DE69822756D1 - Mikromechanischer Schwingkreisel - Google Patents
Mikromechanischer SchwingkreiselInfo
- Publication number
- DE69822756D1 DE69822756D1 DE69822756T DE69822756T DE69822756D1 DE 69822756 D1 DE69822756 D1 DE 69822756D1 DE 69822756 T DE69822756 T DE 69822756T DE 69822756 T DE69822756 T DE 69822756T DE 69822756 D1 DE69822756 D1 DE 69822756D1
- Authority
- DE
- Germany
- Prior art keywords
- oscillating gyro
- micromechanical oscillating
- micromechanical
- gyro
- oscillating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9714041 | 1997-11-07 | ||
FR9714041A FR2770899B1 (fr) | 1997-11-07 | 1997-11-07 | Microgyrometre vibrant |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69822756D1 true DE69822756D1 (de) | 2004-05-06 |
DE69822756T2 DE69822756T2 (de) | 2005-04-28 |
Family
ID=9513173
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69822756T Expired - Lifetime DE69822756T2 (de) | 1997-11-07 | 1998-11-05 | Mikromechanischer Schwingkreisel |
Country Status (5)
Country | Link |
---|---|
US (1) | US6089088A (de) |
EP (1) | EP0915323B1 (de) |
JP (1) | JPH11337345A (de) |
DE (1) | DE69822756T2 (de) |
FR (1) | FR2770899B1 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU7049000A (en) * | 1999-04-21 | 2000-11-21 | Regents Of The University Of California, The | Micro-machined angle-measuring gyroscope |
SG77677A1 (en) | 1999-04-30 | 2001-01-16 | Inst Of Microelectronics | A novel structural design for improving the sensitivity of a surface-micromachined vibratory gyroscope |
KR100363786B1 (ko) * | 1999-05-13 | 2002-12-11 | 삼성전기주식회사 | 마이크로 자이로스코프 |
KR100363785B1 (ko) * | 1999-06-04 | 2002-12-11 | 삼성전기주식회사 | 마이크로 자이로스코프 |
FR2798993B1 (fr) | 1999-09-28 | 2001-12-07 | Thomson Csf Sextant | Gyrometre de type diapason |
JP3525862B2 (ja) * | 2000-05-22 | 2004-05-10 | トヨタ自動車株式会社 | センサ素子及びセンサ装置 |
US6582985B2 (en) | 2000-12-27 | 2003-06-24 | Honeywell International Inc. | SOI/glass process for forming thin silicon micromachined structures |
US6808956B2 (en) | 2000-12-27 | 2004-10-26 | Honeywell International Inc. | Thin micromachined structures |
US8766745B1 (en) | 2007-07-25 | 2014-07-01 | Hrl Laboratories, Llc | Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same |
US7370530B2 (en) * | 2004-09-01 | 2008-05-13 | Honeywell International Inc. | Package for MEMS devices |
JP4381354B2 (ja) * | 2004-09-10 | 2009-12-09 | セイコーエプソン株式会社 | 振動子の支持構造および物理量測定装置 |
US7543496B2 (en) * | 2006-03-27 | 2009-06-09 | Georgia Tech Research Corporation | Capacitive bulk acoustic wave disk gyroscopes |
CA2569159C (en) * | 2006-11-28 | 2015-01-13 | Nanometrics Inc. | Inertial sensor |
DE102009002702B4 (de) * | 2009-04-28 | 2018-01-18 | Hanking Electronics, Ltd. | Mikromechanischer Sensor |
FR2945621B1 (fr) * | 2009-05-15 | 2011-08-26 | Commissariat Energie Atomique | Structure de couplage pour gyrometre resonnant |
CN102042829B (zh) * | 2009-10-10 | 2012-06-20 | 北京理工大学 | 全顺向电容式微机械陀螺 |
US8912711B1 (en) | 2010-06-22 | 2014-12-16 | Hrl Laboratories, Llc | Thermal stress resistant resonator, and a method for fabricating same |
US9599470B1 (en) | 2013-09-11 | 2017-03-21 | Hrl Laboratories, Llc | Dielectric high Q MEMS shell gyroscope structure |
US9977097B1 (en) | 2014-02-21 | 2018-05-22 | Hrl Laboratories, Llc | Micro-scale piezoelectric resonating magnetometer |
US9991863B1 (en) | 2014-04-08 | 2018-06-05 | Hrl Laboratories, Llc | Rounded and curved integrated tethers for quartz resonators |
US10308505B1 (en) | 2014-08-11 | 2019-06-04 | Hrl Laboratories, Llc | Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite |
JP6481293B2 (ja) | 2014-09-05 | 2019-03-13 | セイコーエプソン株式会社 | 物理量センサー素子、物理量センサー、電子機器および移動体 |
JP6481294B2 (ja) | 2014-09-05 | 2019-03-13 | セイコーエプソン株式会社 | 物理量センサー素子、物理量センサー、電子機器および移動体 |
JP2016057073A (ja) | 2014-09-05 | 2016-04-21 | セイコーエプソン株式会社 | 物理量センサー素子、物理量センサー、電子機器および移動体 |
US10031191B1 (en) | 2015-01-16 | 2018-07-24 | Hrl Laboratories, Llc | Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors |
US10545167B2 (en) * | 2015-10-20 | 2020-01-28 | Analog Devices, Inc. | Multiple-axis resonant accelerometers |
US10175307B1 (en) | 2016-01-15 | 2019-01-08 | Hrl Laboratories, Llc | FM demodulation system for quartz MEMS magnetometer |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3992952A (en) * | 1974-12-20 | 1976-11-23 | The Singer Company | Control system for angular displacement sensor |
DE4428405A1 (de) * | 1994-08-11 | 1996-02-15 | Karlsruhe Forschzent | Drehratensensor |
FR2726361B1 (fr) * | 1994-10-28 | 1997-01-17 | Sextant Avionique | Microgyrometre |
JP3028766B2 (ja) * | 1995-12-05 | 2000-04-04 | 株式会社村田製作所 | 角速度センサ |
-
1997
- 1997-11-07 FR FR9714041A patent/FR2770899B1/fr not_active Expired - Lifetime
-
1998
- 1998-10-30 US US09/183,510 patent/US6089088A/en not_active Expired - Lifetime
- 1998-11-05 DE DE69822756T patent/DE69822756T2/de not_active Expired - Lifetime
- 1998-11-05 EP EP98402754A patent/EP0915323B1/de not_active Expired - Lifetime
- 1998-11-06 JP JP10330254A patent/JPH11337345A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP0915323A1 (de) | 1999-05-12 |
US6089088A (en) | 2000-07-18 |
JPH11337345A (ja) | 1999-12-10 |
DE69822756T2 (de) | 2005-04-28 |
FR2770899B1 (fr) | 1999-12-10 |
EP0915323B1 (de) | 2004-03-31 |
FR2770899A1 (fr) | 1999-05-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |