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DE969942C - Electron diffraction apparatus - Google Patents

Electron diffraction apparatus

Info

Publication number
DE969942C
DE969942C DES24863A DES0024863A DE969942C DE 969942 C DE969942 C DE 969942C DE S24863 A DES24863 A DE S24863A DE S0024863 A DES0024863 A DE S0024863A DE 969942 C DE969942 C DE 969942C
Authority
DE
Germany
Prior art keywords
electron diffraction
diffraction apparatus
cathode
borries
dissertation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DES24863A
Other languages
German (de)
Inventor
Dipl-Ing Otto Rang
Dr-Ing Hans Schluge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Priority to DES24863A priority Critical patent/DE969942C/en
Application granted granted Critical
Publication of DE969942C publication Critical patent/DE969942C/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Description

Hierzu 1 Blatt Zeichnungen1 sheet of drawings

© 809 582/48 7.58© 809 582/48 7.58

Claims (1)

PATENTANSPRUCH:PATENT CLAIM: Elektronenbeugungsapparatur oder als solche verwendbare andere Korpuskularstrahlapparatür, dadurch gekennzeichnet, daß eine in den Strahlengang einschwenkbare, den Primärstrahl ausblendende Blende (4) vorgesehen ist, welche hütchenförmig (wie 4, 5) mit Öffnung nach der Kathode hin ausgebildet ist.Electron diffraction apparatus or other corpuscular beam apparatus that can be used as such, characterized in that a pivotable into the beam path, the primary beam fading out aperture (4) is provided, which is cone-shaped (such as 4, 5) with opening after the Cathode is formed out. In Betracht gezogene Druckschriften:
Deutsche Patentanmeldung S 6862 VIII c/ 21 f (bekanntgemacht am 10. 7. 1952);Considered publications:
German patent application S 6862 VIII c / 21 f (published on July 10, 1952); schweizerische Patentschriften Nr. 233 972, 236482;Swiss patents Nos. 233 972, 236482; B. v. Borries, Dissertation: »Außenaufnahme am Kathodenstrahloszillographen«, Verlag der Vereinigung der Elektrizitätswerke, 1932, S. 54 und 62.B. v. Borries, dissertation: "Outside shot on the cathode ray oscillograph", publisher of Association of Electricity Companies, 1932, pp. 54 and 62.
DES24863A 1951-09-19 1951-09-19 Electron diffraction apparatus Expired DE969942C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DES24863A DE969942C (en) 1951-09-19 1951-09-19 Electron diffraction apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES24863A DE969942C (en) 1951-09-19 1951-09-19 Electron diffraction apparatus

Publications (1)

Publication Number Publication Date
DE969942C true DE969942C (en) 1958-07-31

Family

ID=7478076

Family Applications (1)

Application Number Title Priority Date Filing Date
DES24863A Expired DE969942C (en) 1951-09-19 1951-09-19 Electron diffraction apparatus

Country Status (1)

Country Link
DE (1) DE969942C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2371061A1 (en) * 1976-11-12 1978-06-09 Siemens Ag METHOD FOR REPRESENTING THE DIFFRACTION IMAGE IN A TRANSMISSION SCANNING MICROSCOPE, WITH CORPUSCULAR BEAM

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH233972A (en) * 1942-05-15 1944-08-31 Ardenne Manfred Von Electron microscope.
CH236482A (en) * 1942-07-06 1945-02-15 Fides Gmbh Corpuscular beam apparatus.

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH233972A (en) * 1942-05-15 1944-08-31 Ardenne Manfred Von Electron microscope.
CH236482A (en) * 1942-07-06 1945-02-15 Fides Gmbh Corpuscular beam apparatus.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2371061A1 (en) * 1976-11-12 1978-06-09 Siemens Ag METHOD FOR REPRESENTING THE DIFFRACTION IMAGE IN A TRANSMISSION SCANNING MICROSCOPE, WITH CORPUSCULAR BEAM

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