DK1061351T3 - Capacitive relative ceramic pressure sensor - Google Patents

Capacitive relative ceramic pressure sensor

Info

Publication number: DK1061351T3
Authority: DK; Denmark
Prior art keywords: pressure sensor; ceramic pressure; capacitive relative; relative ceramic; capacitive
Prior art date: 1999-06-15

Application number

DK99111580T

Other languages

Danish (da)

Inventor

Frank Hegner

Original Assignee

Endress & Hauser Gmbh & Co Kg

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1999-06-15

Filing date

1999-06-15

Publication date

2003-11-03

1999-06-15 Application filed by Endress & Hauser Gmbh & Co Kg filed Critical Endress & Hauser Gmbh & Co Kg

2003-11-03 Application granted granted Critical

2003-11-03 Publication of DK1061351T3 publication Critical patent/DK1061351T3/en

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0654—Protection against aggressive medium in general against moisture or humidity
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Ceramic Engineering (AREA)
Measuring Fluid Pressure (AREA)

DK99111580T 1999-06-15 1999-06-15 Capacitive relative ceramic pressure sensor DK1061351T3 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
EP99111580A EP1061351B1 (en)	1999-06-15	1999-06-15	Ceramic capacitance pressure sensor

Publications (1)

Publication Number	Publication Date
DK1061351T3 true DK1061351T3 (en)	2003-11-03

Family

ID=8238361

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DK99111580T DK1061351T3 (en)	1999-06-15	1999-06-15	Capacitive relative ceramic pressure sensor

Country Status (5)

Country	Link
EP (1)	EP1061351B1 (en)
JP (1)	JP3205327B2 (en)
CA (1)	CA2311569C (en)
DE (1)	DE59906514D1 (en)
DK (1)	DK1061351T3 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE10163567A1 (en) *	2001-12-21	2003-07-17	Endress & Hauser Gmbh & Co Kg	Pressure sensor with a hydrophobic coating
DE10326975A1 (en)	2003-06-12	2005-01-20	Endress + Hauser Gmbh + Co. Kg	Pressure sensor with moisture protection
KR20080083039A (en) *	2005-12-31	2008-09-12	코닝 인코포레이티드	Microreactor Glass Membrane Sensors
DE102008043175A1 (en)	2008-10-24	2010-04-29	Endress + Hauser Gmbh + Co. Kg	Relative pressure sensor
EP2463635B2 (en)	2010-12-07	2016-01-06	VEGA Grieshaber KG	Pressure measurement cell
DE102010063065A1 (en)	2010-12-14	2012-06-14	Endress + Hauser Gmbh + Co. Kg	Pressure sensor and method for its manufacture +
DE102010063723A1 (en)	2010-12-21	2012-06-21	Endress + Hauser Gmbh + Co. Kg	Pressure sensor has measuring diaphragm that rests on front supporting ends of profiled elements which are extended radially inward from outer surface of base, during overload condition
EP2584332A1 (en)	2011-10-19	2013-04-24	Baumer Bourdon Haenni SAS	Pressure sensor
DE102014117706A1 (en) *	2014-12-02	2016-06-02	Endress + Hauser Gmbh + Co. Kg	Capacitive relative pressure sensor
EP3173760A1 (en)	2015-11-30	2017-05-31	VEGA Grieshaber KG	Relative pressure sensor
CN111693186A (en) *	2020-05-12	2020-09-22	江苏大学	Preparation method of ceramic capacitive pressure sensor electrode
CN113884225A (en) *	2021-10-09	2022-01-04	广州九思科技有限公司	Transient response ceramic capacitance pressure sensor and manufacturing method thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5050034A (en) *	1990-01-22	1991-09-17	Endress U. Hauser Gmbh U. Co.	Pressure sensor and method of manufacturing same
JP3384900B2 (en) *	1995-01-09	2003-03-10	長野計器株式会社	Pressure sensor

1999
- 1999-06-15 DE DE59906514T patent/DE59906514D1/en not_active Expired - Lifetime
- 1999-06-15 EP EP99111580A patent/EP1061351B1/en not_active Expired - Lifetime
- 1999-06-15 DK DK99111580T patent/DK1061351T3/en active
2000
- 2000-06-14 CA CA 2311569 patent/CA2311569C/en not_active Expired - Fee Related
- 2000-06-15 JP JP2000180449A patent/JP3205327B2/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
CA2311569C (en)	2004-01-27
JP3205327B2 (en)	2001-09-04
JP2001021430A (en)	2001-01-26
DE59906514D1 (en)	2003-09-11
EP1061351A1 (en)	2000-12-20
CA2311569A1 (en)	2000-12-15
EP1061351B1 (en)	2003-08-06

Publication	Publication Date	Title
DE60012645D1 (en)	2004-09-09	Capacitive pressure sensor
JP2002504674A5 (en)	2006-03-30	Pressure sensor
DE60144214D1 (en)	2011-04-28	Capacitive pressure sensor
DE10230910B8 (en)	2010-02-11	Capacitive sensor arrangement
DE60030089D1 (en)	2006-09-28	Capacitive sensor matrix
DE69921712D1 (en)	2004-12-16	Capacitive distance sensor
DE50016091D1 (en)	2011-05-19	pressure sensor
HK1062041A1 (en)	2004-10-15	Capacitive sensor
DE69922727D1 (en)	2005-01-27	Capacitive pressure transducer
DE60032747D1 (en)	2007-02-15	PROXIMITY SENSOR
DE60031869D1 (en)	2006-12-28	CAPACITIVE DRUCKWANDLER
DE60131129D1 (en)	2007-12-13	pressure sensor
DE60030395D1 (en)	2006-10-12	Electronic pressure sensor
DE60142406D1 (en)	2010-07-29	INTEGRATED CAPACITIVE CMOS PRESSURE SENSOR
DE60004454D1 (en)	2003-09-18	Pressure sensor unit
DE50015477D1 (en)	2009-01-22	pressure sensor
GB0113362D0 (en)	2001-07-25	Capacitive sensor
DE60002954D1 (en)	2003-07-03	FILM-LIKE PRESSURE SENSOR
DE50015835D1 (en)	2010-02-25	sensor
DE60214690D1 (en)	2006-10-26	CAPACITIVE SENSOR
DE59914223D1 (en)	2007-04-12	Relative pressure sensor
DE60030116D1 (en)	2006-09-28	SINGLE POSITION PRESSURE GAUGE
GB0009930D0 (en)	2000-06-07	Capacitive sensor
DE50014915D1 (en)	2008-03-06	pressure sensor
DK1061351T3 (en)	2003-11-03	Capacitive relative ceramic pressure sensor