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DE98294T1 - HOLDER ARRANGEMENT FOR AN INTEGRATED CIRCUIT CHIP. - Google Patents

HOLDER ARRANGEMENT FOR AN INTEGRATED CIRCUIT CHIP.

Info

Publication number
DE98294T1
DE98294T1 DE1983900511 DE83900511T DE98294T1 DE 98294 T1 DE98294 T1 DE 98294T1 DE 1983900511 DE1983900511 DE 1983900511 DE 83900511 T DE83900511 T DE 83900511T DE 98294 T1 DE98294 T1 DE 98294T1
Authority
DE
Germany
Prior art keywords
thermally conductive
thermoelectric
gas
chip
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE1983900511
Other languages
German (de)
Inventor
Robert Matthew Dayton Oh 45459 Perchak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NCR Voyix Corp
Original Assignee
NCR Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/337,786 external-priority patent/US4402185A/en
Application filed by NCR Corp filed Critical NCR Corp
Publication of DE98294T1 publication Critical patent/DE98294T1/en
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Claims (10)

Dipl.-Ιηη K. '" Λ- Μ '. i" R ■ Europäische Patentanmeldung 83900511.3 . 3244/EPC NCR Corporation, World Headquarters, 30.1.1984 Dayton, Ohio 45479 (USA) Übersetzung der PatentansprücheDipl.-Ιηη K. '"Λ- Μ'. I" R ■ European patent application 83900511.3. 3244 / EPC NCR Corporation, World Headquarters, January 30, 1984 Dayton, Ohio 45479 (USA) Translation of the claims 1. Haltevorrichtung für einen integrierten Schaltungschip (60) mit einer Buchsenvorrichtung (22) zum entfernbaren Befestigen des Chips (60), gekennzeichnet durch ein thermisch leitendes Glied (20), das geeignet ist, für einen Wärmeaustausch mit dem angebrachten Chip (60), thermoelektrische Vorrichtungen (14, 15, 18) in Wärmeaustausch mit dem thermisch leitenden Glied (20) und geeignet, das thermisch leitende Glied (20) selektiv zu erwärmen oder zu kühlen, und Gasflußvorrichtungen (27, 29, 30), die geeignet sind, einen Gasfluß in die Nachbarschaft des angebrachten Chips (60) zu leiten.1. Holding device for an integrated circuit chip (60) with a socket device (22) for removably attaching the chip (60), characterized by a thermally conductive member (20) suitable for heat exchange with the attached Chip (60), thermoelectric devices (14, 15, 18) in heat exchange with the thermally conductive member (20) and adapted to selectively heat or cool the thermally conductive member (20) and gas flow devices (27, 29, 30), which are suitable to direct a gas flow in the vicinity of the attached chip (60). 2. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet , daß die thermoelektrischen Vorrichtungen erste und zweite thermoelektrische Stufen (14, 15; 18) aufweisen, wobei die zweite thermoelektrische Stufe (.18) in Wärmeaustausch mit dem thermisch leitenden Glied (20) und mit einem thermisch leitenden.Anschlußfeld (16) und die erste thermoelektrische Stufe (14, 15) in Wärmeaustausch mit dem thermisch leitenden Anschlußfeld (16) sind.2. Apparatus according to claim 1, characterized in that the thermoelectric devices first and second thermoelectric stages (14, 15; 18), the second thermoelectric Stage (.18) in heat exchange with the thermally conductive member (20) and with a thermally conductive connection panel (16) and the first thermoelectric stage (14, 15) in heat exchange with the thermally conductive connection panel (16) are. 3. Vorrichtung nach Anspruch 2, dadurch gekennzeichnet , daß die erste thermoelektrische Stufe 3. Apparatus according to claim 2, characterized in that the first thermoelectric stage ein Paar thermoelektrischer Module (14, 15) aufweist.a pair of thermoelectric modules (14, 15). 4. Vorrichtung nach Anspruch 3, gekennzeich-4. Apparatus according to claim 3, marked p. net durch ein Körperglied (10) aus thermisch leitendem Material, wobei das Körperglied (10) eine Ausnehmung (12.) aufweist, in der die thermoelektrischen Vorrichtungen (14, 15; 18) angeordnet sind.p. net by a body member (10) made of thermally conductive Material, wherein the body member (10) has a recess (12) in which the thermoelectric devices (14, 15; 18) are arranged. 5. Vorrichtung nach Anspruch 4, dadurch gekennzeichnet , daß die Gasflußvorrichtungen eine innerhalb des Körpergliedes (10) angeordnete Gaskammer (50), eine Einlaßvorrichtung (30), die geeignet ist, Gas der Gaskammer (50) zuzuführen, und eine Richtungs-5. Apparatus according to claim 4, characterized in that the gas flow devices a within the limb (10) arranged gas chamber (50), an inlet device (30) which is suitable, To supply gas to the gas chamber (50), and a directional n_ steuervorrichtung (29), die geeignet ist, das Gas aus 15 n _ control device (29) capable of controlling the gas from 15 der Kammer (50) in Richtung des Chips (60) zu leiten, aufweisen.to direct the chamber (50) in the direction of the chip (60), exhibit. 6. Vorrichtung nach Anspruch 5, gekennzeichnet durch· ein geschlitztes Glied (27) mit einem Schlitz, der einen Zugang zum Anbringen des Chips (60) in der Buchsenvorrichtung (22) hat, wobei die Richtungssteuervorrichtung durch geneigte Kanten (29) des Schlitzes gebildet wird.6. Device according to claim 5, characterized by · a slotted member (27) with a Slot having access for mounting the chip (60) in the socket device (22), the directional control device being provided by inclined edges (29) of the Slit is formed. 7. Vorrichtung nach Anspruch 6, dadurch g e k e η η 25 7. Apparatus according to claim 6, characterized in that g e k e η η 25 z-eichnet , daß die Gaskammer (50) zwischen dem geschlitzten Glied (27) und einem thermisch isolierenden Glied (24) mit einem Schlitz (26) angebracht ist, der ermöglicht, daß ein Teil des thermisch leitendenz-eichnet that the gas chamber (50) between the slotted member (27) and a thermally insulating Member (24) is attached with a slot (26) which allows a portion of the thermally conductive Gliedes (20).hindurchgelangt, wobei die Ausnehmung (12) 30Link (20). Passed through, wherein the recess (12) 30th unterhalb des thermisch isolierenden Gliedes (24) angeordnet ist. " .arranged below the thermally insulating member (24) is. ". 8. Vorrichtung nach Anspruch 7, dadurch gekennzeichnet , daß das thermisch leitende Anschluß- 8. Apparatus according to claim 7, characterized in that the thermally conductive connection '' feld (16) starr, durch Schrauben (17A, 17B) an einer un- · teren Fläche der Ausnehmung (12) angebracht ist, daß dasfield (16) rigid, by screws (17A, 17B) on an un- lower surface of the recess (12) is attached that the thermisch leitende Glied (20) mittels Schrauben (19a, 19b) andern thermisch leitenden Anschlußfeld (16) starr angebracht ist, daß die Buchsenvorrichtung (22) mittels Schrauben (23a.Change the thermally conductive member (20) by means of screws (19a, 19b) thermally conductive connection panel (16) rigidly attached is that the socket device (22) by means of screws (23a. C- 23b) an dem thermisch isolierenden Glied (24) starr angeo C- 23b) rigidly attached to the thermally insulating member (24) bracht ist, und daß das geschlitzte Glied (27) und das thermisch isolierende Glied (21J) an dem Körperglied (10) mittels Schrauben (28A, 28B, 25A, 25B) starr angebracht sind.is brought, and that the slotted member (27) and the thermally insulating member (2 1 J) are rigidly attached to the body member (10) by means of screws (28A, 28B, 25A, 25B). 9. Vorrichtung nach Anspruch 8, dadurch gekennzeichnet , daß Temperaturüberwachungsvorrichtungen an dem Körperglied (10) benachbart zur unteren Fläche der Ausnehmung (12) an dem thermisch leitenden Anschlußfeld (16) und an dem thermisch leitenden Glied9. Apparatus according to claim 8, characterized in that temperature monitoring devices on the body member (10) adjacent the lower surface of the recess (12) on the thermally conductive Connection panel (16) and on the thermally conductive member (20) vorgesehen sind.(20) are provided. 10. Vorrichtung nach einem der vorhergehenden Ansprüche, : dadurch gekennzeichnet, daß das Gas ein trockenes Stickstoffgas ist.10. Device according to one of the preceding claims, : characterized in that the gas is a dry nitrogen gas.
DE1983900511 1982-01-07 1983-01-04 HOLDER ARRANGEMENT FOR AN INTEGRATED CIRCUIT CHIP. Pending DE98294T1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/337,786 US4402185A (en) 1982-01-07 1982-01-07 Thermoelectric (peltier effect) hot/cold socket for packaged I.C. microprobing
PCT/US1983/000021 WO1983002527A1 (en) 1982-01-07 1983-01-04 Holding device for an integrated circuit chip

Publications (1)

Publication Number Publication Date
DE98294T1 true DE98294T1 (en) 1984-05-10

Family

ID=26768088

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1983900511 Pending DE98294T1 (en) 1982-01-07 1983-01-04 HOLDER ARRANGEMENT FOR AN INTEGRATED CIRCUIT CHIP.

Country Status (1)

Country Link
DE (1) DE98294T1 (en)

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