet på ca. 105 fremspring/mm2, fremspringene er positioneret i et ikke-periodisk, irregulært mønster, hvilke fremspring dannes ved en proces omfattende: vekslende passivering og ætsning ind i masterstrukturen, og/eller samtidig passivering og ætsning ind i masterstrukturen, og/eller ætsning ind i masterstrukturen, overføre masterstrukturen ind i en metalindsats (20), metalindsatsen har et tilsvarende nanometer-størrelses-mønster (21) fra fremspringene, og tilpasse metalindsatsen ind i en værktøjsdel (30) for at muliggøre nanometerstørrelses-mønstre at blive dannet af værktøjsdelen.
2. Fremgangsmåde ifølge krav 1, hvor processen til at danne fremspringene resulterer i en tilfældig form og/eller en tilfældig position i forhold til et individuelt fremspring.
3. Fremgangsmåde ifølge krav 1, hvor dimensionerne af fremspringene er defineret med tilsvarende intervaller for hver dimension, hver dimension er vilkårligt spredt inden for et tilsvarende interval, fortrinsvis mindst en dimension har en spredning på mindst 50% af gennemsnitsværdien.
4. Fremgangsmåde ifølge krav 1, hvor processen defineres af et sæt af globale procesparametre, hvilke parametre er fælles for dannelsen af mindst en hoveddel af fremspringene.
5. Fremgangsmåde ifølge krav 1, hvor processen defineres af et sæt af procesparametre, hvilke parametre ikke er direkte relateret til størrelsen og/eller positionen af den individuelle fremspring.
6. Fremgangsmåde ifølge krav 1, hvor nanometer-størrelses-fremspring dannet ved processen ikke kræver nogen litografiske procestrin til at definere form og/eller position af fremspringene, mindst for hovedparten af fremspringene.
7. Fremgangsmåde ifølge krav 1, hvor passiveringen omfatter dannelsen af en i inert polymer, eller et oxid, på masterstrukturen.
8. Fremgangsmåde ifølge krav 1, hvor ætsningen omfatter reaktiv ionætsning (RIE) i masterstrukturen.
9. Fremgangsmåde ifølge krav 1, hvor ætsningen omfatter en våd kemisk ætsning.
10. Fremgangsmåde ifølge krav 1, hvor ætsningen omfatter laser-assisteret ætsning. i
11. Fremgangsmåde ifølge krav 1, hvor masterstrukturen er en siliciumskive, og fortrinsvis udgør nanometer-størrelses-fremspringene nano-græs og/eller sort silicium.
12. Fremgangsmåde ifølge krav 1, hvor masterstrukturen omfatter en hierakisk struktur med en flerhed af overfladearealer omfattende nanometer-størrelsesfremspring med en minimumdensitet på 105 fremspring/mm2, og en flerhed af overfladearealer omfattende mikrometer-størrelsesoverflade-strukturer, hvilke strukturer fortrinsvis haren karakteristisk længdeskala på 1-1000 mikrometer, i mere fortrinsvis 1-100 mikrometer, endnu mere fortrinsvis 2-50 mikrometer.
13. Fremgangsmåde ifølge krav 1, hvor overføring af masterstrukturen ind i en metalindsats udføres ved en fremgangsmåde valgt fra listen bestående af: • materialedeponering, såsom elektrogalvanisering • prægnings-litografi, • blød litografi, • varm-prægning kombineret med ætsning, og • støbning.
14. Fremgangsmåde ifølge krav 1, hvor overføring af masterstrukturen ind i en metalindsats udføres ved elektrokemisk deponering af en udfyldningsplade på masterstrukturen, udfyldningspladen anvendes på, eller i, metalindsatsen som en del af værktøjsdelen.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261608828P | 2012-03-09 | 2012-03-09 | |
| EP12158834 | 2012-03-09 | ||
| PCT/DK2013/050060 WO2013131525A1 (en) | 2012-03-09 | 2013-03-08 | A method for manufacturing a tool part for an injection molding process, a hot embossing process, a nano-imprint process, or an extrusion process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK2823357T3 true DK2823357T3 (da) | 2016-06-13 |
Family
ID=49115957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK13710287.7T DK2823357T3 (da) | 2012-03-09 | 2013-03-08 | Fremgangsmåde til fremstilling af en værktøjsdel til en sprøjtestøbeproces, en varm-prægnings-proces, en nano-prægnings-proces, eller en ekstruderings-proces |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20150026952A1 (da) |
| EP (1) | EP2823357B1 (da) |
| DK (1) | DK2823357T3 (da) |
| WO (1) | WO2013131525A1 (da) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103108705A (zh) * | 2010-07-19 | 2013-05-15 | 哈佛大学校长及研究员协会 | 控制润湿特性的分层结构化表面 |
| US9085019B2 (en) * | 2010-10-28 | 2015-07-21 | 3M Innovative Properties Company | Superhydrophobic films |
| WO2016094589A1 (en) * | 2014-12-09 | 2016-06-16 | The Regents Of The University Of California | Scalable manufacturing of superhydrophobic structures in plastics |
| JP6689576B2 (ja) | 2015-03-31 | 2020-04-28 | デクセリアルズ株式会社 | 原盤の製造方法、原盤、及び光学体 |
| SG11201803557PA (en) * | 2015-10-27 | 2018-05-30 | Agency Science Tech & Res | Nanoinjection molding |
| US9757728B2 (en) * | 2016-01-26 | 2017-09-12 | Lidong Qin | Microfluidic aliquoting for single-cell isolation |
| WO2019185110A1 (en) * | 2018-03-26 | 2019-10-03 | Applied Materials, Inc. | Method for producing a multilevel imprint master, multilevel imprint master, and use of a multilevel imprint master |
| JP7103186B2 (ja) * | 2018-11-22 | 2022-07-20 | マツダ株式会社 | 樹脂製部材、樹脂製部材の成形用金型及び樹脂製部材の製造方法 |
| ES2939117T3 (es) | 2019-01-24 | 2023-04-19 | Nestle Sa | Dispensador de bebidas con componentes de autolimpieza |
| US20220088836A1 (en) * | 2019-01-24 | 2022-03-24 | Nil Technology Aps | A component for liquid handling with self-cleaning properties |
| EP3839626B1 (fr) * | 2019-12-18 | 2023-10-11 | Nivarox-FAR S.A. | Procede de fabrication d'un composant horloger |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5674592A (en) * | 1995-05-04 | 1997-10-07 | Minnesota Mining And Manufacturing Company | Functionalized nanostructured films |
| WO2002022304A1 (de) * | 2000-09-13 | 2002-03-21 | Baerlocher Gmbh | Werkzeug-oberflächen mit definierter mikrostruktur zur abweisung von ablagerungen |
| DE10110589A1 (de) | 2001-03-06 | 2002-09-12 | Creavis Tech & Innovation Gmbh | Geometrische Formgebung von Oberflächen mit Lotus-Effekt |
| US20070115554A1 (en) | 2005-11-22 | 2007-05-24 | Breitung Eric M | Antireflective surfaces, methods of manufacture thereof and articles comprising the same |
| KR100831049B1 (ko) * | 2006-12-21 | 2008-05-21 | 삼성전자주식회사 | 나노임프린트 리소그래피용 솔벤트 가용성 스탬프의 제조방법 |
| US8486319B2 (en) * | 2010-05-24 | 2013-07-16 | Integran Technologies Inc. | Articles with super-hydrophobic and/or self-cleaning surfaces and method of making same |
| MX2013000106A (es) * | 2010-07-01 | 2013-06-03 | Inmold Biosystems As | Metodo y aparato para producir un articulo de polimero nanoestructurado o liso. |
| US20130284690A1 (en) * | 2010-10-13 | 2013-10-31 | Max-Planck-Gesellschaft Zur Foerderung Der Wissens Chaften E.V. | Process for producing highly ordered nanopillar or nanohole structures on large areas |
-
2013
- 2013-03-08 EP EP13710287.7A patent/EP2823357B1/en not_active Not-in-force
- 2013-03-08 DK DK13710287.7T patent/DK2823357T3/da active
- 2013-03-08 WO PCT/DK2013/050060 patent/WO2013131525A1/en active Application Filing
- 2013-03-08 US US14/384,048 patent/US20150026952A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| EP2823357B1 (en) | 2016-03-02 |
| WO2013131525A1 (en) | 2013-09-12 |
| EP2823357A1 (en) | 2015-01-14 |
| US20150026952A1 (en) | 2015-01-29 |
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