DK152061C - Apparat til afstivning af krystalstaven ved digelfri zonesmeltning - Google Patents

Apparat til afstivning af krystalstaven ved digelfri zonesmeltning

Info

Publication number: DK152061C
Authority: DK; Denmark
Prior art keywords: digel; stabilizing; crystal rod; free zone; zone melting
Prior art date: 1976-11-16

Application number

DK439977A

Other languages

Danish (da)

English (en)

Other versions

DK152061B (da

DK439977A (da

Inventor

Heinz Herzer

Helmut Zauhar

Eberhard Muecke

Franz Koehl

Original Assignee

Wacker Chemitronic

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1976-11-16

Filing date

1977-10-04

Publication date

1988-07-11

1977-10-04 Application filed by Wacker Chemitronic filed Critical Wacker Chemitronic

1978-05-17 Publication of DK439977A publication Critical patent/DK439977A/da

1988-01-25 Publication of DK152061B publication Critical patent/DK152061B/da

1988-07-11 Application granted granted Critical

1988-07-11 Publication of DK152061C publication Critical patent/DK152061C/da

Classifications

- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
- C30B13/285—Crystal holders, e.g. chucks
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/911—Seed or rod holders
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
- Y10T117/1084—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone having details of a stabilizing feature

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Crystallography & Structural Chemistry (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Crystals, And After-Treatments Of Crystals (AREA)
Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Recrystallisation Techniques (AREA)

DK439977A 1976-11-16 1977-10-04 Apparat til afstivning af krystalstaven ved digelfri zonesmeltning DK152061C (da)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE2652199		1976-11-16
DE2652199A DE2652199C3 (de)	1976-11-16	1976-11-16	Vorrichtung zum Abstützen des Kristallstabes beim tiegelfreien Zonenziehen

Publications (3)

Publication Number	Publication Date
DK439977A DK439977A (da)	1978-05-17
DK152061B DK152061B (da)	1988-01-25
DK152061C true DK152061C (da)	1988-07-11

Family

ID=5993299

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DK439977A DK152061C (da)	1976-11-16	1977-10-04	Apparat til afstivning af krystalstaven ved digelfri zonesmeltning

Country Status (9)

Country	Link
US (1)	US4140571A (xx)
JP (1)	JPS5383907A (xx)
BE (1)	BE860862A (xx)
DE (1)	DE2652199C3 (xx)
DK (1)	DK152061C (xx)
FR (1)	FR2370511A1 (xx)
GB (1)	GB1567703A (xx)
IT (1)	IT1091784B (xx)
NL (1)	NL7710441A (xx)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4257841A (en) *	1978-01-06	1981-03-24	Monsanto Company	Stabilizing and supporting apparatus for float zone refined semiconductor crystal rod
US5092956A (en) *	1987-09-30	1992-03-03	The United States Of America As Represented By The United States National Aeronautics And Space Administration	Device for mechanically stabilizing web ribbon buttons during growth initiation
DE102014217605A1 (de)	2014-09-03	2016-03-03	Siltronic Ag	Verfahren zum Abstützen eines wachsenden Einkristalls während des Kristallisierens des Einkristalls gemäß dem FZ-Verfahren

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3234009A (en) *	1953-02-14	1966-02-08	Siemens Ag	Method and device for the successive zone melting and resolidifying of extremely pure substances
US3403007A (en) *	1966-04-20	1968-09-24	Materials Research Corp	Hollow cathode floating zone melter and process
DE1519901A1 (de) *	1966-09-23	1970-02-12	Siemens Ag	Verfahren zum tiegelfreien Zonenschmelzen eines kristallinen Stabes
BE789637A (fr) *	1972-10-03	1973-04-03	Elphiac Sa	Procede de fabrication de monocristaux et installation pour executer ceprocede.
DE2358300C3 (de) *	1973-11-22	1978-07-20	Siemens Ag, 1000 Berlin Und 8000 Muenchen	Vorrichtung zum senkrechten Halten eines Halbleiterkristallstabes beim tiegelfreien Zonenschmelzen
DE2455173C3 (de) *	1974-11-21	1979-01-18	Siemens Ag, 1000 Berlin Und 8000 Muenchen	Vorrichtung zum senkrechten Haltern des den Keimkristall enthaltenden Stabendes beim tiegelfreien Zonenschmelzen

1976
- 1976-11-16 DE DE2652199A patent/DE2652199C3/de not_active Expired
1977
- 1977-09-23 NL NL7710441A patent/NL7710441A/xx not_active Application Discontinuation
- 1977-10-04 DK DK439977A patent/DK152061C/da not_active IP Right Cessation
- 1977-10-11 US US05/840,887 patent/US4140571A/en not_active Expired - Lifetime
- 1977-11-14 IT IT51798/77A patent/IT1091784B/it active
- 1977-11-15 JP JP13720977A patent/JPS5383907A/ja active Granted
- 1977-11-16 BE BE182646A patent/BE860862A/xx unknown
- 1977-11-16 GB GB47680/77A patent/GB1567703A/en not_active Expired
- 1977-11-16 FR FR7734432A patent/FR2370511A1/fr active Granted

Also Published As

Publication number	Publication date
FR2370511A1 (fr)	1978-06-09
DK152061B (da)	1988-01-25
US4140571A (en)	1979-02-20
BE860862A (fr)	1978-05-16
JPS5383907A (en)	1978-07-24
DE2652199A1 (de)	1978-05-24
DE2652199C3 (de)	1982-05-19
GB1567703A (en)	1980-05-21
IT1091784B (it)	1985-07-06
DE2652199B2 (de)	1980-08-14
DK439977A (da)	1978-05-17
NL7710441A (nl)	1978-05-18
JPS5611672B2 (xx)	1981-03-16
FR2370511B1 (xx)	1980-02-15

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DK152061C (da)	1988-07-11	Apparat til afstivning af krystalstaven ved digelfri zonesmeltning
DK147245C (da)	1984-10-29	Fremgangsmaade og apparat til formindskelse af sidemaksima ved ekkolod
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Legal Events

Date	Code	Title	Description
1990-06-18	PBP	Patent lapsed