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DE69838102D1 - Gerät zur erzeugung orthogonal polarisierter strahlen mit verschiedenen frequenzen - Google Patents

Gerät zur erzeugung orthogonal polarisierter strahlen mit verschiedenen frequenzen

Info

Publication number
DE69838102D1
DE69838102D1 DE69838102T DE69838102T DE69838102D1 DE 69838102 D1 DE69838102 D1 DE 69838102D1 DE 69838102 T DE69838102 T DE 69838102T DE 69838102 T DE69838102 T DE 69838102T DE 69838102 D1 DE69838102 D1 DE 69838102D1
Authority
DE
Germany
Prior art keywords
different frequencies
orthogonal polarized
generating orthogonal
polarized radiations
radiations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69838102T
Other languages
English (en)
Other versions
DE69838102T2 (de
Inventor
Henry Allen Hill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zygo Corp
Original Assignee
Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp filed Critical Zygo Corp
Application granted granted Critical
Publication of DE69838102D1 publication Critical patent/DE69838102D1/de
Publication of DE69838102T2 publication Critical patent/DE69838102T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G02F1/116—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves using an optically anisotropic medium, wherein the incident and the diffracted light waves have different polarizations, e.g. acousto-optic tunable filter [AOTF]
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/07—Polarisation dependent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1068—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using an acousto-optical device

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
DE69838102T 1997-10-30 1998-04-13 Gerät zur erzeugung orthogonal polarisierter strahlen mit verschiedenen frequenzen Expired - Lifetime DE69838102T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/960,881 US5917844A (en) 1997-04-25 1997-10-30 Apparatus for generating orthogonally polarized beams having different frequencies
US960881 1997-10-30
PCT/US1998/007401 WO1999023733A1 (en) 1997-10-30 1998-04-13 Apparatus for generating orthogonally polarized beams having different frequencies

Publications (2)

Publication Number Publication Date
DE69838102D1 true DE69838102D1 (de) 2007-08-30
DE69838102T2 DE69838102T2 (de) 2008-03-20

Family

ID=25503755

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69838102T Expired - Lifetime DE69838102T2 (de) 1997-10-30 1998-04-13 Gerät zur erzeugung orthogonal polarisierter strahlen mit verschiedenen frequenzen

Country Status (4)

Country Link
US (1) US5917844A (de)
EP (1) EP1027756B1 (de)
DE (1) DE69838102T2 (de)
WO (1) WO1999023733A1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL120754A0 (en) 1997-05-01 1998-01-04 Yeda Res & Dev Optical resonators with discontinuous phase elements
DE19834202A1 (de) * 1998-07-29 2000-02-10 Coherent Luebeck Gmbh Rauscharmer frequenzvervielfachter Laser mit Strahlseparator
US6157660A (en) * 1999-06-04 2000-12-05 Zygo Corporation Apparatus for generating linearly-orthogonally polarized light beams
ATE349790T1 (de) * 1999-09-15 2007-01-15 Yeda Res & Dev Optische resonatoren mit orthogonal polarisierten modi
US6778280B2 (en) * 2001-07-06 2004-08-17 Zygo Corporation Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components
US7075619B2 (en) * 2002-12-12 2006-07-11 Zygo Corporation In-process correction of stage mirror deformations during a photolithography exposure cycle
WO2004113826A2 (en) * 2003-06-19 2004-12-29 Zygo Corporation Compensation for imperfections in a measurement object and for beam misalignments in plane mirror interferometers
US7379190B2 (en) * 2004-01-05 2008-05-27 Zygo Corporation Stage alignment in lithography tools
JP4790632B2 (ja) * 2004-01-06 2011-10-12 ザイゴ コーポレーション 多軸干渉計ならびに多軸干渉計を用いる方法およびシステム
JP2007534941A (ja) * 2004-04-22 2007-11-29 ザイゴ　コーポレーション 光学干渉計システムおよび光学干渉計システムを用いる方法
US7375823B2 (en) * 2004-04-22 2008-05-20 Zygo Corporation Interferometry systems and methods of using interferometry systems
US7489407B2 (en) * 2004-10-06 2009-02-10 Zygo Corporation Error correction in interferometry systems
US7277180B2 (en) * 2004-11-09 2007-10-02 Zygo Corporation Optical connection for interferometry
US7433049B2 (en) * 2005-03-18 2008-10-07 Zygo Corporation Multi-axis interferometer with procedure and data processing for mirror mapping
US7532330B2 (en) * 2005-08-16 2009-05-12 Zygo Corporation Angle interferometers
US7375819B2 (en) * 2005-11-01 2008-05-20 Agilent Technologies, Inc. System and method for generating beams of light using an anisotropic acousto-optic modulator
US7697195B2 (en) * 2006-05-25 2010-04-13 Zygo Corporation Apparatus for reducing wavefront errors in output beams of acousto-optic devices
DE102018110083A1 (de) * 2018-04-26 2019-10-31 Carl Zeiss Microscopy Gmbh Optikanordnung zur flexiblen Mehrfarbbeleuchtung für ein Lichtmikroskop und Verfahren hierzu
KR102479905B1 (ko) * 2022-05-30 2022-12-21 (주)그린광학 음향광학가변필터 및 음향광학가변필터의 제작방법
KR102729209B1 (ko) * 2022-05-30 2024-11-13 (주)그린광학 할로겐화수은 결정을 이용한 음향광학가변필터

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3458259A (en) * 1966-11-07 1969-07-29 Hewlett Packard Co Interferometric system
US3656853A (en) * 1966-11-07 1972-04-18 Hewlett Packard Co Interferometric system
US3662279A (en) * 1969-10-31 1972-05-09 Sandstroem & Others Device for controlling the frequency of a laser beam
US3889207A (en) * 1970-02-24 1975-06-10 Hewlett Packard Co Frequency stabilized gas laser
US4687958A (en) * 1985-03-12 1987-08-18 Zygo Corporation Apparatus to transform a single frequency, linearly polarized laser beam into a high efficiency beam with two, orthogonally polarized frequencies
US4684828A (en) * 1985-03-12 1987-08-04 Zygo Corporation Apparatus to transform a single frequency, linearly polarized laser beam into a beam with two, orthogonally polarized frequencies
JPH01149018A (ja) * 1987-12-07 1989-06-12 Matsushita Electric Ind Co Ltd 音響光学素子
US5463493A (en) * 1993-01-19 1995-10-31 Mvm Electronics Acousto-optic polychromatic light modulator
BE1007876A4 (nl) * 1993-12-17 1995-11-07 Philips Electronics Nv Stralingsbron-eenheid voor het opwekken van een bundel met twee polarisatierichtingen en twee frequenties.

Also Published As

Publication number Publication date
EP1027756A1 (de) 2000-08-16
EP1027756B1 (de) 2007-07-18
US5917844A (en) 1999-06-29
WO1999023733A1 (en) 1999-05-14
DE69838102T2 (de) 2008-03-20
EP1027756A4 (de) 2001-01-10

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